Pre-cooling group roller and coating equipment

Abstract

The utility model discloses pre-cooling group rollers and coating equipment, which comprise M pre-cooling rollers arranged at intervals, M is greater than or equal to 2, the last pre-cooling roller in the M pre-cooling rollers is close to a coating component, the cooling temperature gradient of the M pre-cooling rollers is set, and the cooling temperature of the pre-cooling rollers is-50 DEG C to 10 DEG C; the N cooling rollers are arranged at intervals, N is larger than or equal to 1, the first cooling roller in the N cooling rollers is adjacent to the film coating assembly, the cooling temperature gradient of the N cooling rollers is set, and the cooling temperature of the cooling rollers ranges from-100 DEG C to 10 DEG C. According to the utility model, the film is pre-cooled and pre-cooled through the plurality of pre-cooling rollers before being coated, the temperature of the film can be reduced in advance, so that the temperature of the coated film is prevented from rising too much, and meanwhile, the pre-cooling rollers are matched with the subsequent cooling rollers, so that the temperature of the film can be more finely controlled through the matching of the plurality of pre-cooling rollers and the cooling rollers; and the consistency of the film quality can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of conductive film production, and more specifically to a pre-cooling roller assembly and film coating equipment. Background Art

[0002] A composite current collector refers to the deposition of copper / aluminum atoms on the surface of a thin film to form a composite copper foil current collector or a composite aluminum foil current collector, which combines the mechanical and structural advantages of polymer films with the electrochemical performance advantages of copper and aluminum to replace traditional lithium battery aluminum foil copper foil current collector materials. It has the advantages of high safety, high energy density, and saving metal resources.

[0003] At present, the main preparation process of composite current collector is to deposit metal atoms on the surface of polymer substrate to form a metal composite material with strong bonding and good conductivity. The main preparation processes include vacuum evaporation, magnetron sputtering coating, etc. Among them, the vacuum evaporation process requires the evaporation of a metal layer on the surface of the polymer film to form a metal conductive layer about 1 micron thick on both sides of the film. Therefore, during the preparation of the composite current collector, the bombardment, deposition and heat exchange of gaseous atoms cause the surface temperature of the film to be high, and the main roller needs to be used for cooling and heat exchange treatment to prevent the film from being broken due to excessive temperature. The main roller selects the cooling roller for heat exchange. The cooling roller is a roller that passes cooling water and is generally made of steel, alloy steel, etc.

[0004] At present, the film and the cooling roller have poor adhesion during the vacuum coating process and usually only a single cooling roller is provided, resulting in poor heat exchange, which can easily cause wrinkles or film breakage during the coating process.

[0005] The above shortcomings need to be improved. Summary of the invention

[0006] In order to solve the problem of poor heat exchange effect between a film and a cooling roller in the existing vacuum coating process, the utility model provides a pre-cooling roller assembly and coating equipment.

[0007] The technical solution of the utility model is as follows:

[0008] A pre-cooling roller group and coating equipment, comprising M pre-cooling rollers arranged at intervals, M ≥ 2, the last pre-cooling roller among the M pre-cooling rollers being close to the coating component, the cooling temperature gradient of the M pre-cooling rollers being set, and the cooling temperature of the pre-cooling rollers being -50°C to 10°C; N cooling rollers arranged at intervals, N ≥ 1, the first cooling roller among the N cooling rollers being close to the coating component, the cooling temperature gradient of the N cooling rollers being set, and the cooling temperature of the cooling rollers being -100°C to 10°C.

[0009] Furthermore, the M pre-cooling rollers and the N cooling rollers are continuously distributed.

[0010] Furthermore, at least one of a passing roller, a tension roller or a flattening roller is arranged between the M pre-cooling rollers, between the N cooling rollers or between the pre-cooling roller and the cooling roller.

[0011] Furthermore, the cooling temperature gradient of the M pre-cooling rollers increases, -50°C ≤ 1st pre-cooling roller ≤ 2nd pre-cooling roller ≤ ... ≤ Mth pre-cooling roller ≤ 10°C.

[0012] Furthermore, the cooling temperature gradient of the M pre-cooling rollers decreases, -50°C ≤ Mth pre-cooling roller ≤ M-1st pre-cooling roller ≤ ... ≤ 1st pre-cooling roller ≤ 10°C.

[0013] Furthermore, the cooling temperatures of the N cooling rollers are increased in a gradient, -100°C ≤ 1st cooling roller ≤ 2nd cooling roller ≤ ... ≤ Nth cooling roller ≤ 10°C.

[0014] Furthermore, the cooling temperature gradient of the N cooling rollers decreases, -100°C ≤ Nth cooling roller ≤ N-1th cooling roller ≤ ... ≤ 1st cooling roller ≤ 10°C.

[0015] A coating device comprises a vacuum coating chamber, in which an unwinding device, a pre-cooling roller group, a coating assembly and a winding device are arranged, the pre-cooling roller group is the above-mentioned pre-cooling roller group, the pre-cooling roller group comprises a first pre-cooling roller group, the coating assembly comprises a first coating assembly, the unwinding device is used to release a film to be coated, and the film is sequentially wound around each of the pre-cooling rollers and each of the cooling rollers of the first pre-cooling roller group, the first coating assembly is used to coat the first side of the film at the first pre-cooling roller group that is not in contact with the cooling roller, and the winding device is used to wind up the coated film.

[0016] Furthermore, the pre-cooling roller group also includes a second pre-cooling roller group, and the coating assembly also includes a second coating assembly. The second pre-cooling roller group and the second coating assembly are arranged inside the vacuum coating chamber. The film after coating on the first side is wound around each pre-cooling roller of the second pre-cooling roller group and each cooling roller. The second coating assembly is used to coat the second side of the film at the second pre-cooling roller group that is not in contact with the cooling roller.

[0017] Furthermore, a steering roller is provided in the vacuum coating chamber. Along the running direction of the film, the steering roller is arranged between the first pre-cooling roller group and the second pre-cooling roller group. After the film is wound off the first pre-cooling roller group, it is turned by the steering roller and wound toward the second pre-cooling roller group.

[0018] The utility model according to the above scheme has the beneficial effect that, by setting a plurality of pre-cooling rollers and cooling rollers, the utility model can increase the cooling area, thereby increasing the heat exchange area and heat exchange efficiency, improving the cooling effect, and helping to better control the temperature of the film and prevent overheating and film breakage. By using a plurality of pre-cooling rollers to pre-cool the film before coating, the film temperature can be lowered in advance, thereby avoiding excessive temperature rise of the film after coating. At the same time, by forming a cooperation with the subsequent cooling rollers, the temperature of the film can be more finely controlled through the cooperation of a plurality of pre-cooling rollers and cooling rollers, which helps to improve the consistency of the film quality, because each pre-cooling roller and cooling roller can appropriately cool the film according to its position and temperature gradient, thereby achieving the film to maintain a suitable temperature during the vacuum coating process, preventing film deformation and performance degradation caused by sudden cooling and heating, and improving the consistency of film quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 This is a structural schematic diagram of the first belt-feeding mode of the pre-cooling roller group in the utility model;

[0021] Figure 2 This is a structural schematic diagram of the second belt-feeding mode of the pre-cooling roller group in the utility model;

[0022] Figure 3 This is a structural schematic diagram of the third belt-feeding mode of the pre-cooling roller group in the utility model;

[0023] Figure 4 It is a structural schematic diagram of a coating device with a single-sided evaporation coating component in the utility model;

[0024] Figure 5 It is a structural schematic diagram of a coating device with a magnetron sputtering coating assembly disposed on one side in the utility model;

[0025] Figure 6 It is a structural schematic diagram of a coating device with double-sided evaporation coating components in the utility model;

[0026] Figure 7 It is a structural schematic diagram of a coating device with magnetron sputtering coating components arranged on both sides in the utility model.

[0027] Among them, the figure marks in the figure are: 1. unwinding device; 2. first pre-cooling roller group; 201. cooling roller; 202. pre-cooling roller; 203. pressing roller; 3. first coating assembly; 4. second pre-cooling roller group; 5. second coating assembly; 6. passing roller; 7. tension roller; 8. flattening roller; 9. evaporation coating assembly; 10. magnetron sputtering coating assembly; 11. steering roller; 12. winding device; 13. film. DETAILED DESCRIPTION

[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0029] It should be noted that when a component is referred to as being "fixed" or "set" or "connected" to another component, it may be located directly or indirectly on the other component. The directions or positions indicated by the terms "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the directions or positions shown in the accompanying drawings and are only for the convenience of description and should not be construed as limitations on the present technical solution. The terms "first", "second", etc. are only used for the convenience of description and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features. "Multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0030] like Figures 1 to 3As shown, a pre-cooling roller group described in one embodiment of the utility model includes M pre-cooling rollers 202 arranged at intervals, M≥2, the last pre-cooling roller 202 of the M pre-cooling rollers 202 is close to the coating assembly, the cooling temperature gradient of the M pre-cooling rollers 202 is set, and the cooling temperature of the pre-cooling rollers 202 is -50℃~10℃; N cooling rollers 201 arranged at intervals, N≥1, the first cooling roller 201 of the N cooling rollers 201 is close to the coating assembly, the cooling temperature gradient of the N cooling rollers 201 is set, and the cooling temperature of the cooling rollers 201 is -100℃~10℃. The cooling temperature gradient of the M pre-cooling rollers 202 increases, -50℃≤1st pre-cooling roller≤2nd pre-cooling roller≤……≤Mth pre-cooling roller 202≤10℃. Or, the cooling temperature gradient of the M pre-cooling rollers 202 decreases, -50℃≤Mth pre-cooling roller 202≤M-1st pre-cooling roller 202≤……≤1st pre-cooling roller≤10℃. The cooling temperature gradient of N cooling rollers 201 increases, -100°C ≤ 1st cooling roller ≤ 2nd cooling roller ≤ ... ≤ Nth cooling roller 201 ≤ 10°C. Or, the cooling temperature gradient of N cooling rollers 201 decreases, -100°C ≤ Nth cooling roller 201 ≤ N-1st cooling roller 201 ≤ ... ≤ 1st cooling roller ≤ 10°C. Specifically:

[0031] In a preferred embodiment, M=2, the cooling temperature gradient increases, -50°C≤1st pre-cooling roller≤-40°C, -40°C≤2nd pre-cooling roller≤-30°C; N=1, -30°C≤cooling roller 201≤-10°C.

[0032] In a preferred embodiment, M=2, the cooling temperature gradient rises, -50℃≤1st pre-cooling roller≤-40℃, -40℃≤2nd pre-cooling roller≤-30℃; N=2, the cooling temperature gradient rises, -30℃≤1st cooling roller≤-10℃, -10℃≤2nd cooling roller≤10℃.

[0033] In a preferred embodiment, M=2, the cooling temperature gradient rises, -40℃≤1st pre-cooling roller≤-30℃, -30℃≤2nd pre-cooling roller≤-20℃; N=3, the cooling temperature gradient rises, -30℃≤1st cooling roller≤-20℃, -20℃≤2nd cooling roller≤-10℃, -10℃≤3rd cooling roller≤0℃.

[0034] In a preferred embodiment, M=2, the cooling temperature gradient decreases, -30℃≤1st pre-cooling roller≤-20℃, -50℃≤2nd pre-cooling roller≤-40℃; N=3, the cooling temperature gradient increases, -100℃≤1st cooling roller≤-80℃, -60℃≤2nd cooling roller≤-40℃, -20℃≤3rd cooling roller≤0℃.

[0035] In a preferred embodiment, M=2, the cooling temperature gradient decreases, -30℃≤1st pre-cooling roller≤-20℃, -50℃≤2nd pre-cooling roller≤-40℃; N=4, the cooling temperature gradient increases, -50℃≤1st cooling roller≤-40℃, -40℃≤2nd cooling roller≤-30℃, -30℃≤3rd cooling roller≤-20℃, -20℃≤4th cooling roller≤-10℃.

[0036] In a preferred embodiment, M=3, the cooling temperature gradient decreases, 10℃≤1st pre-cooling roller≤-10℃, -20℃≤2nd pre-cooling roller≤-10℃, -30℃≤3rd pre-cooling roller≤-20℃; N=3, the cooling temperature gradient increases, -30℃≤1st cooling roller≤-10℃, -10℃≤2nd cooling roller≤10℃, -10℃≤3rd cooling roller≤10℃.

[0037] In a preferred embodiment, M=2, the cooling temperature gradient increases, -50℃≤1st pre-cooling roller≤-40℃, -40℃≤2nd pre-cooling roller≤-30℃; N=2, the cooling temperature gradient decreases, -30℃≤1st cooling roller≤-10℃, -50℃≤2nd cooling roller≤-30℃.

[0038] In a preferred embodiment, M=2, the cooling temperature gradient increases, -50℃≤1st pre-cooling roller≤-40℃, -40℃≤2nd pre-cooling roller≤-30℃; N=3, the cooling temperature gradient decreases, -30℃≤1st cooling roller≤-10℃, -50℃≤2nd cooling roller≤-30℃, -70℃≤3rd cooling roller≤-50℃.

[0039] In a preferred embodiment, M=3, the cooling temperature gradient increases, -50℃≤1st pre-cooling roller≤-40℃, -40℃≤2nd pre-cooling roller≤-30℃, -30℃≤3rd pre-cooling roller≤-20℃; N=3, the cooling temperature gradient decreases, -20℃≤1st cooling roller≤-10℃, -40℃≤2nd cooling roller≤-30℃, -60℃≤3rd cooling roller≤-50℃.

[0040] In a preferred embodiment, M=2, the cooling temperature gradient decreases, -40℃≤1st pre-cooling roller≤-30℃, -50℃≤2nd pre-cooling roller≤-40℃; N=2, the cooling temperature gradient decreases, -50℃≤1st cooling roller≤-40℃, -60℃≤2nd cooling roller≤-50℃.

[0041] In a preferred embodiment, M=2, the cooling temperature gradient decreases, -40℃≤1st pre-cooling roller≤-30℃, -50℃≤2nd pre-cooling roller≤-40℃; N=3, the cooling temperature gradient decreases, -50℃≤1st cooling roller≤-40℃, -60℃≤2nd cooling roller≤-50℃, -70℃≤3rd cooling roller≤-60℃.

[0042] In a preferred embodiment, M=2, the cooling temperature gradient decreases, -40℃≤1st pre-cooling roller≤-30℃, -50℃≤2nd pre-cooling roller≤-40℃; N=4, the cooling temperature gradient decreases, -50℃≤1st cooling roller≤-40℃, -60℃≤2nd cooling roller≤-50℃, -70℃≤3rd cooling roller≤-60℃, -80℃≤4th cooling roller≤-70℃.

[0043] These values ​​can be adjusted and optimized according to actual needs and equipment conditions. By selecting appropriate M values, N values ​​and cooling temperature gradient settings, the temperature of the film 13 can be better controlled and film breakage can be prevented. At the same time, increasing the number of pre-cooling rollers 202 and cooling rollers 201 can also increase the heat exchange area and heat exchange efficiency, improve the cooling effect, and the temperature gradient difference can be smaller, so that the temperature transition of the film 13 is more uniform. In order to make the temperature transition uniform, the temperature difference between the last pre-cooling roller 202 of the M pre-cooling rollers 202 and the first cooling roller 201 of the N cooling rollers 201 is less than 50°C. Therefore, when selecting the values, it is necessary to comprehensively consider various factors to determine the optimal solution.

[0044] In the above embodiment, the provision of multiple pre-cooling rollers 202 and cooling rollers 201 can increase the cooling area, thereby increasing the heat exchange area and heat exchange efficiency, improving the cooling effect, and helping to better control the temperature of the film 13 to prevent overheating and film breakage. Compared with the single cooling main roller in the prior art, once the film 13 is partially bulged, it may not be able to contact the cooling roller 201, thereby affecting the production quality of the film 13. The provision of multiple pre-cooling rollers 202 and cooling rollers 201 can reduce this effect, because even if a cooling roller 201 cannot contact a part of the film 13, other pre-cooling rollers 202 and cooling rollers 201 can still cool it.

[0045] By using a plurality of pre-cooling rollers 202 to pre-cool the film 13 before coating, the temperature of the film 13 can be lowered in advance, thereby preventing the temperature of the film 13 from rising too much after coating. At the same time, by cooperating with the subsequent cooling roller 201, the temperature of the film 13 can be more finely controlled through the cooperation of a plurality of pre-cooling rollers 202 and cooling rollers 201, which helps to improve the consistency of the quality of the film 13, because each pre-cooling roller 202 and cooling roller 201 can appropriately cool the film 13 according to its position and temperature gradient, thereby achieving the film 13 maintaining a suitable temperature during the vacuum coating process, preventing deformation and performance degradation of the film 13 due to sudden cooling or heating, and improving the consistency of the quality of the film 13.

[0046] like Figure 1 or Figure 2As shown, in a preferred embodiment, M pre-cooling rollers 202 and N cooling rollers 201 are continuously distributed. In this embodiment, the film 13 continuously passes through each pre-cooling roller 202 and cooling roller 201, and the film 13 is continuously cooled, the cooling efficiency is improved, and the deformation or performance degradation of the film 13 caused by sudden cooling and heating is prevented. The number of cooling rollers 201 and the way the film 13 is wound around the rollers can be adjusted according to actual needs to meet different cooling needs and process requirements.

[0047] Or, if Figure 3 As shown, in a preferred embodiment, at least one of a roller 6, a tension roller 7 or a flattening roller 8 is arranged between the M pre-cooling rollers 202, between the N cooling rollers 201, or between the pre-cooling roller 202 and the cooling roller 201. The roller 6 is used to guide the running direction of the film 13, and can be arranged according to the layout inside the vacuum coating chamber to improve the space utilization, or to increase the wrap angle between the film 13 and the pre-cooling roller 202 or between the film 13 and the cooling roller 201, that is, to increase the contact area between the film 13 and the pre-cooling roller 202 or between the film 13 and the cooling roller 201. The tension roller 7 is used to adjust the tension of the film 13 during the running, to prevent the film 13 from being too loose and wrinkled, or too tight and broken. The flattening roller 8 is used to flatten the film 13, keep the film 13 flat, and ensure uniform coating. At least one of the over-roller 6, the tension roller 7 or the flattening roller 8 is arranged between the M pre-cooling rollers 202, between the N cooling rollers 201 or between the pre-cooling roller 202 and the cooling roller 201, which can further optimize the cooling and processing process of the film 13. Auxiliary rollers such as the over-roller 6, the tension roller 7 or the flattening roller 8 can further optimize the cooling and processing process of the film 13 and improve the quality and consistency of the film 13. The setting of the auxiliary rollers can be flexibly adjusted according to actual needs to meet different coating process requirements.

[0048] like Figures 1 to 3 As shown, in a preferred embodiment, M pre-cooling rollers 202 are correspondingly provided with M pressure rollers 203, and the pressure rollers 203 and the pre-cooling rollers 202 are conveniently arranged on both sides of the film 13. The pressure rollers 203 press the film 13 toward the corresponding pre-cooling rollers 202, so that the film 13 is in close contact with the pre-cooling rollers 202, thereby ensuring the cooling effect.

[0049] like Figure 4 or Figure 5As shown, a coating device in one embodiment of the utility model includes a vacuum coating chamber, in which an unwinding device 1, a pre-cooling roller group, a coating assembly and a winding device 12 are arranged. The pre-cooling roller group is the above-mentioned pre-cooling roller group, the pre-cooling roller group includes a first pre-cooling roller group 2, and the coating assembly includes a first coating assembly 3. The unwinding device 1 is used to release a film 13 to be coated, and the film 13 is sequentially wound around each pre-cooling roller 202 and each cooling roller 201 of the first pre-cooling roller group 2. The first coating assembly 3 is used to coat the first side of the film 13 at the first pre-cooling roller group 2 that is not in contact with the cooling roller 201, and the winding device 12 is used to wind up the coated film 13.

[0050] When the present embodiment is working, after the film 13 is released from the unwinding device 1, it first winds around the pre-cooling rollers 202 of the pre-cooling roller group, and then winds around the cooling rollers 201 of the pre-cooling roller group. The first coating assembly 3 is located below the first cooling roller 201, and the second side of the film 13 contacts the first cooling roller 201. Here, the first side of the film 13 is exposed and faces the first coating assembly 3. The first coating assembly 3 coats the first side of the film 13 here. The pre-cooling roller 202 is used to cool the film 13 so that the temperature of the film 13 can be reduced before coating. The cooling roller 201 is used to cool the film 13. The film 13 can be gradually cooled down under the action of the cooling roller 201 while maintaining a stable shape and performance, thereby preventing deformation or performance degradation of the film 13 caused by sudden cooling or heating. After coating, the film 13 is wound up by the winding device 12.

[0051] like Figure 6 or Figure 7 As shown, in a preferred embodiment, the pre-cooling roller group also includes a second pre-cooling roller group 4, and the coating assembly also includes a second coating assembly 5. The second pre-cooling roller group 4 and the second coating assembly 5 are arranged inside the vacuum coating chamber. The film 13 after the first side coating is wound around the various pre-cooling rollers 202 and the various cooling rollers 201 of the second pre-cooling roller group 4. The second coating assembly 5 is used to coat the second side of the film 13 at the second pre-cooling roller group 4 that is not in contact with the cooling roller 201.

[0052] In this embodiment, both sides of the film 13 can be coated in one device. After the first side of the film 13 is coated, the second side of the film 13 is coated by the second coating component 5. The second pre-cooling group roller 4 controls the temperature of the film 13 when the second coating component 5 is coating, so as to maintain the stable shape and performance of the film 13, thereby ensuring the coating quality.

[0053] According to actual needs, the film 13 may be plated on only one side or on both sides.

[0054] like Figure 6 or Figure 7As shown, in a preferred embodiment, a steering roller 11 is provided in the vacuum coating chamber. The steering roller 11 is provided between the first pre-cooling roller group 2 and the second pre-cooling roller group 4 along the running direction of the film 13. After the film 13 is wound from the first pre-cooling roller group 2, it is turned to the second pre-cooling roller group 4 by the steering roller 11. At least one of a passing roller 6, a tension roller 7 or a flattening roller 8 is also provided inside the vacuum coating chamber along the running path of the film 13.

[0055] In this embodiment, the film surface can be turned over by the action of the steering roller 11, so that the surface to be plated always faces the same direction, which is convenient for coating. The passing roller 6 can be used to guide the film 13 in the running direction, and is set according to the layout inside the vacuum coating chamber to improve the space utilization rate; the tension roller 7 can be used to adjust the tension of the film 13 during the running, to prevent the film 13 from being too loose and wrinkled or too tight and broken; the flattening roller 8 can be used to flatten the film 13, keep the film 13 flat, and ensure uniform coating.

[0056] like Figures 4 to 7 As shown, in a preferred embodiment, the first coating component 3 and the second coating component 5 are both evaporation coating components 9 or magnetron sputtering coating components 10. The evaporation coating component 9 includes an evaporation boat or a crucible, and the evaporation boat or the crucible is arranged opposite to the portion where the first pre-cooling roller group 2 and the second pre-cooling roller group 4 contact with the film 13. The magnetron sputtering coating component 10 includes a magnetron sputtering device and a target material, and the target material includes a first target material and a second target material. The first target material is arranged opposite to the portion where the first pre-cooling roller group 2 contacts with the film 13, and the second target material is arranged opposite to the portion where the second pre-cooling roller group 4 contacts with the film 13. Both the evaporation coating component 9 and the magnetron sputtering coating component 10 can be used for coating on the film 13. The selection of which coating component mainly depends on factors such as process requirements, material selection and cost considerations.

[0057] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A pre-cooling roller assembly, characterized in that: It comprises M pre-cooling rollers arranged at intervals, M≥2, the last pre-cooling roller among the M pre-cooling rollers is close to the coating assembly, the cooling temperature gradient of the M pre-cooling rollers is set, and the cooling temperature of the pre-cooling rollers is -50°C to 10°C; N cooling rollers are arranged at intervals, N≥1, the first cooling roller among the N cooling rollers is adjacent to the coating assembly, the cooling temperature gradient of the N cooling rollers is set, and the cooling temperature of the cooling rollers is -100°C to 10°C.

2. A pre-cooling roller set according to claim 1, characterized in that: The M pre-cooling rollers and the N cooling rollers are continuously distributed.

3. A pre-cooling roller set according to claim 1, characterized in that: At least one of a passing roller, a tension roller or a flattening roller is arranged between the M pre-cooling rollers, between the N cooling rollers or between the pre-cooling roller and the cooling roller.

4. A pre-cooling roller set according to any one of claims 1-3, characterized in that: The cooling temperature gradient of the M pre-cooling rollers increases, -50°C ≤ 1st pre-cooling roller ≤ 2nd pre-cooling roller ≤ ... ≤ Mth pre-cooling roller ≤ 10°C.

5. A pre-cooling roller set according to any one of claims 1-3, characterized in that: The cooling temperature gradient of the M pre-cooling rollers decreases, -50°C ≤ Mth pre-cooling roller ≤ M-1st pre-cooling roller ≤ ... ≤ 1st pre-cooling roller ≤ 10°C.

6. A pre-cooling roller set according to any one of claims 1-3, characterized in that: The cooling temperatures of the N cooling rollers increase in gradient, -100°C ≤ 1st cooling roller ≤ 2nd cooling roller ≤ ... ≤ Nth cooling roller ≤ 10°C.

7. A pre-cooling roller set according to any one of claims 1-3, characterized in that: The cooling temperature gradient of the N cooling rollers decreases, -100°C ≤ Nth cooling roller ≤ N-1th cooling roller ≤ ... ≤ 1st cooling roller ≤ 10°C.

8. A coating device, characterized in that: The invention comprises a vacuum coating chamber, wherein an unwinding device, a pre-cooling roller group, a coating assembly and a winding device are arranged in the vacuum coating chamber, wherein the pre-cooling roller group is the pre-cooling roller group as described in any one of claims 1 to 7, wherein the pre-cooling roller group comprises a first pre-cooling roller group, and wherein the coating assembly comprises a first coating assembly. The unwinding device is used to release the film to be coated, and the film is sequentially wound around each of the pre-cooling rollers and each of the cooling rollers of the first pre-cooling roller group. The first coating assembly is used to coat the first side of the film at the first pre-cooling roller group that is not in contact with the cooling roller, and the winding device is used to wind up the coated film.

9. A coating device according to claim 8, characterized in that: The pre-cooling roller group also includes a second pre-cooling roller group, and the coating assembly also includes a second coating assembly. The second pre-cooling roller group and the second coating assembly are arranged inside the vacuum coating chamber. The film after the first side coating is wound around each pre-cooling roller of the second pre-cooling roller group and each cooling roller. The second coating assembly is used to coat the second side of the film at the second pre-cooling roller group that is not in contact with the cooling roller.

10. A coating device according to claim 9, characterized in that: A turning roller is provided in the vacuum coating chamber. Along the running direction of the film, the turning roller is provided between the first pre-cooling roller group and the second pre-cooling roller group. After the film is wound off from the first pre-cooling roller group, it is turned by the turning roller to the second pre-cooling roller group.

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