FIB pretreatment sample preparation box

By designing a sample preparation box for FIB pretreatment, the vehicle can be inserted into the slot inclined and protected by the cap, the problem of sample contamination and physical damage is solved, and effective protection and safe treatment of chip samples are achieved.

CN222232146UActive Publication Date: 2024-12-24WINTECH NANO (SUZHOU) CO LTD
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Patent Information

Application Number
CN202420655723.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-01
Publication Date
2024-12-24
Estimated Expiration
2034-04-01

AI Technical Summary

Technical Problem

During FIB pretreatment, the sample is susceptible to air dust pollution and physical damage, especially when the vehicle is placed in a dust-free desktop or sealed box, it is prone to damage and drop of the sample due to shaking.

Method used

A FIB pretreatment sample preparation box is designed, the vehicle can be inserted into the card slot inclined and protected by the cap. The cap is rotated in different positions to prevent dust contamination and sample movement, and the automatic flip covering of the cap is achieved by using flexible stretching members and rotating seats. , provides protection against samples.

Benefits of technology

It effectively prevents contamination and physical damage to the sample surface, reduces damage caused by mistaken touch and shaking, and ensures the safety and cleanliness of the sample.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of chip processing, and discloses an FIB pretreatment sample preparation box which is used for placing a carrier carrying a sample, the carrier is arranged in a sheet shape, the FIB pretreatment sample preparation box comprises a base, a clamping groove is formed in the base, the carrier can be inserted into the clamping groove, and the carrier is inclined relative to the base; the cover cap is rotationally connected to the base and located on one side of the clamping groove, an opening of the cover cap is located on the side, close to the clamping groove, of the cover cap, and the cover cap can rotate to a first working position where the carrier is not prevented from being inserted into the clamping groove and a second working position where the carrier is covered with the cover cap. According to the FIB pretreatment sample preparation box, when the cover cap is located at the first working position, a carrier carrying a sample can be inserted into the clamping groove, when the cover cap rotates to the second working position, the cover cap covers the carrier, the carrier is protected by the cover cap, the surface of the sample is not prone to being in contact with dust, pollution to the sample is reduced, meanwhile, the sample is not prone to being touched by mistake, and the sample preparation efficiency is improved. And the damage to the sample is reduced.
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Description

Technical Field

[0001] The utility model relates to the technical field of chip processing, in particular to a FIB pretreatment sample preparation box. Background Art

[0002] Focused Ion Beam (FIB) is a microdissection instrument that uses an electric lens to focus an ion beam into a very small size. It is mainly used for micro-nano processing, micro-nano structure observation and analysis, micro-nano chemical composition testing and analysis, three-dimensional reconstruction analysis, etc. It uses an electric lens to focus the ion beam into a very small size to achieve micro-nano scale processing on the sample surface.

[0003] Before wafers or semiconductor chips are cut by a focused ion beam, the samples to be cut need to be pre-processed. Although different materials use different pre-processing methods, all samples need to be placed on a sheet carrier after pre-processing and wait for the next step of processing, and the samples are transported by a mobile carrier.

[0004] Currently, the carrier containing samples is generally placed on a dust-free table or inside a sealed box. When the carrier is placed on the table, dust in the air can easily contaminate the surface of the sample, and workers can easily touch the surface of the sample by mistake, causing damage and contamination of the sample. If the carrier is placed inside a sealed box, when the box shakes, the carrier will collide with the inner wall of the box, which can easily cause the sample to be damaged or fall off.

[0005] Therefore, the above problems need to be solved urgently. Utility Model Content

[0006] The utility model aims to provide a FIB pretreatment sample preparation box, which is convenient for placing a carrier carrying a chip sample and at the same time protects the chip sample to prevent the chip sample from being contaminated and damaged.

[0007] To achieve this purpose, the utility model adopts the following technical solutions:

[0008] The FIB pretreatment sample preparation box is used to place a carrier carrying a chip sample, wherein the carrier is arranged in a sheet shape. The FIB pretreatment sample preparation box comprises:

[0009] A base, wherein a slot is formed on the base, and the carrier can be inserted into the slot so that the carrier can be tilted relative to the base; and

[0010] The cap is rotatably connected to the base, the cap is located on one side of the slot, and the opening of the cap is located on the side of the cap close to the slot. The cap can be rotated to a first working position that does not hinder the carrier from being inserted into the slot, and a second working position where the cap is covered on the carrier.

[0011] Preferably, a mounting groove is provided on the base, the mounting groove is located on one side of the card slot and is connected to the card slot, a rotating shaft is connected inside the mounting groove, the cover cap is connected to the rotating shaft, and when the cover cap rotates in a direction away from the card slot, the cover cap can abut against the base, so that the cover cap is in the first working position.

[0012] Preferably, a rotating seat is provided on the rotating shaft, and the rotating seat comprises:

[0013] a rotating ring, the rotating ring being rotatably sleeved on the rotating shaft; and

[0014] A mounting seat is connected to the rotating ring, and the mounting seat is connected to the cover cap.

[0015] Preferably, a flexible stretching member is provided between the side of the slot away from the cap and the cap; when the cap is rotated to the first working position, the flexible stretching member is in a straightened state; when the carrier is placed on the flexible stretching member, the flexible stretching member is bent by the gravity of the carrier and drives the cap to rotate to the second working position.

[0016] Preferably, the flexible stretching member is a spring.

[0017] Preferably, a plurality of the flexible stretching members are arranged in parallel.

[0018] Preferably, a paddle is provided on the outer periphery of the cap.

[0019] Preferably, the paddle is arranged in a ring shape and is sleeved on the outer circumference of the cap.

[0020] Preferably, the base is made of polypropylene or polyethylene.

[0021] Preferably, the cap is made of polypropylene or polyethylene.

[0022] Beneficial effects of the utility model:

[0023] In the FIB pretreatment sample preparation box of the utility model, when the cap is in the first working position, the carrier carrying the chip sample can be inserted into the slot, so that the carrier is tilted relative to the base. At this time, the bottom of the carrier abuts against the corner of the bottom of the slot, and the middle part of the carrier abuts against the opening of the slot, so as to achieve the initial positioning of the carrier, and then the cap is rotated so that the cap is covered on the carrier. At this time, the carrier is protected by the cap, and the surface of the sample is not easy to contact with dust, which reduces the contamination of the sample, and is not easy to be accidentally touched, which reduces the damage to the sample. In addition, the cap is covered on the carrier, which has an auxiliary pressing effect on the carrier, preventing the carrier from moving inside the slot, and protecting the sample on the carrier. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the FIB pretreatment sample preparation box of the utility model;

[0025] Figure 2 It is a cross-sectional view of the FIB pretreatment sample preparation box of the utility model;

[0026] Figure 3 yes Figure 2 Enlarged view of point A in the middle.

[0027] In the figure:

[0028] 1. Base; 11. Card slot; 12. Mounting slot; 2. Cover cap; 21. Pick; 3. Rotating shaft; 4. Rotating seat; 41. Rotating ring; 42. Mounting seat; 5. Flexible stretching member. DETAILED DESCRIPTION

[0029] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0030] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0032] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0033] The existing carriers carrying samples are generally placed on a dust-free table or inside a sealed box. When the carrier is placed on the table, dust in the air can easily contaminate the surface of the sample, and workers can easily touch the surface of the sample by mistake, causing damage and contamination of the sample. If the carrier is placed inside a sealed box, when the box shakes, the carrier will collide with the inner wall of the box, which can easily cause the sample to be damaged or fall off.

[0034] In order to solve the above problems, this embodiment provides a FIB pretreatment sample preparation box, as shown below. Figures 1 to 3 The FIB pretreatment sample preparation box provided by the utility model is described.

[0035] The FIB pretreatment sample preparation box is used to place a carrier containing chip samples, and the carrier is arranged in a circular sheet shape. The exemplary structure of the FIB pretreatment sample preparation box can be found in the following content of this embodiment.

[0036] Reference Figure 1 The FIB pretreatment sample preparation box includes a base 1 and a cap 2. The base 1 is cylindrical, and a card slot 11 is provided on the upper surface of the base 1. The card slot 11 is rectangular, and the width of the card slot 11 is greater than the thickness of the carrier. The cap 2 is located on one side of the length direction of the card slot 11 and is rotatably connected to the base 1. The cap 2 can be rotated to a first working position that does not affect the insertion of the carrier into the card slot 11, and a second working position that covers the carrier.

[0037] When the cap 2 is rotated to the first working position, the carrier can be partially inserted into the slot 11, and the carrier tilts under its own gravity, and the side of the carrier close to the cap 2 tilts downward, at which time the bottom of the carrier abuts against the corner of the bottom of the slot 11, and the middle part of the carrier abuts against the opening of the slot 11, to achieve the initial positioning of the carrier. Then the cap 2 is rotated in the direction close to the carrier, so that the cap 2 is covered on the carrier, which plays a role in dustproofing and protecting the carrier, and assists in pressing the carrier to prevent the carrier from moving inside the slot 11.

[0038] Reference Figure 2 Furthermore, a mounting groove 12 is provided on the base 1. The mounting groove 12 is located on one side of the length direction of the card slot 11 and is connected to the card slot 11. The depth of the mounting groove 12 is less than the depth of the card slot 11. A rotating shaft 3 is fixedly connected inside the mounting groove 12. The rotating shaft 3 is horizontally arranged. A rotating seat 4 is rotatably connected to the middle part of the rotating shaft 3.

[0039] Reference Figure 2 and Figure 3 The rotating seat 4 includes a rotating ring 41 and a mounting seat 42. The rotating ring 41 is arranged in an arc shape and is rotatably mounted on the rotating shaft 3. The rotating ring 41 can be a complete circular ring or a circular ring with a gap. The mounting seat 42 is arranged in an L shape. The mounting seat 42 is integrally formed with the rotating ring 41, and the mounting seat 42 is connected to the cap 2. Optionally, the rotating shaft 3 can be rotatably connected to the side wall of the mounting groove 12, and the rotating ring 41 can be fixedly mounted on the rotating shaft 3, so that the cap 2 can also be rotated.

[0040] The cap 2 is arranged in a circular cover shape, and the opening of the cap 2 is arranged toward the card slot 11. A paddle 21 is arranged on the outer periphery of the cap 2. In this embodiment, the paddle 21 is arranged in an annular shape and connected to the outer periphery of the cap 2, and the paddle 21 is connected to the mounting seat 42, so that the staff can drive the cap 2 to rotate by clamping the paddle 21, thereby reducing the possibility of accidentally touching the sample when clamping the body of the cap 2. In addition, the height of the connection between the cap 2 and the rotating shaft 3 is increased by the paddle 21, so that the connection between the cap 2 and the rotating shaft 3 is higher than the upper surface of the base 1, which can increase the rotation angle of the cap 2. In another embodiment, the paddle 21 can also be arranged in a sheet shape, and a plurality of paddles are distributed along the circumference of the cap 2.

[0041] When the cap 2 is in the first working position, the side of the cap 2 away from its opening contacts the upper surface of the base 1, thereby realizing automatic limiting of the cap 2, and the angle between the side of the cap 2 close to the slot 11 and the base 1 is 90 degrees to 135 degrees, and is preferably 125 degrees in this embodiment. This angle facilitates the insertion of the carrier into the slot 11, and the cap 2 is not easy to rotate and reset under the action of its own gravity.

[0042] When the cap 2 is in the second working position, the inner wall of the cap 2 contacts the carrier, realizing automatic limiting of the cap 2, and the angle between the side of the cap 2 close to the slot 11 and the base 1 is 0 degrees-90 degrees, preferably 75 degrees in this embodiment. This angle can completely cover the sample on the carrier and facilitate the staff to flip the cap 2.

[0043] Furthermore, a flexible stretching member 5 is provided between the side of the card slot 11 away from the cap 2 and the cap 2. Specifically, the flexible stretching member 5 is provided inside the card slot 11. Multiple flexible stretching members 5 are provided in parallel. Two are taken as an example in this embodiment. One end of the flexible stretching member 5 is connected to the other side of the card slot 11 in the length direction, and the other end is connected to the rotating seat 4.

[0044] When the cap 2 rotates to the first working position, the flexible stretching member 5 is in a straightened state. When the carrier is placed on the flexible stretching member 5, the flexible stretching member 5 is affected by the gravity of the carrier, so that the flexible stretching member 5 is in a bent deformation, and drives the rotating seat 4 to flip, and drives the cap 2 to flip to the second working position through the rotating seat 4, thereby realizing automatic flipping and covering of the cap 2, which is more convenient to use.

[0045] When the cover cap 2 is rotated to the first working position again, the flexible stretching member 5 is straightened by the cover cap 2 to lift the carrier up, so that the carrier can be taken out of the slot 11 conveniently.

[0046] In this embodiment, the flexible tensile member 5 is a spring, and the spring is made of copper. The spring is easily deformed, so that it bends. Copper has high strength, and can maintain a stable structure during use, and is not easily deformed or damaged by external influences. In other embodiments, the flexible tensile member 5 can also be a flexible wire.

[0047] The base 1 is made of polypropylene or polyethylene, and the base 1 is black. The cap 2 is made of polypropylene or polyethylene, and the cap 2 is transparent. Preferably, the base 1 and the cap 2 in this embodiment are both made of polypropylene. The transparent cap 2 is convenient for the staff to observe the position of the carrier and the sample through the cap 2, thereby preventing the carrier from being accidentally touched when the cap 2 is turned.

[0048] Polypropylene is a polymer formed by the addition polymerization of propylene. The operating temperature range of polypropylene is -30 to 140°C. It can resist corrosion from acids, alkalis, salt solutions and various organic solvents below 80°C, and can decompose under high temperature and oxidation. Polypropylene has chemical resistance, heat resistance, electrical insulation, high-strength mechanical properties and good high-wear processing properties. Polypropylene also has anti-static properties, which prevents high-voltage discharge generated by static electricity from damaging the chip, causing chip burnout, data loss and performance degradation, and prevents dust and impurities adsorbed by static electricity on the wafer surface, thus protecting the sample.

[0049] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A FIB pretreatment sample preparation box, used to place a carrier carrying a chip sample, wherein the carrier is in a sheet shape, characterized in that: The FIB pretreatment sample preparation box comprises: A base (1), wherein the base (1) is provided with a slot (11), the carrier being capable of being inserted into the slot (11) and making the carrier tilt relative to the base (1); and A cover cap (2), the cover cap (2) is rotatably connected to the base (1), the cover cap (2) is located on one side of the card slot (11), and the opening of the cover cap (2) is located on the side of the cover cap (2) close to the card slot (11), and the cover cap (2) can be rotated to a first working position that does not hinder the carrier from being inserted into the card slot (11), and a second working position where the cover is arranged on the carrier.

2. The FIB pretreatment sample preparation box according to claim 1, characterized in that: The base (1) is provided with a mounting groove (12), the mounting groove (12) is located at one side of the card slot (11) and is in communication with the card slot (11), the mounting groove (12) is internally connected with a rotating shaft (3), the cover cap (2) is connected to the rotating shaft (3), and when the cover cap (2) rotates in a direction away from the card slot (11), the cover cap (2) can abut against the base (1), so that the cover cap (2) is in a first working position.

3. The FIB pretreatment sample preparation box according to claim 2, characterized in that: The rotating shaft (3) is provided with a rotating seat (4), and the rotating seat (4) comprises: a rotating ring (41), the rotating ring (41) being rotatably sleeved on the rotating shaft (3); and A mounting seat (42), wherein the mounting seat (42) is connected to the rotating ring (41), and the mounting seat (42) is connected to the cover cap (2).

4. The FIB pretreatment sample preparation box according to claim 1, characterized in that: A flexible stretching member (5) is provided between the side of the slot (11) away from the cover cap (2) and the cover cap (2); when the cover cap (2) is rotated to the first working position, the flexible stretching member (5) is in a straightened state; when the carrier is placed on the flexible stretching member (5), the flexible stretching member (5) is bent by the gravity of the carrier and drives the cover cap (2) to rotate to the second working position.

5. The FIB pretreatment sample preparation box according to claim 4, characterized in that: The flexible stretching member (5) is a spring.

6. The FIB pretreatment sample preparation box according to claim 4, characterized in that: A plurality of the flexible stretching members (5) are arranged in parallel.

7. The FIB pretreatment sample preparation box according to any one of claims 1 to 6, characterized in that: A paddle (21) is provided on the outer periphery of the cover cap (2).

8. The FIB pretreatment sample preparation box according to claim 7, characterized in that: The paddle (21) is arranged in a ring shape and is sleeved on the outer circumference of the cover cap (2).

9. The FIB pretreatment sample preparation box according to any one of claims 1 to 6, characterized in that: The base (1) is made of polypropylene or polyethylene.

10. The FIB pretreatment sample preparation box according to any one of claims 1 to 6, characterized in that: The cover cap (2) is made of polypropylene or polyethylene.