Rotary perovskite evaporator

Abstract

The utility model discloses a rotary perovskite evaporimeter, which comprises a base, a coating chamber and an adjusting mechanism, the top of the base is provided with the coating chamber for perovskite evaporation, and the top of the coating chamber is provided with the adjusting mechanism. The adjusting mechanism comprises a top cover, a mounting seat, a driven gear, a transmission shaft, a motor, a driving gear, an inserting rod and a connecting gear, the top of the top cover is fixedly connected with the mounting seat, and the driven gear is mounted at the position, close to the circle center of the top cover, in the mounting seat through the transmission shaft. The inserting rod is pressed downwards to enable the connecting gear to be meshed with the driving gear and the driven gear, the motor operates to drive the clamping base to rotate through the driving gear, the connecting gear, the driven gear and the transmission shaft, then the base material is in a slow-speed rotating state in the coating process, the coating thickness uniformity is guaranteed, and the finished product quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of perovskite evaporation, in particular to a rotary perovskite evaporator. Background Art

[0002] Perovskites are generally cubic or octahedral in shape, shiny, and light to brown in color. They can be used to refine titanium, niobium and rare earth elements, and are also commonly used raw materials in evaporation processing. Perovskite evaporation is a process of preparing perovskite crystals on a surface using physical vapor deposition technology. It can be used in electronics, solar cells and sensors, and has the advantages of high purity, good film uniformity and high crystal quality.

[0003] The existing perovskite evaporation equipment has the following disadvantages during use: when performing perovskite evaporation processing, the substrate to be processed is directly placed and fixed inside the coating chamber, and the evaporation operation is performed by heating the evaporation source material. Since the position of the substrate is fixed during the processing, the surface film thickness is sometimes uneven during the evaporation operation, affecting the overall quality. For this reason, we propose a rotary perovskite evaporator. Utility Model Content

[0004] The main purpose of the utility model is to provide a rotary perovskite evaporator, which can control the substrate to rotate continuously during the evaporation process when necessary through an adjustment mechanism located at the top of the coating chamber to improve the uniformity of the coating thickness, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A rotary perovskite evaporator comprises a machine base, a coating chamber and an adjustment mechanism, wherein a coating chamber for perovskite evaporation is arranged on the top of the machine base, and an adjustment mechanism is arranged on the top of the coating chamber, and the adjustment mechanism comprises a top cover, a mounting seat, a driven gear, a transmission shaft, a motor, a driving gear, a plug rod and a connecting gear, wherein the top of the top cover is fixedly connected to the mounting seat, and a driven gear is installed inside the mounting seat near the center of the top cover through the transmission shaft, a driving gear is installed at the power output end of the motor, a plug rod is vertically inserted inside the mounting seat, and a connecting gear located between the driving gear and the driven gear is installed at the bottom of the plug rod.

[0007] Furthermore, it also includes a clamping mechanism, a clamping mechanism is arranged at the bottom of the top cover, the clamping mechanism includes a clamping seat, a slide groove and a clamping plate, the bottom end of the transmission shaft is installed with a clamping seat located at the bottom of the top cover, a slide groove is opened inside the clamping seat and a clamping plate for clamping the substrate to be processed is slidably connected through the slide groove; a slidable clamping plate frame is installed at the bottom of the clamping seat through the slide groove, when fixing the substrate, the substrate is placed on the bottom of the clamping seat, the position of the clamping plate is adjusted along the slide groove so that the clamping plate is clamped to the positions on both sides of the surface of the substrate, and the position of the clamping plate can be fixed by the clamping plate by turning the bolts to fix the position of the clamping plate.

[0008] Furthermore, a speed reducer is installed at the power output end of the motor and is connected to the power input end of the driving gear through the speed reducer; when the motor is running, its power end is decelerated by the speed reducer and then drives the driving gear to rotate.

[0009] Furthermore, a bearing seat corresponding to the end position of the plug rod is installed at the bottom of the inner wall of the mounting seat, and a rubber ring is sleeved on the outer periphery of the plug rod at the top position of the top cover; when the plug rod is inserted downward, the rubber ring moves up to the top of the top cover without affecting the rotation of the plug rod, and when the plug rod moves up, the rubber ring slides down to the connection between the plug rod and the top cover to fix the position of the plug rod and the connecting gear.

[0010] Furthermore, fixing plates are fixedly connected to the positions corresponding to the clamping plates on both sides of the bottom of the clamping seat, and bolts are threadedly connected inside the fixing plates; the position of the clamping plates is fixed by tightening the bolts, thereby fixing the position of the substrate.

[0011] Compared with the prior art, the utility model has the following beneficial effects: a coating chamber is provided on the top of the machine base, and the substrate is placed inside the coating chamber. The perovskite evaporates to coat the substrate inside the coating chamber. Under normal use, the insertion rod is lifted up to disconnect the connection between the active gear and the driven gear, and the substrate is in a fixed state inside the coating chamber. When the substrate needs to be rotated, the insertion rod is pressed down so that the connecting gear is meshed with the active gear and the driven gear respectively. The operation of the motor drives the rotation of the clamp seat through the active gear, the connecting gear, the driven gear and the transmission shaft, so that the substrate is in a slow rotation state during the coating process, ensuring the uniformity of the coating thickness and improving the quality of the finished product; a slidable clamping plate frame is installed at the bottom of the clamp seat through a slide groove. When fixing the substrate, the substrate is placed at the bottom of the clamp seat, and the position of the clamp plate is adjusted along the slide groove so that the clamp plate is clamped to the positions on both sides of the substrate surface. The position of the substrate can be fixed by the clamp plate by tightening the bolt to fix the clamp plate position. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The utility model is a schematic diagram of the overall structure of a rotary perovskite evaporator.

[0013] Figure 2The utility model is a schematic diagram of the internal structure of a mounting base of a rotary perovskite evaporator.

[0014] Figure 3 The utility model is a schematic diagram of the structure of a clamping mechanism of a rotary perovskite evaporator.

[0015] In the figure: 1. machine base; 2. coating chamber; 3. adjusting mechanism; 301. top cover; 302. mounting seat; 303. driven gear; 304. transmission shaft; 305. motor; 306. reducer; 307. driving gear; 308. plug rod; 309. connecting gear; 310. bearing seat; 311. rubber ring; 4. clamping mechanism; 401. clamping seat; 402. slide groove; 403. clamping plate; 404. fixing plate; 405. bolt. DETAILED DESCRIPTION

[0016] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0017] like Figure 1-3 As shown, a rotary perovskite evaporator includes a machine base 1, a coating chamber 2 and an adjustment mechanism 3. The coating chamber 2 for perovskite evaporation is arranged on the top of the machine base 1, and the adjustment mechanism 3 is arranged on the top of the coating chamber 2. The adjustment mechanism 3 includes a top cover 301, a mounting seat 302, a driven gear 303, a transmission shaft 304, a motor 305, a driving gear 307, a plug 308 and a connecting gear 309. The top of the top cover 301 is fixedly connected to the mounting seat 302, and the driven gear 303 is installed inside the mounting seat 302 near the center of the top cover 301 through the transmission shaft 304. The driving gear 307 is installed at the power output end of the motor 305, and the plug 308 is vertically inserted into the mounting seat 302, and the connecting gear 309 located between the driving gear 307 and the driven gear 303 is installed at the bottom of the plug 308.

[0018] Wherein, it also includes a clamping mechanism 4, the clamping mechanism 4 is arranged at the bottom of the top cover 301, the clamping mechanism 4 includes a clamping seat 401, a slide groove 402 and a clamping plate 403, the bottom end of the transmission shaft 304 is installed with a clamping seat 401 located at the bottom of the top cover 301, the inside of the clamping seat 401 is provided with a slide groove 402 and a clamping plate 403 for clamping the substrate to be processed is slidably connected through the slide groove 402; a slidable clamping plate 403 structure is installed at the bottom of the clamping seat 401 through the slide groove 402, when fixing the substrate, the substrate is placed at the bottom of the clamping seat 401, the position of the clamping plate 403 is adjusted along the slide groove 402 so that the clamping plate 403 is clamped to the positions on both sides of the surface of the substrate, and the position of the clamping plate 403 can be fixed by tightening the bolts 405.

[0019] Among them, the power output end of the motor 305 is equipped with a reducer 306 and is connected to the power input end of the driving gear 307 through the reducer 306. The bottom of the inner wall of the mounting seat 302 is equipped with a bearing seat 310 corresponding to the end position of the plug rod 308. The outer periphery of the plug rod 308 is located at the top position of the top cover 301 and is sleeved with a rubber ring 311; when the motor 305 is running, its power end drives the driving gear 307 to rotate after being decelerated by the reducer 306. When the plug rod 308 is inserted downward, the bearing seat 310 connects the plug rod 308. When the plug rod 308 is inserted downward, the rubber ring 311 moves up to the top of the top cover 301 without affecting the rotation of the plug rod 308. When the plug rod 308 moves upward, the rubber ring 311 slides down to the connection between the plug rod 308 and the top cover 301 to fix the position of the plug rod 308 and the connecting gear 309.

[0020] Among them, the two sides of the bottom of the clamp seat 401 are fixedly connected to the corresponding positions of the clamp plate 403 with fixing plates 404, and the fixing plates 404 are screwed with bolts 405; the position of the clamp plate 403 is fixed by screwing the bolts 405, thereby fixing the position of the substrate.

[0021] It should be noted that the utility model is a rotary perovskite evaporator. When working, a coating chamber 2 is provided on the top of the base 1, and the substrate is placed inside the coating chamber 2. The perovskite evaporator performs coating treatment on the substrate inside the coating chamber 2. Under normal use, the plug rod 308 is lifted up to disconnect the connection between the driving gear 307 and the driven gear 303, and the substrate is in a fixed state inside the coating chamber 2. When the substrate needs to be rotated, the plug rod 308 is pressed down so that the connecting gear 309 is meshed with the driving gear 307 and the driven gear 303 respectively, and the motor 305 runs through the driving gear 307 and the connecting gear 309, the driven gear 303 and the transmission shaft 304 drive the rotation of the clamp 401, so that the substrate is in a slow rotation state during the coating process, ensuring the uniformity of the coating thickness and improving the quality of the finished product; a slidable clamping plate 403 structure is installed at the bottom of the clamp 401 through the slide groove 402. When fixing the substrate, the substrate is placed at the bottom of the clamp 401, and the position of the clamping plate 403 is adjusted by sliding along the slide groove 402 so that the clamping plate 403 is clamped to the positions on both sides of the substrate surface. The bolts 405 are tightened to fix the position of the clamping plate 403, and the position of the substrate can be fixed by the clamping plate 403.

[0022] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A rotary perovskite evaporator, comprising a base (1), characterized in that: The machine base (1) further comprises a coating chamber (2) and an adjusting mechanism (3). The coating chamber (2) for performing perovskite evaporation is arranged on the top of the machine base (1). The coating chamber (2) is arranged on the top of the coating chamber (2). The adjusting mechanism (3) comprises a top cover (301), a mounting seat (302), a driven gear (303), a transmission shaft (304), a motor (305), a driving gear (307), a plug rod (308) and a connecting gear (309). The top of the top cover (301) A mounting seat (302) is fixedly connected thereto, and a driven gear (303) is installed inside the mounting seat (302) near the center of the top cover (301) via a transmission shaft (304); a driving gear (307) is installed at the power output end of the motor (305); a plug rod (308) is vertically inserted inside the mounting seat (302), and a connecting gear (309) located between the driving gear (307) and the driven gear (303) is installed at the bottom of the plug rod (308).

2. A rotary perovskite evaporator according to claim 1, characterized in that: The invention also comprises a clamping mechanism (4), wherein the bottom of the top cover (301) is provided with the clamping mechanism (4), wherein the clamping mechanism (4) comprises a clamping seat (401), a slide groove (402) and a clamping plate (403), wherein the bottom end of the transmission shaft (304) is provided with a clamping seat (401) located at the bottom of the top cover (301), wherein the clamping seat (401) is provided with a slide groove (402) inside and is slidably connected with a clamping plate (403) for clamping a substrate to be processed via the slide groove (402).

3. A rotary perovskite evaporator according to claim 1, characterized in that: A speed reducer (306) is installed at the power output end of the motor (305) and is connected to the power input end of the driving gear (307) via the speed reducer (306).

4. A rotary perovskite evaporator according to claim 1, characterized in that: A bearing seat (310) corresponding to the end position of the insertion rod (308) is installed at the bottom of the inner wall of the mounting seat (302), and a rubber ring (311) is sleeved on the outer periphery of the insertion rod (308) at the top position of the top cover (301).

5. A rotary perovskite evaporator according to claim 2, characterized in that: Fixed plates (404) are fixedly connected to positions corresponding to the clamping plate (403) on both sides of the bottom of the clamping seat (401), and bolts (405) are screwed inside the fixed plates (404).

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