Etching machine
By using hydraulic components and clamping components of the reversing lock valve in the etching machine, the problems of workpiece loosening and debris accumulation are solved, and more efficient workpiece fixation and automatic cleaning are achieved, ensuring the normal operation of the equipment.
Patent Information
- Application Number
- CN202323353018.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-08
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2033-12-08
AI Technical Summary
Existing etching machines fixing workpieces through simple clamping mechanisms may cause workpieces to loosen, affecting processing efficiency, and failing to automatically clean up debris during processing, resulting in debris accumulation that affects the operation of the equipment.
A clamping assembly including a hydraulic assembly and a reversing lock valve is designed to push the push rod and gear to clamp the workpiece by pushing the clamping plate through the hydraulic assembly, and to automatically clean the debris through the brush and the rolling member.
Effectively prevent workpieces from loosening, improve processing efficiency, and solve the problem of debris accumulation by automatically cleaning them to ensure the normal operation of the equipment.
Smart Images
Figure CN222214153U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of etching, in particular to an etching machine. Background Art
[0002] An etcher is a high-precision etching device used in processing semiconductors, optoelectronic devices, biochips and other fields. The etcher mainly etches the surface of the material through physical or chemical means to form the desired pattern or structure. It has the characteristics of high precision, high selectivity and high uniformity.
[0003] Existing etching machines use a relatively simple clamping mechanism to fix the workpiece, which may cause the workpiece to become loose, thereby affecting the processing efficiency of the equipment and even causing the workpiece to be scrapped. In addition, the workpiece cannot automatically clean up the debris generated during the processing, resulting in the accumulation of debris, thereby affecting the normal operation of the equipment. Utility Model Content
[0004] Based on this, the purpose of the utility model is to provide an etching machine that can effectively solve the problem that the existing etching machine fixes the object through a relatively simple clamping mechanism, which may cause the workpiece to loosen, thereby affecting the processing efficiency of the equipment and even causing the workpiece to be scrapped, and the workpiece cannot automatically clean up the debris generated during the processing, resulting in debris accumulation, thereby affecting the normal operation of the equipment.
[0005] An etching machine comprises a workbench and a back plate arranged on one side of the workbench, a clamping assembly is arranged on the back plate, the clamping assembly comprises a connecting piece connected to the back plate, a fixing piece and a clamping plate for clamping a workpiece, the two ends of the fixing piece are respectively connected to the connecting piece and the clamping plate through a connecting rod, a hydraulic assembly is arranged on the connecting piece, the hydraulic assembly comprises a reversing locking valve and a push rod, a tooth block is connected to the end of the push rod away from the hydraulic assembly, gears are meshed and connected on both sides of the tooth block, the gears are fixed to the fixing piece, the push rod is pushed by the hydraulic assembly, and the gear is driven to rotate by the tooth block, so that the clamping plate clamps the workpiece.
[0006] Furthermore, a return plate is provided on a side of the workbench away from the back plate.
[0007] Furthermore, a screw rod is arranged in the return plate, and one end of the screw rod passes through the return plate, and a rolling element is connected to the end of the screw rod passing through the return plate.
[0008] Furthermore, a nut seat is threadedly connected to the screw rod, and a brush is connected to the nut seat.
[0009] Furthermore, a leakage plate is provided in the workbench, and the leakage plate contacts the bottom of the brush.
[0010] Furthermore, a drawer box is provided on one side of the workbench.
[0011] Furthermore, a placement plate is provided on a side of the workbench away from the back plate, and a driving structure is provided on the placement plate.
[0012] Furthermore, a rolling element is connected to the output shaft of the driving structure.
[0013] Furthermore, a buffer pad is provided on the clamping plate.
[0014] Compared with the prior art, the beneficial effects of the utility model are as follows: by arranging a clamping assembly, the workpiece can be more securely fixed during the processing; specifically, by arranging a hydraulic assembly on the connecting piece, the push rod is retracted through the hydraulic assembly, thereby driving the gear to rotate clockwise through the tooth block, and the clockwise rotation of the gear drives the upper and lower fixing parts and the clamping plate to retract toward the middle, so that the workpiece is clamped by the clamping plate, and by arranging a reversing locking valve, the clamping plate can still maintain its original position after the workpiece is clamped, thereby solving the problem that the workpiece may become loose during the processing, affecting the work efficiency, and even causing the workpiece to be scrapped. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is a schematic diagram of the overall structure of the etching machine in the embodiment of the utility model;
[0016] Figure 2 This is a schematic diagram of the overall structure of the clamping assembly in the embodiment of the utility model;
[0017] Description of main component symbols:
[0018]
[0019]
[0020] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION
[0021] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.
[0022] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.
[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.
[0024] See also Figure 1 , shown is an etching machine in an embodiment of the utility model, comprising a workbench 100 and a back plate 110 arranged on one side of the workbench 100, a clamping assembly 120 is arranged on the back plate 110, a return plate 130 is arranged on the side of the workbench 100 away from the back plate 110, a screw rod 131 is arranged in the return plate 130, one end of the screw rod 131 passes through the return plate 130, a nut seat 132 is threadedly arranged on the screw rod 131, a brush 133 is arranged on the nut seat 132, and the brush 133 is vertically arranged on the nut seat 13 2, a leak plate 134 is provided on the workbench 100, the top of the leak plate 134 contacts the bottom of the brush 133, an upper rolling member is provided on one end of the screw rod 131 passing through the return plate 130, a placement plate 101 is provided below the return plate 130, a driving structure 102 is provided on the placement plate 101, a lower rolling member 103 is provided on the output shaft of the driving structure 102, the upper rolling member 135 is arranged in parallel with the lower rolling member 103, and the upper rolling member 135 and the lower rolling member 103 are connected by a synchronous belt 140.
[0025] It can be understood that the lower rolling member 103 is driven to rotate by the driving structure 102, so that the upper rolling member 103 is driven to rotate through the synchronous belt 140, and the screw rod 131 is driven to rotate through the upper rolling member 103, so that the nut seat 132 drives the brush 133 to reciprocate to clean the debris on the leakage plate 134.
[0026] Furthermore, a drawer box 150 is provided on one side of the workbench 100 , and the drawer box 150 is provided on a side of the back plate 110 adjacent to the return plate 130 .
[0027] It can be understood that the debris cleaned by the brush 133 can be collected by providing the suction box 150 .
[0028] See also Figure 2 , shown is a clamping assembly 120 in an embodiment of the utility model, including a connecting member 121 connected to the back plate 110, a clamping plate 128 for clamping a workpiece, and a fixing member 127, the two ends of the fixing member 127 are respectively connected to the connecting member 121 and the clamping plate 128 through a connecting rod 126, a hydraulic assembly is arranged on the connecting member 121, and the hydraulic assembly includes a reversing locking valve 122 and a push rod 123, a tooth block 124 is connected to the end of the push rod 123 away from the reversing locking valve 122, and gears 125 are meshingly connected on both sides of the tooth block 124, and the gear 125 is fixedly connected to the fixing member 127.
[0029] It can be understood that the push rod 123 is driven to move backward through the reversing locking valve 122, and the gear 125 is driven to rotate clockwise through the tooth block 124, so that the clamping plate 128 clamps the workpiece.
[0030] Furthermore, the reversing locking valve 122 is provided.
[0031] It can be understood that the workpiece can be locked after clamping by means of the reversing locking valve 122 .
[0032] Furthermore, a buffer pad 129 is provided on the clamping plate 128 .
[0033] It can be understood that the friction between the workpiece and the clamping plate 129 is increased by providing a buffer pad.
[0034] In summary, the etching machine in the above-mentioned embodiment of the utility model is equipped with a clamping assembly so that the workpiece can be more securely fixed during the processing; specifically, a hydraulic assembly is arranged on the connecting part, so that the push rod is retracted through the hydraulic assembly, thereby driving the gear to rotate clockwise through the tooth block, and the clockwise rotation of the gear drives the upper and lower fixing parts and the clamping plate to move toward the middle, so that the workpiece is clamped by the clamping plate, and a reversing locking valve is arranged so that the clamping plate can still maintain its original position after the workpiece is clamped, thereby solving the problem that the workpiece may become loose during the processing, affecting the work efficiency, and even causing the workpiece to be scrapped.
[0035] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0036] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.
Claims
1. An etching machine, characterized in that: The invention comprises a workbench and a back plate arranged on one side of the workbench, a clamping assembly is arranged on the back plate, the clamping assembly comprises a connecting piece connected to the back plate, a fixing piece and a clamping plate for clamping a workpiece, two ends of the fixing piece are respectively connected to the connecting piece and the clamping plate through a connecting rod, a hydraulic assembly is arranged on the connecting piece, the hydraulic assembly comprises a reversing locking valve and a push rod, a tooth block is connected to the end of the push rod away from the hydraulic assembly, gears are meshed and connected to the tooth block on both sides, the gears are fixed to the fixing piece, a return plate is arranged on the side of the workbench away from the back plate, a screw rod is arranged in the return plate and one end of the screw rod passes through the return plate, a rolling piece is connected to the end of the screw rod passing through the return plate, the push rod is pushed by the hydraulic assembly, and the gear is driven to rotate through the tooth block, so that the clamping plate clamps the workpiece.
2. The etching machine according to claim 1, characterized in that A nut seat is threadedly connected to the screw rod, and a brush is connected to the nut seat.
3. The etching machine according to claim 2, characterized in that: A leakage plate is arranged in the workbench, and the leakage plate contacts the bottom of the brush.
4. The etching machine according to claim 1, characterized in that: A drawer box is provided on one side of the workbench.
5. The etching machine according to claim 1, characterized in that: A placing plate is arranged on a side of the workbench away from the back plate, and a driving structure is arranged on the placing plate.
6. The etching machine according to claim 5, characterized in that A rolling element is connected to the output shaft of the driving structure.
7. The etching machine according to claim 1, characterized in that A buffer pad is arranged on the clamping plate.