Water segregator, sample table assembly and MPCVD device

Abstract

The utility model relates to the technical field of microwave plasma, in particular to a water segregator, a sample table assembly and an MPCVD device, the water segregator comprises a water segregator body of a disc-shaped structure, the top of the disc-shaped structure is provided with a through hole, the bottom of the disc-shaped structure is provided with a connecting part, and the through hole is communicated with the connecting part. The connecting parts are arranged at intervals and form channels, a heat dissipation water channel does not need to be machined, the water segregator is simple in structure, the sample table assembly comprises the water segregator, and the MPCVD device comprises the sample table assembly.

Description

Technical Field

[0001] The utility model relates to the technical field of microwave plasma, in particular to a water separator, a sample stage component and an MPCVD device. Background Art

[0002] Microwave plasma chemical vapor deposition is an advanced method for preparing high-quality diamond films today. This method requires a microwave plasma chemical vapor deposition device (hereinafter referred to as MPCVD device). The MPCVD device introduces the microwaves generated by the microwave generator into the reaction chamber through a waveguide transmission system, and introduces a mixed gas of methane and hydrogen. Under the excitation of microwaves, a glow discharge is generated in the reaction chamber, which ionizes the molecules of the reaction gas and generates plasma, which is deposited on the sample stage to obtain a diamond film.

[0003] The temperature inside the reaction chamber of the MPCVD device is very high, and the sample stage assembly is placed in this high-temperature environment for a long time. If it is not promptly and effectively helped to dissipate heat and cool down, its service life will inevitably be reduced or even damaged.

[0004] The heat dissipation channels of the sample stage assembly in the prior art are complicated (see Figure 1 and Figure 2 ), which is difficult to process and manufacture, seriously restricting the application prospects of MPCVD devices. Utility Model Content

[0005] The purpose of the utility model is to overcome the shortcomings of the prior art and provide a water divider with a simple structure and without the need for processing heat dissipation water channels.

[0006] Another object of the present invention is to provide a sample stage assembly, which adopts the above-mentioned water separator.

[0007] Another object of the present invention is to provide an MPCVD device, which adopts the above-mentioned sample stage assembly.

[0008] The purpose of the utility model is achieved through the following technical solutions:

[0009] A water divider comprises a water divider body in a disc-shaped structure, wherein a through hole is arranged on the top of the disc-shaped structure, and connecting parts are arranged at intervals on the bottom of the disc-shaped structure to form a channel.

[0010] Furthermore, the channels are evenly arranged.

[0011] Furthermore, the through hole is centrally arranged.

[0012] A sample stage assembly includes the water divider, a base and a sample stage, a cavity is provided between the base and the sample stage, the water divider is provided between the base and the sample stage, the water divider divides the cavity into a first cavity and a second cavity, and the first cavity and the second cavity are connected through a channel.

[0013] Furthermore, it also includes an extension table connected to the sample table, a receiving cavity is provided between the extension table and the sample table, the sample table is provided with a hole, and the receiving cavity and the first cavity are connected through the hole.

[0014] Furthermore, the holes are evenly arranged.

[0015] An MPCVD device comprises the sample stage assembly.

[0016] Furthermore, the second cavity is connected to a cooling medium input end, and the first cavity is connected to a cooling medium output end.

[0017] The utility model has the following advantages:

[0018] The water divider of the utility model has a simple structure and does not require processing and manufacturing of heat dissipation water channels; after adopting the water divider of the utility model, there is no need to process complicated heat dissipation water channels on the sample stage assembly, thereby greatly reducing the processing difficulty of the sample stage assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the implementation of the utility model, the following is a brief introduction to the drawings required for use in the implementation. It should be understood that the following drawings only show certain embodiments of the utility model, and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can also be obtained based on these drawings without creative work.

[0020] Figure 1 It is a partial cross-sectional schematic diagram of a sample stage assembly in the prior art;

[0021] Figure 2 for Figure 1 AA section view in;

[0022] Figure 3 It is a three-dimensional schematic diagram of the water distributor of the utility model;

[0023] Figure 4 It is a cutaway schematic diagram of the water distributor of the utility model;

[0024] Figure 5 It is a cross-sectional schematic diagram of the sample stage assembly of the utility model;

[0025] Figure 6It is a three-dimensional schematic diagram of the sample stage of the utility model;

[0026] Figure 7 It is a cross-sectional schematic diagram of the sample stage of the utility model;

[0027] Figure 8 It is a partial cutaway schematic diagram of the MPCVD device of the utility model;

[0028] In the figure: 1-water divider, 2-water divider body, 3-through hole, 4-connecting part, 5-channel, 6-base, 7-sample table, 8-first cavity, 9-second cavity, 10-expansion table, 11-accommodating cavity, 12-hole, 13-first pipe, 14-second pipe. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the implementation of the utility model clearer, the technical solution in the implementation of the utility model will be clearly and completely described below in conjunction with the drawings in the implementation of the utility model. Obviously, the described implementation is only a part of the implementation of the utility model, not all of the implementations. Based on the implementation of the utility model, all other implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0031] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0032] In the present utility model, unless otherwise clearly specified and limited, the first feature being above or below the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. Moreover, the first feature being above, above, and above the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being below, below, and below the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] like Figure 3 and Figure 4 As shown, a water separator 1 includes a water separator body 2 in a disc-shaped structure, the top of the disc-shaped structure (with an attached Figure 3 as a reference) is provided with a through hole 3, the bottom of the disc-shaped structure (with Figure 3 For reference) a connecting portion 4 is provided, the connecting portions 4 are spaced apart and form a channel 5 for the circulation of a cooling medium with the bottom of the disc-shaped structure; the through hole 3 can be used for the circulation channel of the cooling medium and can also be used for the subsequent installation of a second pipe 14; the connecting portion 4 is used to connect the water divider body 2 with the base 6 on the one hand, and to raise the bottom of the disc-shaped structure and form a channel 5 for the circulation of a cooling medium with the bottom of the disc-shaped structure on the other hand; in this way, the cooling medium in the disc-shaped structure (i.e. the second cavity 9 hereinafter) can flow to the outside of the disc-shaped structure (i.e. the first cavity 8 hereinafter) through the channel 5, thereby realizing the function of a heat dissipation water channel. Compared with the intricate heat dissipation water channels in the prior art, the water divider of the utility model has a simple structure and does not require the processing and production of heat dissipation water channels, so it is more conducive to processing and production.

[0034] Furthermore, in order to allow the cooling medium to enter the first cavity 8 evenly, thereby achieving the purpose of even heat dissipation, the channels 5 are evenly arranged.

[0035] Furthermore, in order to make the distance from the cooling medium in the first cavity 8 to the cooling medium output end equal, thereby achieving the purpose of uniform heat dissipation, the through hole 3 is centrally arranged.

[0036] like Figures 5 to 7 As shown, a sample stage assembly includes the water separator 1, and also includes a base 6 and a sample stage 7. The sample stage 7 is detachably connected to the base 6, a cavity is provided between the base 6 and the sample stage 7, and the water separator 1 is provided between the base 6 and the sample stage 7. The water separator 1 is detachably connected to the base 6, and the water separator 1 divides the cavity into a first cavity 8 and a second cavity 9, and the first cavity 8 and the second cavity 9 are connected through a channel 5.

[0037] Furthermore, it also includes an expansion table 10, which is detachably connected to the sample table 7, and a receiving cavity 11 is provided between the expansion table 10 and the sample table 7. The sample table 7 is provided with a hole 12 for the circulation of a cooling medium, and the receiving cavity 11 is connected to the first cavity 8 through the hole 12.

[0038] Furthermore, in order to allow the cooling medium to enter the accommodating cavity 11 evenly, thereby achieving the purpose of uniform heat dissipation, the holes 12 are evenly arranged.

[0039] An MPCVD device comprises the sample stage assembly.

[0040] Furthermore, the second cavity 9 is connected to the cooling medium input end, and the first cavity 8 is connected to the cooling medium output end; specifically, Figure 8 As shown, the MPCVD device of the utility model includes the sample stage assembly, and also includes a first pipe 13 and a second pipe 14, the first pipe 13 is connected to the base 6, the second pipe 14 passes through the through hole 3 and is connected to the first cavity 8, the first pipe 13 is sleeved on the second pipe 14, and a cooling medium flow channel is formed between the inner wall of the first pipe 13 and the outer wall of the second pipe 14 and is connected to the second cavity 9; when heat is dissipated, the cooling medium flows into the second cavity 9 from between the inner wall of the first pipe 13 and the outer wall of the second pipe 14, and then flows into the first cavity 8 through the channel 5, a part of the cooling medium in the first cavity 8 flows into the accommodating cavity 11 through the hole 12, and a part flows out through the second pipe 14, thereby achieving heat dissipation.

[0041] It should be particularly pointed out that the water divider of the utility model has a simple structure and does not require processing and manufacturing of heat dissipation water channels; and the sample table assembly of the utility model, because it adopts the water divider of the utility model, does not need to process complicated heat dissipation water channels as in the prior art, thereby greatly reducing the difficulty of processing the sample table assembly.

[0042] The above description is only the preferred implementation of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A water distributor (1), characterized in that: It comprises a water divider body (2) in a disc-shaped structure, wherein a through hole (3) is arranged at the top of the disc-shaped structure, and connecting parts (4) are arranged at intervals between the connecting parts (4) to form channels (5).

2. The water distributor (1) according to claim 1, characterized in that: The channels (5) are evenly arranged.

3. The water distributor (1) according to any one of claims 1 or 2, characterized in that: The through hole (3) is centrally arranged.

4. A sample stage assembly, characterized in that: The water separator (1) comprises the water separator (1) according to any one of claims 1 to 3, and further comprises a base (6) and a sample stage (7), wherein a cavity is arranged between the base (6) and the sample stage (7), and the water separator (1) is arranged between the base (6) and the sample stage (7), and the water separator (1) divides the cavity into a first cavity (8) and a second cavity (9), and the first cavity (8) and the second cavity (9) are connected via a channel (5).

5. The sample stage assembly according to claim 4, characterized in that: It also comprises an extension table (10) connected to the sample table (7), a receiving cavity (11) is provided between the extension table (10) and the sample table (7), the sample table (7) is provided with a hole (12), and the receiving cavity (11) and the first cavity (8) are connected via the hole (12).

6. The sample stage assembly according to claim 5, characterized in that: The holes (12) are evenly arranged.

7. An MPCVD device, characterized in that: A sample stage assembly comprising any one of claims 4 to 6.

8. The MPCVD device according to claim 7, characterized in that: The second cavity (9) is connected to a cooling medium input end, and the first cavity (8) is connected to a cooling medium output end.

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