Vacuumizing device for seal welding of sensor pipe cap

Abstract

The utility model discloses a vacuumizing device for sealing and welding a sensor pipe cap, which relates to the technical field of sensor production equipment, and comprises a sealing and welding main machine, a vacuumizing component, a sealing and welding part, a sealing and welding part, a sealing and welding part, a sealing and welding part, a sealing and welding part, a sealing and welding part and a sealing and welding part, a displacement component used for fixing the upper vacuum cavity and a fixing frame used for fixing the lower vacuum cavity are further arranged in the seal welding main machine, and a conveying pipeline is further fixedly installed in the lower vacuum cavity. According to the vacuumizing device for sealing and welding the sensor pipe cap, the pneumatic push rod can push the sliding rod to drive the upper vacuum cavity and the lower vacuum cavity to be mutually closed, so that a sealed environment is formed, then the vacuum pump can be started to vacuumize the vacuum cavities to a common low-vacuum state, and then the vacuum cavities are vacuumized to a high-vacuum state by the molecular pump; in addition, inert gas can be supplemented into the vacuum cavity through the inert gas supplementing connector in the packaging process, and the sensor chip can be prevented from being oxidized under the protection of the inert gas.

Description

Technical Field

[0001] The utility model relates to the technical field of sensor production equipment, in particular to a vacuum pumping device for sealing and welding a sensor tube cap. Background Art

[0002] A sensor is a device, module or subsystem whose purpose is to detect events or changes in the environment and send the information to other electronic devices, usually computer processors. As electronic devices develop towards miniaturization and integration, the application of sensors has received more and more attention. In actual production, a cap needs to be installed around the sensor head to protect the sensor.

[0003] With the development of my country's aerospace industry, the demand for aerospace sensors packaged in metal shells has increased. However, sensors in the aerospace field are high-end sensors that must have extremely high accuracy, stability and durability, and must be able to adapt to extreme temperature, pressure, humidity, radiation and other environments. The operating temperature of aerospace-grade sensors is -55℃~+125℃, and the manufacturing process is quite strict. In order to meet the requirements of the aerospace sensor capping process, the sensor needs to be evacuated during sensor sealing and supplemented with inert gas to improve the stability of the sensor during operation. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a vacuum pumping device for sealing and welding a sensor tube cap, which removes the original gas inside the tube cap (including air and nitrogen, etc.) before sealing and welding, so as to achieve a very high vacuum state for sealing and welding, or adds rare inert gas (helium, xenon, neon, argon) and then seals and welds. Under the protection of the inert gas, the sensor chip can be prevented from oxidation, the stability during operation is improved, and the process requirements for sealing and welding of aerospace sensor components are met.

[0005] To achieve the above objectives, the utility model is implemented through the following technical solutions: a vacuum pumping device for sealing and welding a sensor cap, comprising a sealing and welding host, the side wall of which is provided with a molecular pump and a vacuum pump, and further comprising:

[0006] A vacuum pumping component comprises an upper vacuum chamber and a lower vacuum chamber. A displacement component for fixing the upper vacuum chamber and a fixing frame for fixing the lower vacuum chamber are also provided in the sealing and welding main unit. A delivery pipeline is also fixedly installed inside the lower vacuum chamber. The delivery pipeline connects the molecular pump, the vacuum pump and the lower vacuum chamber in series to form an air extraction circuit. When the upper vacuum chamber and the lower vacuum chamber are closed, the inner cavities of the two chambers form a sealed state.

[0007] Optionally, a sensor bearing seat is provided in the middle of the lower vacuum cavity, and an air-permeable plate is fixedly connected to the outer wall surrounding the sensor bearing seat, and the air-permeable plate is fixedly mounted on the inner wall of the lower vacuum cavity.

[0008] Optionally, a sealing ring is embedded in the upper surface of the lower vacuum chamber, and an inert gas supply joint is fixedly connected to the side wall of the lower vacuum chamber. The inert gas is transmitted to the inner cavity of the upper vacuum chamber and the lower vacuum chamber through the inert gas supply joint and the air permeable plate.

[0009] Optionally, the delivery pipeline includes a delivery pipe, one end of which is connected to the lower vacuum chamber, and the other end of the delivery pipe is connected to a double pipe joint, and two pipe interfaces of the double pipe joint are respectively connected to the vacuum pump and the molecular pump.

[0010] Optionally, a pressure detection valve joint is fixedly connected to the outer wall of the delivery pipe, and a positioning bracket is also mounted on the outer wall of the delivery pipe, and the positioning bracket is fixedly connected to the sealing and welding host through bolts.

[0011] Optionally, the upper vacuum chamber includes a base, a corrugated extension tube is provided at the bottom of the base, a telescopic rod is fixedly connected between the corrugated extension tube and the base, and the corrugated extension tube can be telescopic relative to the base.

[0012] Optionally, the displacement component includes a frame, the inner side wall of the frame is slidably connected with a sliding rod, the bottom of the sliding rod is fixedly connected to the upper vacuum chamber, the top of the sliding rod is fixedly connected to the frame via a spring, and the displacement component also includes a pneumatic push rod fixedly connected to the sealing and welding host, and the output end of the pneumatic push rod is in abutment with the sliding rod.

[0013] The utility model provides a vacuum pumping device for sealing and welding a sensor tube cap, which has the following beneficial effects:

[0014] The vacuum pumping device for sealing the sensor tube cap is provided with a sealing host, a molecular pump, a vacuum pump, a vacuum pumping component and a displacement component. The pneumatic push rod can push the sliding rod to drive the upper vacuum chamber and the lower vacuum chamber to close each other, thereby forming a sealed environment. Subsequently, the vacuum pump can be started to evacuate the vacuum chamber to a normal low vacuum state, and then the molecular pump can be automatically switched to a high vacuum state. In addition, during the packaging process, inert gas can be added to the vacuum chamber through an inert gas supply joint. Under the protection of the inert gas, the sensor chip can be prevented from being oxidized, the stability during operation can be improved, and the process requirements for sealing the aerospace sensor components can be met. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0016] Figure 2 It is a schematic diagram of the local structure of the utility model;

[0017] Figure 3 This is a schematic diagram of the matching structure of the upper vacuum chamber and the lower vacuum chamber of the utility model;

[0018] Figure 4 It is a schematic diagram of the partial disassembly structure of the displacement component of the utility model;

[0019] Figure 5 It is a side structural schematic diagram of the displacement component of the utility model.

[0020] In the figure:

[0021] 10. Sealing and welding host; 11. Molecular pump; 12. Vacuum pump; 13. Sensor bearing seat; 14. Breathable plate; 15. Sealing ring; 16. Inert gas supply joint;

[0022] 20. Vacuuming component; 21. Upper vacuum chamber; 211. Base; 212. Corrugated extension tube; 213. Telescopic rod; 22. Lower vacuum chamber; 23. Fixing frame; 24. Delivery pipeline; 241. Delivery pipe; 242. Double pipeline joint; 243. Pressure detection valve joint; 244. Positioning bracket;

[0023] 30. Displacement component; 31. Frame; 32. Slide rod; 33. Spring; 34. Pneumatic push rod. DETAILED DESCRIPTION

[0024] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Instead, they are merely examples of devices consistent with some aspects of the present disclosure as detailed in the appended claims.

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] See also Figures 1 to 5 The utility model provides a technical solution: a vacuum pumping device for sealing and welding a sensor cap, comprising a sealing and welding host 10, a molecular pump 11 and a vacuum pump 12 are arranged on the side wall of the sealing and welding host 10, and further comprising:

[0027] The vacuum pumping component 20 includes an upper vacuum chamber 21 and a lower vacuum chamber 22. A displacement component 30 for fixing the upper vacuum chamber 21 and a fixing frame 23 for fixing the lower vacuum chamber 22 are also provided in the sealing and welding host 10. The fixing frame 23 is fixedly installed in the sealing and welding host 10. The lower vacuum chamber 22 is embedded in the inner wall of the fixing frame 23. A conveying pipeline 24 is also fixedly installed inside the lower vacuum chamber 22. The conveying pipeline 24 connects the molecular pump 11, the vacuum pump 12 and the lower vacuum chamber 22 in series to form an exhaust circuit. After the upper vacuum chamber 21 and the lower vacuum chamber 22 are closed, the inner cavities of the two chambers form a sealed state.

[0028] The displacement component 30 includes a frame 31, and a slide bar 32 is slidably connected to the inner wall of the frame 31. The bottom of the slide bar 32 is fixedly connected to the upper vacuum chamber 21, and the top of the slide bar 32 is fixedly connected to the frame 31 through a spring 33. The displacement component 30 also includes a pneumatic push rod 34 fixedly connected to the sealing and welding host 10, and the output end of the pneumatic push rod 34 is in contact with the slide bar 32. When in use, the slide bar 32 can be pushed to slide on the inner wall of the frame 31 by starting the pneumatic push rod 34, thereby driving the upper vacuum chamber 21 to close on the lower vacuum chamber 22. When the pneumatic push rod 34 contracts, the spring 33 can drive the frame 31 to automatically retract, thereby driving the upper vacuum chamber 21 to separate from the lower vacuum chamber 22.

[0029] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, as a preferred embodiment, on the basis of the above-mentioned method, a sensor supporting seat 13 is further provided in the middle of the lower vacuum chamber 22, and a breathable plate 14 is fixedly connected to the outer wall surrounding the sensor supporting seat 13. The breathable plate 14 is fixedly installed on the inner wall of the lower vacuum chamber 22, and the breathable plate 14 is a plate body with multiple breathable holes, which facilitates the upper and lower ventilation to realize air flow.

[0030] A sealing ring 15 is also embedded and installed on the upper surface of the lower vacuum chamber 22, and an inert gas supply joint 16 is also fixedly connected to the side wall of the lower vacuum chamber 22. The inert gas is transmitted to the inner cavity of the upper vacuum chamber 21 and the lower vacuum chamber 22 through the inert gas supply joint 16 and the air permeable plate 14. The advantage of providing the sealing ring 15 is that when closing, the sealing ring 15 can be squeezed to deform the sealing ring 15 to further seal the connection gap, thereby ensuring stability after closing.

[0031] The upper vacuum chamber 21 includes a base 211, a corrugated extension tube 212 is arranged at the bottom of the base 211, a telescopic rod 213 is fixedly connected between the corrugated extension tube 212 and the base 211, and the corrugated extension tube 212 can be telescoped relative to the base 211. The advantage of using the corrugated extension tube 212 is that it can provide buffering when closing, thereby reducing the squeezing force on the lower vacuum chamber 22.

[0032] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, as a preferred embodiment, on the basis of the above method, further, the delivery pipeline 24 includes a delivery pipe 241, one end of the delivery pipe 241 is connected to the lower vacuum chamber 22, and the other end of the delivery pipe 241 is connected to a double pipe joint 242, and the two pipe interfaces of the double pipe joint 242 are respectively connected to the vacuum pump 12 and the molecular pump 11.

[0033] The outer wall of the delivery pipe 241 is also fixedly connected with a pressure detection valve joint 243, and the outer wall of the delivery pipe 241 is also sleeved with a positioning bracket 244, and the positioning bracket 244 is fixedly connected with the sealing and welding host 10 through bolts.

[0034] In summary, when the vacuum pumping device for sealing the sensor tube cap is used, the sliding rod 32 can be pushed to slide on the inner wall of the frame 31 by starting the pneumatic push rod 34, thereby driving the upper vacuum chamber 21 to close on the lower vacuum chamber 22, and the upper vacuum chamber 21 and the lower vacuum chamber 22 are closed to each other, thereby forming a sealed environment, and then the vacuum pump 12 can be started to evacuate the vacuum chamber to a normal low vacuum state, and then the molecular pump 11 is automatically switched to work, and the molecular pump 11 is evacuated to a high vacuum state. In addition, during the packaging process, inert gas can be supplemented into the vacuum chamber through the inert gas supply joint 16. Under the protection of the inert gas, the sensor chip can be prevented from oxidizing, the stability during operation is improved, and the process requirements for sealing and welding of aerospace sensor components are met. When the pneumatic push rod 34 contracts, the spring 33 can drive the frame 31 to automatically retract, thereby driving the upper vacuum chamber 21 to separate from the lower vacuum chamber 22.

[0035] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

[0036] Those skilled in the art will readily appreciate other embodiments of the present disclosure after considering the specification and practicing the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the present disclosure that follow the general principles of the present disclosure and include common knowledge or customary techniques in the art that are not disclosed in the present disclosure. The description and examples are intended to be exemplary only, and the true scope of the present disclosure is indicated by the following claims.

Claims

1. A vacuum pumping device for sealing and welding a sensor cap, comprising a sealing and welding host (10), characterized in that: The side wall of the sealing welding mainframe (10) is provided with a molecular pump (11) and a vacuum pump (12), and further comprises: A vacuum pumping component (20), the vacuum pumping component (20) comprising an upper vacuum chamber (21) and a lower vacuum chamber (22); a displacement component (30) for fixing the upper vacuum chamber (21) and a fixing frame (23) for fixing the lower vacuum chamber (22) are also provided in the sealing welding main unit (10); a delivery pipeline (24) is also fixedly installed inside the lower vacuum chamber (22); the delivery pipeline (24) connects the molecular pump (11), the vacuum pump (12) and the lower vacuum chamber (22) in series to form an air extraction circuit; when the upper vacuum chamber (21) and the lower vacuum chamber (22) are closed, the inner cavities of the two chambers are in a sealed state.

2. A vacuum pumping device for sealing and welding a sensor cap according to claim 1, characterized in that: A sensor bearing seat (13) is provided in the middle of the lower vacuum chamber (22), and an air permeable plate (14) is fixedly connected to the outer wall surrounding the sensor bearing seat (13); the air permeable plate (14) is fixedly mounted on the inner wall of the lower vacuum chamber (22).

3. A vacuum pumping device for sealing and welding a sensor cap according to claim 2, characterized in that: A sealing ring (15) is also embedded and installed on the upper surface of the lower vacuum chamber (22), and an inert gas supply joint (16) is also fixedly connected to the side wall of the lower vacuum chamber (22); the inert gas is transmitted to the inner cavities of the upper vacuum chamber (21) and the lower vacuum chamber (22) through the inert gas supply joint (16) and the air permeable plate (14).

4. The vacuum pumping device for sealing and welding a sensor cap according to claim 1, characterized in that: The delivery pipeline (24) comprises a delivery pipe (241), one end of the delivery pipe (241) being connected to the lower vacuum chamber (22), and the other end of the delivery pipe (241) being connected to a double pipe joint (242), wherein two pipe interfaces of the double pipe joint (242) are respectively connected to the vacuum pump (12) and the molecular pump (11).

5. A vacuum pumping device for sealing and welding a sensor cap according to claim 4, characterized in that: The outer wall of the delivery pipe (241) is also fixedly connected to a pressure detection valve connector (243), and the outer wall of the delivery pipe (241) is also sleeved with a positioning bracket (244), and the positioning bracket (244) is fixedly connected to the sealing and welding main machine (10) via bolts.

6. A vacuum pumping device for sealing and welding a sensor cap according to claim 1, characterized in that: The upper vacuum chamber (21) comprises a base (211), a corrugated extension tube (212) being provided at the bottom of the base (211), a telescopic rod (213) being fixedly connected between the corrugated extension tube (212) and the base (211), and the corrugated extension tube (212) being capable of telescoping relative to the base (211).

7. A vacuum pumping device for sealing and welding a sensor cap according to claim 1, characterized in that: The displacement component (30) comprises a frame (31), the inner side wall of the frame (31) is slidably connected to a slide bar (32), the bottom of the slide bar (32) is fixedly connected to the upper vacuum chamber (21), and the top of the slide bar (32) is fixedly connected to the frame (31) via a spring (33). The displacement component (30) further comprises a pneumatic push rod (34) fixedly connected to the sealing and welding main unit (10), and the output end of the pneumatic push rod (34) is in contact with the slide bar (32).

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