Microscope objective table for solar cell

Abstract

The utility model discloses a microscope objective table for a solar cell, which comprises an objective table, the top of the objective table is provided with a concave placing area, two sides of the top of the objective table are provided with plane placing areas, the concave placing area is arranged between the two plane placing areas, and the plane placing areas are arranged between the concave placing area and the plane placing areas. A plurality of first air holes are formed in the side wall of the concave placing area, and a plurality of second air holes are formed in the plane placing area; the objective table is composed of the concave placing area and the plane placing area, the first air holes are formed in the side wall of the concave placing area, the side wall of a silicon wafer sample is subjected to vacuum adsorption through the first air holes to fix the sample, and the cut silicon wafer sample is placed in the concave placing area, so that the size of a tower footing on the side face of the silicon wafer is conveniently tested; second air holes formed in the surface of the plane placement area are used for adsorbing the silicon wafer sample, the silicon wafer sample is adsorbed and fixed to the top of the objective table, and the situation that the position of the sample changes along with movement of the objective table is prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of microscopes, in particular to a microscope loading platform for solar cells. Background Art

[0002] With the development of global science and technology, the enhancement of human environmental awareness and the promotion of new energy industries, solar energy, as a relatively mature emerging energy, plays an increasingly important role in energy allocation. At present, the development of solar cells is mainly based on silicon-based TOPCON cells. There are many processes in the production process of cells that require detection and monitoring of process control points. Among them, the texturing, alkaline polishing and de-winding plating processes of TOPCON cells all require the use of 3D microscopes to conduct microscopic monitoring and testing of the silicon wafer surface. In particular, the de-winding plating process requires monitoring the size of the tower base of the side section of the silicon wafer to confirm the qualified status of the silicon wafer production process.

[0003] The microscope stage for solar cells is one of the key equipment in the solar industry, used for high-precision measurement and analysis of solar cells. With the continuous development of solar technology, the quality and performance requirements of solar cells are getting higher and higher, so the technical requirements for the microscope stage are also increasing.

[0004] The existing microscope loading platform for solar cells is only suitable for placing solar cells flat, and the tower base size on the four sides of the silicon wafer needs to be tested after winding and plating. Because the 3D microscope has no loading platform that can effectively fix the sides of the silicon wafer, it seriously affects the monitoring of the process, making it impossible to smoothly carry out product production, which has an adverse impact on production capacity and product quality. Utility Model Content

[0005] The object of the present invention is to provide a microscope loading platform for solar cells to solve the above-mentioned deficiencies in the prior art.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a microscope loading platform for solar cells, including a loading platform, a recessed placement area is opened on the top of the loading platform, and planar placement areas are arranged on both sides of the top of the loading platform, and the recessed placement area is arranged between the two planar placement areas, and a plurality of first air holes are opened on the side wall of the recessed placement area, and a plurality of second air holes are arranged on the planar placement area.

[0007] As a further description of the above technical solution: the recessed placement area is designed to be linear and has sufficient length.

[0008] As a further description of the above technical solution: vacuum adsorption grooves are opened on both sides of the top of the loading platform, and the vacuum adsorption grooves are arranged inside the plane placement area.

[0009] As a further description of the above technical solution: a vacuum tube is fixedly installed inside the worktable, and a first suction pipe is fixedly installed on both sides of the vacuum tube, one end of a plurality of the first suction pipes is respectively connected to a plurality of first air holes, a plurality of second suction pipes are fixedly installed at the bottom of the vacuum tube, one end of a plurality of the second suction pipes is respectively connected to a plurality of the second air holes, and an air nozzle is fixedly connected to one end of the vacuum tube.

[0010] As a further description of the above technical solution: a sealing sleeve is rotatably arranged inside the vacuum tube, and the sealing sleeve is provided with a first connecting hole and a second connecting hole, the first connecting hole is connected to the first air intake pipe, and the second connecting hole is connected to the second air intake pipe, a motor is fixedly installed at one end of the vacuum tube, and an output end of the motor passes through the vacuum tube and is fixedly connected to one end of the sealing sleeve.

[0011] As a further description of the above technical solution: a clamping block is fixedly installed at one end of the sealing sleeve, a clamping groove is opened at one end of the vacuum tube, and the clamping block is slidably arranged inside the clamping groove.

[0012] The utility model provides a microscope loading platform for solar cells. It has the following beneficial effects: the loading platform in the utility model is composed of a concave placement area and a flat placement area, wherein the first air hole is arranged on the side wall of the concave placement area, and the side wall of the silicon wafer sample is vacuum adsorbed through the first air hole to fix the sample, and the cut silicon wafer sample is placed inside the concave placement area, which is convenient for testing the size of the tower base on the side of the silicon wafer, and the second air hole arranged on the surface of the flat placement area is used to adsorb the silicon wafer sample, and the silicon wafer sample is adsorbed and fixed on the top of the loading platform to prevent the sample from changing position with the movement of the loading platform.

[0013] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.

[0014] This application document provides an overview of various implementations or examples of the technology described in the present disclosure, and is not a comprehensive disclosure of the entire scope or all features of the disclosed technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the overall structure of a microscope loading platform for solar cells proposed by the utility model;

[0016] Figure 2 It is a schematic diagram of the top view structure of the utility model;

[0017] Figure 3 It is a side view structural schematic diagram of the utility model;

[0018] Figure 4 It is a three-dimensional structural schematic diagram of the vacuum tube, the first air suction tube and the second air suction tube of the utility model;

[0019] Figure 5 It is a schematic diagram of the three-dimensional explosion structure of the vacuum tube, the first air intake tube and the second air intake tube of the utility model;

[0020] Figure 6 It is a three-dimensional cross-sectional structural schematic diagram of a part of the structure of the vacuum tube of the utility model.

[0021] Legend:

[0022] 1. Loading table; 101. Concave placement area; 102. Flat placement area; 2. Vacuum adsorption groove; 3. First air hole; 4. Second air hole; 5. Vacuum tube; 6. First suction pipe; 7. Second suction pipe; 8. Air nozzle; 9. Motor; 10. Sealing sleeve; 11. First connecting hole; 12. Second connecting hole; 13. Block; 14. Slot. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0024] Reference Figure 1-6 , a microscope stage for solar cells, comprising a stage 1, a recessed placement area 101 is provided on the top of the stage 1, and plane placement areas 102 are provided on both sides of the top of the stage 1, the recessed placement area 101 is arranged between the two plane placement areas 102, a plurality of first air holes 3 are provided on the side wall of the recessed placement area 101, and a plurality of second air holes 4 are provided on the plane placement area 102; in the utility model, the stage 1 consists of a recessed placement area 101 and a plane placement area 102, wherein the recessed placement area 101, the first air holes 3 are provided on the side wall of the recessed placement area 101, the side wall of the silicon wafer sample is vacuum adsorbed by the first air holes 3 to fix the sample, the cut silicon wafer sample is placed inside the recessed placement area 101, which is convenient for testing the side tower base size of the silicon wafer, and the second air holes 4 provided on the surface of the plane placement area 102 are used to adsorb the silicon wafer sample, and the silicon wafer sample is adsorbed and fixed on the top of the stage 1 to prevent the sample from changing position as the stage 1 moves.

[0025] As a preferred technical solution of this embodiment, the recessed placement area 101 is designed to be linear and of sufficient length; the linear recessed placement area 101 of sufficient length is used to fix the samples to be observed on the sides of four silicon wafers placed at the same time.

[0026] As a preferred technical solution of this embodiment, vacuum adsorption grooves 2 are opened on both sides of the top of the stage 1, and the vacuum adsorption grooves 2 are arranged inside the plane placement area 102; when the silicon wafer sample is flatly adsorbed, the adsorption area for the bottom of the silicon wafer sample is increased by opening the vacuum adsorption grooves 2, thereby improving the fixing effect of the silicon wafer sample on the top of the stage 1.

[0027] As a preferred technical solution of this embodiment, a vacuum tube 5 is fixedly installed inside the stage 1, and first suction pipes 6 are fixedly installed on both sides of the vacuum tube 5, one ends of the plurality of first suction pipes 6 are respectively connected to the plurality of first air holes 3, and a plurality of second suction pipes 7 are fixedly installed on the bottom of the vacuum tube 5, one ends of the plurality of second suction pipes 7 are respectively connected to the plurality of second air holes 4, and an air nozzle 8 is fixedly connected to one end of the vacuum tube 5; air is exhausted through the air nozzle 8 to generate negative pressure inside the vacuum tube 5, and air is sucked through the first suction pipe 6 and the second suction pipe 7 to fix the silicon wafer sample by vacuum adsorption.

[0028] As a preferred technical solution of this embodiment, a sealing sleeve 10 is provided for rotation inside the vacuum tube 5. The sealing sleeve 10 is provided with a first connecting hole 11 and a second connecting hole 12. The first connecting hole 11 is connected to the first suction pipe 6, and the second connecting hole 12 is connected to the second suction pipe 7. A motor 9 is fixedly installed at one end of the vacuum tube 5, and the output end of the motor 9 passes through the vacuum tube 5 and is fixedly connected to one end of the sealing sleeve 10. When the silicon wafer sample is vacuum adsorbed, due to the different placement methods of the silicon wafer sample on the stage 1, the first air hole 3 and the second air hole 4 cannot be blocked at the same time. In order to ensure that the silicon wafer sample has a good adsorption effect under different placement methods, the first suction pipe 6 and the second suction pipe 7 are controlled by the sealing sleeve 10. When the first suction pipe 6 is connected to the first connecting hole 11, the second suction pipe 7 cannot be connected to the second connecting hole 12, and vice versa. The rotation of the sealing sleeve 10 is controlled by the motor 9.

[0029] As a preferred technical solution of this embodiment, a clamping block 13 is fixedly installed at one end of the sealing sleeve 10, and a clamping groove 14 is opened at one end of the vacuum tube 5, and the clamping block 13 is slidably arranged inside the clamping groove 14; the rotation of the sealing sleeve 10 inside the vacuum tube 5 is limited by the mutual cooperation of the clamping block 13 and the clamping groove 14, so that the first suction pipe 6 and the second suction pipe 7 can be connected to the first connecting hole 11 and the second connecting hole 12 respectively without deviation, and the vacuum adsorption effect of the device is achieved.

[0030] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0031] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A microscope loading platform for solar cells, comprising a loading platform (1), characterized in that: The top of the loading platform (1) is provided with a recessed placement area (101), and two sides of the top of the loading platform (1) are provided with planar placement areas (102), the recessed placement area (101) is arranged between the two planar placement areas (102), a plurality of first air holes (3) are provided on the side wall of the recessed placement area (101), and a plurality of second air holes (4) are provided on the planar placement area (102).

2. The microscope stage for solar cells according to claim 1, characterized in that: The recessed placement area (101) is designed to be linear and has a sufficient length.

3. The microscope stage for solar cells according to claim 2, characterized in that: Vacuum adsorption grooves (2) are provided on both sides of the top of the object carrier (1), and the vacuum adsorption grooves (2) are arranged inside the plane placement area (102).

4. The microscope stage for solar cells according to claim 2, characterized in that: A vacuum tube (5) is fixedly installed inside the loading platform (1), and first suction tubes (6) are fixedly installed on both sides of the vacuum tube (5), and one end of each of the first suction tubes (6) is respectively connected to the first air holes (3). A plurality of second suction tubes (7) are fixedly installed at the bottom of the vacuum tube (5), and one end of each of the second suction tubes (7) is respectively connected to the second air holes (4). One end of the vacuum tube (5) is fixedly connected to an air nozzle (8).

5. The microscope stage for solar cells according to claim 4, characterized in that: A sealing sleeve (10) is rotatably arranged inside the vacuum tube (5), and the sealing sleeve (10) is provided with a first connecting hole (11) and a second connecting hole (12), the first connecting hole (11) is connected to the first suction pipe (6), and the second connecting hole (12) is connected to the second suction pipe (7), and a motor (9) is fixedly installed at one end of the vacuum tube (5), and the output end of the motor (9) passes through the vacuum tube (5) and is fixedly connected to one end of the sealing sleeve (10).

6. The microscope stage for solar cells according to claim 5, characterized in that: A clamping block (13) is fixedly mounted on one end of the sealing sleeve (10), a clamping groove (14) is provided on one end of the vacuum tube (5), and the clamping block (13) is slidably arranged inside the clamping groove (14).

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