Alarm and prevention device for rollover of quartz boat
By designing a rollover alarm and prevention device on the quartz boat, the gear meshing and spring mechanism automatically calibrate the position, the problem of rollover of the quartz boat is solved, and the stability of the equipment and silicon wafer production efficiency are improved.
Patent Information
- Application Number
- CN202420737935.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-11
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2034-04-11
AI Technical Summary
Quartz boats are prone to slight deformation and positional deviation in high temperature states, resulting in failure of the automation mechanism, causing the quartz boat to overturn, damage the equipment and reduce the silicon wafer output efficiency.
A warning and prevention device for rolling over the quartz boat is designed, including a quartz boat carrier plate, a baffle plate and transmission assembly that are slidingly connected on both sides. Through gear meshing and spring mechanism, if the quartz boat position is offset, the sound and light alarm is triggered and passed Spring calibrated baffle to prevent rollover.
It effectively reminds staff to shift the position of the quartz boat to avoid overturning damage, and automatically calibrate the position through the spring mechanism, improving the stability of the quartz boat and silicon wafer production efficiency.
Smart Images
Figure CN222213476U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of quartz boats, in particular to an alarm and prevention device for the rollover of a quartz boat. Background Art
[0002] The quartz boat is a device for carrying silicon wafers. In the silicon wafer diffusion process, the silicon wafers are placed in the quartz boat for high-temperature treatment. In the diffusion process, the high-purity quartz boat is used as a carrier. After being used for a period of time under high temperature, the quartz boat will be slightly deformed. The automatic mechanism is prone to position deviation during the process of taking and placing the quartz boat. The quartz boat is prone to rollover. If the personnel fail to find it in time, the quartz boat will be damaged, and the equipment will fail, which will lead to silicon wafer breakage, reduce product output, and low production efficiency. Utility Model Content
[0003] The utility model aims to provide an alarm and prevention device for the rollover of a quartz boat, so as to solve the deficiencies in the above-mentioned prior art.
[0004] In order to achieve the above-mentioned purpose, the utility model provides the following technical scheme: the alarm prevention device for the quartz boat rollover comprises a quartz boat carrier, two baffles are slidably connected on both sides of the quartz boat carrier, a transmission assembly is arranged between the two baffles and the quartz boat carrier, the two transmission assemblies comprise a first slide groove, a third slide groove, a gear, a first rack meshed with the gear, a first telescopic column and a second rack meshed with the gear, the first slide groove and the third slide groove are horizontally opened in the quartz boat carrier, the first rack is slidably connected in the first slide groove, the first telescopic column is arranged between the first rack and the bottom wall of the first slide groove, the gear is rotatably connected in the quartz boat carrier, the second rack is slidably connected in the third slide groove, a button is arranged in the two third slide grooves, the two second racks are abutted and matched with the two buttons in a one-to-one correspondence, an audio-visual alarm light is arranged on both sides of the quartz boat carrier, and the two buttons are electrically connected with the two audio-visual alarm lights in a one-to-one correspondence.
[0005] Furthermore, a first spring is sleeved on each of the two first telescopic columns, one end of the two first springs is fixedly connected to the corresponding bottom wall of the first slide groove, and the other end of the two first springs is fixedly connected to the corresponding first rack.
[0006] Furthermore, the top ends of the two baffles are both inclined.
[0007] Furthermore, a second slide groove is vertically opened on the quartz boat carrier, a second telescopic column is fixedly connected in the second slide groove, a clamping block is provided at the telescopic end of the second telescopic column, a second spring is sleeved on the second telescopic column, and both ends of the second spring are respectively fixedly connected to the bottom wall of the second slide groove and the clamping block.
[0008] Furthermore, the top of the block is arc-shaped.
[0009] Compared with the prior art, the utility model provides the following beneficial effects: when the quartz boat is placed vertically on the quartz boat carrier, if the position is offset, the quartz boat squeezes and pushes one of the two baffles, and the baffle drives the first rack to move. Through the gear meshing transmission, the second rack moves and presses the button, triggering the sound and light alarm light, which can remind the staff which side the quartz boat is offset to, thereby avoiding the quartz boat from tipping over and being damaged. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.
[0011] Figure 1 The overall structural diagram provided for the embodiment of the utility model;
[0012] Figure 2 A top view of the overall structure provided for an embodiment of the utility model;
[0013] Figure 3 for Figure 2 Cross-sectional view at AA in the middle.
[0014] Explanation of the reference numerals in the accompanying drawings: 1. quartz boat carrier; 2. sound and light alarm lamp; 3. baffle; 4. block; 5. first rack; 6. first telescopic column; 7. first spring; 8. first slide groove; 9. second slide groove; 10. second spring; 11. second telescopic column; 12. gear; 13. second rack; 14. third slide groove; 15. button. DETAILED DESCRIPTION
[0015] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0016] See also Figure 1-3The utility model provides a technical solution: the quartz boat rollover prevention device comprises a quartz boat carrier 1, two baffles 3 are slidably connected on both sides of the quartz boat carrier 1, and a transmission assembly is arranged between the two baffles 3 and the quartz boat carrier 1, and the two transmission assemblies include a first slide groove 8, a third slide groove 14, a gear 12, a first rack 5 meshing with the gear 12, a first telescopic column 6 and a second rack 13 meshing with the gear 12, the first slide groove 8 and the third slide groove 14 are horizontally opened in the quartz boat carrier 1, the first rack 5 is slidably connected in the first slide groove 8, and the first telescopic column 6 is arranged It is arranged between the first rack 5 and the bottom wall of the first slide groove 8, the gear 12 is rotatably connected in the quartz boat carrier 1, the second rack 13 is slidably connected in the third slide groove 14, and a button 15 is provided in each of the two third slide grooves 14. The two second racks 13 are abutted and matched with the two buttons 15 in a one-to-one correspondence. Both sides of the quartz boat carrier 1 are provided with an audio-visual alarm light 2, and the two buttons 15 are electrically connected with the two audio-visual alarm lights 2 in a one-to-one correspondence. Specifically, the first slide groove 8 is located above the third slide groove 14, the model of the audio-visual alarm light 2 is GBS-24V, and the power supply and principle of the audio-visual alarm light 2 are not described in detail here.
[0017] As a preferred technical solution, the two first telescopic columns 6 are both sleeved with a first spring 7, one end of the two first springs 7 is fixedly connected to the bottom wall of the corresponding first slide groove 8, and the other end of the two first springs 7 is fixedly connected to the corresponding first rack 5. Specifically, when the position of the quartz boat is shifted, the elastic potential energy of the first spring 7 can be used to pull the squeezed baffle 3 to reset, and the position of the quartz boat can be calibrated. The baffle 3 pushes the quartz boat toward the center of the quartz boat carrier 1 to prevent the quartz boat from tipping over.
[0018] As a preferred technical solution, the top ends of the two baffles 3 are inclined. Specifically, the top ends of the two baffles 3 are inclined toward the center of the quartz boat carrier 1, so as to facilitate the rapid squeezing of one of the two baffles 3 when the quartz boat is placed vertically on the quartz boat carrier 1.
[0019] As a preferred technical solution, a second slide groove 9 is vertically opened on the quartz boat carrier 1, a second telescopic column 11 is fixedly connected in the second slide groove 9, a clamping block 4 is provided at the telescopic end of the second telescopic column 11, a second spring 10 is sleeved on the second telescopic column 11, and the two ends of the second spring 10 are respectively fixedly connected to the bottom wall of the second slide groove 9 and the clamping block 4. Specifically, the clamping block 4 can enable the quartz boat carrier 1 to symmetrically carry two smaller quartz boats. If the carried quartz boat is larger in volume, the bottom of the quartz boat can squeeze the clamping block 4 into the second slide groove 9. Preferably, a clamping groove can be opened at the bottom of the quartz boat, and the clamping block 4 is clamped in cooperation with the clamping groove to position the quartz boat at the center of the quartz boat carrier 1 to avoid position displacement of the quartz boat.
[0020] As a preferred technical solution, the top of the block 4 is arc-shaped. Specifically, the quartz boat carried by it is relatively large in size and is pushed by the block to move toward the center of the quartz boat carrier 1. The arc-shaped setting facilitates the quartz boat squeezing button 15 to enter the second slide groove 9 to prevent the moving stroke from being blocked by the block 4.
[0021] Working principle: When the quartz boat is placed vertically on the quartz boat carrier 1, if the position is offset, the quartz boat squeezes and pushes one of the two baffles 3, and the baffle 3 drives the first rack 5 to move. Through the meshing transmission of the gear 12, the second rack 13 moves and presses the button 15, triggering the sound and light alarm light 2, which can remind the staff to which side the quartz boat is offset, thereby avoiding the quartz boat from tipping over and being damaged. At the same time, the elastic potential energy of the first spring 7 can pull the squeezed baffle 3 to reset, and the position of the quartz boat can be calibrated. The baffle 3 pushes the quartz boat toward the center of the quartz boat carrier 1 to prevent the quartz boat from tipping over.
[0022] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.
Claims
1. An alarm and prevention device for a quartz boat capsizing. It is characterized in that The invention comprises a quartz boat carrier (1), two baffles (3) are slidably connected on both sides of the quartz boat carrier (1), a transmission assembly is arranged between the two baffles (3) and the quartz boat carrier (1), the two transmission assemblies each comprise a first slide groove (8), a third slide groove (14), a gear (12), a first rack (5) meshed with the gear (12), a first telescopic column (6) and a second rack (13) meshed with the gear (12), the first slide groove (8) and the third slide groove (14) are horizontally arranged in the quartz boat carrier (1), the first rack (5) is slidably connected to the first slide groove (8), and the third slide groove (14) is horizontally arranged in the quartz boat carrier (1), the first rack (5) is slidably connected to the first In the slide groove (8), the first telescopic column (6) is arranged between the first rack (5) and the bottom wall of the first slide groove (8), the gear (12) is rotatably connected in the quartz boat carrier (1), the second rack (13) is slidably connected in the third slide groove (14), a button (15) is provided in each of the two third slide grooves (14), the two second racks (13) and the two buttons (15) are abutted and matched one by one, and both sides of the quartz boat carrier (1) are provided with an audible and visual alarm lamp (2), and the two buttons (15) are electrically connected one by one with the two audible and visual alarm lamps (2).
2. The quartz boat rollover prevention device according to claim 1, It is characterized in that A first spring (7) is sleeved on each of the two first telescopic columns (6), one end of the two first springs (7) is fixedly connected to the bottom wall of the corresponding first slide groove (8), and the other end of the two first springs (7) is fixedly connected to the corresponding first rack (5).
3. The quartz boat rollover prevention device according to claim 1, It is characterized in that The top ends of the two baffles (3) are both arranged in an inclined manner.
4. The quartz boat rollover prevention device according to claim 1, It is characterized in that A second slide groove (9) is vertically provided on the quartz boat carrier (1), a second telescopic column (11) is fixedly connected inside the second slide groove (9), a clamping block (4) is provided at the telescopic end of the second telescopic column (11), a second spring (10) is sleeved on the second telescopic column (11), and two ends of the second spring (10) are respectively fixedly connected to the bottom wall of the second slide groove (9) and the clamping block (4).
5. The quartz boat rollover prevention device according to claim 4, It is characterized in that The top of the block (4) is arc-shaped.