Carrying mechanism and processing equipment

Abstract

The utility model provides a carrying mechanism and machining equipment, the carrying mechanism is used for carrying a quartz boat, lifting lugs are arranged on the two opposite sides of the quartz boat respectively, the carrying mechanism comprises a lifting assembly, the lifting assembly comprises a frame and two lifting pieces, the two lifting pieces are both connected with the frame, the two lifting pieces are used for lifting the quartz boat, and the lifting lugs are arranged on the two lifting pieces; the two lifting pieces are arranged in a spaced mode in the first horizontal direction, each lifting piece comprises a lifting frame and two lifting blocks, the lifting frames are connected to the frame, the two lifting blocks are arranged in a spaced mode in the second horizontal direction, each lifting block and the frame are arranged in a spaced mode in the vertical direction, and the two lifting blocks in each lifting piece are used for bearing one lifting lug; the first moving assembly is connected with the frame, and the first moving assembly is used for driving the frame to move in the vertical direction; and the second moving assembly is connected with the first moving assembly, and the second moving assembly is used for driving the first moving assembly to move in the second horizontal direction.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic cells, and in particular to a transport mechanism and processing equipment. Background Art

[0002] In the process of photovoltaic cell production, multiple silicon wafers need to be coated. Multiple silicon wafers can be loaded on a quartz boat, and then the transport mechanism can clamp the quartz boat from both sides and move the quartz boat to a specified position, so that the multiple silicon wafers on the quartz boat can be processed at the specified position.

[0003] At present, quartz boats are usually made of quartz. Insufficient precision or excessive force applied to the quartz boat by the handling mechanism during the clamping process can easily lead to damage to the quartz boat. Therefore, how to reduce the probability of damage to the quartz boat during the handling process is still a problem that needs to be solved in the field of automation mechanisms. Utility Model Content

[0004] In view of the above, it is necessary to provide a transport mechanism and processing equipment to solve the above problems.

[0005] In a first aspect, an embodiment of the present application provides a transport mechanism for transporting a quartz boat, wherein lifting ears are respectively arranged on opposite sides of the quartz boat, including: a lifting assembly, wherein the lifting assembly includes a frame and two lifting members, wherein the two lifting members are connected to the frame, and the two lifting members are spaced apart in a first horizontal direction, wherein each lifting member includes a lifting frame and two lifting blocks, wherein the lifting frame is connected to the frame, and the two lifting blocks are spaced apart in a second horizontal direction, wherein each lifting block is spaced apart from the frame in a vertical direction, and wherein the two lifting blocks in each lifting member are used to jointly support a lifting ear of the quartz boat; wherein the first horizontal direction is perpendicular to the second horizontal direction; in the first horizontal direction, the spacing between the two opposite lifting blocks is defined as L1, and the spacing between the two lifting ears is defined as L2, defines the thickness of the lifting ear as L3, L2≤L1≤L2+2×L3; a first moving component, the first moving component is connected to the frame, and the first moving component is used to drive the frame to move in the vertical direction, wherein the vertical direction is perpendicular to the first horizontal direction and the second horizontal direction; a second moving component, the second moving component is connected to the first moving component, and the second moving component is used to drive the first moving component to move in the second horizontal direction; wherein, the first moving component is used to drive the frame to descend so that the height of each lifting block in the vertical direction is lower than the lifting ear of the quartz boat, the second moving component is used to drive the first moving component to move horizontally so that each lifting block is located below the lifting ear, and the first moving component is used to drive the frame to rise to lift the quartz boat through the lifting ear.

[0006] Optionally, each lifting block is located on a side of the corresponding lifting frame away from the frame, and each lifting block is provided with a positioning recess on a side facing the frame, and the positioning recess is used to accommodate at least a part of the structure of the lifting ear to limit the movement of the lifting ear.

[0007] Optionally, the transport mechanism further includes: a micro switch, which is disposed in a positioning recess of the corresponding lifting member, and the micro switch is used to detect whether the quartz boat is in contact with the lifting member.

[0008] Optionally, in a lifting piece, a positioning recess is formed on a side of each lifting block facing the other lifting block in the second horizontal direction, and a guide surface is formed on each lifting block on a side facing the other lifting block in the second horizontal direction; the guide surface is an arc surface or an inclined surface, and the first end of the guide surface is located on a side of the second end of the guide surface away from the other lifting block in the second horizontal direction, and the guide surface is used to abut against the lifting ear and guide the lifting ear into the positioning recess; wherein the first end of the guide surface is an end that is away from the bottom wall of the positioning recess in the vertical direction, and the second end is an end that is close to the bottom wall of the positioning recess in the vertical direction.

[0009] Optionally, each supporting member further includes: a limiting portion, which is movably connected to the supporting frame in the first horizontal direction, and is used to abut against one side of the quartz boat in the first horizontal direction to limit the quartz boat.

[0010] Optionally, an extension plate is installed on each lifting frame, and the limiting portion passes through the corresponding extension plate in the first horizontal direction and is threadedly connected to the extension plate.

[0011] Optionally, the first movable component includes: a first support beam, which is connected to the frame and the second movable component; a first driving member, which includes a first rack, a first driving unit and a first gear, the first rack is arranged on the frame, the first driving unit is connected to the first support beam, the first gear is connected to the first driving unit, the first gear is meshed with the first rack, and the first driving unit is used to drive the first gear to rotate so that the first rack and the lifting component move in the vertical direction; the first movable component also includes: a first guide rail, which is arranged on the frame and extends in the vertical direction; a first slider, which is slidably connected to the first guide rail in the vertical direction and is connected to the first support beam.

[0012] Optionally, the second moving component includes: a second support beam, the first support beam is movably connected to the second support beam in the second horizontal direction; a second driving member, the second driving member includes a second rack, a second driving unit and a second gear, the second rack is arranged on the first support beam, the second rack extends along the second horizontal direction, the second driving unit is arranged on the first support beam, the second gear is connected to the second driving unit, the second gear is meshed with the second rack, and the second driving unit is used to drive the second gear to rotate so that the first support beam moves in the second horizontal direction; the second moving component also includes: a second guide rail, the second guide rail is arranged on the second support beam, and the second guide rail extends in the second horizontal direction; a second slider, the second slider is slidably connected to the second guide rail in the second horizontal direction, and the first support beam is connected to the second slider.

[0013] Optionally, the frame includes: a first movable frame, which is movably connected to the first support beam in the vertical direction; a second movable frame, which is located at one end of the first movable frame in the vertical direction, and two lifting members are connected to both ends of the second movable frame in the first horizontal direction, and the first horizontal direction is staggered with the vertical direction and the second horizontal direction; the transport mechanism also includes: a pneumatic spring, which is connected to the second movable frame and to the first support beam, and the pneumatic spring is used to drive the second movable frame away from the first support beam.

[0014] In a second aspect, an embodiment of the present application provides a processing device, including: a machine table; a transport mechanism such as any of the above items, wherein a second moving member of the transport mechanism is installed on the machine table, and the transport mechanism is used to lift and move a quartz boat.

[0015] The transport mechanism and processing equipment provided by the present application can support the quartz boat through two supporting members to achieve relative fixation of the supporting assembly and the quartz boat, and then drive the quartz boat to move to a designated position through the first moving assembly and the second moving assembly to achieve transport of the quartz boat. In the process of transporting the quartz boat, the side wall of the quartz boat is not subjected to the pressure generated by clamping, which can avoid the quartz boat being damaged due to insufficient clamping accuracy and excessive clamping force, reduce the probability of damage to the quartz boat, and increase the service life of the quartz boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the transport mechanism in the embodiment of the present application.

[0017] Figure 2 It is a schematic diagram of the structure of a quartz boat in an embodiment of the present application.

[0018] Figure 3 It is a schematic diagram of the first partial structure of the transport mechanism in the embodiment of the present application.

[0019] Figure 4It is a second partial structural schematic diagram of the transport mechanism in the embodiment of the present application.

[0020] Figure 5 It is a schematic diagram of the system connection of the transport mechanism in the embodiment of the present application.

[0021] Figure 6 It is a third partial structural schematic diagram of the transport mechanism in the embodiment of the present application.

[0022] Figure 7 It is a structural disassembly diagram of the transport mechanism in the embodiment of the present application.

[0023] Main component symbols

[0024] Transport mechanism 100

[0025] Quartz boat 200

[0026] Tier 201

[0027] Lifting assembly 10

[0028] Framework 11

[0029] The first movable frame 111

[0030] The second movable frame 112

[0031] Lifting rack 12

[0032] Lifting block 13

[0033] Positioning recess 131

[0034] Guide surface 132

[0035] Limiting part 14

[0036] Extension plate 15

[0037] First moving assembly 20

[0038] First support beam 21

[0039] Connecting frame 22

[0040] First rack 23

[0041] The first driving unit 24

[0042] First motor 241

[0043] The first reducer 242

[0044] First gear 25

[0045] First rail 26

[0046] First slider 27

[0047] The second moving assembly 30

[0048] Second support beam 31

[0049] Second rack 32

[0050] Second driving unit 33

[0051] The second motor 331

[0052] Second reducer 332

[0053] Second gear 34

[0054] Second guide rail 35

[0055] Second slider 36

[0056] Micro switch 40

[0057] Processor 50

[0058] Pneumatic spring 60 DETAILED DESCRIPTION

[0059] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0060] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0061] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0062] See also Figure 1 and Figure 2 , Figure 1 A transport mechanism 100 provided in an embodiment of the present application is shown. Figure 2 A quartz boat 200 provided by an embodiment of the present application is shown.

[0063] The embodiment of the present application provides a processing device. The processing device may include a machine table (not shown) and a transport mechanism 100. The transport mechanism 100 may lift a quartz boat 200 and drive the quartz boat 200 to move linearly in at least two directions. The quartz boat 200 may carry multiple silicon wafers.

[0064] The transport mechanism 100 can move the quartz boat 200 to a specified position, and then the processing equipment can perform coating processing on the silicon wafers carried by the quartz boat 200 .

[0065] In the embodiment of the present application, the length direction and width direction of the transport mechanism 100 can be defined as the first horizontal direction and the second horizontal direction, respectively, and the height direction of the transport mechanism 100 can be defined as the vertical direction. Figure 1 and Figure 2 The Z direction and its reverse direction as shown, the second horizontal direction can be as follows Figure 1 and Figure 2 The X direction and its reverse direction shown, the vertical direction can be as follows Figure 1 and Figure 2 The Y direction and its opposite direction are shown.

[0066] In one embodiment, the transport mechanism 100 may include a lifting assembly 10, a first moving assembly 20, and a second moving assembly 30. The lifting assembly 10 may be connected to the first moving assembly 20, and the second moving assembly 30 may be connected to the first moving assembly 20. The lifting assembly 10 may lift the quartz boat 200 from the bottom. The first moving assembly 20 may drive the lifting assembly 10 to reciprocate in the vertical direction, and the second moving assembly 30 may drive the first moving assembly 20 to reciprocate in the second horizontal direction. The first moving assembly 20 cooperates with the second moving assembly 30 to drive the lifting assembly 10 and the quartz boat 200 to move in the vertical direction and the second horizontal direction.

[0067] It can be understood that the transport mechanism 100 achieves relative fixation with the quartz boat 200 by lifting the quartz boat 200. Compared with the common solution in the related field of clamping the quartz boat 200 from both ends and then moving the quartz boat 200, the probability of damage to the quartz boat 200 due to insufficient clamping accuracy of the mechanism or excessive force on the quartz boat 200 can be reduced, thereby improving the service life of the quartz boat 200.

[0068] Please also read Figure 3 and Figure 4In some embodiments, the lifting assembly 10 may include a frame 11 and two lifting members. The two lifting members are spaced apart in the first horizontal direction. The two lifting members are respectively located at two ends of the frame 11 in the first horizontal direction, and are both fixedly connected to the frame 11. The frame 11 may be connected to the first moving assembly 20, and the first moving assembly 20 drives the lifting assembly 10 to move by driving the frame 11 to move.

[0069] The frame 11 may include a first movable frame 111 and a second movable frame 112. The second movable frame 112 is fixedly connected to one end of the first movable frame 111 in the vertical direction. Both ends of the second movable frame 112 in the first horizontal direction protrude from both sides of the first movable frame 111 in the first horizontal direction. Each lifting member is fixedly mounted on one end of the second movable frame 112 in the first horizontal direction.

[0070] Each lifting member may include a lifting frame 12 and a lifting block 13. The lifting frame 12 is fixedly connected to one end of the second movable frame 112 in the first horizontal direction. The lifting frame 12 protrudes from the side of the second movable frame 112 away from the first movable frame 111 in the vertical direction. The lifting block 13 is fixedly connected to one side of the lifting frame 12 facing the other lifting member in the first horizontal direction, and is located on the side of the lifting frame 12 away from the second movable frame 112 in the vertical direction.

[0071] The transport mechanism 100 may further include two micro switches 40. Each micro switch 40 is fixedly mounted on a side of the corresponding lifting frame 12 facing the other lifting member in the first horizontal direction.

[0072] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, bolt fixing, welding fixing, integral molding fixing, etc.

[0073] It can be understood that the top of the lifting block 13 can abut against the bottom of a part of the structure of the quartz boat 200 to lift the quartz boat 200. When the lifting block 13 lifts the quartz boat 200, the micro switch 40 can abut against a part of the structure of the quartz boat 200; when the lifting block 13 does not support the quartz boat 200, the micro switch 40 does not abut against the quartz boat 200. In this way, the micro switch 40 can detect whether the lifting block 13 lifts the quartz boat 200.

[0074] In some cases, the two ends of the quartz boat 200 in the length direction have lifting ears 201. The two lifting blocks 13 in each lifting member can receive the corresponding lifting ears 201 to lift the quartz boat 200, thereby enabling the lifting assembly 10 and the transport mechanism 100 to lift the quartz boat 200. The transport mechanism 100 can drive the quartz boat 200 to move after lifting the quartz boat 200.

[0075] It can be understood that when the lifting assembly 10 lifts the quartz boat 200 , the length direction of the quartz boat 200 coincides with the first horizontal direction, and the two lifting ears 201 are respectively located at two ends of the quartz boat 200 in the first horizontal direction.

[0076] It can be understood that the top of the lifting block 13 can abut against the bottom of the corresponding lifting ear 201 to receive the corresponding lifting ear 201. When the lifting block 13 receives the lifting ear 201, the micro switch 40 can abut against the lifting ear 201; when the lifting block 13 does not receive the lifting ear 201, the micro switch 40 does not abut against the lifting ear 201.

[0077] It can be understood that in the first horizontal direction, the distance between the lifting block 13 and the corresponding lifting block 13 in another lifting member can be defined as L1, the distance between the two lifting ears 201 can be defined as L2, and the thickness of each lifting ear 201 can be defined as L3, L2≤L1≤L2+2*L3. In the embodiment of the present application, the size of the two quartz boats 200 is not specifically limited. For example, the value interval of the distance between the two lifting ears 201 in the first horizontal direction can be [2136, 2144], and the value interval of the thickness of each lifting ear 201 in the first horizontal direction can be [23, 27], both in millimeters.

[0078] It can be understood that when the quartz boat 200 needs to be moved, the first moving assembly 20 drives the frame 11 to descend, so that each lifting block 13 is located at a lower height in the vertical direction than the corresponding lifting lug 201. Then the second moving assembly 30 drives the first moving assembly 20 to move, so that each lifting block 13 moves below the corresponding lifting lug 201. Then the first moving assembly 20 can drive the frame to rise, so that each lifting block 13 abuts against the bottom of the corresponding lifting lug 201 and lifts the corresponding lifting lug 201, thereby lifting the quartz boat 200.

[0079] Please also read Figure 5 , the micro switches 40 in the two lifting assemblies 10 can be connected to a processor 50 for communication. The processor 50 can be connected to the first moving assembly 20 and the second moving assembly 30 for communication. The processor 50 can determine whether the lifting assembly 10 has completely lifted the quartz boat 200 through the detection results of all the micro switches 40. The processor 50 can trigger the first moving assembly 20 and the second moving assembly 30 to work when it is determined that the lifting assembly 10 has lifted the quartz boat 200, so as to move the quartz boat 200 to a specified position. When the processor 50 determines through the detection results of all the micro switches 40 that at least one micro switch 40 is not in contact with the lifting ear 201, the processor 50 does not trigger the first moving assembly 20 and the second moving assembly 30 to work, so as to reduce the situation where the lifting assembly 10 moves when the quartz boat 200 is not completely lifted, causing damage to the quartz boat 200.

[0080] In the embodiments of the present application, the communication connection method is not specifically limited. For example, the communication connection may be a wired communication connection implemented by a bus or other mechanism. For another example, the communication connection may be a wireless communication connection implemented by 3G, 4G, 5G, Bluetooth, or wireless LAN.

[0081] It is understandable that the processor 50 can also trigger the first movable component 20 and the second movable component 30 to operate when it is determined that the lifting component 10 does not lift the quartz boat 200, so that the lifting block 13 of the lifting component 10 moves to the bottom of the corresponding lifting ear 201, thereby enabling the lifting component 10 to lift the quartz boat 200.

[0082] In the embodiment of the present application, there is no specific limitation on the number of lifting blocks 13 and micro switches 40 in each lifting member. Figure 3 As shown, each lifting member includes two lifting blocks 13 and a micro switch 40 . The two lifting blocks 13 are spaced apart in the second horizontal direction. The micro switch 40 is located between the two lifting blocks 13 and spaced apart from the two lifting blocks 13 .

[0083] In some embodiments, a positioning recess 131 is provided on one side of each lifting block 13 for receiving the lifting ear 201. The positioning recess 131 is used to accommodate at least a portion of the structure of the lifting ear 201. When the lifting block 13 receives the lifting ear 201, at least a portion of the structure of the lifting ear 201 enters the positioning recess 131, and the side wall of the positioning recess 131 can block the side of the lifting ear 201 in the second horizontal direction to limit the movement of the lifting ear 201 in the second horizontal direction, thereby reducing the shaking of the quartz boat 200 when the lifting assembly 10 lifts the quartz boat 200.

[0084] It can be understood that when the lifting ear 201 enters the positioning recess 131 , the lifting ear 201 abuts against the micro switch 40 , and the micro switch 40 can determine that the lifting block 13 has achieved the support of the lifting ear 201 .

[0085] Exemplarily, each lifting member includes two lifting blocks 13, and a positioning recess 131 is opened at the top of each lifting block 13, and the positioning recess 131 penetrates the side of the two lifting blocks 13 facing each other in the same lifting member. Each positioning recess 131 is used to cover one side of the lifting ear 201 in the second horizontal direction.

[0086] In some embodiments, each lifting block 13 is provided with a guide surface 132 on one side facing another lifting block 13 in the second horizontal direction. The guide surface 132 may be an inclined surface or an arc surface. The first end of the guide surface 132 may be defined as an end away from the bottom wall of the corresponding positioning recess 131 in the vertical direction, and the second end may be defined as an end close to the bottom wall of the corresponding positioning recess 131 in the numerical direction. In the second horizontal direction, the first end of the guide surface 132 is located on the side of the second end away from another lifting block 13 in the unified lifting member.

[0087] It can be understood that the guide surface 132 can be aligned with the lifting ear 201 and guide the lifting ear 201 into the corresponding positioning recess 131 .

[0088] In some embodiments, each lifting member may further include a limiting portion 14. The limiting portion 14 is movably connected to the lifting frame 12 in the first horizontal direction. The limiting portion 14 extends along the first horizontal direction. The limiting portion 14 may abut against one side of the quartz boat 200 in the first horizontal direction to limit the movement of the quartz boat 200 in the first horizontal direction when the lifting assembly 10 lifts the quartz boat 200, thereby reducing the shaking of the quartz boat 200 when the lifting assembly 10 lifts the quartz boat 200.

[0089] In some cases, the limiting part 14 can be directly connected to the lifting frame 12. In other cases, the lifting frame 12 is fixedly mounted with an extension plate 15, and the limiting part 14 is movably connected to the extension plate 15, thereby realizing a movably connection with the lifting frame 12.

[0090] In the embodiments of the present application, the connection method of the movable connection is not specifically limited. For example, the limiting portion 14 can be a bolt, the limiting portion 14 can penetrate the lifting frame 12 or the extension plate 15 in the first horizontal direction, and the limiting portion 14 can be threadedly connected to the lifting frame 12 or the extension plate 15.

[0091] It can be understood that the number of the limiting parts 14 in each lifting member can be one or more, and the embodiments of the present application are not limited to this.

[0092] Please also read Figure 6In some embodiments, the first movable seat assembly may include a first support beam 21, a first driving member and a connecting frame 22. The connecting frame 22 is covered on at least a part of the structure of the first movable frame 111, and the first movable frame 111 is movably connected to the connecting frame 22 in the vertical direction. The first support beam 21 is fixedly connected to one side of the connecting frame 22 in the second horizontal direction. The first driving member may include a first rack 23, a first driving part 24 and a first gear 25. The first rack 23 extends in the vertical direction. The first rack 23 is fixedly mounted on the frame 11. The first driving part 24 is fixedly mounted on the connecting frame 22. The first gear 25 is fixedly mounted on the driving end of the first driving part 24, and the first gear 25 is meshed with the first rack 23. The first driving part 24 can drive the first gear 25 to rotate, and the rotation of the first gear 25 drives the first rack 23 to move in the vertical direction, so that the lifting assembly 10 and the quartz boat 200 lifted by the lifting assembly 10 move in the vertical direction.

[0093] It can be understood that the axial direction of the first gear 25 can coincide with the second horizontal direction.

[0094] In the embodiments of the present application, the type of the first driving unit 24 is not specifically limited. For example, the first driving unit 24 may be, but is not limited to, a reduction motor, a rotary cylinder, etc. Exemplarily, the first driving unit 24 may include a first motor 241 and a first reducer 242, the body of the first reducer 242 is fixedly mounted on the connecting frame 22, and the output shaft of the first reducer 242 is coaxially fixed with the first gear 25; the body of the first motor 241 is fixedly mounted on the body of the first reducer 242, the output shaft of the first motor 241 is connected to the input end of the first reducer 242, and the first motor 241 can drive the gear set in the first reducer 242 to rotate, so as to drive the output shaft of the first reducer 242 and the first gear 25 to rotate.

[0095] In the embodiment of the present application, there is no specific limitation on the number of the first driving parts 24, the first gears 25 and the first racks 23. When there are multiple first driving parts 24, the first gears 25 and the first racks 23, the multiple first driving parts 24 and the multiple first gears 25 correspond to each other, and the multiple first gears 25 correspond to the multiple first racks 23.

[0096] Please also read Figure 7 In some embodiments, the first moving assembly 20 may further include a first guide rail 26 and a first slider 27. The first guide rail 26 extends in the vertical direction. The first guide rail 26 is fixedly mounted on the first movable frame 111. The first slider 27 is fixedly mounted on the connecting frame 22, and the first slider 27 is slidably connected to the first guide rail 26 in the vertical direction.

[0097] It can be understood that the linear guide rail pair formed by the first slider 27 and the first guide rail 26 can realize the movable connection between the first movable frame 111 and the connecting frame 22 in the vertical direction. In the embodiment of the present application, the number of the first guide rails 26 and the number of the first sliders 27 connected to one first guide rail 26 are not specifically limited. For example, Figure 6 As shown, there are two first guide rails 26 , and the two first guide rails 26 are spaced apart in the first horizontal direction; and a plurality of first sliding blocks 27 are slidably connected to each first guide rail 26 .

[0098] In some embodiments, the transport mechanism 100 may further include a pneumatic spring 60. The pneumatic spring 60 is fixedly connected to the second movable frame 112 and the first support beam 21. The pneumatic spring 60 may drive the second movable frame 112 to move in a direction away from the first support beam 21.

[0099] For example, the pneumatic spring 60 may include a piston rod and a sleeve. The sleeve is sleeved on the piston rod in the vertical direction. The piston rod is slidably connected to the sleeve in the vertical direction. The sleeve passes through the first support beam 21 in the vertical direction and is fixedly connected to the first support beam 21. The piston rod is fixedly connected to the second movable frame 112.

[0100] It can be understood that the pneumatic spring 60 can support the frame 11, reduce the load when the first driving member drives the lifting assembly 10 to move, and increase the service life of the first driving member.

[0101] In some embodiments, the second movable seat assembly may include a second support beam 31 and a second driving member. The second support beam 31 may be fixedly connected to the machine platform so that the transport mechanism 100 may be fixedly installed on the machine platform. The first support beam 21 is movably connected to the second support beam 31 in the second horizontal direction. The second driving member may include a second rack 32, a second driving portion 33 and a second gear 34. The second rack 32 extends along the second horizontal direction. The second rack 32 is fixedly mounted on the second support frame. The second driving portion 33 is fixedly mounted on the first support beam 21. The second gear 34 is fixedly mounted on the driving end of the second driving portion 33, and the second gear 34 is meshed with the second rack 32. The second driving portion 33 can drive the second gear 34 to rotate, and the rotation of the second gear 34 drives the first support beam 21 to move in the second horizontal direction, thereby moving the lifting assembly 10 and the quartz boat 200 lifted by the lifting assembly 10 in the second horizontal direction.

[0102] It can be understood that the axial direction of the second gear 34 can coincide with the vertical direction.

[0103] In the embodiments of the present application, the type of the second driving unit 33 is not specifically limited. For example, the second driving unit 33 may be, but is not limited to, a reduction motor, a rotary cylinder, etc. Exemplarily, the second driving unit 33 may include a second motor 331 and a second reducer 332, the body of the second reducer 332 is fixedly mounted on the first support beam 21, and the output shaft of the second reducer 332 is coaxially fixed with the second gear 34; the body of the second motor 331 is fixedly mounted on the body of the second reducer 332, the output shaft of the second motor 331 is connected to the input end of the second reducer 332, and the second motor 331 can drive the gear set in the second reducer 332 to rotate, so as to drive the output shaft of the second reducer 332 and the second gear 34 to rotate.

[0104] It is understandable that the number of the second support beam 31 and the second driving member can be one or more, and the embodiment of the present application does not limit this. Figure 7 As shown, the number of the second support beams 31 may be two, and every two second support beams 31 may be spaced apart in the first horizontal direction, and a second driving member is correspondingly provided for each second support beam 31 .

[0105] For example, Figure 1 As shown, the number of the second support beams 31 may be two, and every two second support beams 31 may be spaced apart in the first horizontal direction, wherein a second driving member is disposed on one of the second support beams 31 .

[0106] In some embodiments, the second moving assembly 30 may further include a second guide rail 35 and a second slider 36. The second guide rail 35 extends along the second horizontal direction. The second guide rail 35 is fixedly mounted on the second support beam 31. The second slider 36 is fixedly mounted on the first support beam 21, and the second slider 36 is slidably connected to the second guide rail 35 in the second horizontal direction.

[0107] It can be understood that the linear guide rail pair formed by the second slider 36 and the second guide rail 35 can realize the movable connection between the first support beam 21 and the second support beam 31 in the second horizontal direction. In the embodiment of the present application, the number of the second guide rails 35 and the number of the second sliders 36 connected to one second guide rail 35 are not specifically limited. For example, Figure 7 As shown, the number of second guide rails 35 can be equal to the number of second support beams 31 , that is, two of each, with one second guide rail 35 installed on each second support beam 31 ; and each second guide rail 35 is slidably connected to a plurality of second sliders 36 .

[0108] It is understood that the processor 50 can be connected to the first driving unit 24 and the second driving unit 33. The processor 50 can control the lifting assembly 10 and the lifting assembly 10 to move in the vertical direction and the second horizontal direction by triggering the first driving unit 24 and the second driving unit 33 to work.

[0109] When the processing equipment and the handling mechanism 100 provided by the embodiment of the present application are not lifting the quartz boat 200, the first driving part 24 can drive the lifting assembly 10 to move in the vertical direction, so that the lifting block 13 can be lowered to a position below the lifting ears 201 of the quartz boat 200 to be lifted. Then the second driving part 33 can drive the lifting assembly 10 to approach the quartz boat 200 in the second horizontal direction. When each lifting block 13 moves to the bottom of the two lifting ears 201, the second driving part 33 can stop working, and the first driving part 24 can work to drive the lifting block 13 to rise to approach the corresponding lifting ears 201 and receive the corresponding lifting ears 201. When the two lifting ears 201 enter the corresponding positioning recesses 131, each lifting ear 201 abuts against the corresponding micro switch 40, and the micro switch 40 can detect that the lifting block 13 has received the lifting ears 201. Then, the first driving part 24 and the second driving part 33 can work to drive the lifting assembly 10 and the quartz boat 200 to move in the vertical direction and the second horizontal direction, so that the quartz boat 200 moves to a designated position.

[0110] It can be understood that the processing equipment and the transport mechanism 100 provided in the present application can achieve relative fixation with the quartz boat 200 by lifting the ear 201 of the quartz boat 200, and then drive the quartz boat 200 to move to a specified position through the first moving component 20 and the second moving component 30. Compared with the general solution of fixing the quartz boat 200 by clamping in the relevant field, the transport mechanism 100 provided in the present application can avoid the quartz boat 200 from being damaged due to insufficient clamping accuracy and excessive clamping force, can reduce the probability of damage to the quartz boat 200, and can increase the service life of the quartz boat 200.

[0111] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent parts of the claims are included in the present application.

Claims

1. A transport mechanism for transporting a quartz boat, wherein two opposite sides of the quartz boat are provided with lifting ears, characterized in that: include: A lifting component, the lifting component comprises a frame and two lifting members, the two lifting members are connected to the frame, the two lifting members are spaced apart in a first horizontal direction, each of the lifting members comprises a lifting frame and two lifting blocks, the lifting frame is connected to the frame, the two lifting blocks are spaced apart in a second horizontal direction, each of the lifting blocks is spaced apart from the frame in a vertical direction, and the two lifting blocks in each of the lifting members are used to jointly support one of the lifting ears of the quartz boat; wherein the first horizontal direction is perpendicular to the second horizontal direction; in the first horizontal direction, the spacing between the two relative lifting blocks is defined as L1, the spacing between the two lifting ears is defined as L2, the thickness of the lifting ears is defined as L3, and L2≤L1≤L2+2*L3; a first moving assembly, the first moving assembly being connected to the frame, and the first moving assembly being used to drive the frame to move in a vertical direction, wherein the vertical direction is perpendicular to the first horizontal direction and the second horizontal direction; a second moving assembly, the second moving assembly being connected to the first moving assembly, and the second moving assembly being used to drive the first moving assembly to move in a second horizontal direction; Among them, the first moving component is used to drive the frame to descend so that the height of each lifting block in the vertical direction is lower than the lifting ear of the quartz boat, the second moving component is used to drive the first moving component to move horizontally so that each lifting block is located below the lifting ear, and the first moving component is used to drive the frame to rise to lift the quartz boat through the lifting ear.

2. The transport mechanism according to claim 1, characterized in that: Each of the lifting blocks is located on a side of the corresponding lifting frame away from the frame, and each of the lifting blocks is provided with a positioning recess on a side facing the frame, and the positioning recess is used to accommodate at least a portion of the structure of the lifting ear to limit the movement of the lifting ear.

3. The transport mechanism according to claim 2, characterized in that: The transport mechanism also includes: A micro switch is disposed in the corresponding positioning recess of the supporting member, and the micro switch is used to detect whether the quartz boat is in contact with the supporting member.

4. The transport mechanism according to claim 3, characterized in that: In one of the lifting members, the positioning recess is formed on the side of each of the lifting blocks facing the other lifting blocks in the second horizontal direction, and a guide surface is formed on the side of each of the lifting blocks facing the other lifting blocks in the second horizontal direction; the guide surface is an arc surface or a slope, and the first end of the guide surface is located on the side of the second end of the guide surface away from the other lifting block in the second horizontal direction, and the guide surface is used to abut against the lifting ear and guide the lifting ear into the positioning recess; wherein the first end of the guide surface is the end facing away from the bottom wall of the positioning recess in the vertical direction, and the second end is the end close to the bottom wall of the positioning recess in the vertical direction.

5. The transport mechanism according to claim 1, characterized in that: Each of the lifting members further comprises: A limiting portion, wherein the limiting portion is movably connected to the supporting frame in the first horizontal direction, and the limiting portion is used to abut against one side of the quartz boat in the first horizontal direction to limit the quartz boat.

6. The transport mechanism according to claim 5, characterized in that: An extension plate is installed on each of the lifting frames, and the limiting portion passes through the corresponding extension plate in the first horizontal direction and is threadedly connected with the extension plate.

7. The transport mechanism according to claim 1, characterized in that: The first moving component comprises: a first support beam connected to the frame and the second moving assembly; A first driving member, the first driving member comprises a first rack, a first driving part and a first gear, the first rack is arranged on the frame, the first driving part is connected to the first supporting beam, the first gear is connected to the first driving part, the first gear is meshed with the first rack, and the first driving part is used to drive the first gear to rotate so that the first rack and the lifting assembly move in the vertical direction; a first guide rail, the first guide rail being arranged on the frame, and the first guide rail extending in the vertical direction; A first sliding block is slidably connected to the first guide rail in the vertical direction, and the first sliding block is connected to the first support beam.

8. The transport mechanism according to claim 7, characterized in that: The second moving component comprises: a second support beam, the first support beam being movably connected to the second support beam in the second horizontal direction; a second driving member, the second driving member comprising a second rack, a second driving part and a second gear, the second rack being arranged on the first support beam, the second rack extending along the second horizontal direction, the second driving part being arranged on the first support beam, the second gear being connected to the second driving part, the second gear being meshed with the second rack, and the second driving part being used for driving the second gear to rotate so as to move the first support beam in the second horizontal direction; a second guide rail, the second guide rail being disposed on the second support beam, the second guide rail extending in the second horizontal direction; A second slider is connected to the second guide rail in a sliding manner in the second horizontal direction, and the first support beam is connected to the second slider.

9. The transport mechanism according to claim 7, characterized in that: The framework includes: a first movable frame, the first movable frame being movably connected to the first support beam in the vertical direction; a second movable frame, the second movable frame being located at one end of the first movable frame in the vertical direction, the two lifting members being connected to two ends of the second movable frame in the first horizontal direction, the first horizontal direction being staggered with the vertical direction and the second horizontal direction; A pneumatic spring, wherein the pneumatic spring is connected to the second movable frame and to the first support beam, and the pneumatic spring is used to drive the second movable frame away from the first support beam.

10. A processing equipment, characterized in that: include: Machine; The transport mechanism according to any one of claims 1 to 9, wherein the transport mechanism is installed on the machine platform, and the transport mechanism is used to lift and move the quartz boat.

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