Turntable mechanism for silicon wafer processing

CN222146188UActive Publication Date: 2024-12-10深圳市圭华智能科技有限公司
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Patent Information

Application Number
CN202422541559.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-21
Publication Date
2024-12-10
Estimated Expiration
2034-10-21

AI Technical Summary

Technical Problem

The existing silicon wafer processing turntables are prone to data chaos and shaking when rotating, resulting in angle errors and affecting processing quality and working efficiency.

Method used

A rotating mechanism including a rotating rod, belt, gear, movable ring, mechanical gripper and drive motor is designed. The movable ring is moved by the teeth of the gear and the movable ring, clamping the rotating rod to prevent shaking, and passing through the wire The combination of the rod and the movable plate drives the placement plate and lift plate to move to fix the product, ensuring accuracy and stability.

Benefits of technology

It effectively improves the accuracy of the rotary rotating angle, prevents shaking, and ensures the quality and working efficiency of silicon wafer processing.

✦ Generated by Eureka AI based on patent content.

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    Figure CN222146188U_ABST
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Abstract

The utility model discloses a turntable mechanism for silicon wafer processing, which comprises a placing box, a rotating rod is mounted on the upper surface of the placing box in a penetrating manner, a belt is sleeved on the outer surface of the rotating rod, when the rotating rod rotates by 90 degrees, a rotating drum is driven by the belt to rotate by a circle, and the rotating drum drives the rotating rod to rotate and simultaneously drives a first gear to rotate; a toothed part of a gear I is meshed with teeth on two side walls in a movable ring, so that the meshing of the teeth can drive the movable ring to move left and right back and forth, and the movable ring is fixed on the upper surface of the placing box through a movable sleeve and a supporting rod; when a toothed part of a gear I is engaged with teeth on one side of the inner wall of a movable ring to drive a mechanical gripper on the outer wall of one end of the movable ring to move towards a rotating rod to clamp the rotating rod so as to prevent the four-station turntable from shaking, the accuracy of the rotating angle of the rotating rod can be improved; when the toothed part of the first gear is meshed with the teeth on the other side of the inner wall of the movable ring to drive the mechanical gripper on the outer wall of the movable ring to move outwards, the rotating rod can rotate conveniently.
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