Quartz tube transfer trolley

Abstract

The utility model provides a quartz tube transfer trolley which comprises two bottom frames, a cross rod and two supporting frames, the cross rod is connected between the two bottom frames, and the two supporting frames are arranged on the two bottom frames respectively. The supporting frame comprises a V-shaped frame body and supporting rollers, the V-shaped frame body is provided with two V-shaped supporting arms, the supporting rollers are rotatably arranged on the two supporting arms of the V-shaped frame body, and the heights of the central axes of the two supporting rollers on the V-shaped frame body are consistent. According to the utility model, quartz tubes can be easily transferred, and the labor intensity of workers is reduced; the structure of the supporting frame can adapt to quartz tubes of different models, and the angles of the quartz tubes can be conveniently adjusted according to the requirements of different working procedures; the bottom frame and the transverse rod are designed to be of an adjustable structure, the height and length of the transfer trolley can be conveniently adjusted according to production requirements, and therefore use flexibility is improved.

Description

Technical Field

[0001] The utility model relates to the field of devices for process furnace production, in particular to a quartz tube transfer vehicle. Background Art

[0002] The equipment used to dope silicon wafers with phosphorus is a high-temperature diffusion furnace. The most widely used high-temperature diffusion furnace is a tubular furnace, which is mainly used for gas phase diffusion. Quartz is resistant to high temperatures and acids and alkalis, so it is widely used in tubular high-temperature diffusion furnaces. The production and manufacturing of quartz tubes often involves multiple processes. When the quartz tubes are circulated between these processes, the traditional method is to rely on manual handling. Since the quartz tubes used in tubular diffusion furnaces are large in size, manual handling is more difficult. In addition, the quartz tubes themselves are fragile. During the handling process, the quartz tubes will be broken if not handled with care. At the same time, there are still highly corrosive chemicals such as residual acids and alkalis in the quartz tubes after diffusion, which can harm the operator if not handled properly. Although some of the current quartz tube transporters can carry quartz tubes and reduce the intensity of manual labor, they cannot adjust the angle of the quartz tubes, nor can they adapt to different models of quartz tubes, and their flexibility is poor. Utility Model Content

[0003] The utility model aims to solve the shortcomings in the prior art and proposes a quartz tube transfer vehicle, which can realize easy transfer of quartz tubes and is suitable for quartz tubes of different models.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A quartz tube transfer vehicle comprises a base frame, a cross bar and a support frame, wherein the base frames are two, and the cross bar is connected between the two base frames; the support frames are two, and the two support frames are respectively arranged on the two base frames, and the two support frames are symmetrically arranged; the support frame comprises a V-shaped frame body and support rollers, the V-shaped frame body has two V-shaped support arms, the support rollers are rotatably arranged on the two support arms of the V-shaped frame body, and the central axis heights of the two support rollers on the V-shaped frame body are consistent.

[0006] Preferably, the base frame comprises a base rod and a lifting mechanism, the base rod is horizontally arranged, the lifting mechanism is vertically arranged, and the support frame is arranged on the lifting mechanism.

[0007] Preferably, the lifting mechanism comprises a lifting cylinder and a lifting head, the lifting cylinder is arranged on the bottom rod, the lifting head is arranged on the end of the piston rod of the lifting cylinder, and the support frame is arranged on the lifting head.

[0008] Preferably, the base frame further comprises a reinforcing rod, and two ends of the reinforcing rod are respectively connected to the lifting cylinder and the bottom rod.

[0009] Preferably, the base frame further includes moving wheels, and the moving wheels are arranged below the bottom rod.

[0010] Preferably, the crossbar comprises a first rod body, a second rod body and a third rod body, the second rod body is arranged between the first rod body and the third rod body, and the first rod body and the third rod body are respectively connected to the bottom frames on both sides.

[0011] Preferably, an adjustment channel and a screw hole are provided in the first rod body, the adjustment channel extends along the length direction of the first rod body, the center axis of the screw hole is perpendicular to the length direction of the first rod body, and the screw hole is connected to the adjustment channel; an adjustment groove is provided at the end of the second rod body, and the adjustment groove extends along the length direction of the second rod body; the end of the second rod body penetrates into the adjustment channel, and the first rod body and the second rod body are fixed by a screw, and the screw passes through the screw hole and extends into the adjustment groove and abuts against the bottom wall of the adjustment groove.

[0012] Preferably, the center axis of the support roller is parallel to the length direction of the cross bar, and the outer diameter of the support roller is greater than the outer diameter of the support arm.

[0013] Preferably, the support roller is rotatably disposed on the support arm via a bearing.

[0014] Preferably, the support roller is made of graphite, and the surface of the support roller is smooth.

[0015] Compared with the prior art, the beneficial effects of the utility model are as follows: the utility model can realize easy transportation of quartz tubes and reduce manual labor intensity; the structure of the support frame can adapt to quartz tubes of different models, and it is convenient to adjust the angle of the quartz tube according to the requirements of different processes, thereby improving the flexibility of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The present invention is a schematic structural diagram of a quartz tube transfer vehicle according to an embodiment of the present invention.

[0017] Figure 2 It is a structural schematic diagram of a base frame in one embodiment of the utility model.

[0018] Figure 3 It is a structural schematic diagram of a support frame according to an embodiment of the utility model.

[0019] Figure 4 This is a schematic structural diagram of a quartz tube transfer vehicle according to another embodiment of the utility model.

[0020] Figure 5 It is a schematic structural diagram of a cross bar in another embodiment of the utility model.

[0021] In the figure, 100, 200 are transfer vehicles, 10 are base frames, 11 are bottom rods, 12 are lifting mechanisms, 121 are lifting cylinders, 122 are lifting heads, 13 are reinforcing rods, 14 are moving wheels, 20 are cross rods, 21 are first rod bodies, 211 are adjusting channels, 212 are screw holes, 22 are second rod bodies, 221 are adjusting grooves, 23 are third rod bodies, 24 are screws, 30 are support frames, 31 are V-shaped frame bodies, 311 are support arms, 32 are supporting rollers, and 33 are bearings. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model. It can be understood that some technical means of the various embodiments described herein can be replaced or combined with each other without conflict.

[0023] In the description of the present invention, if there are terms such as "first", "second", etc., they are only used to distinguish the objects described, and do not have any order or technical meaning. Therefore, the objects defined as "first", "second", etc. may explicitly or implicitly include one or more of the objects. Moreover, "one" or "a" and similar words do not indicate a quantity limitation, but indicate the existence of at least one, and "multiple" means not less than two.

[0024] In the description of the utility model specification, reference to "one embodiment" or "some embodiments" etc. means that one or more embodiments of the utility model include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in the specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways.

[0025] Please refer to Figures 1 to 3The utility model provides a quartz tube transfer vehicle 100, which is used to realize the turnover of quartz tubes between different processes, and includes a base frame 10, a cross bar 20 and a support frame 30. There are two base frames 10, and the cross bar 20 is connected between the two base frames 10. There are two support frames 30, and the two support frames 30 are respectively arranged on the two base frames 10, and the two support frames 30 are symmetrically arranged. The support frame 30 includes a V-shaped frame body 31 and a support roller 32. The V-shaped frame body 31 has two V-shaped support arms 311. The support roller 32 is rotatably arranged on the two support arms 311 of the V-shaped frame body 31, and the central axis heights of the two support rollers 32 on the V-shaped frame body 31 are consistent.

[0026] During the transportation process, the quartz tube is placed on two support frames 30. The V-shaped design of the support frames 30 can adapt to quartz tubes of different models and diameters; and the four support rollers 32 are respectively attached to the tube wall of the supporting quartz tube, so that the quartz tube is rotatable, which is convenient for adjusting the angle of the quartz tube according to the requirements of different processes, thereby improving the flexibility of use. The structure design of this transport vehicle is simple and light, easy to control and operate, and can realize the easy transportation of quartz tubes and reduce the labor intensity.

[0027] like Figure 3 As shown, in some embodiments, the support arm 311 is a cylindrical structure, the central axis of the support roller 32 is parallel to the length direction of the crossbar 20, and the outer diameter of the support roller 32 is larger than the outer diameter of the support arm 311, so that the support roller 32 can be used to support the quartz tube to prevent the quartz tube from contacting the support arm 311. Further, the support rollers 32 on the two support frames 30 can be arranged opposite to each other, that is, they are respectively arranged on the inner sides of the V-shaped frame bodies 31 on both sides.

[0028] In some preferred embodiments, the support roller 32 is made of graphite, and the surface of the support roller 32 is smooth. The graphite material is durable, has good fire resistance, and will not scratch or damage the quartz tube body.

[0029] In some embodiments, the support roller 32 may be rotatably mounted on the support arm via a bearing 33. However, the present invention is not limited thereto, and in other embodiments, the support roller 32 may also be rotatably mounted in other reasonable manners.

[0030] Furthermore, the base frame 10 and the crossbar 20 may be designed as an adjustable structure so as to adjust the height and length of the transfer vehicle 100 according to production requirements.

[0031] See also Figure 2In some embodiments, the base frame 10 includes a bottom bar 11 and a lifting mechanism 12. The bottom bar 11 is horizontally arranged, and the length direction of the bottom bar 11 is perpendicular to the length direction of the cross bar 20. The lifting mechanism 12 is vertically arranged in the middle of the bottom bar 11, and the support frame 30 is arranged on the lifting mechanism 12. The lifting mechanism 12 is used to adjust the height of the support frame 30, so as to match different types of quartz tubes and operators of different heights.

[0032] In some embodiments, the lifting mechanism 12 includes a lifting cylinder 121 and a lifting head 122. The lifting cylinder 121 is arranged on the bottom rod 11, the lifting head 122 is arranged at the end of the piston rod of the lifting cylinder 121, and the support frame 30 is arranged on the lifting head 122. The height of the support frame 30 is adjusted by controlling the piston rod state of the lifting cylinder 121 to improve flexibility. Among them, the lifting cylinder 121 can adopt a commercially available linear cylinder product. The structure and control principle of the linear cylinder belong to the prior art and will not be repeated here. Of course, the utility model is not limited to this. In other embodiments, the lifting mechanism 12 can also adopt other reasonable lifting mechanisms, such as an electric telescopic rod.

[0033] Furthermore, the base frame 10 further includes a reinforcing rod 13, the two ends of which are respectively connected to the lifting cylinder 121 and the bottom rod 11, so as to enhance the structural strength of the base frame 10, ensure the stability of the quartz tube during operation, and extend the service life of the transfer vehicle 100. The base frame 10 further includes moving wheels 14, which are rotatably disposed below the bottom rod 11. Among them, moving wheels 14 are respectively disposed at both ends of each bottom rod 11 to ensure the stability of the transfer vehicle 100 during movement.

[0034] Please refer to Figure 4 and Figure 5 In other embodiments of the transfer vehicle 200, the cross bar 20 includes a first rod body 21, a second rod body 22 and a third rod body 23, the second rod body 22 is arranged between the first rod body 21 and the third rod body 22, and the first rod body 21 and the third rod body 23 are respectively connected to the base frame 10 on both sides.

[0035] Furthermore, an adjustment channel 211 and a screw hole 212 are provided in the first rod body 21. The adjustment channel 211 extends along the length direction of the first rod body 21. The central axis of the screw hole 212 is perpendicular to the length direction of the first rod body 21. The screw hole 212 is connected to the adjustment channel 211. An adjustment groove 221 is provided at the end of the second rod body 22. The adjustment groove 221 extends along the length direction of the second rod body 22. The end of the second rod body 22 penetrates into the adjustment channel 211. The first rod body 21 and the second rod body 22 are fixed by a screw 24. The screw 24 passes through the screw hole 212 and then extends into the adjustment groove 221 and tightly abuts against the bottom wall of the adjustment groove 221.

[0036] It is understandable that after the end of the second rod body 21 penetrates the adjustment channel 211, the adjustment groove 221 is located below the screw hole 212, so that the second rod body 22 and the first rod body 21 are fixed by the screw 24. When the length of the crossbar 20 needs to be adjusted, the screw 24 can be loosened, and the second rod body 22 can be moved left and right in the adjustment channel 211 until the transfer vehicle 200 reaches a suitable length, and then the screw 24 is tightened so that the screw 24 passes through the screw hole 212 and extends into the adjustment groove 221 and tightly against the bottom wall of the adjustment groove 221. Further, the second rod body 22 and the third rod body 23 can also adopt the adjustable structure as described above, so as to expand the adjustable length range of the transfer vehicle 200. The adjustable structure of the crossbar 20 is convenient for flexibly adjusting the length of the transfer vehicle according to production requirements to match different types of quartz tubes. However, the utility model is not limited to this. In other embodiments, the length adjustment method of the crossbar 20 can also be implemented by other reasonable structures.

[0037] In one embodiment, the height of the transfer vehicle is designed to be adjustable from 1.0m to 1.2m, and the length is designed to be adjustable from 1.6m to 1.8m, which can match the current transportation needs of different types of quartz tubes.

[0038] In summary, the utility model provides a quartz tube transfer vehicle with a simple and lightweight structural design, which is easy to control and operate, can realize easy transfer of quartz tubes, and reduce manual labor intensity; the structure of the support frame can adapt to quartz tubes of different models, and is convenient for adjusting the angle of the quartz tube according to the requirements of different processes; the base frame and cross bar are designed as adjustable structures, which is convenient for adjusting the height and length of the transfer vehicle according to production needs, thereby improving flexibility of use.

[0039] The present invention has been described by the above-mentioned relevant embodiments, however, the above-mentioned embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, any changes and modifications made without departing from the spirit and scope of the present invention are within the scope of patent protection of the present invention.

Claims

1. A quartz tube transporter, Features: It includes a base frame, a cross bar and a support frame, wherein there are two base frames, and the cross bar is connected between the two base frames; there are two support frames, and the two support frames are respectively arranged on the two base frames, and the two support frames are symmetrically arranged; the support frame includes a V-shaped frame body and a support roller, and the V-shaped frame body has two V-shaped support arms, and the support roller is rotatably arranged on the two support arms of the V-shaped frame body, and the central axis heights of the two support rollers on the V-shaped frame body are consistent.

2. The quartz tube transporter according to claim 1, Features: The base frame comprises a base rod and a lifting mechanism, the base rod is arranged horizontally, the lifting mechanism is arranged vertically, and the support frame is arranged on the lifting mechanism.

3. The quartz tube transporter according to claim 2, Features: The lifting mechanism comprises a lifting cylinder and a lifting head, wherein the lifting cylinder is arranged on the bottom rod, the lifting head is arranged on the end of the piston rod of the lifting cylinder, and the support frame is arranged on the lifting head.

4. The quartz tube transporter according to claim 3, Features: The base frame also includes a reinforcing rod, and two ends of the reinforcing rod are respectively connected to the lifting cylinder and the bottom rod.

5. The quartz tube transporter according to claim 2, Features: The base frame also includes moving wheels, and the moving wheels are arranged below the bottom rod.

6. The quartz tube transporter according to claim 1, Features: The crossbar comprises a first rod body, a second rod body and a third rod body, the second rod body is arranged between the first rod body and the third rod body, and the first rod body and the third rod body are respectively connected to the bottom frames on both sides.

7. The quartz tube transporter according to claim 6, Features: An adjustment channel and a screw hole are provided in the first rod body, wherein the adjustment channel extends along the length direction of the first rod body, the center axis of the screw hole is perpendicular to the length direction of the first rod body, and the screw hole is connected with the adjustment channel; an adjustment groove is provided at the end of the second rod body, wherein the adjustment groove extends along the length direction of the second rod body; the end of the second rod body penetrates into the adjustment channel, and the first rod body and the second rod body are fixed by a screw, and the screw passes through the screw hole and extends into the adjustment groove and abuts against the bottom wall of the adjustment groove.

8. The quartz tube transporter according to claim 1, Features: The center axis of the support roller is parallel to the length direction of the cross bar, and the outer diameter of the support roller is greater than the outer diameter of the support arm.

9. The quartz tube transporter according to claim 1, Features: The supporting roller is rotatably arranged on the supporting arm through a bearing.

10. The quartz tube transporter according to claim 1, Features: The supporting roller is made of graphite, and the surface of the supporting roller is smooth.

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