Protective mounting structure for turbo molecular pump

Abstract

The present disclosure relates to a protective mounting structure for a turbo molecular pump. The protective mounting structure for the turbo molecular pump comprises a shell, a driving assembly, a rotating assembly, a moving assembly, a heat dissipation assembly, a flow guide assembly and a mounting assembly. Compared with a traditional turbo molecular pump which can generate more heat to abrade an internal mechanical structure during operation, the device can enable the multiple heat dissipation structures to linearly move at the same time through the two sliding structures which are rotationally connected with each other so as to fix the turbo molecular pump; and heat is guided out through the heat dissipation structure and is taken away in an air cooling mode, so that the turbo molecular pump is fixedly installed and meanwhile subjected to heat dissipation protection treatment through the protection installation structure.

Description

Technical Field

[0001] The utility model relates to the technical field of molecular pumps, in particular to a protective installation structure for a turbomolecular pump. Background Art

[0002] The turbomolecular pump is a common high vacuum pump. When the turbomolecular pump is running, the gas enters the pump body through an inlet. There is a high-speed rotating turbine in the pump body. The turbine has blades separated by grooves. When the turbine rotates, the blades accelerate the gas and push it to the outlet of the pump. In the process of pushing to the outlet, the gas passes through the sealing wall and is further compressed by the static and dynamic pressure reducing valves. Finally, the gas is discharged into the atmosphere through the outlet. The working principle of the turbomolecular pump is based on continuous molecular collisions. When gas molecules enter the turbomolecular pump, they collide with the blades on the turbine and are pushed to the outlet of the pump by the blades. During the collision process, the collision between gas molecules will also cause the pressure inside the gas to increase. Therefore, the turbomolecular pump can provide a high vacuum environment. The turbine Molecular pumps have many advantages. First, they have a high suction speed and can effectively remove gas. Secondly, turbomolecular pumps can reach high vacuum levels and are often used in vacuum metallurgy and laboratory environments. In addition, turbomolecular pumps also have high pumping speeds and low exhaust gas concentrations. However, in the use of traditional turbomolecular pumps, traditional turbomolecular pumps generate high-speed gas flow through the rotation of the turbine to push gas molecules to a higher pressure area for gas extraction. However, when the traditional turbomolecular pump is in operation, when gas molecules enter the turbomolecular pump, they will collide with the blades on the turbine. The high-speed rotation of the blades will generate more heat. After the heat accumulates, it will cause wear to the internal mechanical structure of the molecular pump, thereby affecting the normal use of the turbomolecular pump. Therefore, the problem of the prior art is that when the traditional turbomolecular pump is in operation, the high-speed rotation of the blades will generate more heat. After the heat accumulates, it will cause wear to the internal mechanical structure of the molecular pump, thereby affecting the normal use of the turbomolecular pump. Therefore, the problem of the prior art is that when the traditional turbomolecular pump is in operation, the high-speed rotation of the blades will generate more heat. After the heat accumulates, it will cause wear to the internal mechanical structure of the molecular pump. Utility Model Content

[0003] In order to overcome the problem that when gas molecules enter the traditional turbomolecular pump during operation, they will collide with the blades on the turbine. The high-speed rotation of the blades will generate more heat. The accumulated heat will cause wear on the internal mechanical structure of the molecular pump, thereby affecting the normal use of the turbomolecular pump.

[0004] The technical solution of the utility model is: a protective installation structure for a turbomolecular pump, comprising a shell, a driving component, a rotating component, a moving component, a heat dissipation component, a flow guide component and a mounting component; a driving component with a driving function is arranged on the inner side of the shell, a rotating component with a rotating function is arranged on the inner side of the shell, a moving component with a moving function is arranged above the rotating component, a heat dissipation component with a heat dissipation function is arranged at one end of the moving component, a flow guide component with a flow guide function is arranged above the shell, and a mounting component with a mounting function is arranged on the outer side of the shell.

[0005] Preferably, the shell can be installed and fixed by means of the installation component, so that the installation tube of the device can be fixed, the rotating component is driven to rotate by starting the driving component, the moving component is driven to move linearly by the rotation of the rotating component, and the heat dissipation component is driven to move linearly by the linear movement of the moving component, so that the heat dissipation component is close to the outer wall of the turbomolecular pump, the turbomolecular pump is fixed, the heat generated during the operation of the turbomolecular pump is extracted by the heat dissipation component, the heat dissipation component is air-cooled by the guide component, and the heat on the surface of the heat dissipation component is taken away.

[0006] Preferably, the driving assembly includes a motor and a worm; the motor is arranged outside the housing, and the worm is arranged at the output end of the motor. When in use, the worm is driven to rotate by starting the motor.

[0007] Preferably, the rotating assembly includes a worm wheel and a groove plate; a worm wheel is arranged on the inner side of the shell, the worm wheel and the worm are meshingly connected, and a groove plate is arranged above the worm wheel. When in use, the worm wheel is driven to rotate by the rotation of the worm, and the groove plate is driven to rotate by the rotation of the worm wheel.

[0008] Preferably, the moving component includes a slider and a moving frame; a slider is arranged on the inner side of the groove plate, and multiple groups of sliders are arranged, and a moving frame is arranged above the slider, the slider and the moving frame are rotatably connected, the slider and the groove plate are slidably connected, and the moving frame and the shell are slidably connected. When in use, the slider is driven to slide along the groove structure on the inner side of the groove plate by rotating the groove plate, and the moving frame is driven to move linearly along the inner side of the shell by sliding the slider along the groove structure on the inner side of the groove plate.

[0009] Preferably, the heat dissipation component includes an aluminum plate, a thermally conductive silicone pad and heat dissipation fins; an aluminum plate is arranged at one end of the movable frame, a thermally conductive silicone pad is arranged on one side of the aluminum plate, and heat dissipation fins are arranged on the other side of the aluminum plate, and multiple groups of heat dissipation fins are arranged. When in use, the aluminum plate is driven to move linearly by the linear movement of the movable frame, and the thermally conductive silicone pad is driven to move linearly by the linear movement of the aluminum plate. The thermally conductive silicone pad is moved linearly so as to be close to the outer wall of the turbomolecular pump, and the turbomolecular pump is installed and fixed. The heat generated by the thermally conductive silicone pad during the operation of the turbomolecular pump is introduced into the aluminum plate through the thermally conductive silicone pad, and the heat is diffused to the multiple groups of heat dissipation fins through the aluminum plate, and the contact area between the heat and the flowing air is increased through the heat dissipation fins.

[0010] Preferably, the guide assembly includes a connecting rod and a fan; a connecting rod is arranged above the shell, and a fan is arranged at one end of the connecting rod. When in use, the position of the fan is fixed by the connecting rod, and the flow speed of the air on the surface of the heat dissipation fin is increased by starting the fan, thereby taking away the heat on the heat dissipation fin and protecting the turbomolecular pump from heat dissipation, thereby achieving the goal of the protective installation structure to fix the turbomolecular pump and protect it from heat dissipation at the same time.

[0011] Preferably, the mounting assembly includes a mounting plate and a mounting hole; a mounting plate is provided on the outer side of the shell, and a mounting hole is provided on the inner side of the mounting plate, and multiple groups of mounting holes are provided. When in use, the mounting plate can be installed and fixed through the mounting holes using a bolt structure, and the protective mounting structure can be installed and fixed by installing and fixing the mounting plate, thereby improving the stability of the protective mounting structure during use.

[0012] Preferably, the fan and the connecting rod are arranged in pairs.

[0013] Preferably, the fan is arranged toward the heat dissipation fins.

[0014] Preferably, the fan and the heat dissipation fins are arranged in pairs.

[0015] Beneficial effects of the utility model:

[0016] 1. Compared with the traditional turbomolecular pump, which generates high-speed gas flow through the rotation of the turbine to push the gas molecules to a higher pressure area for gas extraction, when the traditional turbomolecular pump is running, when the gas molecules enter the turbomolecular pump, they will collide with the blades on the turbine, and the high-speed rotation of the blades will generate more heat. After the heat accumulates, it will cause wear on the internal mechanical structure of the molecular pump, thereby affecting the normal use of the turbomolecular pump. The installation protection structure can make multiple sets of heat dissipation structures move linearly at the same time through two sets of sliding structures connected to each other by rotation inside the groove plate to fix the turbomolecular pump, and the heat is exported through the heat dissipation structure and taken away by air cooling, so that the protective installation structure can fix the turbomolecular pump while performing heat dissipation protection treatment on it;

[0017] 2. Further, the worm is driven to rotate by starting the motor, the worm is driven to rotate by rotating the worm, the groove plate is driven to rotate by rotating the worm, the slider is driven to slide along the groove structure on the inner side of the groove plate by rotating the groove plate, the movable frame is driven to move linearly along the inner side of the shell by sliding the slider along the groove structure on the inner side of the groove plate, the aluminum plate is driven to move linearly by linear movement of the movable frame, the thermal conductive silicone pad is driven to move linearly by linear movement of the aluminum plate, the thermal conductive silicone pad is made to be close to the outer wall of the turbomolecular pump by linear movement of the thermal conductive silicone pad, and the turbomolecular pump is installed and fixed, the heat generated by the thermal conductive silicone pad during the operation of the turbomolecular pump is introduced into the aluminum plate, the heat is diffused to multiple groups of heat dissipating fins by the aluminum plate, the contact area between the heat and the flowing air is increased by the heat dissipating fins, the position of the fan is fixed by the connecting rod, the air flow rate on the surface of the heat dissipating fins is increased by starting the fan, so as to take away the heat on the heat dissipating fins, and the turbomolecular pump is heat-dissipated and protected, thereby realizing that the protective installation structure can fix the turbomolecular pump and perform heat dissipation protection on it at the same time;

[0018] 3. Furthermore, the mounting plate can be installed and fixed by a bolt structure through the mounting hole. By installing and fixing the mounting plate, the protective mounting structure can be installed and fixed, thereby improving the stability of the protective mounting structure during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The figure shows a schematic diagram of the cross-sectional three-dimensional structure of the protective installation structure for a turbomolecular pump of the utility model;

[0020] Figure 2 Shown is a three-dimensional schematic diagram of the protective installation structure for a turbomolecular pump of the utility model;

[0021] Figure 3 A schematic diagram showing a first partial structure of a protective installation structure for a turbomolecular pump according to the utility model; and

[0022] Figure 4 The figure shows a second partial structural diagram of the protective installation structure for a turbomolecular pump of the utility model;

[0023] Explanation of the reference numerals: 1. Shell; 2. Driving assembly; 201. Motor; 202. Worm; 3. Rotating assembly; 301. Worm wheel; 302. Groove plate; 4. Moving assembly; 401. Slider; 402. Moving frame; 5. Heat dissipation assembly; 501. Aluminum plate; 502. Thermal conductive silicone pad; 503. Heat dissipation fin; 6. Guide assembly; 601. Connecting rod; 602. Fan; 7. Mounting assembly; 701. Mounting plate; 702. Mounting hole. DETAILED DESCRIPTION

[0024] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0025] See also Figure 1 The utility model provides a protective installation structure for a turbomolecular pump, including a shell 1, a driving component 2, a rotating component 3, a moving component 4, a heat dissipation component 5, a flow guide component 6 and a mounting component 7; a driving component 2 with a driving function is arranged on the inner side of the shell 1, a rotating component 3 with a rotating function is arranged on the inner side of the shell 1, a moving component 4 with a moving function is arranged above the rotating component 3, a heat dissipation component 5 with a heat dissipation function is arranged at one end of the moving component 4, a flow guide component 6 with a flow guide function is arranged above the shell 1, and a mounting component 7 with a mounting function is arranged on the outer side of the shell 1.

[0026] See also Figure 2-4In this embodiment, the driving assembly 2 includes a motor 201 and a worm 202; the motor 201 is arranged outside the housing 1, and the worm 202 is arranged at the output end of the motor 201. When in use, the worm 202 is driven to rotate by starting the motor 201. The rotating assembly 3 includes a worm wheel 301 and a groove plate 302; the worm wheel 301 is arranged inside the housing 1, and the worm wheel 301 and the worm 202 are meshed and connected. A groove plate 302 is arranged above the worm wheel 301. When in use, the worm 202 rotates to drive the worm wheel 301 to rotate, and the worm wheel 301 rotates to drive the groove plate 302 to rotate. The moving component 4 includes a slider 401 and a moving frame 402; a slider 401 is arranged on the inner side of the groove plate 302, and multiple groups of sliders 401 are arranged. A moving frame 402 is arranged above the slider 401. The slider 401 and the moving frame 402 are rotatably connected, the slider 401 and the groove plate 302 are slidably connected, and the moving frame 402 and the shell 1 are slidably connected. When in use, the slider 401 is driven to slide along the groove structure on the inner side of the groove plate 302 by rotating the groove plate 302, and the moving frame 402 is driven to move linearly along the inner side of the shell 1 by sliding the slider 401 along the groove structure on the inner side of the groove plate 302.

[0027] The heat dissipation component 5 includes an aluminum plate 501, a thermally conductive silicone pad 502 and heat dissipation fins 503; an aluminum plate 501 is arranged at one end of the movable frame 402, a thermally conductive silicone pad 502 is arranged on one side of the aluminum plate 501, and a heat dissipation fin 503 is arranged on the other side of the aluminum plate 501, and a plurality of heat dissipation fins 503 are arranged. When in use, the aluminum plate 501 is driven to move linearly by the linear movement of the movable frame 402, and the thermally conductive silicone pad 502 is driven to move linearly by the linear movement of the aluminum plate 501, and the thermally conductive silicone pad 502 is made to be close to the outer wall of the turbomolecular pump by the linear movement of the thermally conductive silicone pad 502, and the turbomolecular pump is installed and fixed, and the heat generated by the thermally conductive silicone pad 502 during the operation of the turbomolecular pump is introduced into the aluminum plate 501 through the thermally conductive silicone pad 502, and the heat is diffused to the plurality of heat dissipation fins 503 through the aluminum plate 501, and the contact area between the heat and the flowing air is increased by the heat dissipation fins 503. The guide component 6 includes a connecting rod 601 and a fan 602; the upper A connecting rod 601 is provided on the side, and a fan 602 is provided at one end of the connecting rod 601. When in use, the position of the fan 602 is fixed by the connecting rod 601, and the flow speed of the air on the surface of the heat dissipation fin 503 is increased by starting the fan 602, so as to take away the heat on the heat dissipation fin 503, and perform heat dissipation protection on the turbomolecular pump, thereby realizing that the protective mounting structure fixes and installs the turbomolecular pump while performing heat dissipation protection on it, and the mounting component 7 includes a mounting plate 701 and a mounting hole 702; a mounting plate 701 is provided on the outer side of the shell 1, and a mounting hole 702 is opened on the inner side of the mounting plate 701, and the mounting hole 702 is opened in multiple groups. When in use, the mounting plate 701 can be installed and fixed by a bolt structure through the mounting hole 702, and the protective mounting structure is installed and fixed by installing and fixing the mounting plate 701, thereby improving the stability of the protective mounting structure when in use.

[0028] When working, firstly, the mounting plate 701 can be installed and fixed by using a bolt structure through the mounting hole 702, and the protective mounting structure can be installed and fixed by installing and fixing the mounting plate 701.

[0029] After the device is installed and fixed, the worm 202 is driven to rotate by starting the motor 201, the worm 202 is driven to rotate the worm wheel 301, the groove plate 302 is driven to rotate by the worm wheel 301, the groove plate 302 is driven to slide along the groove structure inside the groove plate 302 by the rotation of the slider 401, the moving frame 402 is driven to move linearly along the inner side of the housing 1 by the sliding of the slider 401 along the groove structure inside the groove plate 302, and the aluminum plate 501 is driven to move linearly by the linear movement of the moving frame 402;

[0030] After the aluminum plate 501 moves linearly, the thermal conductive silicone pad 502 is driven to move linearly by the linear movement of the aluminum plate 501. The thermal conductive silicone pad 502 is closely attached to the outer wall of the turbomolecular pump by the linear movement of the thermal conductive silicone pad 502, and the turbomolecular pump is installed and fixed. The heat generated by the thermal conductive silicone pad 502 during the operation of the turbomolecular pump is introduced into the aluminum plate 501, and the heat is diffused to the multiple groups of heat dissipation fins 503 by the aluminum plate 501. The contact area between the heat and the flowing air is increased by the heat dissipation fins 503. The position of the fan 602 is fixed by the connecting rod 601. The flow speed of the air on the surface of the heat dissipation fins 503 is increased by starting the fan 602, so as to take away the heat on the heat dissipation fins 503, and the turbomolecular pump is heat-dissipated and protected.

[0031] Through the above steps, the shell 1 can be installed and fixed by using the installation component 7, so that the device can be fixed by the installation pipe, the starting drive component 2 is used to drive the rotating component 3 to rotate, the rotating component 3 is used to drive the moving component 4 to move linearly, and the moving component 4 is used to drive the heat dissipation component 5 to move linearly, so that the heat dissipation component 5 is close to the outer wall of the turbomolecular pump, the turbomolecular pump is fixed, the heat dissipation component 5 is used to extract the heat generated during the operation of the turbomolecular pump, the guide component 6 is used to air-cool the heat dissipation component 5, and the heat on the surface of the heat dissipation component 5 is taken away.

[0032] It should be noted that the so-called fan and connecting rod are arranged in pairs, which means that one fan is arranged at one end of one connecting rod. The so-called fan is arranged to face the heat dissipation fins, which means that the direction of the fan blowing faces (towards) the heat dissipation fins.

[0033] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the purpose of the present invention.

Claims

1. A protective mounting structure for a turbomolecular pump, comprising a housing (1); Features: The invention also comprises a driving component (2), a rotating component (3), a moving component (4), a heat dissipation component (5), a flow guiding component (6) and a mounting component (7); a driving component (2) having a driving function is arranged on the inner side of the shell (1); a rotating component (3) having a rotating function is arranged on the inner side of the shell (1); a moving component (4) having a moving function is arranged above the rotating component (3); a heat dissipation component (5) having a heat dissipation function is arranged at one end of the moving component (4); a flow guiding component (6) having a flow guiding function is arranged above the shell (1); and a mounting component (7) having a mounting function is arranged on the outer side of the shell (1); wherein the heat dissipation component (5) comprises an aluminum plate (501), a heat conductive silicone pad (502) and heat dissipation fins (503); an aluminum plate (501) is arranged at one end of the moving frame (402); a heat conductive silicone pad (502) is arranged on one side of the aluminum plate (501); and heat dissipation fins (503) are arranged on the other side of the aluminum plate (501); and a plurality of groups of heat dissipation fins (503) are arranged.

2. The protective installation structure according to claim 1, Features: The driving assembly (2) comprises a motor (201) and a worm (202); the motor (201) is arranged outside the housing (1), and the worm (202) is arranged at the output end of the motor (201).

3. The protective installation structure according to claim 1, Features: The rotating assembly (3) comprises a worm wheel (301) and a groove plate (302); the worm wheel (301) is arranged on the inner side of the housing (1), the worm wheel (301) and the worm (202) are meshingly connected, and the groove plate (302) is arranged above the worm wheel (301).

4. The protective installation structure according to claim 3, Features: The moving assembly (4) comprises a slider (401) and a moving frame (402); the slider (401) is arranged inside the groove plate (302), a plurality of sliders (401) are arranged, a moving frame (402) is arranged above the slider (401), the slider (401) and the moving frame (402) are rotatably connected, the slider (401) and the groove plate (302) are slidably connected, and the moving frame (402) and the housing (1) are slidably connected.

5. The protective installation structure according to claim 1, Features: The air guide assembly (6) comprises a connecting rod (601) and a fan (602); the connecting rod (601) is arranged above the housing (1), and the fan (602) is arranged at one end of the connecting rod (601).

6. The protective installation structure according to claim 1, Features: The mounting assembly (7) comprises a mounting plate (701) and mounting holes (702); the mounting plate (701) is arranged on the outer side of the housing (1), and the mounting holes (702) are arranged on the inner side of the mounting plate (701), and the mounting holes (702) are arranged in a plurality of groups.

7. The protective installation structure according to claim 5, Features: The fan (602) and the connecting rod (601) are arranged in pairs.

8. The protective installation structure according to claim 5, Features: The fan (602) is arranged to face the heat dissipation fins (503).

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