LDI exposure equipment for battery piece

Abstract

The LDI exposure equipment for the battery piece comprises a workpiece table on which a plurality of guide rails are arranged; the number of the machining tables is at least two, the machining tables are slidably connected to the guide rails, and a plurality of suction cups are arranged on the machining tables; the alignment mechanism stretches across the multiple guide rails of the workpiece table and aligns the battery pieces on the two machining tables through transverse movement; and the exposure mechanism stretches across the plurality of guide rails of the workpiece table and exposes the aligned battery pieces through transverse movement. The device is compact and reasonable in structure and convenient to operate, multi-station work is realized by arranging at least two processing tables and simultaneously arranging the alignment mechanism and the exposure mechanism which can transversely move, the alignment and exposure processes of the battery piece are simultaneously carried out, the restricting factors of the alignment process on the whole processing speed are eliminated, the processing efficiency is fully improved, and the production cost is reduced. The processing cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of exposure equipment, in particular to an LDI exposure equipment for a battery sheet. Background Art

[0002] At present, the patterning in the field of solar cells is mainly used in heterojunction cells. The patterning of heterojunction solar cells mostly adopts the exposure-development process, among which there are two types of exposure processes: direct writing (LDI) and mask type. Compared with mask type exposure, direct writing exposure directly modulates the laser to form a pattern, without the need to make a mask plate, and the exposure pattern is flexible and changeable.

[0003] At present, the exposure equipment used for cell exposure has only one processing station for the exposure lens, and the alignment and exposure of the cell can only be carried out one after another, resulting in low cell processing efficiency. As the demand for exposure efficiency continues to increase, this point has become a key factor restricting the processing efficiency of the equipment.

[0004] In addition, the methods for preparing solar cell grid lines include screen printing, electroless deposition, and electrodeposition, among which screen printing is the most widely used. The grid line width prepared by screen printing is generally 40-50μm, and the grid line width is relatively large. The wider grid line has a large shading area, which affects the photoelectric conversion efficiency. In order to obtain a more efficient battery, it is necessary to reduce the grid line width and increase the aspect ratio of the grid line, which is difficult to achieve with the traditional screen printing process.

[0005] With the continuous improvement of photovoltaic solar cell technology, higher requirements are put forward for the graphic technology of complex structures: finer wire diameter, higher precision, higher processing speed and lower process cost. Therefore, the application of exposure technology is an inevitable trend in the development of solar cells.

[0006] To this end, we propose an LDI exposure device for solar cells. Utility Model Content

[0007] In view of the shortcomings of the above-mentioned existing production technology, the applicant provides an LDI exposure device for battery cells, thereby achieving simultaneous battery cell alignment and exposure processes, thereby fully improving processing efficiency.

[0008] The technical solution adopted by the utility model is as follows:

[0009] An LDI exposure device for a battery cell, comprising:

[0010] A workpiece table, on which a plurality of parallel guide rails are arranged;

[0011] There are at least two processing tables, which are slidably connected to different guide rails, and the processing tables are provided with a plurality of suction cups for fixing the battery sheets;

[0012] An alignment mechanism, which spans over the multiple guide rails of the workpiece table and aligns the battery cells on the processing table by lateral movement;

[0013] The exposure mechanism spans over a plurality of guide rails of the workpiece table and exposes the aligned battery slices by lateral movement.

[0014] Furthermore, it also includes:

[0015] The loading mechanism and unloading mechanism are located on both sides of the processing table, and the battery cells are loaded and unloaded through the conveying device;

[0016] The feeding mechanism is located between the loading mechanism and the unloading mechanism and is used to transport the battery cells and transfer them between the loading mechanism, the processing table and the unloading mechanism.

[0017] Furthermore, the structure of the feeding mechanism includes a translation mechanism, and a rotating cylinder, a lifting cylinder and a conveying plate connected to the translation mechanism, and the conveying plate is used to convey the battery cells.

[0018] Furthermore, the workpiece platform comprises:

[0019] A platform, on which a plurality of parallel guide rails are arranged;

[0020] The alignment bracket is arranged on the platform and spans across a plurality of guide rails. The alignment bracket comprises an alignment column and an alignment beam. The alignment mechanism moves on the alignment beam via an X-axis moving track.

[0021] An exposure bracket is arranged on the platform and is parallel to the alignment bracket. The exposure bracket includes an exposure column and an exposure beam. The exposure mechanism is connected to the exposure beam and the alignment beam at the same time through an X-axis moving track 2 and can move in the X-axis direction.

[0022] The chassis assembly is arranged at the bottom of the platform and plays a supporting and leveling role.

[0023] Furthermore, the alignment mechanism includes an alignment camera, and the alignment camera captures the marking points on the battery cell and aligns the battery cell.

[0024] Furthermore, the exposure mechanism includes an exposure lens assembly, a micromirror assembly and a laser assembly, which are used to expose the battery cell.

[0025] Furthermore, two suction cups distributed side by side are arranged on the processing table, and the first suction cup can realize movement in the X-axis and Y-axis directions and rotation in the θ-axis direction through adjustment mechanism one, and the second suction cup can realize rotation in the θ-axis direction through adjustment mechanism two.

[0026] Furthermore, the processing platform includes:

[0027] A linear conveying device, which can drive the processing table to move on the guide rail;

[0028] The structural plate is used to fix the adjusting mechanism 1 and the adjusting mechanism 2 on the linear conveying device.

[0029] Furthermore, the adjustment mechanism 1 includes three alignment motors, and two of the alignment motors are used to control the movement of the corresponding first suction cup horizontal plane in the X-axis and Y-axis directions, and the other alignment motor is used to control the rotation of the corresponding first suction cup horizontal plane in the θ-axis direction.

[0030] Furthermore, the second adjustment mechanism includes a positioning motor for driving the corresponding second suction cup to rotate in the θ-axis direction on the horizontal plane.

[0031] The beneficial effects of the utility model are as follows:

[0032] The utility model has a compact and reasonable structure and is easy to operate. By arranging at least two processing tables and providing a positioning mechanism and an exposure mechanism that can be moved laterally, multi-station work is realized, and the battery cell positioning and exposure processes are carried out simultaneously, eliminating the restrictive factor of the positioning process on the overall processing speed, fully improving the processing efficiency and reducing the processing cost.

[0033] At the same time, the utility model also has the following advantages:

[0034] 1. Each processing table is equipped with multiple suction cups, which can expose multiple cells at the same time.

[0035] 2. The alignment process and the exposure process are carried out in parallel, which improves the processing efficiency of the exposure equipment.

[0036] 3. By setting the adjustment mechanism 1 and the adjustment mechanism 2 with different structures, the space utilization rate can be improved. In particular, the structural improvement of the adjustment mechanism 2 greatly reduces the space occupation, making the overall structure more compact and the layout more reasonable. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a structural schematic diagram of the utility model.

[0038] Figure 2 It is a structural schematic diagram of the workpiece platform in the utility model.

[0039] Figure 3 It is a structural schematic diagram of the feeding mechanism in the utility model.

[0040] Figure 4 It is a structural schematic diagram of the processing table in the utility model.

[0041] Figure 5It is a structural schematic diagram of the alignment mechanism in the utility model.

[0042] Figure 6 It is a structural schematic diagram of the exposure mechanism in the utility model.

[0043] in:

[0044] 100, workpiece table; 200, loading mechanism; 300, feeding mechanism; 400, processing table; 500, alignment mechanism; 600, exposure mechanism; 700, unloading mechanism;

[0045] 101, platform; 102, alignment column; 103, alignment beam; 104, exposure column; 105, exposure beam; 106, chassis assembly;

[0046] 301, conveying plate; 302, rotating cylinder; 303, translation mechanism; 304, lifting cylinder; 305, X-axis moving track three;

[0047] 401, first suction cup; 401', second suction cup; 402, linear conveying device; 403, alignment motor; 404, structural plate;

[0048] 501, alignment camera; 502, X-axis moving track 1;

[0049] 601, exposure lens assembly; 602, micromirror assembly; 603, X-axis moving track 2; 604, laser assembly. DETAILED DESCRIPTION

[0050] The specific implementation of the present utility model is described below in conjunction with the accompanying drawings.

[0051] like Figure 1-Figure 6 As shown, the LDI exposure equipment for battery cells of this embodiment includes a workpiece table 100, a processing table 400, an alignment mechanism 500, and an exposure mechanism 600; at the same time, the number of the processing tables 400 is at least two, and corresponding alignment mechanisms 500 and exposure mechanisms 600 that can move laterally are provided to realize multi-station work and realize the simultaneous alignment and exposure processes of the battery cells, thereby eliminating the limiting factor of the alignment process on the overall processing speed, fully improving the processing efficiency, and reducing the processing cost.

[0052] At the same time, in this embodiment, it also includes:

[0053] The loading mechanism 200 and the unloading mechanism 700 are respectively located on both sides of the processing table 400, and the battery cells are loaded and unloaded through the conveying device;

[0054] like Figure 1As shown, the loading mechanism 200 and the unloading mechanism 700 are the same in structure, and both include a frame, a table, and several conveying components. The frame is a metal structure, which is in direct contact with the ground, and is equipped with multiple foot cups at the bottom. The threaded pair of the foot cups is used to adjust the level of the mechanism; the table is fixedly connected to the top of the frame; several conveying components with the same structure are fixed to the upper surface of the table in sequence along the X-axis at equal intervals. The belt conveying direction of the conveying component is along the X-axis. Each conveying component is composed of a belt within the group, a pulley, and a bracket; the conveying components are linked by the inter-group belt to ensure that the linear speed of each conveying belt is consistent.

[0055] In another embodiment, the belt-driven loading mechanism 200 and unloading mechanism 700 may be other transmission forms such as V-belt transmission, wire transmission, chain transmission, etc.

[0056] The feeding mechanism 300 is located between the loading mechanism 200 and the unloading mechanism 700 and is used to transport the battery cells and transfer them between the loading mechanism 200 , the processing table 400 and the unloading mechanism 700 .

[0057] The structure of the feeding mechanism 300 includes a translation mechanism 303, and a rotating cylinder 302, a lifting cylinder 304 and a conveying plate 301 connected to the translation mechanism 303, and the conveying plate 301 is used to convey the battery cells.

[0058] like Figure 3 As shown, the feeding mechanism 300 includes an X-axis moving track 305, a linear motor, a feeding bottom plate, a lifting cylinder 304, a rotating cylinder 302, and a conveying plate 301. The X-axis moving track 305 includes two guide rails, which are arranged front and back, and the guide rail direction is along the X-axis, fixed to the upper side of the platform 101 of the workpiece table 100 and on both sides of the linear motor, and each guide rail is equipped with a number of sliders; the linear motor stator is fixed to the upper side of the platform 101 of the workpiece table 100 and between the two guide rails, and is arranged along the X-axis direction; the feeding bottom plate is located above the guide rail slider and is fixedly connected to the linear motor mover; the lifting cylinder 304 is fixedly connected to the upper side of the feeding bottom plate, and the cylinder push rod is along the Z-axis direction; There are two lifting side plates, which are respectively located on the left and right sides of the lifting cylinder 304 and the upper side of the feeding bottom plate; the lifting top plate is located on the upper side of the lifting cylinder 304, and a guide rail is arranged between the lifting top plate and the lifting side plates; there are two rotating cylinders 302, which are located on the upper side of the lifting top plate and arranged up and down, and a partition, a thrust bearing, etc. are arranged between the two rotating cylinders 302; the conveying plate 301 is located on the upper side of the rotating cylinder 302, and there are arrayed vacuum holes on the lower side of the conveying plate 301, which absorb the battery cells by vacuum adsorption.

[0059] In another embodiment, the lifting cylinder 304 and the rotating cylinder 302 of the utility model may also be other drive forms such as a servo motor plus a screw.

[0060] Specifically, Figure 1 As shown, this embodiment describes each mechanism of the device in detail. To facilitate the description of positional relationships, the X, Y, Z, and θ axes are used to indicate spatial directions.

[0061] like Figure 2 As shown, the workpiece stage 100 serves as a carrier of the entire device, and the structure of the workpiece stage 100 includes a platform 101 and an alignment bracket, an exposure bracket and a chassis assembly 106 .

[0062] A plurality of parallel guide rails are arranged on the platform 101, and the platform 101 is made of marble;

[0063] The alignment bracket is arranged on the platform 101 to install the alignment mechanism 500 and spans across multiple guide rails. The alignment bracket includes an alignment column 102 and an alignment beam 103. The alignment mechanism 500 moves on the alignment beam 103 via an X-axis moving track 1 502.

[0064] The exposure bracket is arranged on the platform 101 and is arranged parallel to the alignment bracket, and is used to install the exposure mechanism 600. The exposure bracket includes an exposure column 104 and an exposure beam 105. The exposure mechanism 600 is connected to the exposure beam 105 and the alignment beam 103 through the X-axis moving track 603, and can move in the X-axis direction.

[0065] The chassis assembly 106 is disposed at the bottom of the platform 101 and plays a supporting and leveling role to provide a level working environment.

[0066] In this embodiment, Figure 4 As shown, there are two processing tables 400, which are slidably connected to different guide rails respectively. Two suction cups are arranged side by side on the processing table 400 for fixing the battery sheet, and the first suction cup 401 can move in the X-axis and Y-axis directions and rotate in the θ-axis direction through the adjustment mechanism 1, and the second suction cup 401' can rotate in the θ-axis direction through the adjustment mechanism 2;

[0067] The structure of the processing table 400 includes a linear conveying device 402 and a structural plate 404;

[0068] The linear conveying device 402 can drive the processing table 400 to move on the guide rail;

[0069] There are multiple structural plates 404, which are used to fix the adjustment mechanism 1 and the adjustment mechanism 2 on the linear conveying device 402. In this embodiment, the adjustment mechanism 1 includes three alignment motors 403, and two of the alignment motors 403 are used to control the movement of the corresponding first suction cup 401 in the X-axis and Y-axis directions on the horizontal plane, and the other alignment motor 403 is used to control the rotation in the θ-axis direction on the horizontal plane. The three alignment motors 403 are sequentially arranged from bottom to top along the Z-axis direction: X-axis alignment motor, Y-axis alignment motor, and θ-axis DD (Direct Drive) motor, which respectively drive the X, Y, and θ alignment axes of the first suction cup 401 on the left side.

[0070] In this embodiment, the second adjustment mechanism includes a positioning motor 403 for driving the corresponding second suction cup 401' to rotate. The positioning motor 403 of the second suction cup 401' on the right side has one, which is a θ-axis DD motor, which drives the θ positioning axis of the second suction cup 401' on the right side. The X and Y positioning axes of the second suction cup 401' on the right side are shared with the X-axis of the exposure mechanism 600 and the Y-axis of the processing table 400, respectively, that is, the exposure mechanism 600 moves along the X-axis to achieve the X-axis positioning of the second suction cup, and the processing table 400 moves along the Y-axis to achieve the Y-axis positioning of the second suction cup.

[0071] By setting up the adjustment mechanism 1 and the adjustment mechanism 2 with different structures, the space utilization rate can be improved. In particular, the structural improvement of the adjustment mechanism 2 only includes one alignment motor, which greatly reduces the space occupancy, makes the overall structure more compact and the layout more reasonable.

[0072] In this embodiment, each suction cup has vacuum holes arranged in an array on its upper side, and the battery cell is fixed by vacuum adsorption.

[0073] In another embodiment, the adsorption method of the conveying plate 301 and the vacuum holes arranged in the suction cup array of the utility model can also be other adsorption methods such as porous ceramic vacuum adsorption or electrostatic adsorption.

[0074] The alignment mechanism 500 spans over the multiple guide rails of the workpiece table 100 and aligns the battery cells on the two processing tables 400 by lateral movement. In this embodiment, the alignment mechanism 500 includes an alignment camera 501, and the alignment camera 501 grabs the marking points on the battery cells and aligns the battery cells. The battery cells will be provided with marking points before exposure.

[0075] The specific structure is as follows Figure 5As shown, the alignment mechanism 500 is composed of an X-axis moving track 502, a linear motor, a camera back plate, an alignment camera 501, etc. The X-axis moving track 502 includes two guide rails, which are installed on the front side of the alignment beam 103, arranged up and down, and the guide rail direction is along the X axis. Each guide rail is equipped with a number of sliders; the linear motor stator is installed on the front side of the alignment beam 103, between the two guide rails, and arranged along the X axis direction; there are two camera back plates, which are respectively installed on the front side of the slider, arranged left and right along the X axis direction, and fixedly connected to the linear motor mover; there are two alignment cameras 501, which are respectively installed on the front sides of the two camera back plates.

[0076] The exposure mechanism 600 spans over more than 100 guide rails of the workpiece table and exposes the aligned battery cells by lateral movement. The exposure mechanism 600 includes an exposure lens assembly 601, a micromirror assembly 602 and a laser assembly 604 for exposing the battery cells.

[0077] like Figure 6 As shown, the exposure mechanism 600 is composed of an X-axis moving track 603, a linear motor, an exposure platform, an exposure lens assembly 601, a micromirror assembly 602, a drive card fixing frame, a laser assembly 604, etc. The second X-axis moving track 603 includes two guide rails, which are respectively installed on the upper side of the exposure beam 105 and the alignment beam 103, arranged front to back, and the guide rail direction is along the X-axis. Each guide rail is equipped with a number of sliders; the linear motor stator is installed on the upper side of the exposure beam 105, the rear side of the two guide rails, and arranged along the X-axis direction; the exposure platform is installed on the upper side of the slider, fixedly connected to the linear motor mover, and the exposure platform has two avoidance slots; the exposure lens assembly 601 has multiple groups, which are arranged in two rows and staggered, pass through the avoidance slots of the exposure platform, and are installed on the upper side of the exposure platform, between the two guide rails; the drive card fixing frame is a metal structural part, installed on the upper side of the exposure platform, and surrounds the exposure lens assembly 601; there are multiple groups of micromirror assemblies 602, each group includes a DMD (Digital Micromirror Device) micromirror unit and DMD driver board, etc.; wherein the DMD micromirror unit is installed on the upper side of the exposure lens assembly 601, and is used to modulate the laser to form an exposure pattern; the DMD driver board is installed on the upper side of the driver card fixing frame, and is used to process the exposure pattern data; the laser assembly 604 is installed on the upper side of the exposure platform and the rear side of the driver card fixing frame, and includes multiple laser units, which are used to provide laser for the exposure mechanism 600.

[0078] The driving form of the linear motor of the utility model can also be other driving forms such as a servo motor plus a screw.

[0079] The utility model realizes parallel alignment and exposure process of the battery sheet by arranging double working positions for the exposure lens, thus fully improving the processing efficiency and reducing the processing cost.

[0080] The utility model realizes the left and right double-station exposure processing by setting a linear moving mechanism for the exposure lens and the alignment camera 501. By moving the exposure lens and the alignment camera 501 left and right, when the left station battery cell is aligned, the right station battery cell is exposed; when the left station battery cell is exposed, the right station battery cell is aligned.

[0081] For ease of understanding, the following terms are explained:

[0082] Photosensitive / Photosensitive Material: A material with photosensitive properties that undergoes physical or chemical changes when exposed to light, solidifies after exposure or becomes more soluble after exposure.

[0083] Exposure / Photolithography: The process by which photosensitive materials undergo physical or chemical changes when exposed to ultraviolet light. On a surface coated with photosensitive material, the photosensitive material in the exposed area forms a specific pattern, which is retained or removed through development.

[0084] Development: The process by which the photosensitive material in the exposed or unexposed area is dissolved and washed away by the developer. The shape of the remaining photosensitive material after development is the same as the exposure pattern.

[0085] Mask: It is a graphic master used in the exposure process in microelectronics manufacturing. The mask pattern is formed on a transparent substrate by an opaque light-shielding film. During exposure, light passes through the hollow part and shines on the photosensitive material to form a specific pattern.

[0086] DMD: Digital Micromirror Device, composed of many tiny mirrors, each of which can be adjusted independently to control the direction of its light reflection. Each micromirror of DMD represents a pixel. By controlling the angle of the micromirror, the brightness of each pixel can be controlled to achieve image projection.

[0087] LDI: Laser Direct Imaging, an exposure process that uses DMD to modulate the laser and directly forms an image without using a mask.

[0088] Heterojunction / HJT: Heterojunction Technology, heterojunction technology. Heterojunction: A PN junction formed by different semiconductors.

[0089] Patterning: usually refers to the process of forming electrode patterns on the surface of the cell in the production of heterojunction (HJT) solar cells.

[0090] Alignment: The process of equipment identifying and calculating the position of workpieces in precision production. Usually, an alignment camera is used to capture multiple prefabricated marking points on the workpiece, and the position of the workpiece is calculated based on the coordinates of the marking points.

[0091] The working principle in this embodiment is as follows:

[0092] ① The battery cells are loaded by the loading mechanism 200 and transferred to the left / right processing table 400 via the conveying plate 301;

[0093] ② The left / right processing table 400 moves along the Y axis to the alignment station and cooperates with the alignment camera 501 to align the battery cells;

[0094] ③ After the battery cells are aligned, the left / right processing table 400 moves along the Y axis to the exposure station, and the exposure lens assembly 601 performs exposure;

[0095] ④ The exposure lens and the alignment camera 501 are both moved along the X-axis. When the battery cell at the left station is aligned, the battery cell at the right station is exposed; when the battery cell at the left station is exposed, the battery cell at the right station is aligned;

[0096] ⑤ After the exposure is completed, the left / right processing table 400 moves along the Y axis to the loading and unloading station, and the battery cell is transferred to the unloading mechanism 700 via the conveying plate 301.

[0097] The above description is an explanation of the utility model, not a limitation of the utility model. The scope of the utility model is defined by the claims. Any form of modification can be made within the protection scope of the utility model.

Claims

1. An LDI exposure device for a cell, characterized in that: include: A workpiece table (100) having a plurality of parallel guide rails disposed thereon; There are at least two processing tables (400) which are slidably connected to different guide rails respectively, and a plurality of suction cups for fixing battery sheets are arranged on the processing tables (400); An alignment mechanism (500) straddles a plurality of guide rails of a workpiece table (100) and aligns the battery cells on the processing table (400) by lateral movement; The exposure mechanism (600) spans over a plurality of guide rails of the workpiece platform (100) and exposes the aligned battery slices by lateral movement.

2. The LDI exposure device for a cell according to claim 1, characterized in that: Also includes: A loading mechanism (200) and a unloading mechanism (700), which are respectively located on two sides of the processing table (400) and are used to load and unload the battery cells through a conveying device; The feeding mechanism (300) is located between the loading mechanism (200) and the unloading mechanism (700) and is used to transport the battery cells and transfer them between the loading mechanism (200), the processing table (400) and the unloading mechanism (700).

3. The LDI exposure device for a cell according to claim 2, characterized in that: The structure of the feeding mechanism (300) comprises a translation mechanism (303), and a rotating cylinder (302), a lifting cylinder (304) and a conveying plate (301) connected to the translation mechanism (303), and the conveying plate (301) is used to convey the battery cells.

4. The LDI exposure device for a cell according to claim 1, characterized in that: The workpiece platform (100) comprises: A platform (101) on which a plurality of parallel guide rails are arranged; An alignment bracket is arranged on the platform (101) and spans across a plurality of guide rails. The alignment bracket comprises an alignment column (102) and an alignment beam (103). The alignment mechanism (500) moves on the alignment beam (103) via an X-axis moving track 1 (502); An exposure bracket is arranged on the platform (101) and is parallel to the alignment bracket, the exposure bracket comprises an exposure column (104) and an exposure beam (105), and the exposure mechanism (600) is simultaneously connected to the exposure beam (105) and the alignment beam (103) via an X-axis moving track 2 (603), and can move in the X-axis direction; The chassis assembly (106) is arranged at the bottom of the platform (101) and plays a supporting and leveling role.

5. The LDI exposure device for a cell according to any one of claims 1 to 4, characterized in that: The alignment mechanism (500) comprises an alignment camera (501), and the alignment camera (501) aligns the battery cell by grabbing the marking points on the battery cell.

6. An LDI exposure device for a cell according to any one of claims 1 to 4, characterized in that: The exposure mechanism (600) comprises an exposure lens assembly (601), a micromirror assembly (602) and a laser assembly (604), and is used to expose a cell sheet.

7. The LDI exposure device for a cell according to claim 1, characterized in that: The processing table (400) is provided with two suction cups distributed side by side, wherein the first suction cup (401) can move in the X-axis and Y-axis directions and rotate in the θ-axis direction through the first adjustment mechanism, and the second suction cup (401') can rotate in the θ-axis direction through the second adjustment mechanism.

8. The LDI exposure device for a cell according to claim 1, characterized in that: The processing station (400) comprises: A linear conveying device (402) capable of driving the processing table to move on the guide rail; The structural plate (404) is used to fix the adjustment mechanism 1 and the adjustment mechanism 2 on the linear conveying device (402).

9. The LDI exposure device for a cell according to claim 8, characterized in that: The first adjustment mechanism comprises three alignment motors (403), two of which are used to control the movement of the first suction cup (401) in the X-axis and Y-axis directions on the horizontal plane, and the other alignment motor (403) is used to control the rotation of the first suction cup (401) in the θ-axis direction on the horizontal plane.

10. The LDI exposure device for a cell according to claim 8, characterized in that: The second adjustment mechanism comprises a positioning motor (403) for driving the corresponding second suction cup (401') to rotate in the direction of the θ axis on the horizontal plane.

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