Microscopic crack detection device

Abstract

The utility model discloses a microscopic crack detection device which comprises a placing plate, a lifting mechanism, a protection mechanism and a scanner are arranged at the upper end of the placing plate, and the placing plate is connected with the scanner through the lifting mechanism; transmission assemblies are arranged on the two sides of the lifting mechanism, and the lifting mechanism provides power for the protection mechanism through the transmission assemblies. According to the utility model, through the arrangement of the lifting mechanism, the transmission assembly and the protection mechanism, when the scanner does not work, the lifting mechanism ascends to drive the scanner to move upwards, and at the same time, under the cooperation of the transmission assembly, the protection covers of the protection mechanism are driven to move towards the scanner; at the moment, the scanner is just located in the protective cover, then the scanner can be protected under the action of the protective cover, so that the service life of the scanner is prolonged, meanwhile, dust is effectively prevented from falling on the scanning end of the scanner through combination of the protective cover, and the shooting definition of the scanner can be improved.

Description

Technical Field

[0001] The utility model relates to the field of micro crack detection, in particular to a micro crack detection device. Background Art

[0002] Chip is a general term for semiconductor component products. It is the carrier of integrated circuits and is divided from wafers. A chip is a small piece of silicon that contains an integrated circuit. It is part of a computer or other electronic device. After the chip is produced, in order to prevent cracks from affecting the overall quality of the chip, the chip needs to be tested for micro cracks.

[0003] The existing micro crack detection device uses a scanner to detect micro cracks on the chip surface when in use. Although this achieves the purpose of detection, the scanner is exposed to the outside after use and is easily damaged by external objects, thereby affecting the service life of the scanner. Therefore, it is necessary to design a micro crack detection device. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a micro crack detection device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a micro crack detection device, including a placement plate, a lifting mechanism, a protective mechanism and a scanner are arranged on the upper end of the placement plate, and the placement plate is connected to the scanner through the lifting mechanism; transmission components are arranged on both sides of the lifting mechanism, and the lifting mechanism provides power to the protective mechanism through the transmission component.

[0006] As a further description of the above technical solution:

[0007] The lifting mechanism includes a support column, a motor, a screw and a cantilever. The upper end of the placement plate is fixedly connected to the support column, the support column is rotatably connected to the screw, the circumferential surface of the screw is threadedly connected to the cantilever, and a scanner is plugged into the cantilever; the upper end of the support column is fixedly connected to the motor, and the output end of the motor is fixedly connected to the screw.

[0008] As a further description of the above technical solution:

[0009] A slide groove is provided on the front end surface of the support column, and the slide groove is slidably connected to the cantilever.

[0010] As a further description of the above technical solution:

[0011] The front end of the cantilever is internally threadedly connected with a locking screw, and one end of the locking screw close to the scanner is fitted with the scanner.

[0012] As a further description of the above technical solution:

[0013] The transmission assembly includes a first connecting block, a transmission rod and a second connecting block. The second connecting blocks are fixedly connected on both sides of the cantilever. The second connecting block is rotatably connected to the transmission rod inside. The end of the transmission rod away from the second connecting block is rotatably connected to the first connecting block.

[0014] As a further description of the above technical solution:

[0015] The protection mechanism includes a support plate, a guide rod, a movable plate, a connecting rod and a protective cover. The upper end of the placement plate is fixedly connected to the support plate, four support plates are provided, and a guide rod is fixedly connected between two adjacent support plates. The movable plate is slidably connected to the circumferential surface of the guide rod, the side end of the movable plate is fixedly connected to the connecting rod, the upper end of the connecting rod is fixedly connected to the first connecting block, the end of the connecting rod away from the movable plate is fixedly connected to the protective cover, and the scanner is located inside the protective cover.

[0016] As a further description of the above technical solution:

[0017] A spring is arranged on the circumferential surface of the guide rod, one end of the spring is fixedly connected to the moving plate, and the other end of the spring is fixedly connected to the supporting plate.

[0018] The utility model has the following beneficial effects:

[0019] Compared with the prior art, the micro crack detection device is provided with a lifting mechanism, a transmission assembly and a protective mechanism. When performing micro crack detection, the lifting mechanism is used to drive the scanner to move downward, so that the scanning end of the scanner is closer to the chip, thereby facilitating the scanner to more clearly photograph the chip, which is beneficial to improving the accuracy of micro crack detection; at the same time, when the lifting mechanism is working in descending, it also drives the protective cover of the protective mechanism away from the scanner with the cooperation of the transmission assembly, thereby facilitating the scanner to perform scanning work; when the scanner is not working, the lifting mechanism is working in ascending, which can drive the scanner to move upward, and at the same time, it also drives the protective cover of the protective mechanism to move toward the scanner with the cooperation of the transmission assembly. When the two protective covers are merged, the scanner is just located inside the protective cover, and then the scanner can be protected under the action of the protective cover, thereby improving the service life of the scanner. At the same time, the merging of the protective cover can also effectively prevent dust from falling on the scanning end of the scanner, thereby improving the clarity of the scanner's shooting. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the overall structure of a micro crack detection device proposed by the utility model;

[0021] Figure 2 A micro crack detection device proposed by the utility model Figure 1Enlarged view of part A;

[0022] Figure 3 The present invention is a schematic structural diagram of a micro crack detection device after the protective cover is opened.

[0023] Legend:

[0024] 1. Placement plate; 2. Lifting mechanism; 201. Support column; 202. Motor; 203. Screw rod; 204. Cantilever; 3. Scanner; 4. Transmission assembly; 401. First connecting block; 402. Transmission rod; 403. Second connecting block; 5. Protection mechanism; 501. Support plate; 502. Guide rod; 503. Moving plate; 504. Connecting rod; 505. Protection cover; 6. Spring; 7. Slide groove; 8. Locking screw. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] Reference Figure 1-3 The utility model provides a micro crack detection device, including a placement plate 1, a lifting mechanism 2, a protection mechanism 5 and a scanner 3 are arranged on the upper end of the placement plate 1, and the placement plate 1 is connected to the scanner 3 through the lifting mechanism 2; transmission components 4 are arranged on both sides of the lifting mechanism 2, and the lifting mechanism 2 provides power to the protection mechanism 5 through the transmission component 4.

[0027] Specifically, the lifting mechanism 2 includes a support column 201, a motor 202, a screw rod 203 and a cantilever 204. The upper end of the placement plate 1 is fixedly connected to the support column 201, the support column 201 is rotatably connected to the screw rod 203, the circumferential surface of the screw rod 203 is threadedly connected to the cantilever 204, and the cantilever 204 is plugged with a scanner 3; the upper end of the support column 201 is fixedly connected to the motor 202, and the output end of the motor 202 is fixedly connected to the screw rod 203.

[0028] The transmission assembly 4 includes a first connecting block 401, a transmission rod 402 and a second connecting block 403. The second connecting blocks 403 are fixedly connected on both sides of the cantilever 204. The transmission rod 402 is rotatably connected inside the second connecting block 403. The end of the transmission rod 402 away from the second connecting block 403 is rotatably connected to the first connecting block 401.

[0029] The protective mechanism 5 includes a support plate 501, a guide rod 502, a movable plate 503, a connecting rod 504 and a protective cover 505. The upper end of the placement plate 1 is fixedly connected to the support plate 501, and four support plates 501 are arranged. A guide rod 502 is fixedly connected between two adjacent support plates 501. The movable plate 503 is slidably connected to the circumferential surface of the guide rod 502. The side end of the movable plate 503 is fixedly connected to the connecting rod 504. The upper end of the connecting rod 504 is fixedly connected to the first connecting block 401. The end of the connecting rod 504 away from the movable plate 503 is fixedly connected to the protective cover 505, and the scanner 3 is located inside the protective cover 505.

[0030] When in use, the chip to be detected is placed on the placement plate 1, and then the motor 202 works to drive the screw rod 203 to rotate, thereby driving the cantilever 204 to slide downward inside the support column 201, and the downward movement of the cantilever 204 drives the scanner 3 to move downward, so that the scanning end of the scanner 3 is closer to the chip, thereby facilitating the scanner 3 to more clearly photograph the chip, which is beneficial to improving the accuracy of micro crack detection; at the same time, the downward movement of the cantilever 204 can drive the connecting rod 504 to move to both sides with the cooperation of the second connecting block 403, the transmission rod 402 and the third connecting block, and then the moving plate 503 and the guide rod 502 can cooperate to make the moving rod move smoothly, and the movement of the moving rod also drives The protective cover 505 is away from the scanner 3, so that the protective cover 505 no longer blocks the scanner 3, so as to facilitate the detection work of the scanner 3; when the scanner 3 is not in use, the motor 202 rotates in the opposite direction to drive the scanner 3 to move upward, and at the same time, with the cooperation of the transmission component 4, it also drives the protective cover 505 of the protective mechanism 5 to move toward the scanner 3. When the two protective covers 505 are merged, the scanner 3 is just located inside the protective cover 505, and then the scanner 3 can be protected under the action of the protective cover 505, thereby improving the service life of the scanner 3. At the same time, the merging of the protective cover 505 can also effectively prevent dust from falling on the scanning end of the scanner 3, thereby improving the clarity of the photos taken by the scanner 3.

[0031] A slide groove 7 is provided on the front end surface of the support column 201, and the slide groove 7 is slidably connected to the cantilever 204. When working, the slide groove 7 is provided to facilitate the movement of the cantilever 204.

[0032] The front end of the cantilever 204 is internally threaded with a locking screw 8, and the end of the locking screw 8 close to the scanner 3 is in contact with the scanner 3. During operation, by setting the locking screw 8, when the scanner 3 needs to be disassembled, it is only necessary to loosen the locking screw 8, so that the scanner 3 can be conveniently disassembled from the cantilever 204.

[0033] A spring 6 is arranged on the circumferential surface of the guide rod 502, one end of the spring 6 is fixedly connected to the movable plate 503, and the other end of the spring 6 is fixedly connected to the support plate 501. During operation, by arranging the spring 6, when the protective cover 505 is opened, the spring 6 can be compressed, and the compressed spring 6 is conducive to the merging of the protective cover 505.

[0034] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A micro crack detection device, comprising a placement plate (1), characterized in that: The upper end of the placement plate (1) is provided with a lifting mechanism (2), a protection mechanism (5) and a scanner (3); the placement plate (1) is connected to the scanner (3) via the lifting mechanism (2); transmission components (4) are provided on both sides of the lifting mechanism (2); the lifting mechanism (2) provides power to the protection mechanism (5) via the transmission component (4).

2. A micro crack detection device according to claim 1, characterized in that: The lifting mechanism (2) comprises a support column (201), a motor (202), a screw rod (203) and a cantilever (204); the upper end of the placement plate (1) is fixedly connected to the support column (201); the support column (201) is rotatably connected to the screw rod (203); the circumferential surface of the screw rod (203) is threadedly connected to the cantilever (204); and the cantilever (204) is plugged with a scanner (3); the upper end of the support column (201) is fixedly connected to the motor (202); and the output end of the motor (202) is fixedly connected to the screw rod (203).

3. A micro crack detection device according to claim 2, characterized in that: A sliding groove (7) is provided on the front end surface of the support column (201), and the sliding groove (7) is slidably connected to the cantilever (204).

4. A micro crack detection device according to claim 2, characterized in that: The front end of the cantilever (204) is internally threadedly connected with a locking screw (8), and the end of the locking screw (8) close to the scanner (3) is in contact with the scanner (3).

5. A micro crack detection device according to claim 2, characterized in that: The transmission assembly (4) comprises a first connection block (401), a transmission rod (402) and a second connection block (403); the second connection blocks (403) are fixedly connected to both sides of the cantilever (204); the transmission rod (402) is rotatably connected inside the second connection block (403); and one end of the transmission rod (402) away from the second connection block (403) is rotatably connected to the first connection block (401).

6. A micro crack detection device according to claim 5, characterized in that: The protection mechanism (5) comprises a support plate (501), a guide rod (502), a movable plate (503), a connecting rod (504) and a protective cover (505); the upper end of the placement plate (1) is fixedly connected to the support plate (501); four support plates (501) are provided; a guide rod (502) is fixedly connected between two adjacent support plates (501); the circumferential surface of the guide rod (502) is slidably connected to the movable plate (503); the side end of the movable plate (503) is fixedly connected to the connecting rod (504); the upper end of the connecting rod (504) is fixedly connected to the first connecting block (401); the end of the connecting rod (504) away from the movable plate (503) is fixedly connected to the protective cover (505); and the scanner (3) is located inside the protective cover (505).

7. A micro crack detection device according to claim 6, characterized in that: A spring (6) is provided on the circumferential surface of the guide rod (502), one end of the spring (6) is fixedly connected to the movable plate (503), and the other end of the spring (6) is fixedly connected to the support plate (501).

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