Silicon wafer bearing wet-process flower basket
By designing the water drop-shaped flower basket and the smooth connection, the problem of poor drying effect of wet flower baskets is solved, and more efficient drying effect and strength guarantee is achieved. It is suitable for large-scale photovoltaic cell manufacturing and simplifies the processing process.
Patent Information
- Application Number
- CN202420921437.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-29
- Publication Date
- 2024-12-24
- Estimated Expiration
- 2034-04-29
AI Technical Summary
During the drying process of existing wet flower baskets, the drying effect of the flower basket teeth near the bottom of the drying tank is poor, and liquid volume is prone to retaining, resulting in flower basket marks and EL pollution problems. The traditional solution is to set up a ventilation pipe inside the flower basket rod. and holes to improve, but processing is difficult and weakens the strength of the basket, making it not suitable for large-scale applications.
A silicon wafer-bearing wet flower basket is designed, where the bottom section of the flower basket rod is small at the top and large at the bottom. The flower basket teeth are located at the upper part of the water droplet shape, and the two sides are smoothly transitioned to reduce the risk of effusion at the connection, and Improve drying airflow through streamlined design.
Effectively reduce the effusion at the junction of the bottom basket teeth and the flower basket rod, improve the drying effect, ensure the strength of the flower basket rod and the flower basket teeth, simplify the processing process, is suitable for large-scale industrial applications, and improves photovoltaic cell manufacturing The yield of the production line during the process and the uniformity of the natural oxide layer.
Smart Images
Figure CN222233589U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of solar cell production equipment, in particular to a silicon chip carrying wet method flower basket. Background Art
[0002] In the field of photovoltaic cell manufacturing, the wet process often requires the use of a drying tank to dry and remove the liquid attached to the basket and silicon wafer to prevent liquid residue from causing basket marks, EL pollution, and the like. In the actual drying process, the drying effect of the basket teeth near the bottom of the drying tank is not good, and liquid is easily accumulated at the junction of the basket rod and the basket teeth, causing problems such as basket marks. Specifically, the existing wet basket design usually sets the basket rod to a cylindrical shape, and the cross-sectional diameter is often significantly larger than the bottom side length of the basket teeth. This design makes it difficult for the accumulated liquid at the junction of the basket teeth and the basket rod near the bottom of the wet tank to flow down along the surface of the basket rod, and liquid accumulation is likely to occur. After the wet tank cleaning process, the basket carrying the silicon wafer needs to be placed in the drying tank for drying. Affected by gravity, the residual liquid accumulated on the upper and side basket teeth is easy to drip downwards and is not easy to accumulate, so the drying effect is better. The bottom basket teeth are prone to the junction of the basket teeth and the basket rod ( Figure 1 In the middle (A), liquid that cannot drip off is formed. After drying, the silicon wafer is prone to problems such as basket marks and burns caused by the basket teeth carrying liquid. In order to solve this problem, some researchers set up a gas transmission channel radially inside the basket bottom rod, and set up air outlets at intervals on the gas transmission channel. The drying gas is transported to the junction of the basket bottom rod and the basket teeth through the gas transmission channel and the air outlet to enhance the drying effect. Although this solution can improve the basket mark problem by strengthening the drying of the junction of the rod teeth, it is difficult to process the ventilation pipe radially inside the basket rod, and the internal pipe and multiple ventilation holes will greatly weaken the strength of the basket rod. Therefore, this solution has high requirements on the material strength and processing of the basket rod, and is not suitable for large-scale application. Utility Model Content
[0003] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a simple and practical silicon wafer bearing wet method flower basket which can effectively solve the flower basket printing problem under the premise of ensuring the strength of the flower basket rod and the flower basket teeth.
[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0005] A silicon wafer carrying wet basket comprises two end plates and a plurality of basket rods located between the two end plates, the basket rods comprising a top rod, a side rod and a bottom rod, the top rod, the side rod, the bottom rod and the two end plates together form a storage space for carrying silicon wafers, a hook groove is provided on the end plate, the hook groove is located on the side where the top rod is located, the top rod is opposite to the bottom rod, and the side opposite to the side rod is a basket mouth, basket teeth are provided on the rod wall of the basket rod facing the storage space, the tooth tips of the basket teeth face the storage space, the radial section of the bottom rod is a water drop shape with a small top and a large bottom, the bottom rod basket teeth are located at the upper part of the water drop shape, and the bottom rod basket teeth are smoothly transitioned and connected with the curves on both sides of the water drop shape along the two side edges of the radial section of the bottom rod.
[0006] As a further improvement, the teardrop shape is composed of an elliptical arc at the top, connecting segments at both sides and a circular arc at the bottom, and both side edges of the cross section of the bottom rod flower basket teeth along the radial direction of the bottom rod are tangent to both sides of the elliptical arc respectively.
[0007] According to further improvements, the major axis length of the ellipse corresponding to the elliptical arc is 10mm~15mm, the minor axis length is 7mm~11mm, the diameter of the circle corresponding to the circular arc is 26mm~34mm, the height of the bottom rod flower basket teeth is 8mm~10mm, and the bottom width of the bottom rod flower basket teeth is 6mm~9mm.
[0008] According to a further improvement, the mandrel is a round rod, the cross-sectional diameter of the mandrel is 28 mm to 35 mm, the height of the mandrel flower basket teeth is 8 mm to 10 mm, and the bottom width of the mandrel flower basket teeth is 4 mm to 6 mm.
[0009] In a further improvement, the side rod is a round rod, the cross-sectional diameter of the side rod is 28mm~35mm, the height of the side rod flower basket teeth is 8mm~10mm, and the bottom width of the side rod flower basket teeth is 4mm~6mm.
[0010] According to a further improvement, the spacing of the basket teeth along the axial direction is 1 mm to 2 mm.
[0011] According to a further improvement, there are two of each of the top rod, the side rod and the bottom rod.
[0012] Compared with the prior art, the advantages of the utility model are:
[0013] The utility model discloses a silicon wafer carrying wet process flower basket. On the premise of meeting the basic strength requirements of the flower basket rod and the flower basket teeth, the flower basket rod close to the bottom of the drying tank is designed to be an irregular rod in the shape of a water drop with a small upper part and a large lower part in cross section. The flower basket teeth are located in the upper part of the water drop shape, so that the connection between the two sides of the flower basket teeth and the bottom rod is smoothly transitioned, and the area of the flower basket rod at the connection is reduced, so that the accumulated liquid there can easily flow down along the surface of the flower basket rod, and the situation of liquid accumulation at the junction of the bottom flower basket teeth and the flower basket rod is effectively reduced. At the same time, the streamlined design is more conducive to the passage of drying airflow, thereby improving the drying effect. Compared with the traditional round flower basket bottom rod or the one with ventilation duct, the wet flower basket of the utility model effectively improves the problems of flower basket print caused by liquid accumulation at the junction of the bottom flower basket rod teeth and poor drying effect while ensuring strength. It is simple, practical, easy to process and suitable for promotion. It is suitable for wet flower baskets in the fields of photovoltaic cell manufacturing and can improve the yield of battery production lines. For example, in the TOPCon battery alkaline polishing process, the structure of the flower basket can reduce the liquid residue on the silicon wafer and the bottom teeth of the flower basket after slow pulling, avoid oxidation dirt caused by the thick natural oxide layer at the bottom, improve the uniformity of the natural oxide layer after wet cleaning, and is suitable for large-scale industrial promotion and application. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a schematic cross-sectional view of a wet flower basket in the prior art.
[0015] Figure 2 It is a schematic diagram of the three-dimensional structure of the wet-process flower basket supported by the silicon wafer in the specific embodiment of the utility model.
[0016] Figure 3 It is a cross-sectional schematic diagram of a silicon wafer carrying a wet flower basket in a specific embodiment of the utility model.
[0017] Figure 4 1. The cross-sectional view (a) of the bottom rod and the bottom rod turnbuckle and the cross-sectional view (b) of the top rod and the top rod turnbuckle in a specific embodiment of the utility model.
[0018] Figure 5 The three views of the bottom rod and the bottom rod turnbuckle in a specific embodiment of the utility model, wherein (a) is a main view, (b) is a side view, and (c) is a top view.
[0019] The numbers in the figure represent: 01, drying tank bottom; 1, end plate; 2, top rod; 21, top rod flower basket teeth; 3, side rod; 31, side rod flower basket teeth; 4, bottom rod; 41, bottom rod flower basket teeth; 42, elliptical arc; 43, connecting section; 44, circular arc; 5, hook slot; 6, flower basket mouth. DETAILED DESCRIPTION
[0020] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0021] Figures 2 to 5A specific embodiment of the silicon wafer carrying wet flower basket of the utility model is shown, comprising two end plates 1 and a plurality of flower basket rods located between the two end plates 1, the flower basket rods comprising a top rod 2, a side rod 3 and a bottom rod 4, the top rod 2, the side rod 3, the bottom rod 4 and the two end plates 1 together form a receiving space for carrying silicon wafers, a hook groove 5 is provided on the end plate 1, the hook groove 5 is located on the side where the top rod 2 is located, the top rod 2 is opposite to the bottom rod 4, and the side opposite to the side rod 3 is a flower basket mouth 6, the flower basket rod is provided with flower basket teeth on the rod wall facing the receiving space, the tooth tips of the flower basket teeth face the receiving space, the radial section of the bottom rod 4 is a water drop shape with a small top and a large bottom, the bottom rod flower basket teeth 41 are located at the upper part of the water drop shape, and the bottom rod flower basket teeth 41 are smoothly transitioned with the curves on both sides of the water drop shape along the two side edges of the radial section of the bottom rod 4.
[0022] Usually, when the flower basket is in the drying tank, the side opposite to the hook groove 5 is the side close to the drying tank bottom 01. In this embodiment, the flower basket rod on this side is defined as the bottom rod 4, and the bottom rod 4 is designed to be an irregular rod in the shape of a teardrop with a small upper part and a large lower part. Compared with the traditional round flower basket rod, the area of the flower basket rod at the connection between the flower basket teeth and the teardrop-shaped flower basket rod is smaller, and liquid is not easily accumulated. When the flower basket is placed in the drying tank, the residual liquid at the junction of the flower basket teeth and the bottom rod 4 is easy to slide down along the two side walls of the flower basket rod, thereby effectively preventing liquid accumulation and liquid contamination, and the streamlined design of the teardrop shape helps the drying airflow to pass through the flower basket teeth, which is beneficial to improving the drying effect.
[0023] The teardrop-shaped flower basket rod is mainly used as the bottom rod 4, but is not limited to this. The top rod 2 and the side rod 3 can also be used. In this embodiment, using the teardrop-shaped flower basket rod as the bottom rod 4 effectively improves the drying efficiency, improves the thickness of the natural oxide layer, and reduces the proportion of burning caused by water sheets. The top rod 2 and the side rod 3 continue to use the original structure, which can save the cost of modifying the equipment (i.e., the flower basket structure) and solve the problem with a relatively low investment.
[0024] In this embodiment, the teardrop-shaped cross section of the bottom rod 4 is formed by sequentially connecting the upper elliptical arc 42, the connecting sections 43 on both sides and the lower circular arc 44, and the two sides of the cross section of the bottom rod 4 along the radial direction of the bottom rod 4 are respectively tangent to the two sides of the elliptical arc 42. By making the edge line of the bottom rod basket teeth 41 tangent to the upper elliptical arc 42 of the cross section of the bottom rod 4, the connection between the edge line of the basket teeth and the bottom rod 4 can be made smoother, and the effect of improving the effusion is better.
[0025] like Figure 4As shown, in this embodiment, the length of the major axis L1 of the ellipse corresponding to the elliptical arc 42 is 10mm~15mm, the length of the minor axis L2 is 7mm~11mm, the diameter d1 of the circle corresponding to the arc 44 is 26mm~34mm, the height h1 of the bottom rod flower basket tooth 41 is 8mm~10mm, and the bottom width W1 of the bottom rod flower basket tooth 41 is 6mm~9mm. Therefore, the diameter of the bottom rod 4 and the height of the bottom rod flower basket tooth 41 are designed to meet the basic strength of the flower basket rod and the flower basket tooth, while minimizing the space occupied by the flower basket rod.
[0026] In this embodiment, the top rod 2 is a round rod, the cross-sectional diameter d2 of the top rod 2 is 28mm~35mm, the height h2 of the top rod flower basket teeth 21 is 8mm~10mm, and the bottom width W2 of the top rod flower basket teeth 21 is 4mm~6mm. The side rod 3 is a round rod, the cross-sectional diameter of the side rod 3 is 28mm~35mm, the height of the side rod flower basket teeth 31 is 8mm~10mm, and the bottom width of the side rod flower basket teeth 31 is 4mm~6mm. The spacing W3 of the flower basket teeth arranged along the axial direction is 1mm~2mm. Therefore, the design of the flower basket rod diameter, the height of the flower basket teeth and the spacing of the flower basket teeth is to minimize the space occupied by the flower basket while meeting the basic strength of the flower basket rod and the flower basket teeth.
[0027] In this embodiment, there are two top bars 2, two side bars 3 and two bottom bars 4. Providing two top bars 2, two side bars 3 and two bottom bars 4 can enhance the stability of the flower basket structure and improve the bearing capacity of the flower basket on the silicon wafer.
[0028] Although the present invention has been disclosed as a preferred embodiment, it is not intended to limit the present invention. Any technician familiar with the art can use the above disclosed technical content to make many possible changes and modifications to the technical solution of the present invention without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention should fall within the scope of protection of the technical solution of the present invention.
Claims
1. A silicon wafer carrying wet process flower basket, characterized in that: The invention comprises two end plates (1) and a plurality of basket rods located between the two end plates (1), the basket rods comprising a top rod (2), a side rod (3) and a bottom rod (4), the top rod (2), the side rod (3), the bottom rod (4) and the two end plates (1) together enclose a storage space for carrying silicon wafers, the end plate (1) is provided with a hook groove (5), the hook groove (5) is located on the side where the top rod (2) is located, the top rod (2) is opposite to the bottom rod (4), and the side opposite to the side rod (3) is a basket mouth (6), the basket rod walls facing the storage space are provided with basket teeth, the tooth tips of the basket teeth face the storage space, the radial cross section of the bottom rod (4) is a water drop shape with a small top and a large bottom, the bottom rod basket teeth (41) are located at the upper part of the water drop shape, and the bottom rod basket teeth (41) are smoothly transitionally connected to the curves on both sides of the water drop shape along the two side edges of the radial cross section of the bottom rod (4).
2. The silicon wafer supporting wet process basket according to claim 1, characterized in that: The teardrop shape is composed of an upper elliptical arc (42), connecting sections (43) on both sides, and a lower circular arc (44) connected in sequence, and the two side edges of the cross section of the bottom rod (4) along the radial direction of the bottom rod (4) are respectively tangent to the two sides of the elliptical arc (42).
3. The silicon wafer supporting wet process basket according to claim 2, characterized in that: The length of the major axis of the ellipse corresponding to the elliptical arc (42) is 10 mm to 15 mm, and the length of the minor axis is 7 mm to 11 mm. The diameter of the circle corresponding to the circular arc (44) is 26 mm to 34 mm. The height of the bottom rod flower basket teeth (41) is 8 mm to 10 mm, and the bottom width of the bottom rod flower basket teeth (41) is 6 mm to 9 mm.
4. The silicon wafer supporting wet process basket according to any one of claims 1 to 3, characterized in that: The top rod (2) is a round rod, the cross-sectional diameter of the top rod (2) is 28 mm to 35 mm, the height of the top rod flower basket teeth (21) is 8 mm to 10 mm, and the bottom width of the top rod flower basket teeth (21) is 4 mm to 6 mm.
5. The silicon wafer supporting wet process basket according to any one of claims 1 to 3, characterized in that: The side rod (3) is a round rod, the cross-sectional diameter of the side rod (3) is 28 mm to 35 mm, the height of the side rod flower basket teeth (31) is 8 mm to 10 mm, and the bottom width of the side rod flower basket teeth (31) is 4 mm to 6 mm.
6. The silicon wafer supporting wet process basket according to any one of claims 1 to 3, characterized in that: The spacing of the basket teeth along the axial direction is 1mm~2mm.
7. The silicon wafer supporting wet process basket according to any one of claims 1 to 3, characterized in that: There are two top rods (2), two side rods (3) and two bottom rods (4).