Measuring device for annular workpiece

Abstract

The utility model discloses a measuring device for an annular workpiece, and the device comprises a bearing part which is used for bearing the annular workpiece on a preset plane; the positioning part is used for positioning the circle center of the annular workpiece to a preset point on the preset plane; a first measuring portion configured to indicate a dimension in a first direction passing through the predetermined point on the predetermined plane; and a second measuring part configured to indicate a size in a second direction perpendicular to the predetermined plane, by using the measuring device, a plurality of sizes of the annular workpiece can be measured at a time, the measuring efficiency is significantly improved, and the accuracy of a measuring result is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a measuring device for annular workpieces. Background Art

[0002] Chemical Vapor Deposition (CVD) is a material surface treatment technology widely used in semiconductor, photovoltaic, coating and nanotechnology fields. Chemical vapor deposition is mainly used to deposit thin films on the surface of substrates. By controlling the reaction process, uniform, dense and pure thin film materials are formed under high temperature and low pressure conditions.

[0003] During the chemical vapor deposition process, the substrate is supported in the reaction chamber by a support. Using a dedicated support to support the substrate plays an important role. The support not only ensures that the substrate is stably supported in the correct position in the reaction chamber, but also improves the uniformity and efficiency of the deposition process. For example, the support can adopt an annular structure to provide uniform support for the substrate while using the central through hole of the support to improve the gas flow and improve the deposition uniformity.

[0004] The size of the support needs to match the size of the substrate. Taking a ring-shaped support as an example, if the diameter of the support is too large or too small, the substrate cannot be stably supported, thus affecting the uniformity and quality of deposition; the thickness of the support directly affects its mechanical strength and thermal conductivity. In addition, the size of the support will also directly affect its manufacturing cost.

[0005] In order to ensure the quality and consistency of chemical vapor deposition reactions and control manufacturing costs, it is necessary to screen the supports according to their size. Therefore, how to measure several key dimensions of the supports in an efficient manner to improve overall production efficiency has always been an urgent problem to be solved in this field. Utility Model Content

[0006] In order to solve the above technical problems, an embodiment of the utility model hopes to provide a measuring device for an annular workpiece, by using the measuring device, multiple dimensions of the annular workpiece can be measured at one time, which significantly improves the measurement efficiency and the accuracy of the measurement result.

[0007] The technical solution of the utility model embodiment is achieved as follows:

[0008] The present invention provides a measuring device for an annular workpiece, the measuring device comprising:

[0009] A bearing portion, used for bearing the annular workpiece on a predetermined plane;

[0010] A positioning portion, the positioning portion is used to position the center of the annular workpiece at a predetermined point on the predetermined plane;

[0011] a first measuring portion configured to indicate a dimension in a first direction passing through the predetermined point on the predetermined plane; and

[0012] A second measuring portion configured to indicate a dimension in a second direction perpendicular to the predetermined plane.

[0013] In some optional examples, the bearing portion includes a bearing plane parallel to the predetermined plane for bearing the annular workpiece, wherein the first measuring portion includes a first length scale formed on the bearing plane, and an extension line of the first length scale in the first direction passes through the predetermined point.

[0014] In some optional examples, the second measuring portion includes a scale member, wherein the scale member extends along the second direction and a second length scale is provided on the scale member.

[0015] In some optional examples, the scale member is configured to be movable along the first direction to abut against a circumferential edge of the annular workpiece.

[0016] In some optional examples, the bearing portion includes a bearing plane parallel to the predetermined plane for bearing the annular workpiece, wherein a slide groove extending along the first direction is formed on the bearing plane, and the scale member is configured to be able to slide along the slide groove.

[0017] In some optional examples, the second measuring portion further includes an indicator connected to the scale member, wherein the indicator is arranged to extend perpendicularly to the scale member and is movable along the second direction to abut against the annular workpiece.

[0018] In some optional examples, the positioning portion is disposed at the predetermined point to position the center of the annular workpiece at the predetermined point by cooperating with the center hole of the annular workpiece.

[0019] In some optional examples, the measuring device includes at least three positioning portions arranged around the predetermined point, and each positioning portion is configured to be movable along the first direction to abut against the annular workpiece.

[0020] In some optional examples, the second measuring portion is at least one positioning portion among the at least three positioning portions.

[0021] In some optional examples, the measuring device includes a plurality of first measuring portions spaced apart at predetermined angles.

[0022] The embodiment of the utility model provides a measuring device for an annular workpiece. The measuring device includes a positioning part and two measuring parts, wherein, through the two measuring parts, the thickness dimension and one or more radial dimensions of the annular workpiece can be obtained at one time when the positioning part positions the center of the annular workpiece at a predetermined point on a predetermined plane. Compared with the measurement scheme of measuring each dimension one by one multiple times in the prior art, the measuring device provided by the embodiment of the utility model simplifies the measurement operation process and reduces the time of repeated measurement and positioning, thereby significantly improving the measurement efficiency. In addition, the positioning part can ensure that the center of the annular workpiece is aligned with the predetermined point on the bearing part, so that it can be ensured that the measuring point is located at the center point of the annular workpiece when measuring the radial dimension of the annular workpiece, so as to reduce the center deviation caused by improper human operation, thereby improving the measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic diagram of a ring-shaped workpiece;

[0024] Figure 2 is another schematic diagram of a ring-shaped workpiece;

[0025] Figure 3 A top view of a measuring device provided in one embodiment of the utility model;

[0026] Figure 4 for Figure 3 A front view of the measuring device;

[0027] Figure 5 A schematic diagram of a measuring device provided in another embodiment of the utility model;

[0028] Figure 6 A schematic diagram of a measuring device provided in yet another embodiment of the present utility model. DETAILED DESCRIPTION

[0029] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] See also Figure 1 and Figure 2, both show an annular workpiece 100 currently used as a support for a substrate in a chemical vapor deposition reaction. The annular workpiece 100 is annular in shape as a whole and has a certain thickness. Specifically, the annular workpiece 100 has a central through hole 101 and three fan-shaped holes 102 arranged around the central through hole 101. The annular portion 103 located radially outside the fan-shaped hole 102, i.e. Figure 2 The radially outer portion of the dotted circle in FIG. 1 is a key portion that affects the chemical vapor deposition reaction effect. Therefore, it is necessary to measure some dimensions of the annular portion 103 to select the annular workpiece 100 that meets the size requirements for use.

[0031] More specifically, during the measurement, the first radius R1, the second radius R2 and the thickness H of the annular portion 103 need to be measured, see Figure 1 and Figure 2 , wherein the first radius R1 and the second radius R2 are indicated by arrows. At present, the conventional measurement method is that an operator holds a measuring tool such as a ruler and measures the three dimensions one by one. Figure 2 As shown, it is necessary to measure three times with a ruler Z to obtain the first radius R1, the second radius R2 and the thickness H, that is, multiple measurements are required, and each measurement may require repositioning and calibration to ensure the accuracy of the measurement. This method is not only time-consuming, but also easily affected by human factors, resulting in inaccurate measurement results. For example, when measuring two radius dimensions, it is difficult to ensure that the measuring point is located at the center point of the annular portion 103. If the center point is not aligned, even if the operator is skilled, the accurate radius dimension cannot be obtained, but the measured radius value will be too large or too small. This measurement error may cause a large number of unqualified annular workpieces 100 to be used in chemical vapor deposition reactions, which will have an adverse effect on the reaction effect.

[0032] To this end, the utility model proposes a measuring device for an annular workpiece. By using the measuring device, multiple dimensions of the annular workpiece can be measured at one time, which significantly improves the measurement efficiency and the accuracy of the measurement result.

[0033] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0034] like Figure 3 and Figure 4As shown, the embodiment of the utility model proposes a measuring device 1 for an annular workpiece. The measuring device 1 comprises: a bearing portion 11, used to bear the annular workpiece 100 on a predetermined plane P; a positioning portion 12, used to position the center of the annular workpiece 100 at a predetermined point O on the predetermined plane P; a first measuring portion 13, the first measuring portion 13 is configured to indicate the dimension in a first direction D1 passing through the predetermined point O on the predetermined plane P; and a second measuring portion 14, the second measuring portion 14 is configured to indicate the dimension in a second direction D2 perpendicular to the predetermined plane.

[0035] exist Figure 1 In FIG. 1 , a predetermined plane P is shown by a dotted line. Figure 1 In the embodiment shown in the figure, the annular workpiece 100 is placed on the bearing portion 11 along the horizontal direction. Therefore, in this case, the predetermined plane P can be a plane parallel to the horizontal plane. In other embodiments of the present invention not shown, the predetermined plane P can be a plane that forms a certain angle with the horizontal plane, which is not limited here.

[0036] The predetermined point O may be any point on the predetermined plane P. The first measuring portion 13 may be set with reference to the predetermined point O, so that the first measuring portion 13 can indicate a dimension in a first direction D passing through the predetermined point O on the predetermined plane P. In some embodiments of the present invention, the dimension may include a first radius R1 and a second radius R2 of the annular workpiece 100 .

[0037] The second measuring part 14 can be provided independently of the first measuring part 13. Specifically, the first measuring part 13 and the second measuring part 14 can be used to indicate the dimensions of the annular workpiece 100 in different planes, respectively, wherein the second measuring part 14 can be used to indicate the dimensions of the annular workpiece 100 in a plane perpendicular to the predetermined plane. In some embodiments of the present utility model, the second measuring part 14 can be used to indicate the thickness H of the annular workpiece 100.

[0038] When the measuring device 1 is used to measure the size of the annular workpiece 100, first, the annular workpiece 100 can be positioned on the bearing portion 11 by the positioning portion 12 so that the center of the annular workpiece 100 is aligned with the predetermined point O on the predetermined plane P. Once the positioning portion 12 places the annular workpiece 100 on the bearing portion, the various dimensions of the annular workpiece 100 indicated by the first measuring portion and the second measuring portion can be directly read, which improves the convenience of operation and measurement efficiency compared to the existing measurement method. In addition, since the center of the annular workpiece 100 is positioned at the predetermined point, the first measuring portion can accurately reflect the actual radial size of the annular workpiece 100, eliminating the measurement error caused by the deviation of the measuring point from the center of the annular workpiece.

[0039] The embodiment of the utility model provides a measuring device 1 for an annular workpiece. The measuring device 1 includes a positioning part 12 and two measuring parts, wherein, through the two measuring parts, the thickness dimension and one or more radial dimensions of the annular workpiece can be measured at one time when the positioning part 12 positions the center of the annular workpiece 100 at a predetermined point on a predetermined plane. Compared with the measurement scheme of measuring each dimension one by one for many times in the prior art, the measuring device 1 provided by the embodiment of the utility model simplifies the measurement operation process and reduces the time for repeated measurement and positioning, thereby significantly improving the measurement efficiency. In addition, the positioning part 12 can ensure that the center of the annular workpiece is aligned with the predetermined point on the bearing part, so that it can be ensured that the measuring point is located at the center point of the annular workpiece when measuring the radial dimension of the annular workpiece, so as to reduce the measurement deviation caused by improper human operation, thereby improving the measurement accuracy.

[0040] According to other embodiments of the present invention, see Figure 5 The bearing portion 11 may include a bearing plane 111 parallel to the predetermined plane P for bearing the annular workpiece 100, wherein the first measuring portion 13 includes a first length scale 131 formed on the bearing plane 111, and an extension line of the first length scale 131 in the first direction D1 passes through the predetermined point O.

[0041] like Figure 5 As shown, the bearing portion 11 has a flat upper surface, and the annular workpiece 100 is carried by the upper surface, so the upper surface can also be called a bearing plane 111. The bearing plane 111 is parallel to the predetermined plane P. In fact, in this embodiment, the bearing plane 111 can be identified as a predetermined plane. The bearing plane can be used to support the annular workpiece more stably, reducing the possibility of displacement of the annular workpiece during the measurement process.

[0042] although Figure 5 The carrying plane 111 of the carrying portion 11 in the embodiment is circular, but in other embodiments, it may also have other shapes, such as rectangular, triangular, etc., and the present invention is not limited to this.

[0043] The first length scale 131 is formed on the bearing plane 111, and the predetermined point O is located at one scale of the first length scale 131. For example, the predetermined point O may be located at the zero scale of the first length scale 131. In other embodiments of the present invention, the predetermined point O may be located at the middle scale of the entire range of the first length scale 131, or may be located at other scales, which are not limited here.

[0044] The bearing plane 111 is arranged so that when the annular workpiece 100 is positioned on the bearing portion 11 through the positioning portion 12, the annular workpiece 100 is located within the range of the bearing plane 111. The first length scale 131 is arranged so that its maximum range is greater than the maximum radial dimension of the annular workpiece 100. Thus, when the annular workpiece 100 is positioned on the bearing plane 111, a portion of the contour line of the annular workpiece 100 will be aligned with some scales on the first length scale 131. For example, the arc contour and the circular contour of the annular portion 103 of the annular workpiece 100 are respectively aligned with two scales on the first length scale 131, and these two scales can respectively indicate the first radius R1 and the second radius R2 of the annular workpiece 100.

[0045] Through the above arrangement, the operator only needs to use the positioning part to position the annular workpiece on the bearing plane, and can directly read the radial size of the annular workpiece using the scale line without complicated adjustment and positioning steps.

[0046] In some embodiments of the present invention, see Figure 4 and Figure 5 The second measuring part 14 includes a scale member 141 , wherein the scale member 141 extends along the second direction D2 and is provided with a second length scale 142 .

[0047] The scale member 141 may be provided independently of other components of the measuring device 1, or may be provided on the bearing portion, so that the measuring device 1 has a more compact structure and occupies less space. Figure 4 As shown, the scale member 141 can be arranged at the edge of the bearing portion. In some embodiments of the present invention, the scale member 141 can be arranged on the bearing plane 111 of the bearing portion 11, such as Figure 5 Arranging the scale member 141 at the edge of the bearing portion can provide a larger bearing space, thereby allowing the measuring device 1 to measure a larger size range.

[0048] The scale member 141 may be arranged along a second direction D2 perpendicular to the bearing plane 111. The annular workpiece 100 positioned on the bearing portion 11 protrudes from the bearing plane due to having a certain thickness. Figure 5 As shown, the lower surface of the annular workpiece 100 contacts the bearing plane 111, and the upper surface can be aligned with the scale in the second length scale 142 on the scale member 141, and the aligned scale can indicate the thickness H of the annular workpiece 100. Figure 5 It can be seen that the first length scale 131 and the second length scale 142 can be set independently of each other without interfering with each other, so the operator can directly read the first radius R1, the second radius R2 and the thickness H of the annular workpiece 100 without adjusting the annular workpiece and / or the measuring part.

[0049] In order to facilitate operators to accurately read the measurement results, in some embodiments of the present disclosure, see Figure 5 The scale member 141 may be configured to be movable along the first direction D1 to abut against the circumferential edge of the annular workpiece 100 .

[0050] Before starting the measurement operation, the scale member 141 may be first moved along the first direction D1 toward the edge of the bearing portion 11 to facilitate placing the annular workpiece 100 on the bearing portion. When the annular workpiece 100 is in place, the scale member 141 may be moved along the first direction D1 toward the annular workpiece 100 until the scale member 141 abuts against the circumferential edge of the annular workpiece 100. When the scale member 141 abuts against the circumferential edge of the annular workpiece 100, the scale value indicated on the second length scale is read, which can reduce the measurement error caused by the viewing angle deviation during reading, shorten the reading time, and improve the reading efficiency.

[0051] According to some embodiments of the present invention, see Figure 5 The bearing portion 11 may include a bearing plane 111 parallel to the predetermined plane for bearing the annular workpiece, wherein a slide groove 112 extending along the first direction D1 is formed on the bearing plane 111, and the scale member 141 is configured to be able to slide along the slide groove 112.

[0052] like Figure 5 As shown, the scale member 141 can form a slider-rail mechanism with the slide groove 112. It is understandable that this is only an exemplary implementation. The movement of the scale member 141 relative to the bearing portion 11 can also be achieved by other structures, and the utility model is not limited to this. The slide groove 112 can not only be used to guide the movement of the scale member 141 in a precise manner, but also can stably hold the scale member 141 to avoid measurement errors caused by the deflection of the scale member 141.

[0053] To further facilitate reading of measurement results, see Figure 5 The second measuring portion 14 may further include an indicator 143 connected to the scale member 141 , wherein the indicator 143 may be arranged to extend perpendicularly to the scale member 141 and be movable along the second direction D2 to abut against the annular workpiece 100 .

[0054] exist Figure 5In the embodiment shown in FIG. 1 , the indicator 143 can be formed to abut against the upper surface of the annular workpiece 100 through its lower surface, and can be aligned with each scale of the second length scale 142 of the scale member 141 by movement. Thus, the operator can directly read the scale value aligned with the lower surface of the indicator 143 as the measurement result when the indicator 143 abuts against the annular workpiece. By providing the indicator 143, even if the scale member 141 does not abut against the annular workpiece 100, the thickness of the annular workpiece 100 can be accurately indicated by means of the indicator 143.

[0055] The specific implementation form of the positioning part 12 is described below with reference to the accompanying drawings.

[0056] In some embodiments of the present invention, see Figures 3 to 5 The positioning portion 12 can be directly disposed at the predetermined point O so as to position the center of the annular workpiece at the predetermined point O by cooperating with the center hole of the annular workpiece.

[0057] exist Figures 3 to 5 In the embodiment, the positioning portion 12 may be formed as a columnar portion protruding from the bearing portion 11 along the second direction D2, and the size of the positioning portion 12 in the second direction D2 may be greater than the thickness of the annular workpiece. Figure 5 As shown by the dotted line in , the center of the positioning portion 12 on a plane parallel to the predetermined plane P or the bearing plane 111 can be aligned with the predetermined point O in the second direction D2, and the radial dimension of the positioning portion 12 can be set to be able to have a clearance fit or transition fit with the center hole of the annular workpiece, so that when the annular workpiece is placed, it is only necessary to make the positioning portion 12 pass through the center hole of the annular workpiece to align the center of the annular workpiece with the predetermined point O. Thus, accurate positioning of the annular workpiece can be achieved with a simple structure and operation.

[0058] In an alternative embodiment, see Figure 6 The measuring device 1 may include at least three positioning portions 12 arranged around the predetermined point, and each positioning portion 12 is arranged to be movable along the first direction D1 to abut against the annular workpiece.

[0059] like Figure 6 As shown, the three positioning parts 12 are arranged around the predetermined point O and can be moved in the first direction respectively. Before using the measuring device 1 for measurement, the three positioning parts 12 can be moved in a direction away from the predetermined point O to facilitate placing the annular workpiece on the measuring device 1. Then, the three positioning parts 12 can be moved toward the annular workpiece until the three positioning parts 12 are all against the circumferential edge of the annular workpiece and the distances between the three positioning parts 12 and the predetermined point are equal, and the center of the annular workpiece is aligned with the predetermined point O.

[0060] As an example, the measuring device may include three slide grooves 112 disposed on the bearing portion, wherein the first length scale may be formed at the bottom of one or more of the slide grooves. The three positioning portions 12 may slide in the three slide grooves respectively to form a slider-rail mechanism respectively. It is understood that the movement of the positioning portion 12 may also be achieved by other means, which is not limited by the present invention.

[0061] In other embodiments of the present invention, the three positioning parts 12 can be interconnected by a linkage device, so that by driving any one of the three positioning parts 12, the three positioning parts 12 can be moved synchronously, thereby further improving the positioning efficiency and accuracy.

[0062] In other embodiments of the present invention, more positioning portions 12 may be provided, for example, four, five or more positioning portions 12 may be provided, and the present invention is not limited thereto.

[0063] Since the second measuring part can move in the same manner as the positioning part, in some embodiments of the present invention, see Figure 6 The second measuring part 14 can be at least one of the at least three positioning parts 12. In other words, the second measuring part 14 can be used as one of the positioning parts. This makes the measuring device 1 have a simpler structure and is easy to operate.

[0064] According to the structural characteristics of the annular workpiece itself, when the annular workpiece is placed on the measuring device 1, the annular workpiece may block the first measuring portion 13, resulting in failure to read the radial dimension of the annular workpiece. To this end, the measuring device 1 may include a plurality of first measuring portions 13 spaced apart at a predetermined angle.

[0065] like Figure 5 As shown, the measuring device 1 may include two first measuring parts 13 spaced 90 degrees apart. Figure 5 In the case shown in FIG. 1 , the annular workpiece has blocked most of one of the first measuring portions 13, so that the size of the first radius R1 cannot be read from it. However, the other first measuring portion 13 is not affected. Therefore, the number and arrangement of the first measuring portions 13 can be determined according to the specific structure of the annular workpiece. For example, in Figure 5 In the illustrated embodiment, the two annular parts of the annular workpiece are connected by three connecting parts, wherein the angle between two adjacent connecting parts is 120 degrees. In this case, the two first measuring parts 13 with an angle of 90 degrees will not be blocked at the same time so that the first radius R1 and the second radius R2 cannot be read. Thus, the step of performing a secondary adjustment on the position of the annular workpiece on the bearing part can be omitted, which not only improves the measurement efficiency, but also avoids damage to the annular workpiece caused by improper adjustment operation.

[0066] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A measuring device for annular workpieces, characterized in that: The measuring device comprises: A bearing portion, used for bearing the annular workpiece on a predetermined plane; A positioning portion, the positioning portion is used to position the center of the annular workpiece at a predetermined point on the predetermined plane; a first measuring portion configured to indicate a dimension in a first direction passing through the predetermined point on the predetermined plane; and A second measuring portion configured to indicate a dimension in a second direction perpendicular to the predetermined plane.

2. The measuring device for annular workpieces according to claim 1, characterized in that: The bearing portion includes a bearing plane parallel to the predetermined plane and used to bear the annular workpiece, wherein the first measuring portion includes a first length scale formed on the bearing plane, and an extension line of the first length scale in the first direction passes through the predetermined point.

3. The measuring device for annular workpieces according to claim 1, characterized in that: The second measuring part includes a scale member, wherein the scale member extends along the second direction and is provided with a second length scale.

4. The measuring device for annular workpieces according to claim 3, characterized in that: The scale member is arranged to be movable in the first direction to abut against a circumferential edge of the annular workpiece.

5. The measuring device for annular workpieces according to claim 4, characterized in that: The bearing portion comprises a bearing plane parallel to the predetermined plane and used for bearing the annular workpiece, wherein a slide groove extending along the first direction is formed on the bearing plane, and the scale member is configured to be able to slide along the slide groove.

6. The measuring device for annular workpieces according to any one of claims 3 to 5, characterized in that: The second measuring portion further includes an indicator connected to the scale member, wherein the indicator is arranged to extend perpendicularly to the scale member and is movable in the second direction to abut against the annular workpiece.

7. The measuring device for annular workpieces according to any one of claims 1 to 5, characterized in that: The positioning portion is disposed at the predetermined point to position the center of the annular workpiece at the predetermined point by cooperating with the center hole of the annular workpiece.

8. The measuring device for annular workpieces according to any one of claims 1 to 5, characterized in that: The measuring device includes at least three positioning portions arranged around the predetermined point, each positioning portion being arranged to be movable along the first direction to abut against the annular workpiece.

9. The measuring device for annular workpieces according to claim 8, characterized in that: The second measuring portion is at least one positioning portion among the at least three positioning portions.

10. The measuring device for an annular workpiece according to any one of claims 1 to 5, characterized in that: The measuring device includes a plurality of first measuring portions spaced apart at predetermined angles.

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