Cleaning basket capable of adapting to silicon wafers in different shapes
By designing an adjustable rotating rod system and comb-shaped compression device, the problem that the existing silicon wafer cleaning basket cannot adapt to different sizes and shapes is solved, and the stable fixation and protection of different silicon wafers is achieved, which improves the convenience of cleaning baskets is improved. Sex and efficiency.
Patent Information
- Application Number
- CN202323290278.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-04
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2033-12-04
AI Technical Summary
The existing silicon wafer cleaning basket cannot adapt to silicon wafers of different sizes and shapes, which is inconvenient to use and increases production costs.
A rotary rod system including a front panel, a rear panel and an adjustable rotary rod system is designed, equipped with first and second comb-shaped compression devices, and the silicon wafer is fixed through long through holes and slide grooves to adapt to different sizes and shapes. Silicon wafer.
It realizes stable fixation of silicon wafers of different sizes and shapes, protects the silicon wafer from damage, and improves the convenience of use and production efficiency of the cleaning basket.
Smart Images
Figure CN222214136U_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of silicon wafer processing, in particular to a cleaning basket for silicon wafers. Background Art
[0002] Silicon wafers are widely used in the electronics industry and are often used as raw materials for precision components. Silicon wafers used as raw materials require very high cleanliness and no impurities can exist on the surface of the silicon wafers. Therefore, cleaning of silicon wafers is an important step in the production of electronic components. The common method for cleaning silicon wafers is wet chemical cleaning, which is to place the silicon wafers in a silicon wafer basket and then rinse them in a cleaning agent.
[0003] The silicon wafer cleaning basket currently used adopts an integrated structure with fixed length and width, and can only hold silicon wafers of one size. Different baskets are needed to hold silicon wafers of different sizes, which is inconvenient to use and increases production costs. Summary of the invention
[0004] In view of the deficiencies in the prior art, the present invention provides a cleaning basket for silicon wafers, which can be adjusted to accommodate silicon wafers of different sizes, protect the silicon wafers from damage during cleaning in the cleaning basket, increase the stability of the silicon wafers in the cleaning basket, and solve the problems in the above-mentioned background technology.
[0005] The technical solution adopted by the utility model is as follows.
[0006] A cleaning basket adaptable to silicon wafers of different shapes comprises a front panel and a rear panel, wherein the front panel and the rear panel are connected via a plurality of first rotating rods, wherein the central axis of the first rotating rods is perpendicular to the front panel and the rear panel; and each first rotating rod is provided with a first comb-shaped pressing device.
[0007] The front panel and the rear panel are each provided with a long through hole, and the two long through holes are parallel to each other; the side wall of each long through hole is provided with a long slide groove parallel to the long through hole, and each long through hole is provided with a slider, and a part of the slider is located in the long slide groove; the two sliders are connected by a second rotating rod; the second rotating rod is equipped with a second comb-shaped clamping device.
[0008] The front end of the second rotating rod is located in front of the front side of the front panel, the front end of the second rotating rod is threadedly connected with a clamping ring wheel, and a clamping pad ring is provided between the front panel and the clamping ring wheel on the second rotating rod, or,
[0009] The rear end of the second rotating rod is located behind the rear side of the rear panel, the rear end of the second rotating rod is threadedly connected with a clamping ring wheel, and a clamping pad ring is arranged between the rear panel and the clamping ring wheel on the second rotating rod.
[0010] The utility model has the beneficial effect that when a round silicon wafer is placed in the cleaning basket, the second comb-shaped pressing device moves along the two long through holes, and the second comb-shaped pressing device can be used to press the silicon wafer, and the pressing ring wheel rotates to squeeze the gasket ring to fix the silicon wafer. The second comb-shaped pressing device and the first comb-shaped pressing device are small in size, have a good effect of fixing the silicon wafer, and the entire device is relatively light and can adapt to silicon wafers of different sizes.
[0011] As a preferred technical solution, the compression washer is made of rubber, which is relatively soft.
[0012] As a preferred technical solution, a plurality of first rotating rod installation through holes are provided on the front panel and the rear panel, and the two ends of the first rotating rod are respectively inserted into the first rotating rod through holes closest thereto and are interference fit with the first rotating rod through holes;
[0013] The front end of the first rotating rod is located in front of the front panel, and the front end of the second rotating rod is provided with a rotating block.
[0014] or,
[0015] The rear end of the first rotating rod is located in front of the rear panel, and the rear end of the second rotating rod is provided with a rotating block. The rotating block is provided to rotate the second rotating rod and the first rotating rod.
[0016] As a preferred technical solution, the first comb-shaped pressing device includes a first longitudinal bar, on which a plurality of first teeth perpendicular to the central axis of each first rotating rod are arranged longitudinally near the centroid of the cleaning basket. During cleaning, the edge of the silicon wafer is limited by the first teeth and the first longitudinal bar.
[0017] As a preferred technical solution, the first rotating rod is connected to the center of each tooth of the first comb-shaped pressing device closest to it.
[0018] As a preferred technical solution, the second comb-shaped pressing device includes a second longitudinal bar, on which a plurality of second teeth perpendicular to the central axis of each second rotating rod are arranged longitudinally near the centroid of the cleaning basket. During cleaning, the edge of the silicon wafer is limited by the second teeth and the second longitudinal bar.
[0019] As a preferred technical solution, the second rotating rod is connected to the center of each tooth of the second comb-shaped pressing device closest to it.
[0020] As a preferred technical solution, the front panel and the rear panel have the same structure, both including a bottom plate, a top plate, and a middle plate arranged between the bottom plate and the top plate. The left and right ends of the bottom plate are connected with inclined plates of equal length, and the distance between the top ends of the two inclined plates is greater than the distance between the bottom ends of the two inclined plates; the top end of the inclined plate at the left end of the bottom plate is connected with a short vertical plate, and the top end of the inclined plate at the right end of the bottom plate is connected with a long vertical plate, and the top end of the long vertical plate is connected to the right end of the top plate; the top end of the short vertical plate is connected to the left end of the top plate through a "V"-shaped plate, and the opening of the "V"-shaped plate is arranged on the side away from the centroid of the washing basket; the middle plate is respectively connected to the top ends of the two inclined plates, the top end of the long vertical plate, and the top end of the short vertical plate through a connecting strip plate; the long through hole is arranged on the connecting strip plate between the middle plate and the top end of the long vertical plate; the left end of the bottom plate is located directly below the left end of the top plate. As a preferred technical solution, a plurality of fixing grooves are arranged on the top plate.
[0021] As a preferred technical solution, a third comb-shaped clamping device installation buckle is provided at the same height of the side of each long vertical board close to the short vertical board and the surface of each short vertical board close to the long vertical board, and a third comb-shaped clamping device is provided between the third comb-shaped clamping device installation buckles of the two long vertical boards and between the third comb-shaped clamping device installation buckles of the two short vertical boards. The third comb-shaped clamping device includes a third longitudinal bar, and a plurality of third teeth perpendicular to the central axis of the third longitudinal bar are arranged vertically on the bottom surface of each third longitudinal bar. With this technical solution, special-shaped silicon wafers, such as semicircular silicon wafers, can be fixed. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 The utility model is a three-dimensional structural schematic diagram of a cleaning basket which can adapt to silicon wafers of different shapes.
[0023] Figure 2 yes Figure 1 A partial enlarged view of part A.
[0024] Figure 3 yes Figure 1 A partial enlarged view of part B.
[0025] Figure 4 yes Figure 1 A top view of a cleaning basket that can accommodate silicon wafers of different shapes is shown.
[0026] Figure 5 yes Figure 4 A partial enlarged view of part C.
[0027] Figure 6 yes Figure 1 Left view of a cleaning basket that can accommodate silicon wafers of different shapes.
[0028] Figure 7 yes Figure 6 A partial enlarged view of part D.
[0029] Figure 8 yes Figure 1 A front view of a cleaning basket that can accommodate silicon wafers of different shapes is shown.
[0030] Fig. 9 yes Figure 1 A rear view of a cleaning basket that can accommodate silicon wafers of different shapes is shown.
[0031] Fig.10 yes Figure 1 A state diagram of a cleaning basket that can adapt to silicon wafers of different shapes is shown.
[0032] Fig.11 yes Figure 1 A state diagram of a cleaning basket that can adapt to silicon wafers of different shapes is shown.
[0033] Fig.12 The utility model is a three-dimensional structural schematic diagram of a cleaning basket which can adapt to silicon wafers of different shapes.
[0034] Fig.13 yes Fig.12 A partial enlarged view of part E.
[0035] Fig.14 The utility model is a three-dimensional structural schematic diagram of a cleaning basket which can adapt to silicon wafers of different shapes.
[0036] Fig.15 yes Fig.14 A partial enlarged view of part F.
[0037] Fig.16 yes Fig.14 A partial enlarged view of part G.
[0038] Fig.17 yes Fig.14 A state diagram of a cleaning basket that can adapt to silicon wafers of different shapes is shown.
[0039] Among them: front panel-1; rear panel-11; bottom panel-12; top panel-13; middle panel-14; inclined panel-15; short vertical panel-16; "V"-shaped panel-17; connecting strip panel-18; long vertical panel-19; third comb-shaped clamping device mounting buckle-110; third comb-shaped clamping device-111; third vertical strip-112; third tooth-113;
[0040] Slider - 2;
[0041] First rotating rod-3; second rotating rod-31; clamping ring wheel-32; clamping pad ring-33; rotating block-34;
[0042] First comb-shaped pressing device-4; second comb-shaped pressing device-41; first longitudinal bar-42; first tooth-43; second longitudinal bar-44; second tooth-45;
[0043] Long through hole-5; long slide groove-51;
[0044] Fixed groove-6; Silicon wafer-7. DETAILED DESCRIPTION
[0045] Below, the utility model is further described in conjunction with the drawings and embodiments.
[0046] Example 1. Figure 1-11 As shown, a cleaning basket that can adapt to silicon wafers of different shapes includes a front panel 1 and a rear panel 11. The front panel 1 and the rear panel 11 are connected by five first rotating rods 3, and the central axis of the first rotating rods 3 is perpendicular to the front panel 1 and the rear panel 11; each first rotating rod 3 is installed with a first comb-shaped clamping device 4.
[0047] A long through hole 5 is provided on each of the front panel 1 and the rear panel 11, and the two long through holes 5 are parallel to each other; a side wall of each long through hole 5 is provided with a long slide groove 51 parallel to the long through hole 5, and each long through hole 5 is provided with a slider 2, and a part of the slider 2 is located in the long slide groove 51; the two sliders 2 are connected by a second rotating rod 31; the second rotating rod 31 is installed with a second comb-shaped clamping device 41.
[0048] The rear end of the second rotating rod 31 is located behind the rear side of the rear panel 11 . The rear end of the second rotating rod 31 is threadedly connected with a clamping ring wheel 32 . A clamping pad ring 33 is provided between the rear panel 11 and the clamping ring wheel 32 on the second rotating rod 31 .
[0049] The compression washer 33 is a compression washer 33 made of rubber.
[0050] A plurality of first rotating rod installation through holes are provided on the front panel 1 and the rear panel 11 , and the two ends of the first rotating rod 3 are respectively inserted into the through holes of the first rotating rod 3 closest thereto and are interference fit with the through holes of the first rotating rod 3 .
[0051] The rear end of the first rotating rod 3 is located in front of the rear panel 11 , and the rear end of the second rotating rod 31 is provided with a rotating block 34 .
[0052] The first comb-shaped pressing device 4 comprises a first longitudinal bar 42 , on which a plurality of first teeth 43 perpendicular to the central axis of each first rotating rod 3 are arranged longitudinally near the centroid of the cleaning basket.
[0053] The first rotating rod 3 is connected to the center of each tooth of the first comb-shaped pressing device 4 closest thereto.
[0054] The second comb-shaped pressing device 41 includes a second longitudinal bar 44 , on which a plurality of second teeth 45 perpendicular to the central axis of each second rotating rod 31 are arranged longitudinally near the centroid of the cleaning basket.
[0055] The second rotating rod 31 is connected to the center of each tooth of the second comb-shaped pressing device 41 closest thereto.
[0056] The front panel 1 and the rear panel 11 have the same structure, and both include a bottom plate 12, a top plate 13, and a middle plate 14 disposed between the bottom plate 12 and the top plate 13. The left and right ends of the bottom plate 12 are respectively connected with an inclined plate 15 of equal length, and the distance between the top ends of the two inclined plates 15 is greater than the distance between the bottom ends of the two inclined plates 15; the top end of the inclined plate 15 at the left end of the bottom plate 12 is connected with a short vertical plate 16, and the top end of the inclined plate 15 at the right end of the bottom plate 12 is connected with a long vertical plate 19, and the top end of the long vertical plate 19 is connected with the bottom end of the long vertical plate 19. The right end of the top plate 13 is connected; the top of the short vertical plate 16 is connected to the left end of the top plate 13 through a "V"-shaped plate 17, and the opening of the "V"-shaped plate 17 is arranged on the side away from the centroid of the cleaning basket; the middle plate 14 is connected to the top of the two inclined plates 15, the top of the long vertical plate 19, and the top of the short vertical plate 16 through the connecting strip 18; the long through hole 5 is arranged on the connecting strip 18 between the middle plate 14 and the top of the long vertical plate 19; the left end of the bottom plate 12 is located directly below the left end of the top plate 13.
[0057] A plurality of fixing grooves 6 are provided on the top plate 13 .
[0058] The second comb-shaped clamping device 41 is a second clamping device made of plastic; the first comb-shaped clamping device 4 is a first clamping device made of plastic; the front panel 1 is a front panel 1 made of plastic, and the rear panel 11 is a rear panel 11 made of plastic; the first rotating rod 3 is a second rotating rod 31 made of plastic.
[0059] When a round silicon wafer is placed in the cleaning basket, the second comb-shaped clamping device 41 moves along the two long through holes 5, and the silicon wafer 7 can be clamped by the second comb-shaped clamping device 41, and the silicon wafer 7 can be fixed by rotating and squeezing the gasket 33 through the clamping ring wheel 32. The second comb-shaped clamping device 41 and the first comb-shaped clamping device 4 are small in size, have a good effect on fixing the silicon wafer, and the entire device is relatively light. The clamping gasket 33 made of rubber is relatively soft and has a good clamping effect. A rotating block 34 is provided to rotate the second rotating rod 31 and the first rotating rod 3. During cleaning, the edge of the silicon wafer is limited by the first teeth 43 and the first longitudinal strip 42, and the edge of the silicon wafer is limited by the second teeth 45 and the second longitudinal strip 44, which can adapt to silicon wafers of different sizes.
[0060] Example 2. Figure 12-13 As shown, the difference between this embodiment and embodiment 1 is that the front end of the second rotating rod 31 is located in front of the front side of the front panel 1, the front end of the second rotating rod 31 is threadedly connected with a clamping ring wheel 32, and a clamping gasket ring 33 is provided between the front panel 1 and the clamping ring wheel 32 on the second rotating rod 31.
[0061] The front end of the first rotating rod 3 is located in front of the front panel 1 , and the front end of the second rotating rod 31 is provided with a rotating block 34 .
[0062] Example 3. Figure 14-17 As shown, the difference between this embodiment and embodiment 1 is that: a third comb-shaped clamping device mounting buckle 110 is provided at the same height of the side of each long vertical plate 19 close to the short vertical plate and the surface of each short vertical plate close to the long vertical plate 19, and a third comb-shaped clamping device 111 is provided between the third comb-shaped clamping device mounting buckles 110 of the two long vertical plates 19 and between the third comb-shaped clamping device mounting buckles 110 of the two short vertical plates 16. The third comb-shaped clamping device 111 includes a third longitudinal bar 112, and a plurality of third teeth 113 perpendicular to the central axis of the third longitudinal bar 112 are arranged longitudinally on the bottom surface of each third longitudinal bar 112. With this technical solution, special-shaped silicon wafers, such as semicircular silicon wafers, can be fixed. With this technical solution, semicircular silicon wafers 7 can be fixed when they are cleaned.
[0063] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes to the technical solution and the inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A cleaning basket that can adapt to silicon wafers of different shapes. Features: The device comprises a front panel (1) and a rear panel (11), wherein the front panel (1) and the rear panel (11) are connected via a plurality of first rotating rods (3), wherein the central axis of the first rotating rods (3) is perpendicular to the front panel (1) and the rear panel (11); and each first rotating rod (3) is provided with a first comb-shaped pressing device (4); The front panel (1) and the rear panel (11) are each provided with a long through hole (5), and the two long through holes (5) are parallel to each other; a side wall of each long through hole (5) is provided with a long slide groove (51) parallel to the long through hole (5); each long through hole (5) is provided with a slider (2), and a part of the slider (2) is located in the long slide groove (51); the two sliders (2) are connected via a second rotating rod (31); the second rotating rod (31) is provided with a second comb-shaped pressing device (41); The front end of the second rotating rod (31) is located in front of the front side of the front panel (1), the front end of the second rotating rod (31) is threadedly connected to a clamping ring wheel (32), and a clamping pad ring (33) is provided between the front panel (1) and the clamping ring wheel (32) on the second rotating rod (31), or, The rear end of the second rotating rod (31) is located behind the rear side of the rear panel (11), the rear end of the second rotating rod (31) is threadedly connected to a clamping ring wheel (32), and a clamping pad ring (33) is provided between the rear panel (11) and the clamping ring wheel (32) on the second rotating rod (31).
2. The cleaning basket for silicon wafers of different shapes as claimed in claim 1, Features: The compression washer (33) is a compression washer (33) made of rubber.
3. The cleaning basket that can adapt to silicon wafers of different shapes as claimed in claim 1, Features: A plurality of first rotating rod mounting through holes are provided on the front panel (1) and the rear panel (11), and the two ends of the first rotating rod (3) are respectively inserted into the through holes of the first rotating rod (3) closest thereto and are interference-fitted with the through holes of the first rotating rod (3); The front end of the first rotating rod (3) is located in front of the front panel (1), and the front end of the second rotating rod (31) is provided with a rotating block (34). or, The rear end of the first rotating rod (3) is located in front of the rear panel (11), and the rear end of the second rotating rod (31) is provided with a rotating block (34).
4. The cleaning basket that can adapt to silicon wafers of different shapes as claimed in claim 1, Features: The first comb-shaped pressing device (4) comprises a first longitudinal strip (42), on which a plurality of first teeth (43) perpendicular to the central axis of each first rotating rod (3) are arranged longitudinally on a side of the first longitudinal strip (42) close to the centroid of the cleaning basket.
5. The cleaning basket that can adapt to silicon wafers of different shapes as claimed in claim 4, Features: The first rotating rod (3) is connected to the center of each tooth of the first comb-shaped pressing device (4) closest to it.
6. The cleaning basket capable of adapting to silicon wafers of different shapes as claimed in claim 1, Features: The second comb-shaped pressing device (41) comprises a second longitudinal strip (44), on which a plurality of second teeth (45) perpendicular to the central axis of each second rotating rod (31) are arranged longitudinally near the centroid of the cleaning basket.
7. The cleaning basket that can adapt to silicon wafers of different shapes as claimed in claim 6, Features: The second rotating rod (31) is connected to the center of each tooth of the second comb-shaped pressing device (41) closest to it.
8. The cleaning basket capable of adapting to silicon wafers of different shapes as claimed in claim 1, Features: The front panel (1) and the rear panel (11) have the same structure, and both include a bottom panel (12), a top panel (13), and a middle panel (14) arranged between the bottom panel (12) and the top panel (13). The bottom panel (12) is connected to an inclined panel (15) of equal length at the left and right ends, respectively. The distance between the top ends of the two inclined panels (15) is greater than the distance between the bottom ends of the two inclined panels (15). The inclined panel (15) at the left end of the bottom panel (12) is connected to a short vertical panel (16). The inclined panel (15) at the right end of the bottom panel (12) is connected to a long vertical panel (19). The top of the long vertical panel (19) is connected to a short vertical panel (16). The top end of the short vertical plate (16) is connected to the right end of the top plate (13); the top end of the short vertical plate (16) is connected to the left end of the top plate (13) through a "V"-shaped plate (17), and the opening of the "V"-shaped plate (17) is arranged on the side away from the centroid of the cleaning basket; the middle plate (14) is respectively connected to the top ends of the two inclined plates (15), the top ends of the long vertical plates (19), and the top ends of the short vertical plates (16) through connecting strips (18); the long through holes (5) are arranged on the connecting strips (18) between the top ends of the middle plate (14) and the long vertical plates (19); and the left end of the bottom plate (12) is located directly below the left end of the top plate (13).
9. The cleaning basket capable of adapting to silicon wafers of different shapes as claimed in claim 1, Features: A plurality of fixing grooves (6) are provided on the top plate (13).
10. The cleaning basket capable of adapting to silicon wafers of different shapes as claimed in claim 1, Features: A third comb-shaped clamping device mounting buckle (110) is provided at the same height on the side of each long vertical plate (19) close to the short vertical plate and on the surface of each short vertical plate close to the long vertical plate (19). A third comb-shaped clamping device (111) is provided between the third comb-shaped clamping device mounting buckles (110) of the two long vertical plates (19) and between the third comb-shaped clamping device mounting buckles (110) of the two short vertical plates (16). The third comb-shaped clamping device (111) comprises a third longitudinal bar (112). A plurality of third teeth (113) perpendicular to the central axis of the third longitudinal bar (112) are arranged longitudinally on the bottom surface of each third longitudinal bar (112).