Heating device and semiconductor processing equipment
By using an adjustable ring light source device in the semiconductor processing equipment, the heating inhomogeneity problem caused by the rotational movement of the heating lamp array is solved, and a more uniform heating effect and higher temperature adjustment accuracy are achieved.
Patent Information
- Application Number
- CN202323552649.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-25
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2033-12-25
AI Technical Summary
In existing semiconductor processing equipment, the heating lamp array in the radiation heating chamber has mechanical wear, rotation accuracy and stability problems due to rotational movement, resulting in untimely and accurate light spot movement, resulting in differences in the annular high temperature or low temperature distribution during the wafer heating process, and it is impossible to Effectively eliminate the difference in high and low temperatures.
An adjustable annular light source device is adopted, including optical cable, collimating part, beam expansion part, correction part and light distribution part. Through these components, light is converted into annular light spot to ensure the uniformity of the optical density of the heating area.
It improves heating uniformity in the annular area, reduces the differences in high-temperature and low-temperature distribution, improves the timeliness and accuracy of wafer temperature regulation, and extends the service life of optical devices.
Smart Images
Figure CN222146144U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductors, and in particular to a heating device and semiconductor processing equipment. Background Art
[0002] In semiconductor processing equipment, radiation heating is one of the important heating methods. For example, in epitaxial process equipment, a radiation heating chamber is set outside the reaction chamber to heat the wafer in the reaction chamber. However, the radiation heating chamber generally uses a heating lamp array, and the installation position is relatively fixed. The arrangement of the lamps will form a certain energy density characteristic due to the light distribution, resulting in a ring-shaped high or low temperature distribution difference during the wafer heating process, such as Figure 1 shown.
[0003] The prior art generally adopts the method of adding an auxiliary heating device outside the radiation heating chamber to adjust the local wafer temperature. By setting a rotatable point heating source component outside the chamber cover, the light spot can be selectively moved in the radial range of the wafer for heating. In the epitaxial process equipment, the wafer is in a state of self-rotation, so that the temperature at different radii of the wafer can be locally heated and fine-tuned based on this.
[0004] However, such solutions have the following problems:
[0005] 1. The light source projection device needs to rotate to change the spot position. During the rotation process, it may interfere with other devices, and the rotating moving parts will inevitably have mechanical wear, rotation accuracy and motion stability problems. Therefore, the rotation action reduces the timeliness, accuracy and stability of its rotation action, thereby affecting the movement of the spot, and ultimately affecting the timeliness and accuracy of the wafer temperature adjustment;
[0006] 2. A circular or irregular light spot can only heat one point and can only affect a part of the temperature characteristic area. Although the light spot can eventually heat the circumference of the wafer with the same radius through the wafer rotation, as a cumulative compensation method, when observing the area affected by the projection at the same time point, there will be an unavoidable problem of high and low differences. Summary of the invention
[0007] Based on the above problems, the utility model provides a heating device, which improves the heating uniformity in the annular area through an adjustable annular light source.
[0008] In order to achieve the above-mentioned purpose, the utility model provides a heating device, including an optical cable, and a light projector connected to the end of the optical cable, the light projector comprising a collimating portion, a beam expanding portion, a correcting portion and a spectroscopic portion arranged in sequence along the outgoing light direction of the optical cable; the collimating portion is used to convert the outgoing light of the optical cable into a first parallel light; the beam expanding portion is used to convert the first parallel light into a second parallel light with a larger diameter; the correcting portion is used to move the central light energy of the second parallel light to the edge to form a third parallel light; the spectroscopic portion is used to refract the third parallel light and convert it into annular light, so as to project an annular light spot with uniform light density to the surface to be heated.
[0009] Optionally, the optical cable includes an optical fiber core, the optical fiber core passes into a collimating portion, and a collimating lens is provided in the collimating portion to convert the emergent light into the first parallel light.
[0010] Optionally, the end of the collimating lens facing the optical fiber core is flat and perpendicular to the outgoing light, and the end away from the optical fiber core is convex, and the convex surface is an aspheric mirror surface with a first focus, which coincides with the end point of the optical fiber core.
[0011] Optionally, the numerical aperture of the collimating lens is at least twice the numerical aperture of the optical fiber.
[0012] Optionally, the beam expansion unit includes a beam expansion lens group to convert the first parallel light into a circular second parallel light with a larger diameter.
[0013] Optionally, the beam expanding lens group includes a first concave lens and a first convex lens; along the light path direction, the first concave lens and the first convex lens are arranged in sequence.
[0014] Optionally, the light-facing surface of the first concave lens is a plane and is perpendicular to the first parallel light; the light-back surface of the first concave lens is a concave surface to diverge and refract the first parallel light.
[0015] Optionally, the light-facing surface of the first convex lens is a convex surface, and the backlight surface is a plane and is perpendicular to the first parallel light; the first convex lens and the first concave lens share a second focus.
[0016] Optionally, the diameter of the first convex lens is greater than the diameter of the first concave lens.
[0017] Optionally, the beam expanding lens group is a Kepler lens combination.
[0018] Optionally, the correction part includes a correction lens group to move the central light energy of the second parallel light toward the edge to form a third parallel light.
[0019] Optionally, the correction lens group includes a second concave lens and a second convex lens; along the light path direction, the second concave lens and the second convex lens are arranged in sequence.
[0020] Optionally, the light-facing surface of the second concave lens is convex, and the backlight surface is flat and perpendicular to the second parallel light; the backlight surface of the second concave lens is a concave surface with an increasing radius of curvature from the center to the edge, so as to diverge the central light energy of the second parallel light toward the edge.
[0021] Optionally, the light-facing surface of the second convex lens is a convex surface with a curvature radius increasing from the center to the edge, and the backlight surface is a plane and perpendicular to the second parallel light; the second concave lens and the second convex lens have multiple focal points in common.
[0022] Optionally, the edge area of the backlight surface of the second concave lens and the light-facing surface of the second convex lens are planes, the central area of the backlight surface of the second concave lens is a concave surface, the central area of the light-facing surface of the second convex lens is a convex surface, and the diameter of the central area of the backlight surface of the second concave lens is smaller than the diameter of the central area of the light-facing surface of the second convex lens.
[0023] Optionally, a diameter of a central area of the light-facing surface of the second convex lens is smaller than a diameter of the second parallel light.
[0024] Optionally, the light splitting unit includes a light splitter to convert the third parallel light into annular light after refracting.
[0025] Optionally, the beam splitter is a Bessel cone lens.
[0026] Optionally, the beam splitter is a curved conical lens, or a Bessel cone lens and a hyperbolic lens group.
[0027] Optionally, a first shielding layer and a first transmission layer are distributed on the cross section of the inner core of the optical fiber.
[0028] Optionally, the first shielding layer and the first transmission layer are coaxially arranged.
[0029] Optionally, coaxial shielding layers and transmission layers are arranged alternately from outside to inside on the cross section of the inner core of the optical fiber.
[0030] Optionally, different transmission layers are connected to light sources with different powers.
[0031] Optionally, the light projector jacket is provided with a cooling jacket.
[0032] The utility model also provides a semiconductor processing equipment, comprising: a heating chamber and a process chamber, wherein the heating chamber is covered by a cover plate, a heating lamp is arranged in the heating chamber, and the cover plate is provided with the aforementioned heating device to assist in heating the wafer in the process chamber, wherein the distance between the heating device and the wafer is adjustable.
[0033] Optionally, the light projector is mounted on the cover plate in a liftable manner.
[0034] Optionally, the light projector is divided into two parts, the first part integrates the collimation part, the beam expansion part and the correction part, and is packaged as a whole; the second part is a separate package of the splitter part, and the distance between the first part and the second part is adjustable.
[0035] Optionally, the first part is fixed above the cover plate, and the second part is fixed on the cover plate in a liftable manner.
[0036] Optionally, the cover plate has a mounting portion, the mounting portion includes a lifting platform or a lifting cylinder, and the second part is mounted on the mounting portion.
[0037] Optionally, the mounting portion includes a lifting cylinder and a mounting hole, wherein the mounting hole is located on the cover plate and is coaxial with the wafer W; the lifting cylinder can be lifted and fixed in the mounting hole, and the second part is fixed to the bottom end of the lifting cylinder.
[0038] Optionally, the lifting cylinder is wrapped with a cooling jacket, or a cooling channel is provided in the lifting cylinder.
[0039] The utility model improves the heating uniformity in the annular area through an adjustable annular light source. BRIEF DESCRIPTION OF THE DRAWINGS
[0040] Figure 1 Schematic diagram of light distribution of existing heating lamps.
[0041] Figure 2-3 This is a schematic diagram of the structure of the heating device of the utility model.
[0042] Figure 4 This is a schematic diagram of the working of an embodiment of the heating device structure of the utility model.
[0043] Figure 5 This is a schematic diagram of the optical fiber structure of the heating device of the utility model.
[0044] Figure 6 to Figure 8 It is a schematic diagram of the operation of different embodiments of the heating device of the present utility model.
[0045] Fig. 9 It is a schematic diagram of an embodiment of the heating device of the utility model.
[0046] Fig.10 It is a schematic diagram of an embodiment of the semiconductor processing equipment of the present utility model.
[0047] Fig.11 The figure is a schematic diagram of the working principle of an embodiment of the semiconductor processing equipment of the present utility model.
[0048] Figure ID:
[0049] Wafer W
[0050] Projection light path R1
[0051] Scattered light path R11
[0052] Halo R2
[0053] Heating area R3
[0054] The first heating zone R31
[0055] The second heating zone R32
[0056] The third heating zone R33
[0057] The first sub-area R331
[0058] Second sub-area R332
[0059] First focus L1
[0060] Second focus L2
[0061] Heating lamp 10
[0062] Light Projector 200
[0063] Collimation part 210
[0064] Collimating lens 211
[0065] Beam expansion part 220
[0066] Beam expansion lens group 221
[0067] First concave lens 2211
[0068] First convex lens 2212
[0069] Correction Department 230
[0070] Correction lens group 231
[0071] Second concave lens 2311
[0072] Second convex lens 2312
[0073] Spectroscopic unit 240
[0074] Beam splitter 241
[0075] Cooling Jacket 250
[0076] Lifting device 260
[0077] Optical Cable 300
[0078] Optical fiber core 310
[0079] The first shielding layer 311
[0080] First transport layer 312
[0081] The second shielding layer 313
[0082] Second transport layer 314
[0083] The third shielding layer 315
[0084] Fourth transport layer 316
[0085] Cover 30
[0086] Mounting section 31
[0087] Stage 40
[0088] Process gas inlet 101
[0089] Purified gas inlet 102
[0090] Gas exhaust port 103
[0091] Upper Dome 111
[0092] Base ring 112
[0093] Bushing 113
[0094] Lower Dome 114
[0095] Drive shaft 115 DETAILED DESCRIPTION
[0096] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0097] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0098] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0099] According to one aspect of the present invention, a heating device is provided. Figure 2 As shown, it includes an optical cable 300, and a light projector 200 connected to the end of the optical cable 300. The light projector 200 has a collimating part 210, a beam expander 220, a correcting part 230 and a light splitting part 240 arranged in sequence along the direction of the outgoing light of the optical cable 300; the collimating part 210 is used to convert the outgoing light of the optical cable 300 into a first parallel light; the beam expander 220 is used to convert the first parallel light into a circular second parallel light with a larger diameter; the correcting part 230 is used to move the central light energy of the second parallel light to the edge to achieve energy density shaping, forming a flat top or moderate parallel light beam that is conducive to heating uniformity, that is, the third parallel light; the light splitting part 240 is used to refract the third parallel light after shaping optimization and convert it into an annular light. Thus, an annular light spot with uniform light density can be projected onto the surface to be heated.
[0100] In one embodiment, the light projector 200 is as follows: Figure 3 As shown, the optical fiber core 310 of the optical cable 300 passes through the collimating portion 210, and the collimating lens 211 is disposed in the collimating portion 210 to transform the outgoing light into the first parallel light.
[0101] Preferably, the end of the collimating lens 211 facing the fiber core 310 is a plane and perpendicular to the outgoing light, and the end away from the fiber core 310 is a convex surface, and the convex surface is an aspheric mirror surface. The convex surface has a first focus L1, and the first focus L1 coincides with the end point of the fiber core 310 to form a Gaussian characteristic parallel light with high center energy and low edge energy.
[0102] The numerical aperture (NA) of the collimating lens 211 is at least twice the numerical aperture (NA) of the optical fiber. When the NA of the lens is not less than the NA of the optical fiber, it can be ensured that all the light emitted by the optical fiber is refracted into parallel light by the lens; the NA of the lens is at least twice the NA of the optical fiber, so that the laser path output by the optical fiber can be covered within the main path range of the lens. Figure 3 ,NA=sin(θ i / 2), θ1 is the light path divergence angle of the lens, and θ2 is the light path divergence angle of the optical fiber.
[0103] The beam expander 220 includes a beam expander lens group 221 to convert the first parallel light into a circular second parallel light with a larger diameter.
[0104] Preferably, the beam expanding lens group 221 includes a first concave lens 2211 and a first convex lens 2212. Along the optical path direction, the first concave lens 2211 and the first convex lens 2212 are arranged in sequence.
[0105] The light-facing surface of the first concave lens 2211 is a plane and is perpendicular to the first parallel light. The light-backing surface of the first concave lens 2211 is a concave surface to diverge and refract the first parallel light.
[0106] The first convex lens 2212 has a convex surface facing the light and a flat surface facing away from the light, which is perpendicular to the first parallel light. The first convex lens 2212 and the first concave lens 2211 share a second focus L2. The light diverged by the first concave lens 2211 is refracted into a second parallel light by the first convex lens 2212, and the diameter of the second parallel light is greater than the first parallel light. The diameter of the first convex lens 2212 is greater than the diameter of the first concave lens 2211.
[0107] Preferably, the beam expanding lens group 221 is a Kepler lens combination.
[0108] The correction part 230 includes a correction lens group 231 to move the central light energy of the second parallel light toward the edge to achieve energy density shaping to form a third parallel light.
[0109] Preferably, the correction lens group 231 includes a second concave lens 2311 and a second convex lens 2312. Along the optical path, the second concave lens 2311 and the second convex lens 2312 are arranged in sequence.
[0110] The light-facing surface of the second concave lens 2311 is convex, and the backlight surface is flat and perpendicular to the second parallel light. The backlight surface of the second concave lens 2311 is a concave surface with a radius of curvature increasing from the center to the edge, so as to diverge the central light energy of the second parallel light to the edge.
[0111] The light-facing surface of the second convex lens 2312 is a convex surface with a radius of curvature increasing from the center to the edge, and the backlight surface is a plane and is perpendicular to the second parallel light. The second concave lens 2311 and the second convex lens 2312 share multiple focal points. The light after the central light energy of the second parallel light is diverged to the edge is refracted into the third parallel light, so that the central light energy of the second parallel light moves to the edge, so that the energy distribution in the radial range of the third parallel light is uniform, and energy density shaping is achieved.
[0112] Preferably, the edge areas of the backlight surface of the second concave lens 2311 and the light-facing surface of the second convex lens 2312 are planes, the central area of the backlight surface of the second concave lens 2311 is a concave surface, the central area of the light-facing surface of the second convex lens 2312 is a convex surface, and the diameter of the central area of the backlight surface of the second concave lens 2311 is smaller than the diameter of the central area of the light-facing surface of the second convex lens 2312. The diameter of the central area of the light-facing surface of the second convex lens 2312 is smaller than the diameter of the second parallel light, so as to improve the energy density shaping effect.
[0113] The light splitting unit 240 includes a beam splitter 241 to convert the third parallel light into annular light after being refracted, so that an annular light spot with uniform light density can be projected onto the surface to be heated.
[0114] Preferably, the beam splitter 241 is a Bessel cone lens so that the split annular beams remain parallel. Figure 4 As shown, Figure 4 This is a working schematic diagram of this embodiment. The third parallel light is refracted into a projection light path R1 through the Bessel cone lens. The projection light path R1 is a parallel light path, so that the ring width of the light ring remains unchanged, thereby accurately controlling the ring width of the projection light ring R2 of the annular light spot and accurately controlling the heating area.
[0115] In one embodiment, Figure 5 As shown in Figure (a), an optical fiber core 310 is provided in the optical cable 300, and a first shielding layer 311 and a first transmission layer 312 are distributed on the cross section of the optical fiber core 310. The first shielding layer 311 and the first transmission layer 312 are coaxially arranged, and the first shielding layer 311 is located on the outer ring of the first transmission layer 312. The light path is converged to the first transmission layer 312 through the first shielding layer 311 to increase the energy density of the light beam and project a light ring.
[0116] In addition, the optical fiber core 310 can also be Figure 5 In the arrangement of Figure (b), a coaxial second shielding layer 313, a second transmission layer 314, a third shielding layer 315 and a third transmission layer 316 are arranged in sequence from the outside to the inside on the cross section of the optical fiber core 310, so that the coaxially spaced second transmission layer 314 and the third transmission layer 316 are formed through the shielding of the second shielding layer 313 and the third shielding layer 315, thereby, two light rings with different radii can be projected by the light projector 200.
[0117] Preferably, the second transmission layer 314 and the third transmission layer 316 are connected to light sources with different powers, so that different light rings can have different heating powers.
[0118] Based on the above-mentioned shielding layer and transmission layer design principles, multiple coaxial light rings can also be projected based on needs, such as coaxial shielding layers and transmission layers arranged alternately from the outside to the inside on the cross section of the optical fiber core.
[0119] Preferably, different transmission layers are connected to light sources with different powers.
[0120] Projection effect is visible Figure 6 When using a Bessel cone lens, a double light ring spaced apart from each other can be projected to form a first heating area R31 and a second heating area R32. At this time, the light beam will propagate to the target area in parallel without interference without changing the width of the light ring.
[0121] In one embodiment, the beam splitter 241 may be a curved conical lens, or a Bessel cone lens and a hyperbolic lens group, so that the third parallel light can be refracted into a divergent scattered light path R11, such as Figure 7 As shown, the width of the light ring can be expanded to project a larger third heating area R33.
[0122] And, thus Figure 5 By combining the embodiment of FIG. (b) with the embodiment of FIG. 5 , a double-ring or multi-ring cross-scattering projection effect can be achieved, such as Figure 8 As shown, at this time, the third heating zone R33 is formed by the overlap of the first sub-zone R331 and the second sub-zone R332. At the edge of the single beam ring, it is inevitable that the projection energy will drop sharply, but by overlapping the divergent first sub-zone R331 and the second sub-zone R332, the projection energy at the overlap of the two can be equal to the center value of the single beam ring, so that the third heating zone R33 with uniform overall energy density can be obtained.
[0123] In one embodiment, considering the thermal effect of the light beam in the light projector 200, a cooling jacket 250 is provided outside the light projector 200 to cool and protect the light projector 200. The cooling jacket 250 can be liquid-cooled and connected to a cold water pipe.
[0124] In one embodiment, the light projector 200 is divided into two parts, the first part integrates the collimating part 210, the beam expanding part 220 and the correcting part 230, and is packaged as a whole, and the second part is a separate package of the light splitting part 240. The distance between the first part and the second part is adjustable.
[0125] like Fig.10 The semiconductor processing equipment shown includes a heating chamber and a process chamber, the heating chamber is covered by a cover plate 30, and a heating lamp 10 is arranged in the heating chamber to radiate and heat the wafer W in the process chamber. The aforementioned heating device is mounted on the cover plate 30 to assist in heating the wafer W in the process chamber. The distance between the heating device and the wafer W is adjustable.
[0126] The light projector 200 is installed on the cover plate 30 in a liftable manner. Thus, by changing the distance between the light projector 200 and the wafer W, the diameter of the light ring projected onto the wafer W can be adjusted, that is, different radius areas of the wafer can be heated, such as Fig.11 The heating device is coaxially arranged with the wafer W.
[0127] In one embodiment, the cover plate 30 has a mounting portion 31 , and the mounting portion 31 includes a lifting platform or a lifting cylinder. The second part is mounted on the mounting portion 31 .
[0128] In one embodiment, the mounting portion 31 includes a lifting cylinder 260 and a mounting hole, and the mounting hole is located on the cover plate 30 and is coaxial with the wafer W. The lifting cylinder 260 is fixed in the mounting hole in a liftable manner, the first part of the light projector 200 is fixed on the cover plate 30, and the second part is fixed to the bottom end of the lifting cylinder 260. Thus, the lifting cylinder 260 drives the second part to rise and fall, and adjusts the diameter of the light ring projected onto the wafer W. And because the first part is fixed on the cover plate 30, the first part is not disturbed during the lifting and falling process of the second part, so the stability and life of the optical device of the first part can be guaranteed, and bending damage to the optical cable 300 connected thereto can be avoided.
[0129] The lifting cylinder 260 can be a vertical lifting structure, such as a telescopic sleeve; it can also be a screw-in structure that cooperates with the inner wall thread of the mounting hole to accurately adjust the distance between the second part and the wafer W.
[0130] The first part can extend out of the lifting cylinder 260 and be fixed to the cover plate 30 through the upper end mounting bracket, and be suspended and fixed above the cover plate 30 and the lifting cylinder 260 .
[0131] The lifting cylinder 260 may wrap the cooling jacket 250 , or a cooling channel may be provided in the lifting cylinder 260 to cool down and protect the light splitting unit 240 .
[0132] The wafer is supported by a carrier 40, and the carrier 40 can rotate the wafer W around its axis. The heating chamber and the process chamber are separated by an upper dome 111. A process gas inlet 101 and a purge gas inlet 102 are provided on one side wall of the process chamber, and a gas exhaust port 103 is provided on the other side wall. A base ring 112 is provided on the outer periphery of the process chamber as a chamber wall, a bushing 113 is provided on the inner ring of the base ring 112, and a lower dome 114 is provided at the lower part of the process chamber, thereby forming a relatively closed process chamber for easy vacuuming. A driving shaft 115 is connected to the lower end of the carrier 40 to drive the carrier 40 to rotate. Outside the lower dome 114, there are also multiple heating lamps 10 to heat the process chamber.
[0133] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.
Claims
1. A heating device, It is characterized in that include, an optical cable, and a light projector connected to an end of the optical cable, The light projector comprises a collimating part, a beam expanding part, a correcting part and a light splitting part which are arranged in sequence along the outgoing light direction of the optical cable; The collimating part is used to convert the outgoing light of the optical cable into the first parallel light; The beam expander is used to convert the first parallel light into a second parallel light, wherein the diameter of the second parallel light is larger than the diameter of the first parallel light; The correction part is used to move the central light energy of the second parallel light to the edge to form a third parallel light; The light splitting part is used to convert the third parallel light into annular light after refraction, so as to project an annular light spot with uniform light density to the surface to be heated.
2. The heating device according to claim 1, It is characterized in that The optical cable comprises an optical fiber inner core, which passes into a collimating part, and a collimating lens is arranged in the collimating part to transform the emergent light into a first parallel light.
3. The heating device according to claim 2, It is characterized in that The end of the collimating lens facing the optical fiber core is a plane and perpendicular to the outgoing light, and the end away from the optical fiber core is a convex surface, which is an aspheric mirror surface and has a first focus, which coincides with the end point of the optical fiber core.
4. The heating device according to claim 3, It is characterized in that The numerical aperture of the collimating lens is at least twice the numerical aperture of the optical fiber.
5. The heating device according to claim 1, It is characterized in that The beam expansion unit includes a beam expansion lens group, and the beam expansion lens group includes a first concave lens and a first convex lens; along the light path direction, the first concave lens and the first convex lens are arranged in sequence.
6. The heating device according to claim 5, It is characterized in that The light-facing surface of the first concave lens is a plane and is perpendicular to the first parallel light; the light-backed surface of the first concave lens is a concave surface to diverge and refract the first parallel light.
7. The heating device according to claim 6, It is characterized in that The light-facing surface of the first convex lens is a convex surface, and the light-repelling surface is a plane and is perpendicular to the first parallel light; the first convex lens and the first concave lens share a second focus.
8. The heating device according to claim 7, It is characterized in that The diameter of the first convex lens is greater than the diameter of the first concave lens.
9. The heating device according to claim 5, It is characterized in that The beam expansion lens group is a Kepler lens combination.
10. The heating device according to claim 1, It is characterized in that The correction part includes a correction lens group, and the correction lens group includes a second concave lens and a second convex lens; along the optical path direction, the second concave lens and the second convex lens are arranged in sequence.
11. The heating device according to claim 10, It is characterized in that The light-facing surface of the second concave lens is a convex surface, and the backlight surface is a plane and perpendicular to the second parallel light; the backlight surface of the second concave lens is a concave surface with a curvature radius increasing from the center to the edge, so as to diverge the central light energy of the second parallel light to the edge.
12. The heating device according to claim 11, It is characterized in that The light-facing surface of the second convex lens is a convex surface with a curvature radius increasing from the center to the edge, and the light-repelling surface is a plane and is perpendicular to the second parallel light; the second concave lens and the second convex lens have a plurality of focal points in common.
13. The heating device according to claim 12, It is characterized in that The backlight surface of the second concave lens and the edge area of the light-facing surface of the second convex lens are planes, the central area of the backlight surface of the second concave lens is a concave surface, the central area of the light-facing surface of the second convex lens is a convex surface, and the diameter of the central area of the backlight surface of the second concave lens is smaller than the diameter of the central area of the light-facing surface of the second convex lens.
14. The heating device according to claim 13, It is characterized in that The diameter of the central area of the light-facing surface of the second convex lens is smaller than the diameter of the second parallel light.
15. The heating device according to claim 1, It is characterized in that The light splitting part includes a light splitter to convert the third parallel light into annular light after refracting.
16. The heating device according to claim 15, It is characterized in that The beam splitter is a Bessel axicon.
17. The heating device according to claim 15, It is characterized in that The beam splitter is a curved conical lens, or a Bessel cone lens and a hyperbolic lens group.
18. The heating device according to any one of claims 1 to 17, It is characterized in that A first shielding layer and a first transmission layer are distributed on the cross section of the inner core of the optical fiber.
19. The heating device according to claim 18, It is characterized in that The first shielding layer and the first transmission layer are coaxially arranged.
20. The heating device according to any one of claims 1 to 17, It is characterized in that On the cross section of the inner core of the optical fiber, coaxial shielding layers and transmission layers are arranged alternately from the outside to the inside.
21. The heating device according to claim 20, It is characterized in that Different transmission layers are connected to light sources with different powers.
22. The heating device according to claim 1, It is characterized in that The light projector outer shell is provided with a cooling jacket.
23. A semiconductor processing device, include: A heating chamber and a process chamber, wherein the heating chamber is covered by a cover plate, and a heating lamp is arranged in the heating chamber, wherein a heating device as described in any one of claims 1 to 22 is mounted on the cover plate to assist in heating the wafer in the process chamber, wherein the distance between the heating device and the wafer is adjustable.
24. The semiconductor processing apparatus of claim 23, It is characterized in that The light projector is installed on the cover plate in a liftable manner.
25. The semiconductor processing apparatus of claim 23, It is characterized in that The light projector is divided into two parts. The first part integrates the collimating part, the beam expanding part and the correcting part and is packaged as a whole; the second part is a separate package of the light splitting part, and the distance between the first part and the second part is adjustable.
26. The semiconductor processing apparatus of claim 25, It is characterized in that The first part is fixed above the cover plate, and the second part is fixed on the cover plate in a liftable manner.
27. The semiconductor processing apparatus of claim 26, It is characterized in that The cover plate has a mounting portion, the mounting portion includes a lifting platform or a lifting cylinder, and the second part is mounted on the mounting portion.
28. The semiconductor processing apparatus of claim 27, It is characterized in that The mounting portion includes a lifting cylinder and a mounting hole, wherein the mounting hole is located on the cover plate and is coaxial with the wafer; the lifting cylinder is fixed in the mounting hole in a liftable manner, and the second part is fixed to the bottom end of the lifting cylinder.
29. The semiconductor processing apparatus of claim 28, It is characterized in that The lifting cylinder is wrapped with a cooling jacket, or a cooling channel is arranged in the lifting cylinder.