Czochralski method crucible size detection device

Abstract

The utility model provides a crucible size detection device for a Czochralski method. The crucible size detection device comprises a frame and a plurality of distance measuring sensors, the frame comprises two U-shaped frames and a top plate, the two U-shaped frames are vertically connected in a cross shape at the center of the bottom, the two U-shaped frames jointly define an axisymmetric containing space, the two U-shaped frames form a cross-shaped horizontal bottom face extending in the same horizontal plane at the bottom, and a bottom containing hole used for containing a corresponding distance measuring sensor is formed in the center of the cross-shaped horizontal bottom face; an arc surface is formed at the inner corner of each U-shaped frame; corner position accommodating holes for accommodating the corresponding distance measuring sensors are formed in the inner corners of the U-shaped frames and form an angle of 45 degrees with the horizontal plane; at least one vertical section of the two U-shaped frames is provided with scales on a vertical surface which is directly adjacent to the accommodating space; the top plate is horizontally arranged at the tops of the four vertical sections of the two U-shaped frames, the top plate is provided with a cylindrical hole penetrating in the vertical direction, the diameter of the cylindrical hole is not smaller than that of the containing space, and the cylindrical hole and the containing space are coaxial.

Description

Technical Field

[0001] The present disclosure relates to the field of crystal growth, and more particularly to a crucible size detection device for a Czochralski method. Background Art

[0002] In the field of crystal growth, the Czochralski method of growing crystals requires the use of a large number of quartz crucibles, which have high requirements for the precision of their processing dimensions, and have certain requirements for the height, diameter and bottom curvature of the crucible. The current detection method is usually to measure manually with traditional tools such as calipers and rulers. Since manual measurement is affected by the habits of the measurer, the proficiency of the operator and other factors, both the accuracy and functionality of the measurement need to be improved. Utility Model Content

[0003] In view of the problems existing in the background technology, an object of the present disclosure is to provide a crucible size detection device for a Czochralski method, which can improve the accuracy of crucible size detection for a Czochralski method.

[0004] Another object of the present disclosure is to provide a crucible size detection device for a Czochralski process, which can improve the functionality of the crucible size detection device for a Czochralski process.

[0005] Therefore, a crucible size detection device for the Czochralski method is provided, which comprises a frame and a plurality of distance measuring sensors; the frame comprises two U-shaped frames and a top plate, the two U-shaped frames are vertically connected in a cross at the center of the bottom, the two U-shaped frames together form an axisymmetric accommodation space for accommodating the Czochralski method crucible, the two U-shaped frames form a cross-shaped horizontal bottom surface extending in the same horizontal plane at the bottom, the cross-shaped horizontal bottom surface is used to support the bottom plane of the Czochralski method crucible, a bottom position accommodation hole for accommodating the corresponding distance measuring sensor is provided at the center of the cross-shaped horizontal bottom surface, each U-shaped frame forms an arc surface at the inner corner, the arc surface is used to correspond to the arc-shaped portion of the bottom of the outer surface of the Czochralski method crucible; each U-shaped frame has a hole for accommodating the corresponding distance measuring sensor at an inner corner at an angle of 45 degrees to the horizontal plane. Corner accommodating holes; the distance measuring sensors in all the corner accommodating holes and the distance measuring sensors in the bottom accommodating holes are used together to measure the curvature of the arc-shaped part of the bottom of the outer surface of the Czochralski crucible; at least one vertical section of the two U-shaped frames is provided with a scale on the vertical plane directly adjacent to the accommodating space, and the scale is used to measure the height of the Czochralski crucible; the top plate is horizontally arranged on the top of the four vertical sections of the two U-shaped frames, and the top plate has a cylindrical hole penetrating in the up-down direction, the diameter of the cylindrical hole is not less than the diameter of the accommodating space, the cylindrical hole is coaxial with the accommodating space, and the bottom edge of the cylindrical hole is used to detect the gap change in the up-down direction between the top surface of the peripheral wall of the Czochralski crucible and the bottom edge of the cylindrical hole when the Czochralski crucible rotates in the accommodating space to judge the uniformity of the rotation of the Czochralski crucible.

[0006] The beneficial effects of the present disclosure are as follows.

[0007] In the device for detecting the size of a crucible for the Czochralski method according to the present disclosure, when the crucible for the Czochralski method is placed in the accommodation space, the bottom plane of the crucible for the Czochralski method is supported on the cross-shaped horizontal bottom surface, and the operator only needs to determine the height of the crucible for the Czochralski method when it is placed in the accommodation space by the scale provided on the vertical surface of the at least one vertical section, thereby avoiding the influence of manual operation of measuring the height manually using a caliper or a ruler, and improving the accuracy of measurement (i.e. detection). Relative to the scale provided on the vertical surface of the at least one vertical section, the operator can use the finger to rotate the Czochralski method crucible to change the position through the hollow space between the two U-shaped frames, thereby measuring the height of multiple positions of the Czochralski method crucible, and then comparing the heights measured at multiple positions with the required height to determine whether the deviation is within the specified range, and then determining the uniformity of the height of the entire Czochralski method crucible, because when detecting each position, the Czochralski method crucible only needs to be rotated to measure, so the convenience of operation is improved.

[0008] In the device for detecting the size of the crucible for the Czochralski method according to the present disclosure, when the crucible for the Czochralski method is placed in the accommodating space, the bottom plane of the crucible for the Czochralski method is supported on a cross-shaped horizontal bottom plane, and the operator can visually adjust whether the crucible for the Czochralski method is centered between the four vertical segments, and then start the distance measuring sensors in all the corner accommodating holes and the distance measuring sensors in the bottom accommodating holes to measure the curvature of the arc-shaped portion of the bottom of the outer surface of the crucible for the Czochralski method. The multiple distances measured by multiple (a total of 5) distance measuring sensors are used to determine whether the curvature of the arc-shaped portion of the bottom of the outer surface of the crucible for the Czochralski method meets the requirements as a whole and at specific positions, thereby using multiple distance measuring sensors to detect the curvature of the arc-shaped portion of the bottom of the outer surface of the crucible for the Czochralski method, reducing the use of manual labor and improving the measurement (i.e., detection) accuracy.

[0009] In the device for detecting the size of the crucible for the Czochralski method according to the present disclosure, when the crucible for the Czochralski method is placed in the accommodating space, the bottom plane of the crucible for the Czochralski method is supported on the cross-shaped horizontal bottom plane, and the operator can visually adjust whether the crucible for the Czochralski method is centered between the four vertical sections. Thereafter, the operator uses his fingers to rotate the crucible for the Czochralski method to change its position (i.e., simulates the rotation of the crucible for the Czochralski method when growing single crystals by the Czochralski method) through the hollow space between the two U-shaped frames, and observes the gap between the top surface of the peripheral wall of the crucible for the Czochralski method and the bottom edge of the cylindrical hole in the up and down directions at a fixed position point of the bottom edge of the cylindrical hole to determine whether there is a visually observable change, thereby judging the uniformity of the rotation of the crucible for the Czochralski method.

[0010] In the device for detecting the size of the crucible used in the Czochralski method according to the present disclosure, the scales provided on the vertical surface of the at least one vertical section, the multiple distance measuring sensors and the manual rotation / turning of the Czochralski crucible realize multi-point measurement, thereby being able to obtain the size information of the Czochralski crucible in a more comprehensive and accurate manner.

[0011] In the device for detecting the size of the crucible for the Czochralski method according to the present disclosure, it is possible to detect the height of the crucible for the Czochralski method, the curvature of the curved portion of the bottom of the outer surface of the crucible for the Czochralski method, and the uniformity of the rotation of the crucible for the Czochralski method, thereby achieving multifunctional detection of the three indicators and improving the functionality and detection efficiency of the device for detecting the size of the crucible for the Czochralski method. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a three-dimensional view of a crucible size detection device for a Czochralski process according to the present disclosure, wherein the crucible for a Czochralski process is not accommodated therein and a distance measuring sensor is schematically shown.

[0013] Figure 2 yes Figure 1 A top view of the device, wherein the distance measuring sensor is not shown.

[0014] Figure 3 yes Figure 1 A front view of the device, wherein the distance measuring sensor is not shown.

[0015] Figure 4 It is a perspective view of a crucible size detection device for a Czochralski process according to the present disclosure, wherein a Czochralski crucible is accommodated therein.

[0016] Figure 5 yes Figure 4 A front view of a Czochralski crucible is shown in section.

[0017] The reference numerals are described as follows:

[0018] 100 Crucible size detection device for Czochralski method Rb bottom position hole

[0019] D 12 top plate in up and down direction

[0020] 1 frame 121 cylindrical hole

[0021] 11U frame 121a bottom edge

[0022] 111 arc surface 121b top edge

[0023] 112 Corner position accommodation hole 121c peripheral surface

[0024] 113 vertical segment 2 distance sensor

[0025] 113a vertical surface 200 Czochralski crucible

[0026] 113b scale 200a arc part

[0027] 113c inner surface 200b top surface

[0028] S Accommodation space G Gap

[0029] Sb cross horizontal bottom DETAILED DESCRIPTION

[0030] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0031] Reference Figures 1 to 5 According to the present disclosure, the crucible size detection device 100 for the Czochralski method includes a frame 1 and a plurality of distance measuring sensors 2. The frame 1 includes two U-shaped frames 11 and a top plate 12. The two U-shaped frames 11 are vertically connected in a cross at the bottom center, and the two U-shaped frames 11 together enclose an axisymmetric accommodation space S for accommodating the Czochralski method crucible 200. The two U-shaped frames 11 form a cross-shaped horizontal bottom surface Sb extending in the same horizontal plane at the bottom, and the cross-shaped horizontal bottom surface Sb is used to support the bottom plane of the Czochralski method crucible 200. A bottom position accommodation hole Rb for accommodating the corresponding distance measuring sensor 2 is provided at the center of the cross-shaped horizontal bottom surface Sb. Each U-shaped frame 11 forms an arc surface 111 at the inner corner, and the arc surface 111 is used to correspond to the arc portion of the bottom of the outer surface of the Czochralski method crucible 200. The U-shaped frames 11 are provided with a corner accommodating hole 112 at an angle of 45 degrees to the horizontal plane at the inner corner for accommodating the corresponding distance measuring sensor 2; the distance measuring sensors 2 in all the corner accommodating holes 112 and the distance measuring sensor 2 in the bottom accommodating hole Rb are used together to measure the curvature of the arc-shaped portion 200a at the bottom of the outer surface of the crucible 200 for the Czochralski method; at least one vertical section 113 in the two U-shaped frames 11 is provided with a scale 113b on a vertical surface 113a directly adjacent to the accommodating space S, and the scale 113b is used to measure the height of the crucible 200 for the Czochralski method. The top plate 12 is horizontally arranged on the top of the four vertical sections 113 of the two U-shaped frames 11. The top plate 12 has a cylindrical hole 121 that penetrates along the up-down direction D. The diameter of the cylindrical hole 121 is not less than the diameter of the accommodating space S. The cylindrical hole 121 is coaxial with the accommodating space S. The bottom edge 121a of the cylindrical hole 121 is used to detect the change in the gap G in the up-down direction D between the top surface 200b of the peripheral wall of the Czochralski crucible 200 and the bottom edge 121a of the cylindrical hole 121 when the Czochralski crucible 200 rotates in the accommodating space S, so as to judge the uniformity of the rotation of the Czochralski crucible 200.

[0032] In the device 100 for detecting the size of the crucible for the Czochralski method according to the present disclosure, when the crucible 200 for the Czochralski method is placed in the accommodating space S, the bottom plane of the crucible 200 for the Czochralski method is supported on the cross-shaped horizontal bottom surface Sb, and the operator only needs to determine the height of the crucible 200 for the Czochralski method when it is placed in the accommodating space S through the scale 113b provided on the vertical surface 113a of the at least one vertical section 113, thereby avoiding the influence of manual operation of measuring the height with a caliper or a ruler, thereby improving the measurement (i.e., detection) accuracy. With respect to the scale 113b provided on the vertical surface 113a of the at least one vertical section 113, the operator can use his fingers to rotate the Czochralski crucible 200 to change its position through the hollow space between the two U-shaped frames 11, thereby measuring the heights of the Czochralski crucible 200 at multiple positions, and then comparing the heights measured at multiple positions with the required heights to determine whether the deviations are within the specified range, and then determining the overall height uniformity of the Czochralski crucible 200, because when detecting at each position, the Czochralski crucible 200 only needs to be rotated to perform the measurement, thereby improving the convenience of operation.

[0033] In the crucible size detection device 100 for the Czochralski method according to the present disclosure, when the crucible 200 for the Czochralski method is placed in the accommodating space S, the bottom plane of the crucible 200 for the Czochralski method is supported on the cross-shaped horizontal bottom surface Sb, and the operator can visually adjust whether the crucible 200 for the Czochralski method is centered between the four vertical sections 113, and then start the distance measuring sensors 2 in the accommodating holes 112 at all corner positions and the distance measuring sensors 2 in the accommodating holes Rb at the bottom position to measure the crucible 200 for the Czochralski method. 00 is measured, and multiple distances measured by multiple (5 in total) distance measuring sensors 2 are used to determine whether the curvature of the arc portion 200a at the bottom of the outer surface of the crucible 200 for the pulling method meets the requirements as a whole and at specific positions. Therefore, multiple distance measuring sensors 2 are used to detect the curvature of the arc portion 200a at the bottom of the outer surface of the crucible 200 for the pulling method, which reduces the use of manual labor and improves the measurement (i.e. detection) accuracy.

[0034] In the crucible size detection device 100 for the Czochralski method according to the present disclosure, when the crucible 200 for the Czochralski method is placed in the accommodating space S, the bottom plane of the crucible 200 for the Czochralski method is supported on the cross-shaped horizontal bottom surface Sb, and the operator can visually adjust whether the crucible 200 for the Czochralski method is centered between the four vertical sections 113. Thereafter, the operator uses fingers to rotate the crucible 200 for the Czochralski method through the hollow space between the two U-shaped frames 11 to change the position (i.e., simulate the rotation of the crucible 200 for the Czochralski method when growing a single crystal by the Czochralski method), and observes the gap G between the top surface 200b of the peripheral wall of the crucible 200 for the Czochralski method and the bottom edge 121a of the cylindrical hole 121 in the up and down direction D at a fixed position point of the bottom edge 121a of the cylindrical hole 121 to determine whether there is a visually observable change, thereby judging the uniformity of the rotation of the crucible 200 for the Czochralski method.

[0035] In the device 100 for detecting the size of the crucible for the Czochralski method according to the present disclosure, the scale 113b provided on the vertical surface 113a of the at least one vertical section 113, the multiple distance measuring sensors 2, and the manual rotation / turning of the Czochralski crucible 200 realize multi-point measurement, thereby being able to obtain the size information of the Czochralski crucible 200 more comprehensively and accurately.

[0036] In the crucible size detection device 100 for the pulling method according to the present disclosure, it is possible to detect the height of the crucible 200 for the pulling method, the curvature of the arc-shaped portion 200a at the bottom of the outer surface of the crucible 200 for the pulling method, and the uniformity of the rotation of the crucible 200 for the pulling method, thereby realizing multifunctional detection of the three indicators and improving the functionality and detection efficiency of the crucible size detection device 100 for the pulling method.

[0037] In one example, the two U-shaped frames 11 are integrally formed. In an alternative example, the two U-shaped frames 11 are separately formed and connected together at the bottom, and further, the two U-shaped frames 11 are welded together at the bottom.

[0038] Likewise, in one example, the top plate 12 is integrally formed with the two U-shaped frames 11. In an alternative example, the top plate 12 is separately formed with the two U-shaped frames 11, and further, the top plate 12 and the two U-shaped frames 11 are welded together.

[0039] like Figure 1 and Figure 4 As shown, the cylindrical hole 121 of the top plate 12 is chamfered at the top edge 121 b, thereby facilitating the guiding and centering of the Czochralski crucible 200 when it is placed into the accommodating space S through the cylindrical hole 121 .

[0040] like Figure 2As shown, the circumferential surface 121c of the cylindrical hole 121 of the top plate 12 is tangent to the inner surface 113c of the four vertical segments 113 constituting the accommodation space S, so as to determine the outer diameter of the Czochralski crucible 200. Since the inner diameter of the accommodation space S can be known during design, when the operator visually adjusts the Czochralski crucible 200 to be centered between the four vertical segments 113, the operator can visually determine whether the outer diameter of the Czochralski crucible 200 has a significant deviation by visually observing the gap between the inner surface 113c of the four vertical segments 113 constituting the accommodation space S and the outer edge of the top 200b of the Czochralski crucible 200 from above.

[0041] In order to improve the measurement (detection) accuracy, all surfaces of the two U-shaped frames 11 constituting the accommodation space S and the circumference of the cylindrical hole 121 of the top plate 12 are polished surfaces. The two U-shaped frames 11 and the top plate 12 can be made of any suitable material, such as 316 stainless steel.

[0042] The distance measuring sensor 2 may be, but is not limited to, a laser distance measuring sensor.

[0043] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A crucible size detection device for a Czochralski method, characterized in that: A crucible size detection device (100) for a Czochralski method comprises a frame (1) and a plurality of distance measuring sensors (2); The frame (1) comprises two U-shaped frames (11) and a top plate (12). The two U-shaped frames (11) are vertically connected in a cross shape at the bottom center, and the two U-shaped frames (11) together enclose an axisymmetric accommodation space (S) for accommodating a crucible (200) for the Czochralski method. The two U-shaped frames (11) form a cross-shaped horizontal bottom surface (Sb) extending in the same horizontal plane at the bottom, the cross-shaped horizontal bottom surface (Sb) is used to support the bottom plane of the crucible (200) for the Czochralski method, and a bottom position receiving hole (Rb) for accommodating a corresponding distance measuring sensor (2) is provided at the center of the cross-shaped horizontal bottom surface (Sb). Each U-shaped frame (11) forms an arc surface (111) at an inner corner, and the arc surface (111) is used to correspond to the arc portion (200a) of the bottom of the outer surface of the crucible (200) for the Czochralski method; Each U-shaped frame (11) is provided with a corner receiving hole (112) at an inner corner at an angle of 45 degrees to the horizontal plane for receiving a corresponding distance measuring sensor (2); The distance measuring sensors (2) in all the corner accommodating holes (112) and the distance measuring sensors (2) in the bottom accommodating hole (Rb) are used together to measure the curvature of the arc-shaped portion (200a) at the bottom of the outer surface of the crucible (200) for the Czochralski method; At least one vertical section (113) of the two U-shaped frames (11) is provided with a scale (113b) on a vertical surface (113a) directly adjacent to the accommodating space (S), and the scale (113b) is used to measure the height of the crucible (200) for the Czochralski method; A top plate (12) is horizontally arranged on the top of four vertical sections (113) of two U-shaped frames (11), and the top plate (12) has a cylindrical hole (121) penetrating in the up-down direction (D). The diameter of the cylindrical hole (121) is not less than the diameter of the accommodating space (S), and the cylindrical hole (121) and the accommodating space (S) are coaxial. The bottom edge (121a) of the cylindrical hole (121) is used to detect the change of the gap (G) between the top surface (200b) of the peripheral wall of the Czochralski crucible (200) and the bottom edge (121a) of the cylindrical hole (121) in the up-down direction (D) when the Czochralski crucible (200) rotates in the accommodating space (S) to judge the uniformity of the rotation of the Czochralski crucible (200).

2. The crucible size detection device for the Czochralski method according to claim 1, characterized in that: The two U-shaped frames (11) are integrally formed.

3. The crucible size detection device for the Czochralski method according to claim 1, characterized in that: The two U-shaped frames (11) are formed separately and connected together at the bottom.

4. The crucible size detection device for the Czochralski method according to claim 3, characterized in that: The two U-shaped frames (11) are welded together at the bottom.

5. The crucible size detection device for the Czochralski method according to claim 1, characterized in that: The top plate (12) and the two U-shaped frames (11) are integrally formed.

6. The crucible size detection device for the Czochralski method according to claim 1, characterized in that: The top plate (12) and the two U-shaped frames (11) are formed separately.

7. The crucible size detection device for the Czochralski method according to claim 6, characterized in that: The top plate (12) and the two U-shaped frames (11) are welded together.

8. The crucible size detection device for the Czochralski method according to claim 1, characterized in that: The cylindrical hole (121) of the top plate (12) is chamfered at the top edge (121b).

9. The crucible size detection device for the Czochralski method according to claim 8, characterized in that: The peripheral surface (121c) of the cylindrical hole (121) of the top plate (12) is tangent to the inner surface (113c) of the four vertical sections (113) constituting the accommodation space (S) so as to determine the outer diameter of the crucible (200) for the Czochralski method.

10. The crucible size detection device for the Czochralski method according to claim 1, characterized in that: All surfaces of the two U-shaped frames (11) constituting the accommodating space (S) and the peripheral surface of the cylindrical hole (121) of the top plate (12) are polished surfaces.

11. The crucible size detection device for the Czochralski method according to claim 1, characterized in that: The distance measuring sensor (2) is a laser distance measuring sensor.

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