Anti-interference connection structure and micro-displacement sensor

Abstract

The utility model provides an anti-interference connecting structure and a micro-displacement sensor. The connecting structure comprises a connecting piece, a supporting piece, a fixing piece and an isolating piece, the connecting piece comprises a first connecting part and a second connecting part, the first connecting part is configured to be connected with a guide mechanism of the micro-displacement sensor, and the second connecting part is connected with the supporting piece; the supporting piece is configured to be connected with a sensor of the micro-displacement sensor; the fixing piece is configured to enable the second connecting part to be fixed and attached to the supporting piece. The isolation piece is arranged on one side where the fixing piece penetrates and is configured to enable electrical isolation to be formed between the supporting piece and the second connecting part. According to the utility model, electrical isolation can be formed in the micro-displacement sensor, and an anti-interference connection structure can be simplified.

Description

Technical Field

[0001] The utility model relates to the field of intelligent manufacturing equipment industry, and in particular to an anti-interference connection structure and a micro-displacement sensor. Background Art

[0002] The step meter is a contact surface topography measuring device, which is commonly used to measure parameters such as surface features of micron and nano structures and film thickness. The step meter includes a probe for measurement and a drive motor that controls the movement of the probe on the Z-axis guide rail. The probe includes a scanner and a sensor. When the step meter measures the object to be measured, the scanner will come into contact with the object to be measured and slide across the surface of the object to be measured. The sensor is connected to the scanner and can generate a motion signal based on the motion state of the scanner. At the same time, the sensor can transmit the motion signal to the computer, where the motion signal is ultimately presented as the surface topography of the object to be measured.

[0003] The scanning part and sensor in the step meter are usually installed on the guide rail through connecting elements. Before the step meter starts measuring, the driving motor of the step meter will drive the probe to move along the Z-axis guide rail until the scanning part contacts the object to be measured, thereby determining the surface height of the object to be measured. During the measurement process, the scanning part reaches a suitable measurement position and starts to measure the object to be measured.

[0004] However, the current of some electrical components (such as drive motors) may leak and cause electromagnetic interference to the sensor, resulting in reduced sensor accuracy. Therefore, an insulating layer can be set on the surface of the connecting element to achieve electromagnetic isolation. However, when processing or installing the connecting element, the insulating layer may be damaged, thus affecting the electromagnetic isolation effect. Summary of the invention

[0005] The utility model is proposed in view of the above-mentioned prior art conditions, and its purpose is to provide an anti-interference connection structure and a micro-displacement sensor which can form electrical isolation inside the micro-displacement sensor and facilitate simplification of the anti-interference connection structure.

[0006] To this end, the first aspect of the utility model provides an anti-interference connection structure, including a connecting member, a supporting member, a fixing member and an isolating member; the connecting member includes a first connecting portion and a second connecting portion, the first connecting portion is configured to be connected to a guide mechanism of a micro-displacement sensor, and the second connecting portion is connected to the supporting member; the supporting member is configured to be connected to a sensor of the micro-displacement sensor; the fixing member is configured to fix and fit the second connecting portion to the supporting member; the isolating member is arranged on a side through which the fixing member penetrates and is configured to form electrical isolation between the supporting member and the second connecting portion.

[0007] In the first aspect of the utility model, by connecting the connecting member to the guide mechanism and the support member of the micro-displacement sensor, and by providing an isolating member to form electrical isolation between the support member and the connecting member, the interference of the leakage current on the sensor can be reduced, thereby improving the accuracy of the sensor. In addition, by providing the isolating member on the side where the fixing member for fixing and fitting the second connecting part to the support member penetrates, the requirement for electrical isolation of other components can be reduced, thereby simplifying the anti-interference connection structure.

[0008] In addition, in the anti-interference connection structure involved in the first aspect of the utility model, optionally, the second connection part, the fixing member and the support member are distributed along the direction of gravity. In this case, by distributing the second connection part, the fixing member and the support member along the direction of gravity, the relative sliding caused by gravity between the second connection part, the fixing member and the support member can be reduced, thereby reducing the possibility of the connection between the connection part and the fixing member and the support member being connected due to the relative sliding of the connection part and the support member, thereby helping to form electrical isolation in the micro-displacement sensor.

[0009] In addition, in the anti-interference connection structure involved in the first aspect of the utility model, optionally, the isolating member is configured to form electrical isolation between the fixing member and the second connecting portion; or the isolating member is configured to form electrical isolation between the fixing member and the supporting member. In this case, when the isolating member is configured to form electrical isolation between the fixing member and the second connecting portion, it is possible to prevent conduction between the connecting portion and the fixing member. In addition, when the isolating member is configured to form electrical isolation between the fixing member and the supporting member, it is possible to prevent conduction between the fixing member and the supporting member.

[0010] In addition, in the anti-interference connection structure involved in the first aspect of the utility model, optionally, the second connection part has a first channel, the fixing member passes through the first channel and is at least partially located in the support member, and there is a gap between the fixing member and the first channel; or the support member has a second channel, the fixing member passes through the second channel and is at least partially located in the second connection part, and there is a gap between the fixing member and the second channel. In this case, when the fixing member passes through the first channel or the second channel, by preventing the fixing member from contacting the second connection part or the support member, it can help to form electrical isolation between the fixing member and the second connection part or the support member.

[0011] In addition, in the anti-interference connection structure involved in the first aspect of the utility model, optionally, the fixing member includes a head and a body; the isolating member is located between the second connecting member and the head, and the body passes through the second connecting member, or the isolating member is located between the supporting member and the head, and the body passes through the supporting member. In this case, it is convenient to press the isolating member against the second connecting member or the supporting member through the head, which can help to form electrical isolation between the fixing member and the connecting member or the supporting member.

[0012] In addition, in the anti-interference connection structure involved in the first aspect of the utility model, optionally, the fixing member is a screw and the isolating member is a gasket. In this case, by reducing the looseness of the fixing member, the fixing effect of the fixing member can be improved, thereby reducing the possibility of the connecting member being conductive with the fixing member and the supporting member due to the relative sliding of the connecting member and the supporting member, thereby facilitating the formation of electrical isolation in the micro-displacement sensor.

[0013] In addition, in the anti-interference connection structure involved in the first aspect of the utility model, optionally, the fixing member is made of a non-magnetic material. In this case, the possibility of generating a current inside the fixing member due to the magnetic field generated by the current in the second connecting part can be reduced, thereby facilitating electrical isolation in the micro-displacement sensor.

[0014] In addition, in the anti-interference connection structure involved in the first aspect of the utility model, optionally, the first connection part and the second connection part are integrally formed. In this case, by integrally forming the first connection part and the second connection part, the strength of the connection piece can be increased and the structure of the micro-displacement sensor can be simplified.

[0015] In addition, in the anti-interference connection structure involved in the first aspect of the utility model, optionally, the surface of the connecting member is covered with an insulating layer. In this case, the insulating layer is used to separate the connecting member from the supporting member, which can help form electrical isolation in the micro-displacement sensor.

[0016] The second aspect of the utility model provides a micro displacement sensor, comprising a driving mechanism, a guiding mechanism, the connecting structure involved in the first aspect of the utility model, and a sensor; the driving mechanism is configured to drive the connecting structure to move along the guiding mechanism; the connecting structure is configured to connect the guiding mechanism and the sensor; the sensor is configured to measure the information of the object to be measured. In this case, the sensor is connected to the guiding mechanism through the connecting structure, and moves to the measuring position along the guiding mechanism under the drive of the driving mechanism, so that the sensor can measure the information of the object to be measured. In addition, through the connecting structure, electrical isolation can be formed inside the micro displacement sensor and the micro displacement sensor can be simplified.

[0017] According to the utility model, an anti-interference connection structure and a micro-displacement sensor are provided, which can form electrical isolation inside the micro-displacement sensor and facilitate simplification of the anti-interference connection structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will now be explained in further detail by way of example only with reference to the accompanying drawings.

[0019] Figure 1 2 is a diagram showing an application scenario of the micro-displacement sensor involved in the example of the utility model.

[0020] Figure 2 It is a schematic diagram showing the position of the connection structure involved in the example of the utility model.

[0021] Figure 3 1 is a schematic structural diagram showing a first embodiment of a connection structure according to an example of the present invention.

[0022] Figure 4 It is a schematic diagram showing the structure of the connecting piece involved in the example of the utility model.

[0023] Figure 5 It is a schematic diagram showing the structure of the support member involved in the example of the utility model.

[0024] Figure 6 It is a schematic diagram showing the structure of the fixing member involved in the example of the utility model.

[0025] Figure 7 Schematic diagram showing the structure of the isolating member involved in the example of the utility model.

[0026] Fig. 8A It shows Figure 3 The connection structure is shown in cross-section along line XX.

[0027] Figure 8B It is a cross-sectional view showing a second embodiment of the connection structure according to the present invention.

[0028] Fig. 9 2 is a schematic diagram showing the structure of a micro-displacement sensor according to an example of the present utility model. DETAILED DESCRIPTION

[0029] Hereinafter, with reference to the accompanying drawings, the preferred embodiments of the present invention will be described in detail. In the following description, the same symbols are assigned to the same components, and repeated descriptions are omitted. In addition, the accompanying drawings are only schematic diagrams, and the ratio of the dimensions of the components or the shapes of the components may be different from the actual ones.

[0030] It should be noted that the terms "including" and "having" and any variations thereof in the present invention, such as a process, method, system, product or device that includes or has a series of steps or units, are not necessarily limited to those steps or units clearly listed, but may include or have other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0031] It should be noted that, in this article, relative position and relative direction terms such as "above", "towards above", "below", "towards downward", "up and down direction", "left side", "towards the left side", "left side", "towards the left", "right side", "towards the right side", "right side", "towards the right", "left and right direction", "front", "towards the front", "back", "towards the back", "front and back direction" are used with reference to the normal operating posture and should not be considered restrictive.

[0032] The utility model relates to an anti-interference connection structure (hereinafter referred to as the connection structure), which is a connection structure connecting a sensor and a guide mechanism. The connection structure involved in the utility model can form electrical isolation between the connection member and the support member, thereby forming electrical isolation between the sensor and the guide mechanism. In addition, the connection structure involved in the utility model can form electrical isolation between the connection member and the support member, which can reduce the interference of leakage current on the sensor, thereby improving the accuracy of the sensor.

[0033] In some examples, the anti-interference connection structure involved in the present invention may also be referred to as a connection structure, a connection mechanism, an anti-interference connection mechanism, or a structure for forming electrical isolation, etc. Anti-interference may refer to anti-electromagnetic interference, that is, reducing the impact of current leakage on measurement accuracy.

[0034] In order to better introduce the micro displacement sensor involved in the utility model, this embodiment defines a spatial rectangular coordinate system based on the x-axis, y-axis, and z-axis. The x-axis, y-axis, and z-axis may be perpendicular to each other, the plane where the turntable is located may be the plane where the x-axis and the y-axis are located, and the direction of the z-axis may be opposite to the direction of gravity.

[0035] The connection structure and micro-displacement sensor of the present invention are described below with reference to the accompanying drawings.

[0036] Figure 1 2 is a diagram showing an application scenario of the micro-displacement sensor 1 involved in the example of the present utility model.

[0037] In this utility model, see Figure 1The micro displacement sensor 1 may include a turntable 10. In some examples, the micro displacement sensor 1 may be a step meter. In some examples, the turntable 10 may be used to carry the object to be measured 2, and the micro displacement sensor 1 may measure the object to be measured 2.

[0038] In some examples, the turntable 10 can move in the xy plane and can rotate around its own central axis. In some examples, the object to be measured 2 placed on the turntable 10 can move with the turntable 10. In this case, the movement and rotation of the turntable 10 can be controlled to control the movement and rotation of the object to be measured 2, so that the object to be measured 2 can be placed in a suitable measurement position.

[0039] In some examples, the object to be tested 2 can be placed in the central area of ​​the turntable 10. In this case, the object to be tested 2 can be located in the area where the central axis of the turntable 10 is located. When the turntable 10 moves, the position change of the turntable 10 relative to the micro-displacement sensor 1 is the same as the position change of the object to be tested 2 relative to the micro-displacement sensor 1, thereby facilitating the control of the movement of the object to be tested 2 and locating the position of the object to be tested 2. However, the present invention is not limited thereto. In some examples, the object to be tested 2 can be placed in any area of ​​the turntable 10.

[0040] Figure 2 Schematic diagram showing the position of the connection structure 20 involved in the example of the present utility model.

[0041] Among them, in order to better illustrate the utility model, Figure 2 The components of the connection structure 20 are simplified.

[0042] For some examples, see Figure 2 The micro-displacement sensor 1 may include a connecting structure 20 , a guiding mechanism 30 and a sensor 40 .

[0043] In some examples, the connection structure 20 can be configured to connect the guide mechanism 30 and the sensor 40. In some examples, the connection structure 20 can drive the sensor 40 to move. In some examples, the guide mechanism 30 can be configured to guide the connection structure 20 to move, that is, the connection structure 20 can move along the guide mechanism 30. In some examples, the connection structure 20 and the sensor 40 can move together along the guide mechanism 30 toward the object to be measured 2. As a result, the sensor 40 can be moved to the measurement position and contact the object to be measured 2.

[0044] In some examples, the length direction of the guide mechanism 30 may be the same as the gravity direction G. In some examples, the connection structure 20 and the sensor 40 may move in the gravity direction G. Thus, the movement of the connection structure 20 and the sensor 40 may be easily controlled.

[0045] In some examples, the sensor 40 may be configured to measure information (such as surface characteristics and film thickness, etc.) of the object to be tested 2. In some examples, the sensor 40 may feed back the information of the object to be tested 2 to the computer.

[0046] In some examples, the sensor 40 may be located above the turntable 10 , thereby facilitating the measurement of the object 2 to be measured.

[0047] Figure 3 1 is a schematic structural diagram showing a first embodiment of a connection structure 20 according to an example of the present invention.

[0048] For some examples, see Figure 2 and Figure 3 The connection structure 20 may include a connection member 21 , a support member 22 and a fixing member 23 .

[0049] In some examples, the connecting member 21 may be configured to connect the guide mechanism 30 and the support member 22. In some examples, the connecting member 21 may be connected to the guide mechanism 30. Thus, the connecting member 21 can be moved under the guidance of the guide mechanism 30.

[0050] In some examples, the connecting member 21 may also be connected to the supporting member 22 , so that the supporting member 22 can be moved under the guidance of the guiding mechanism 30 .

[0051] In some examples, the connecting member 21 may be attached to the supporting member 22 .

[0052] In some examples, the connector 21 may be made of a metal material (such as an aluminum alloy, etc.), thereby increasing the strength of the connector 21. In other examples, the connector 21 may be made of an insulating material, thereby facilitating electrical isolation within the micro-displacement sensor 1.

[0053] In some examples, the support member 22 may be configured to be connected to the connector 21 and the sensor 40. In some examples, the support member 22 may be configured to install the connector 21 and the sensor 40. Thus, the sensor 40 can be moved under the guidance of the guide mechanism 30.

[0054] In some examples, the support member 22 may be made of a metal material (such as an aluminum alloy, etc.), thereby increasing the strength of the support member 22. In other examples, the support member 22 may be made of an insulating material, thereby facilitating electrical isolation within the micro-displacement sensor 1.

[0055] In some examples, the fixing member 23 may be configured to fix the connecting member 21 to the supporting member 22 .

[0056] In some examples, the fixing member 23 may be made of a non-magnetic material. In this case, the possibility that the magnetic field generated by the current in the second connecting portion 212 cannot generate current inside the fixing member 23 can be reduced, thereby being able to help form electrical isolation within the micro-displacement sensor 1. In some examples, the non-magnetic material may include at least one of nickel and molybdenum. In other examples, the fixing member 23 may be made of a magnetic material. In this case, compared to non-magnetic materials, it is easy to enhance the strength of the fixing member 23 by using a magnetic material, which can improve the fixing effect of the fixing member 23.

[0057] In some examples, the fixing member 23 may be a screw. In this case, by reducing the looseness of the fixing member 23, the fixing effect of the fixing member 23 can be improved, thereby reducing the possibility of the connection member 21 being connected to the fixing member 23 and the support member 22 due to the relative sliding of the connecting member 21 and the support member 22, thereby facilitating the formation of electrical isolation in the micro-displacement sensor 1.

[0058] For some examples, see Figure 2 , the connecting member 21, the supporting member 22 and the fixing member 23 may be distributed along the gravity direction G. In some examples, the connecting member 21, the supporting member 22 and the fixing member 23 may be arranged in sequence in the gravity direction G. In this case, by reducing the relative sliding between the connecting member 21, the supporting member 22 and the fixing member 23 due to gravity, thereby reducing the possibility of conduction between the connecting member 21 and the supporting member 22 due to the relative sliding between the connecting member 21 and the supporting member 22, it can help to form electrical isolation in the micro-displacement sensor 1.

[0059] As described above, in some examples, the micro-displacement sensor 1 may include a sensor 40. In some examples, see Figure 3 , the sensor 40 can be installed on the side of the support member 22 away from the connecting member 21. Thus, the influence of electromagnetic interference on the sensor 40 can be reduced.

[0060] In some examples, the sensor 40 may be a differential capacitance sensor, thereby improving the measurement accuracy of the micro-displacement sensor 1 .

[0061] Figure 4 Schematic diagram showing the structure of the connecting member 21 involved in the example of the present utility model.

[0062] For some examples, see Figure 3 and Figure 4 The connecting member 21 may include a first connecting portion 211 and a second connecting portion 212 .

[0063] In some examples, the first connection portion 211 may be configured to be connected to the guide mechanism 30 , so that the first connection portion 211 can be moved under the guidance of the guide mechanism 30 .

[0064] In some examples, the first connection portion 211 may connect the guide mechanism 30 and the second connection portion 212 , so that the second connection portion 212 can move under the guidance of the guide mechanism 30 .

[0065] In some examples, the first connection portion 211 may be connected to the guide mechanism 30 via an insulating component.

[0066] In some examples, the second connection portion 212 can be configured to be connected to the support member 22. In some examples, the second connection portion 212 can be attached to the support member 22. In some examples, the second connection portion 212 can connect the first connection portion 211 and the support member 22.

[0067] As described above, in some examples, the connection structure 20 and the sensor 40 can move in the gravity direction G. In some examples, the second connection portion 212, the fixing member 23 and the support member 22 can be distributed along the gravity direction G. In this case, when the second connection portion 212 drives the support member 22, the interaction force between the second connection portion 212 and the support member 22 is perpendicular to the contact surface between the second connection portion 212 and the support member 22, thereby reducing the possibility of relative sliding between the second connection portion 212 and the support member 22, thereby reducing the possibility of conduction between the second connection portion 212 and the support member 22 due to the relative sliding of the second connection portion 212 and the support member 22, thereby helping to form electrical isolation in the micro-displacement sensor 1.

[0068] In some examples, the connector 21 may be integrally formed. In some examples, the first connector 211 and the second connector 212 may be integrally formed, in other words, the first connector 211 and the second connector 212 may be integrally formed. Thus, the strength of the connector 21 may be increased, and the structure of the micro-displacement sensor 1 may be simplified.

[0069] In some examples, the connector 21 may be split. Specifically, the first connector 211 and the second connector 212 may be independent components. In some examples, an isolator 24 (described later) may be disposed between the first connector 211 and the second connector 212. This may help to form electrical isolation within the micro-displacement sensor 1.

[0070] For some examples, see Figure 4 , the connecting member 21 may have a first channel 2121 .

[0071] In some examples, the first channel 2121 can be configured to allow the fixing member 23 to pass through. Figure 3 and Figure 4The fixing member 23 can pass through the first channel 2121 to fix the connecting member 21 to the supporting member 22. Thus, the supporting member 22 can be moved under the guidance of the guiding mechanism 30.

[0072] In some examples, the first channel 2121 may be a through hole. In some examples, the first channel 2121 may be a light hole. In some examples, the inner diameter of the first channel 2121 may be greater than the outer diameter of the fixing member 23. In this case, when the fixing member 23 passes through the first channel 2121, the fixing member 23 and the first channel 2121 are not in contact, which can help to form electrical isolation in the micro-displacement sensor 1.

[0073] For some examples, see Figure 4 , the first channel 2121 may be located on the second connecting portion 212 .

[0074] In some examples, there may be a plurality of first channels 2121 , thereby improving the fixing effect.

[0075] Figure 5 Schematic diagram showing the structure of the support member 22 involved in the example of the present utility model.

[0076] For some examples, see Figure 5 , the support member 22 may include an upper plate 221 and a lower plate 222. In some examples, the upper plate 221 may be configured to mount the connector 21, that is, the upper plate 221 may be connected to the connector 21. In some examples, the lower plate 222 may be configured to mount the sensor 40, that is, the lower plate 222 may be connected to the sensor 40.

[0077] For some examples, see Figure 5 , the support member 22 may include a second channel 2211. In some examples, the second channel 2211 may be configured to cooperate with the fixing member 23 to fix the connecting member 21 to the support member 22.

[0078] In some examples, the second channel 2211 may be a through hole. In other examples, the second channel 2211 may be a blind hole.

[0079] For some examples, see Figure 5 , the upper plate 221 may have a second channel 2211. Thus, the fixing of the connecting member 21 can be facilitated.

[0080] In some examples, there may be a plurality of second channels 2211. In some examples, the number of second channels 2211 may be the same as the number of first channels 2121.

[0081] In some examples, the second channel 2211 may correspond one-to-one with the position of the first channel 2121 .

[0082] Figure 6 Schematic diagram showing the structure of the fixing member 23 involved in the example of the present utility model.

[0083] For some examples, see Figure 6 The fixing member 23 may include a head 231 and a body 232. In some examples, the head 231 may be configured to press the connecting member 21 against the supporting member 22. In some examples, the radial dimension of the head 231 may be greater than the radial dimension of the body 232. Thus, it is convenient to press the connecting member 21 against the supporting member 22 through the head 231, thereby improving the fixing effect of the fixing member 23.

[0084] In some examples, the body 232 can be configured to pass through the first channel 2121 and cooperate with the second channel 2211 to fix the fixing member 23 to the support member 22. In some examples, the end of the body 232 can have a thread. In some examples, the second channel 2211 can be a screw hole. In some examples, the thread of the body 232 can match the screw hole of the second channel 2211. Thus, the fixing effect of the fixing member 23 can be improved.

[0085] In some examples, the fixing member 23 may further include a blocking piece 233. In some examples, the blocking piece 233 may be annular. In some examples, the blocking piece 233 may be sleeved on the body 232.

[0086] In some examples, the blocking piece 233 may be attached to the side of the head 231 close to the body 232. In some examples, the blocking piece 233 may be located between the head 231 and the isolation member 24 (described later). Thus, the contact area between the fixing member 23 and the isolation member 24 can be increased, thereby improving the fixing effect of the fixing member 23.

[0087] In some examples, there may be a plurality of fixing members 23. In some examples, the number of fixing members 23 may be the same as the number of first channels 2121. Thus, the fixing effect of the fixing members 23 can be improved.

[0088] Figure 7 Schematic diagram showing the structure of the isolating member 24 involved in the example of the present utility model.

[0089] For some examples, see Figure 7 The connection structure 20 may further include an isolating member 24. In some examples, the isolating member 24 may be configured to electrically isolate the support member 22 from the guide mechanism 30. In some examples, the isolating member 24 may be configured to electrically isolate the support member 22 from the second connection portion 212.

[0090] In some examples, the isolating member 24 may be located between the support member 22 and the guide mechanism 30. In some examples, the isolating member 24 may be located between the support member 22 and the fixing member 23. In some examples, the isolating member 24 may be sleeved on the body 232 of the fixing member 23. In this case, when the fixing member 23 is used to fix the second connecting portion 212 to the support member 22, by arranging the isolating member 24 on the fixing member 23, it is possible to form isolation between the head 231 of the fixing member 23 and the second connecting portion 212. At the same time, since the fixing member 23 does not contact the first channel 2121, that is, the fixing member 23 after installation does not contact the connecting member 21, electrical isolation can be achieved, and the requirements for electrical isolation of other components can be reduced, so that the connection structure 20 can be simplified.

[0091] In some examples, there may be multiple isolating members 24. In some examples, the isolating members 24 may be disposed between the head 231 and the connector 21, between the connector 21 and the support member 22, and between the head 231 and the connector 21 and between the connector 21 and the support member 22. This can help to form electrical isolation in the micro-displacement sensor 1.

[0092] In some examples, the isolating member 24 may be annular, so that it can be sleeved on the body 232 of the fixing member 23 .

[0093] In some examples, the isolating member 24 may be made of an insulating material, for example, the isolating member 24 may be a rubber gasket, thereby facilitating electrical isolation in the micro-displacement sensor 1 .

[0094] In some examples, the isolating member 24 may have a rough surface. In this case, by reducing the looseness of the fixing member 23, the fixing effect of the fixing member 23 can be improved, thereby reducing the possibility of the connecting member 21 being connected to the fixing member 23 and the supporting member 22 due to the relative sliding of the connecting member 21 and the supporting member 22, thereby facilitating the formation of electrical isolation in the micro-displacement sensor 1.

[0095] Fig. 8A It shows Figure 3 The connecting structure 20 is shown in a cross-sectional view along the line XX.

[0096] For some examples, see Fig. 8A , the isolating member 24 can be configured to electrically isolate the fixing member 23 from the connecting member 21. In some examples, the isolating member 24 can be located between the connecting member 21 and the fixing member 23. In some examples, the isolating member 24 can be located between the second connecting portion 212 and the head 231. In this case, it is convenient to press the isolating member 24 onto the second connecting portion 212 through the head 231, which can help to electrically isolate the fixing member 23 from the connecting member 21.

[0097] In some examples, the isolating member 24 may be disposed on a side where the fixing member 23 penetrates. Specifically, the isolating member 24 may be disposed on a side where the fixing member 23 penetrates the connecting member 21.

[0098] In some examples, the inner diameter of the isolating member 24 may be not less than the outer diameter of the body 232. Thus, it is convenient for the fixing member 23 to pass through the isolating member 24. In other examples, the inner diameter of the isolating member 24 may be slightly smaller than the outer diameter of the body 232. Thus, the fixing member 23 and the isolating member 24 can form an interference fit.

[0099] In some examples, the fixing member 23 may pass through the isolating member 24 and enter the first channel 2121 of the second connecting portion 212. In some examples, the fixing member 23 may pass through the connecting member 21. In some examples, the fixing member 23 may pass through the first channel 2121. In some examples, the fixing member 23 may fix the support member 22 to the connecting member 21. In some examples, the body 232 may pass through the second connecting portion 212.

[0100] In some examples, the fixing member 23 may be at least partially located in the support member 22. In some examples, the body 232 may be at least partially located in the upper plate 221 of the support member 22. In some examples, the body 232 may be at least partially located in the second channel 2211 of the second connecting portion 212.

[0101] In some examples, there may be a gap between the fixing member 23 and the connecting member 21. In some examples, there may be a gap between the fixing member 23 and the first channel 2121. In this case, when the fixing member 23 passes through the first channel 2121, by preventing the fixing member 23 from contacting the first channel 2121, it can help to form electrical isolation between the fixing member 23 and the second connecting portion 212.

[0102] In some examples, an isolation layer may be provided between the body 232 of the fixing member 23 and the inner wall of the first channel 2121, thereby further improving the isolation effect and filling the gap between the body 232 of the fixing member 23 and the inner wall of the first channel 2121, thereby better defining the relative position of the body 232 of the fixing member 23 and the first channel 2121.

[0103] In some examples, the connection structure 20 may include an insulating layer 25. In some examples, see Fig. 8A The surface of the connector 21 may be covered with an insulating layer 25. In other words, the insulating layer 25 may cover the surface of the connector 21. In this case, the connector 21 is separated from the support member 22 by the insulating layer 25, which can help form electrical isolation in the micro-displacement sensor 1.

[0104] In some examples, the surfaces of the support member 22 and the fixing member 23 may also be covered with an insulating layer 25. This can help to form electrical isolation in the micro-displacement sensor 1. At the same time, since the fixing member 23 is not in contact with the connecting member 21, no force is directly applied to the insulating layer 25 of the connecting member 21 when the fixing member 23 is installed, so the insulating layer 25 can be protected.

[0105] Figure 8B It is a cross-sectional view showing a second embodiment of the connection structure 20 of the present invention. It should be noted that in the second embodiment of the connection structure 20, the assembly position of the spacer 24 is different from that of the first embodiment, and the same parts are not repeated.

[0106] In this embodiment, in the connection structure 20 , the spacer 24 may be disposed between the fixing member 23 and the supporting member 22 .

[0107] For some examples, see Figure 8B , the isolating member 24 can be configured to form electrical isolation between the fixing member 23 and the support member 22. In some examples, the isolating member 24 can be located between the support member 22 and the fixing member 23. In some examples, the isolating member 24 can be located between the support member 22 and the head 231 of the fixing member 23. In this case, it is convenient to press the isolating member 24 against the support member 22 through the head 231, which can help to form electrical isolation between the fixing member 23 and the support member 22.

[0108] In some examples, the isolating member 24 may be disposed on a side where the fixing member 23 penetrates. Specifically, the isolating member 24 may be disposed on a side where the fixing member 23 penetrates the supporting member 22.

[0109] In some examples, the second channel 2211 can be configured to allow the fixing member 23 to pass through. In some examples, the second channel 2211 can be a through hole. In some examples, the second channel 2211 can be a light hole. In some examples, the inner diameter of the second channel 2211 can be greater than the outer diameter of the fixing member 23. In this case, when the fixing member 23 passes through the second channel 2211, the fixing member 23 can be prevented from contacting the second channel 2211, thereby being able to help form electrical isolation in the micro-displacement sensor 1. In some examples, the fixing member 23 can pass through the second channel 2211 to fix the support member 22 to the connecting member 21.

[0110] In some examples, the first channel 2121 can be configured to cooperate with the fixing member 23 to fix the connecting member 21 to the supporting member 22. In some examples, the first channel 2121 can be a through hole. In other examples, the first channel 2121 can be a blind hole. In some examples, the body 232 can be configured to pass through the second channel 2211 and cooperate with the first channel 2121 to fix the fixing member 23 to the supporting member 22.

[0111] In some examples, the first channel 2121 may be a screw hole. In some examples, the thread of the first channel 2121 may match the thread of the body 232. Thus, the fixing effect of the fixing member 23 can be improved.

[0112] In some examples, the fixing member 23 can pass through the isolation member 24 and enter the second channel 2211 of the support member 22. In some examples, the fixing member 23 can pass through the support member 22. In some examples, the fixing member 23 can pass through the second channel 2211. In some examples, the fixing member 23 can fix the connecting member 21 to the support member 22. In some examples, the body 232 of the fixing member 23 can pass through the support member 22.

[0113] In some examples, the fixing member 23 may be at least partially located in the connecting member 21. In some examples, the body 232 of the fixing member 23 may be at least partially located in the second connecting portion 212. In some examples, the body 232 may be at least partially located in the first channel 2121 of the second connecting portion 212.

[0114] In some examples, there may be a gap between the fixing member 23 and the support member 22. In some examples, there may be a gap between the fixing member 23 and the second channel 2211. In this case, when the fixing member 23 passes through the second channel 2211, by preventing the fixing member 23 from contacting the second channel 2211, it is possible to facilitate electrical isolation between the fixing member 23 and the support member 22.

[0115] Fig. 9 Schematic diagram showing the structure of a micro displacement sensor 1 according to an example of the present utility model.

[0116] For some examples, see Fig. 9 The micro-displacement sensor 1 may further include a driving mechanism 50 , a guiding mechanism 30 , a connecting structure 20 , and a sensor 40 .

[0117] In some examples, the driving mechanism 50 may be configured to drive the connecting structure 20 to move along the guiding mechanism 30 .

[0118] As described above, in some examples, the guide mechanism 30 can guide the connection structure 20 to move along the guide direction. In some examples, the guide direction can be the same as the gravity direction G. In other words, the movement direction of the connection structure 20 can be the same as the gravity direction G. In some examples, the guide mechanism 30 can be a guide rail.

[0119] In some examples, the guide mechanism 30 may be made of a metal material (eg, aluminum alloy, etc.), thereby increasing the strength of the guide mechanism 30 .

[0120] In other examples, the guide mechanism 30 may be made of insulating material, thereby facilitating electrical isolation in the micro-displacement sensor 1 .

[0121] In the present invention, the sensor 40 is connected to the guide mechanism 30 through the connection structure 20, and the isolating member 24 is provided between the fixing member 23 and the connecting member 21, so that the support member 22 and the connecting member 21 are electrically isolated, thereby forming electrical isolation between the sensor 40 and the guiding mechanism 30. In addition, when the fixing member 23 is used to fix the second connecting portion 212 to the supporting member 22, by providing the isolating member 24 to the fixing member 23, the requirement for electrical isolation of other components can be reduced, thereby simplifying the connection structure 20. In addition, by coating the surface of the connecting member 21 with an insulating layer 25, the insulating layer 25 separates the connecting member 21 from the supporting member 22, which can help to form electrical isolation in the micro-displacement sensor 1. In addition, by providing a driving mechanism 50 on the guiding mechanism 30, and providing a connection structure 20 between the sensor 40 and the guiding mechanism 30, the sensor 40 can be driven by the driving mechanism 50 to move along the guiding mechanism 30 to the measuring position, so that the sensor 40 can measure the information of the object 2 to be measured.

[0122] Although the utility model is specifically described above in conjunction with the accompanying drawings and examples, it is to be understood that the above description does not limit the utility model in any form. Those skilled in the art can modify and change the utility model as needed without departing from the essential spirit and scope of the utility model, and these modifications and changes all fall within the scope of the utility model.

Claims

1. An anti-interference connection structure, characterized in that: It includes a connecting member, a supporting member, a fixing member and an isolating member; the connecting member includes a first connecting portion and a second connecting portion, the first connecting portion is configured to be connected to a guide mechanism of a micro-displacement sensor, and the second connecting portion is connected to the supporting member; the supporting member is configured to be connected to a sensor of the micro-displacement sensor; the fixing member is configured to fix and fit the second connecting portion to the supporting member; the isolating member is arranged on a side through which the fixing member penetrates and is configured to form electrical isolation between the supporting member and the second connecting portion.

2. The anti-interference connection structure according to claim 1, characterized in that: The second connecting portion, the fixing member and the supporting member are distributed along the direction of gravity.

3. The anti-interference connection structure according to claim 1, characterized in that: The isolating member is configured to electrically isolate the fixing member from the second connecting portion; or the isolating member is configured to electrically isolate the fixing member from the supporting member.

4. The anti-interference connection structure according to claim 1, characterized in that: The second connecting portion has a first channel, the fixing member passes through the first channel and is at least partially located in the supporting member, and a gap is formed between the fixing member and the first channel; or the supporting member has a second channel, the fixing member passes through the second channel and is at least partially located in the second connecting portion, and a gap is formed between the fixing member and the second channel.

5. The anti-interference connection structure according to claim 1, characterized in that: The fixing member includes a head and a body; the isolating member is located between the second connecting member and the head, and the body passes through the second connecting member; or the isolating member is located between the supporting member and the head, and the body passes through the supporting member.

6. The interference-resistant connection structure according to any one of claims 1 to 5, characterized in that: The fixing member is a screw, and the isolating member is a gasket.

7. The interference-resistant connection structure according to any one of claims 1 to 5, characterized in that: The fixing piece is made of non-magnetic material.

8. The interference-resistant connection structure according to any one of claims 1 to 5, characterized in that: The first connection portion and the second connection portion are integrally formed.

9. The interference-resistant connection structure according to any one of claims 1 to 5, characterized in that: The surface of the connecting piece is covered with an insulating layer.

10. A micro displacement sensor, characterized in that: It comprises a driving mechanism, a guiding mechanism, a connecting structure according to any one of claims 1 to 9, and a sensor; the driving mechanism is configured to drive the connecting structure to move along the guiding mechanism; the connecting structure is configured to connect the guiding mechanism and the sensor; the sensor is configured to measure information of the object to be measured.

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