Cleaning device for GaAs single crystal growth

Abstract

The utility model discloses a cleaning device for GaAs single crystal growth, which comprises a cleaning body, a driving device, a cleaning device and a plurality of water outlets, the driving device comprises driving components and a transmission component, and the driving components are respectively arranged on two sides of the cleaning body; the transmission assemblies are rotatably arranged in the cleaning body, and the transmission assemblies are connected with the driving assembly; the cleaning device comprises a cleaning assembly, and the cleaning assembly is arranged on the cleaning body; the multiple water outlets are formed in one side of the cleaning body. Therefore, by arranging the driving assembly and the transmission assembly, the batch processing capacity of the cleaning device can be remarkably enhanced, the cleaning efficiency is greatly improved, meanwhile, the conveying belt with the inclined angle is arranged, single crystals can be more comprehensively exposed in cleaning liquid or cleaning airflow in the conveying process, cleaning dead corners are effectively avoided, and the cleaning efficiency is improved. Therefore, each single crystal can be thoroughly and uniformly cleaned.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning devices, in particular to a cleaning device for GaAs single crystal growth. Background Art

[0002] The existing cleaning device for GaAs single crystal growth does face some obvious limitations in practical applications. The first is its insufficient processing capacity, which cannot meet the needs of large-scale and large-volume cleaning work. In the production process of semiconductor materials, a large number of single crystals often need to be cleaned in a short period of time to ensure production efficiency and product quality stability. However, the design and processing capacity of the existing cleaning device are obviously unable to meet such needs, which will undoubtedly seriously restrict the operating speed and overall efficiency of the production line.

[0003] Secondly, the existing cleaning devices are prone to leaving dead corners during the cleaning process, resulting in the inability to effectively clean some single crystal surfaces. This will not only affect the purity and quality of the single crystal, but may also pose potential risks to subsequent processing and use. In the semiconductor industry, the purity and quality of materials are directly related to the performance and reliability of the product, so the lack of thoroughness in cleaning is undoubtedly a serious problem. Utility Model Content

[0004] The utility model aims to solve one of the technical problems in the related art at least to a certain extent.

[0005] To this end, the purpose of the utility model is to propose a cleaning device for GaAs single crystal growth. By setting a driving component and a transmission component, the batch processing capacity of the cleaning device can be significantly enhanced, and the cleaning efficiency is greatly improved. At the same time, a conveyor belt with an inclined angle is provided, so that the single crystal can be more fully exposed to the cleaning liquid or cleaning air flow during the conveying process, effectively avoiding cleaning dead corners, thereby ensuring that each single crystal can be thoroughly and evenly cleaned.

[0006] To achieve the above-mentioned purpose, the utility model proposes a cleaning device for GaAs single crystal growth, comprising a cleaning body, a driving device, a cleaning device and a plurality of drain ports, wherein the driving device comprises a driving component and a transmission component, wherein the driving components are respectively arranged on both sides of the cleaning body; the transmission components are respectively rotatably arranged in the cleaning body, and the transmission components are connected to the driving components; the cleaning device comprises a cleaning component, wherein the cleaning component is arranged on the cleaning body; and the plurality of drain ports are respectively arranged on one side of the cleaning body.

[0007] The utility model discloses a cleaning device for growing GaAs single crystals. By arranging a driving component and a transmission component, the batch processing capacity of the cleaning device can be significantly enhanced, and the cleaning efficiency is greatly improved. At the same time, a conveyor belt with an inclined angle is arranged, so that the single crystal can be more fully exposed to the cleaning liquid or the cleaning air flow during the conveying process, and the cleaning dead corners are effectively avoided, thereby ensuring that each single crystal can be thoroughly and evenly cleaned.

[0008] In addition, the cleaning device for growing GaAs single crystals proposed in the application may also have the following additional technical features:

[0009] Specifically, the driving assembly includes two driving motors and two machine bases, wherein the two driving motors are respectively arranged on one side of the cleaning body; one end of the two machine bases is respectively connected to the two driving motors, and the other end is respectively connected to the side wall of the cleaning body.

[0010] Specifically, the transmission assembly includes two transmission rollers, a plurality of rolling rods and a conveyor belt, wherein the two transmission rollers are rotatably arranged at the two ends of the cleaning body, and one end of the two transmission rollers is respectively connected to the output shafts of the two driving motors; the plurality of rolling rods are respectively rotatably arranged in the cleaning body; the conveyor belt is respectively mounted on the two transmission rollers and is rollingly connected to the plurality of rolling rods.

[0011] Specifically, the cleaning component includes three support rods and multiple water outlets, wherein the three support rods are respectively arranged on the cleaning body; the multiple water outlets are evenly distributed on the three support rods, and the multiple water outlets are respectively connected to an external water source.

[0012] Specifically, the conveyor belt is arranged at an angle.

[0013] Additional aspects and advantages of the present invention will be given in part in the following description and in part will become apparent from the following description or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0015] Figure 1 A three-dimensional diagram of a cleaning device for growing GaAs single crystals according to an embodiment of the utility model;

[0016] Figure 2 A three-dimensional diagram of a cleaning device for growing GaAs single crystals according to another embodiment of the utility model;

[0017] Figure 3 The present invention is a schematic structural diagram of a cleaning device for growing GaAs single crystals according to an embodiment of the present invention.

[0018] As shown in the figure: 1. Cleaning body; 2. Driving device; 3. Cleaning device; 4. Drain outlet; 21. Driving assembly; 22. Transmission assembly; 31. Cleaning assembly; 211. Driving motor; 212. Machine base; 221. Transmission roller; 222. Rolling rod; 223. Conveyor belt; 311. Support rod; 312. Water outlet. DETAILED DESCRIPTION

[0019] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limitations on the present invention. On the contrary, the embodiments of the present invention include all changes, modifications, and equivalents that fall within the spirit and connotation of the appended claims.

[0020] A cleaning device for growing GaAs single crystals according to an embodiment of the utility model will be described below in conjunction with the accompanying drawings.

[0021] like Figure 1-Figure 3 As shown, a cleaning device for growing GaAs single crystals according to an embodiment of the utility model comprises a cleaning body 1, a driving device 2, a cleaning device 3 and a plurality of drain ports 4, wherein the driving device 2 comprises a driving component 21 and a transmission component 22, wherein the driving components 21 are respectively arranged on both sides of the cleaning body 1, the transmission components 22 are respectively rotatably arranged in the cleaning body 1, and the transmission components 22 are connected to the driving components 21, the cleaning device 3 comprises a cleaning component 31, wherein the cleaning component 31 is arranged on the cleaning body 1, the plurality of drain ports 4 are respectively arranged on one side of the cleaning body 1, and the conveyor belt 223 is arranged at an angle.

[0022] Among them, it can be understood that the crystal is placed on the cleaning body 1, and the driving component 21 is rotated to drive the transmission component 22 for transmission, and at the same time drive the crystal to be transported forward, and the crystal is cleaned by the cleaning component 31, so that the single crystal can be more fully exposed to the cleaning liquid or cleaning airflow during the transmission process, effectively avoiding cleaning dead corners, thereby ensuring that each single crystal can be thoroughly and evenly cleaned, and the cleaning waste water is discharged through multiple drain ports 4.

[0023] Specifically, when a large number of crystals need to be cleaned, a large number of crystals are placed on the cleaning body 1 in batches, and the driving component 21 rotates to drive the transmission component 22 for transmission, while driving the crystals to be transported forward, and the crystals are cleaned by the cleaning component 31, so that the single crystals can be more fully exposed to the cleaning liquid or cleaning airflow during the transmission process, effectively avoiding cleaning dead corners, thereby ensuring that each single crystal can be thoroughly and evenly cleaned, and the cleaning waste water is discharged through multiple drain ports 4, which can significantly enhance the batch processing capacity of the cleaning device and greatly improve the cleaning efficiency.

[0024] In one embodiment of the present invention, Figure 2 As shown, the driving assembly 21 includes two driving motors 211 and two machine bases 212, wherein the two driving motors 211 are respectively arranged on one side of the cleaning body 1, and one end of the two machine bases 212 is respectively connected to the two driving motors 211, and the other end is respectively connected to the side wall of the cleaning body 1.

[0025] It can be understood that the rotation of the two driving motors 211 provides a power source for the device, and the base 212 can provide stable support for the driving motors 211 .

[0026] In one embodiment of the present invention, Figure 2 As shown, the transmission assembly 22 includes two transmission rollers 221, a plurality of rolling rods 222 and a conveyor belt 223, wherein the two transmission rollers 221 are rotatably arranged at the two ends inside the cleaning body 1, one end of the two transmission rollers 221 is respectively connected to the output shafts of the two driving motors 211, a plurality of rolling rods 222 are respectively rotatably arranged in the cleaning body 1, and the conveyor belt 223 is respectively sleeved on the two transmission rollers 221 and is rollingly connected with the plurality of rolling rods 222.

[0027] Among them, it can be understood that the two transmission rollers 221 are driven to rotate by the driving motor 211, and the transmission belt 223 is driven to transmit at the same time. When the transmission belt 223 is transmitting, it also rolls on multiple rolling rods 222, which improves the stability and smoothness of the transmission, and at the same time drives the crystal to be transmitted forward, thereby realizing large-scale crystal cleaning work.

[0028] In one embodiment of the present invention, Figure 3 As shown, the cleaning assembly 31 includes three support rods 311 and multiple water outlets 312, wherein the three support rods 311 are respectively arranged on the cleaning body 1, the multiple water outlets 312 are respectively evenly distributed on the three support rods 311, and the multiple water outlets 312 are respectively connected to an external water source.

[0029] Among them, it can be understood that water is sprayed out through the water outlet 312 to achieve the cleaning of the crystals on the conveyor belt 223. Water pipes are respectively provided on the three support rods 311, and the water pipes are connected to an external water source. At the same time, a water pump is provided at the external water source to control the switch of the water.

[0030] Specifically, in the actual implementation process, when a large number of crystals need to be cleaned, a large number of crystals are placed on the cleaning body 1 in batches, and the two transmission rollers 221 are driven to rotate by the driving motor 211, and the conveyor belt 223 is driven to transmit at the same time. When the conveyor belt 223 is transmitting, it also rolls on multiple rolling rods 222, which improves the stability and smoothness of the transmission, and drives the crystals forward at the same time, realizing the cleaning of a large number of crystals, and spraying water through the water outlet 312 to realize the cleaning of the crystals on the conveyor belt 223.

[0031] In summary, a cleaning device for growing GaAs single crystals according to an embodiment of the utility model can significantly enhance the batch processing capacity of the cleaning device and greatly improve the cleaning efficiency by setting a driving component and a transmission component. At the same time, a conveyor belt with an inclined angle is provided, so that the single crystal can be more fully exposed to the cleaning liquid or the cleaning air flow during the conveying process, effectively avoiding cleaning dead corners, thereby ensuring that each single crystal can be thoroughly and evenly cleaned.

[0032] In the description of this specification, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0033] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0034] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations of the present invention. Ordinary technicians in this field can change, modify, replace and deform the above embodiments within the scope of the present invention.

Claims

1. A cleaning device for growing GaAs single crystals, characterized in that: It comprises a cleaning body (1), a driving device (2), a cleaning device (3) and a plurality of drainage ports (4), wherein: The driving device (2) comprises a driving component (21) and a transmission component (22), wherein: The driving components (21) are respectively arranged on both sides of the cleaning body (1); The transmission components (22) are rotatably arranged in the cleaning body (1), and the transmission components (22) are connected to the driving components (21); The cleaning device (3) comprises a cleaning component (31), wherein: The cleaning component (31) is arranged on the cleaning body (1); The plurality of drainage ports (4) are respectively arranged on one side of the cleaning body (1).

2. A cleaning device for growing GaAs single crystal according to claim 1, characterized in that: The driving assembly (21) comprises two driving motors (211) and two machine bases (212), wherein: The two driving motors (211) are respectively arranged on one side of the cleaning body (1); One end of the two machine bases (212) is respectively connected to the two driving motors (211), and the other end is respectively connected to the side wall of the cleaning body (1).

3. A cleaning device for growing GaAs single crystal according to claim 2, characterized in that: The transmission assembly (22) comprises two transmission rollers (221), a plurality of rolling rods (222) and a transmission belt (223), wherein: The two transmission rollers (221) are rotatably arranged at two ends of the cleaning body (1), and one end of the two transmission rollers (221) is connected to the output shafts of the two driving motors (211). A plurality of rolling rods (222) are rotatably arranged in the cleaning body (1); The conveying belts (223) are respectively sleeved on the two transmission rollers (221) and are rollingly connected to a plurality of rolling rods (222).

4. A cleaning device for growing GaAs single crystal according to claim 1, characterized in that: The cleaning assembly (31) comprises three support rods (311) and a plurality of water outlets (312), wherein: The three support rods (311) are respectively arranged on the cleaning body (1); The plurality of water outlets (312) are evenly distributed on the three support rods (311), and the plurality of water outlets (312) are respectively connected to an external water source.

5. The cleaning device for growing GaAs single crystal according to claim 3, characterized in that: The conveyor belt (223) is arranged obliquely.

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