Feeding device

Abstract

The utility model relates to a feeding device which comprises a flower basket frame, a conveying mechanism, a distance measuring mechanism and a lifting mechanism, and the flower basket frame is used for bearing a flower basket containing silicon wafers. At least part of the conveying mechanism can extend into or retreat from the basket, and the conveying mechanism is used for sending the silicon wafers out of the basket. The distance measuring mechanism is arranged on the conveying mechanism, the distance measuring mechanism is used for acquiring distance information from the lowermost silicon wafer in the multiple silicon wafers stacked at intervals in the basket to the conveying mechanism, the lifting mechanism is connected with the basket frame, and the lifting mechanism is in communication connection with the distance measuring mechanism; the lifting mechanism can drive the basket frame to descend by a corresponding distance according to distance information acquired by the distance measuring mechanism so as to release the silicon wafers in the basket to the conveying mechanism one by one. According to the feeding device, the material waiting time can be shortened, the production efficiency is improved, and the universality is good.

Description

Technical Field

[0001] The present application relates to the technical field of solar cell production equipment, and in particular to a feeding device. Background Art

[0002] As conventional fossil fuels are increasingly depleted, solar energy is undoubtedly the cleanest, most common and most promising alternative energy source among the existing sustainable energy sources. In the solar cell manufacturing process, the cell needs to go through cleaning, PECVD (Plasma Enhanced Chemical Vapor Deposition) coating, PVD (Physical Vapor Deposition) coating and screen printing.

[0003] Before the battery cells undergo the coating process, the silicon wafers need to be loaded with the help of a basket and a conveyor belt. However, the traditional loading method is inefficient, especially when the basket is not full. The traditional loading device needs to wait for a long time for the material, which seriously delays the production line output. At the same time, when the number or specifications of the slots in the basket for placing silicon wafers change, the traditional loading device cannot perform the loading operation, which has great limitations. Utility Model Content

[0004] Based on this, it is necessary to provide a feeding device, which can reduce the waiting time for materials, improve production efficiency, and has good versatility.

[0005] A feeding device, comprising:

[0006] A flower basket stand, the flower basket stand being used to carry a flower basket containing silicon wafers;

[0007] A conveying mechanism, at least a portion of which can extend into or out of the flower basket, and the conveying mechanism is used to convey the silicon wafer out of the flower basket;

[0008] a distance measuring mechanism, the distance measuring mechanism being arranged on the conveying mechanism, the distance measuring mechanism being used to obtain distance information from the bottommost silicon wafer of the plurality of silicon wafers stacked at intervals in the flower basket to the conveying mechanism; and

[0009] A lifting mechanism is connected to the flower basket frame, and the lifting mechanism is in communication connection with the distance measuring mechanism. The lifting mechanism can drive the flower basket frame to descend a corresponding distance according to the distance information obtained by the distance measuring mechanism, so as to release the silicon wafers in the flower basket onto the conveying mechanism one by one.

[0010] The technical solution is further described below:

[0011] In one embodiment, the conveying mechanism includes a baffle and two conveyor belts, the two conveyor belts are arranged in parallel and at intervals, the baffle is arranged between the two conveyor belts, and the distance measuring mechanism is arranged on the baffle.

[0012] In one embodiment, each of the conveyor belts is provided with a moving wheel that rolls with the conveyor belt, and the conveying mechanism further includes a synchronization shaft, and both ends of the synchronization shaft are respectively connected to the moving wheels of the two conveyor belts.

[0013] In one of the embodiments, the baffle is provided with an avoidance hole penetrating through two sides of the baffle, and the synchronization shaft is rotatably arranged in the avoidance hole.

[0014] In one embodiment, the ranging mechanism includes an ultrasonic transmitter and an ultrasonic receiver, and both the ultrasonic transmitter and the ultrasonic receiver are arranged on the conveying mechanism. The ultrasonic transmitter is used to transmit ultrasonic waves to the silicon wafer, and the ultrasonic receiver is used to receive the ultrasonic waves reflected by the silicon wafer.

[0015] In one of the embodiments, the feeding device further comprises a support arm, the support arm extends in a vertical direction, the support arm is slidably connected to the flower basket stand, and the lifting mechanism is used to drive the flower basket stand to perform lifting motion along the support arm.

[0016] In one embodiment, there are two support arms, the two support arms are arranged at an interval, the flower basket stand is arranged between the two support arms, and two sides of the flower basket stand are slidably matched with the two support arms respectively.

[0017] In one embodiment, the lifting mechanism comprises:

[0018] A lead screw, the lead screw being rotatably disposed in the support arm and extending along the vertical direction;

[0019] a slider, the slider is threadably matched with the lead screw and is slidably connected to the support arm, the slider is connected to the flower basket; and,

[0020] A motor is connected to the lead screw, and the motor is used to drive the lead screw to rotate.

[0021] In one embodiment, the flower basket stand includes a bottom plate, a top plate, and a column connected between the bottom plate and the top plate, and the bottom plate, the top plate, and the column together enclose a receiving cavity for receiving the flower basket.

[0022] In one of the embodiments, a detection sensor is provided on the flower basket stand, and the detection sensor is communicatively connected with the conveying mechanism. The detection sensor is used to detect whether there are silicon wafers in the flower basket in the flower basket stand, and control the conveying mechanism to withdraw from the flower basket when there are no silicon wafers in the flower basket.

[0023] In the above-mentioned loading device, by setting a distance measuring mechanism on the conveying mechanism, the distance measuring mechanism can obtain the distance from the silicon wafers at the bottom layer in the flower basket to the conveying mechanism, and the lifting mechanism can drive the flower basket frame to descend the same distance according to the distance measured by the distance measuring mechanism, so as to ensure that the flower basket frame can accurately release the silicon wafers at the bottom layer in the flower basket to the conveying mechanism each time it descends, so that the conveying mechanism can deliver the silicon wafers. Compared with the traditional loading device in which the flower basket frame descends a fixed distance each time, the loading device of the present application can avoid the frequent airdrop phenomenon of the flower basket frame when the flower basket is not full, thereby reducing the waiting time of the conveying mechanism and improving the production speed and output of the production line. At the same time, the lifting mechanism drives the flower basket frame to descend the same distance according to the distance measured by the distance measuring mechanism, and also ensures that when the specifications of the flower basket change, the lifting mechanism can adjust the distance of the flower basket frame descending according to the actual distance from the silicon wafers at the bottom layer in the flower basket to the conveying mechanism, so as to ensure that the silicon wafers in the flower basket after the specification change can still be placed one by one in the conveying mechanism, so that the loading operation of the loading device is not limited by the specifications of the flower basket, and the versatility of the loading device is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application.

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0026] In addition, the drawings are not drawn to a 1:1 scale, and the relative sizes of the various elements are drawn only as examples in the drawings and are not necessarily drawn according to the true scale.

[0027] FIG. 1 is a schematic structural diagram of a flower basket according to an embodiment.

[0028] FIG. 2 is a schematic structural diagram of a feeding device according to an embodiment.

[0029] FIG. 3 is a left side view of the feeding device shown in FIG. 2 .

[0030] FIG. 4 is a schematic structural diagram of a conveying mechanism according to an embodiment.

[0031] FIG. 5 is a schematic diagram of the connection between the driving wheel and the synchronous shaft according to an embodiment.

[0032] FIG. 6 is a schematic structural diagram of a baffle according to an embodiment.

[0033] Description of reference numerals:

[0034] 10. Flower basket stand; 11. Bottom plate; 12. Top plate; 13. Column; 20. Conveying mechanism; 21. Conveyor belt; 211. Driving wheel; 212. Synchronous shaft; 22. Baffle; 221. Avoidance hole; 30. Distance measuring mechanism; 31. Ultrasonic transmitter; 32. Ultrasonic receiver; 41. Support arm; 50. Flower basket; 51. Notch; 60. Silicon wafer. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0036] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0037] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0038] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0039] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0040] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0041] As described in the background technology, before the silicon wafers are subjected to the coating process, the silicon wafers need to be loaded with the help of a flower basket and a conveyor belt. Specifically, referring to FIG1 , the inner wall of the flower basket 50 is provided with a plurality of notches 51, and the plurality of notches 51 are arranged at intervals in the vertical direction, and each notch 51 can hold a silicon wafer 60. It is necessary to first carry the silicon wafer 60 through the flower basket 50 and transfer it to the inner frame of the upper flower basket support, and then control the lifting and lowering of the flower basket support to control the lifting and lowering of the flower basket 50. During this period, the retractable conveyor belt extends into the flower basket 50, and the flower basket support puts the silicon wafers 60 one by one on the retractable conveyor belt by descending a fixed distance one by one, so that the retractable conveyor belt 21 can be sent to the next process. In this process, the inventor found that in the traditional loading device, the distance that the flower basket support descends each time is fixed to the spacing between two adjacent notches 51 in the flower basket 50. Thus, when the basket 50 is not full, for example, as shown in FIG. 1 , when there are multiple slots 51 between two adjacent silicon wafers 60 in the basket 50, since the distance that the basket support descends each time is still maintained at the distance between two adjacent slots 51 in the basket 50, the basket support frequently fails to release the silicon wafers 60, which in turn causes the retractable conveyor belt and the subsequent conveying mechanism to wait for materials for a long time, and finally the time consumed for loading the unfull basket 50 is the same as the time required for loading the full basket 50, which seriously delays the production line output. In addition, when the specifications of the basket 50 are changed, for example, when the number of slots 51 in the basket 50 or the distance between the slots 51 is changed, since the distance that the basket support descends each time is still maintained at the distance between two adjacent slots 51 in the old basket 50, the silicon wafers 60 in the new basket 50 cannot be accurately placed on the retractable conveyor belt 21, and even the silicon wafers 60 may fall and be damaged, and the loading operation cannot be completed.

[0042] Based on this, an embodiment of the present application provides a loading device for placing the silicon wafers 60 stacked in intervals in the flower basket 50 one by one onto the conveying mechanism 20. Specifically, referring to FIG. 2 and FIG. 3, the loading device of an embodiment includes a flower basket frame 10, a conveying mechanism 20, a distance measuring mechanism 30 and a lifting mechanism (not shown), and the flower basket frame 10 is used to carry the flower basket 50 containing the silicon wafers 60. At least a part of the conveying mechanism 20 can extend into or out of the flower basket 50, and the conveying mechanism 20 is used to deliver the silicon wafers 60 out of the flower basket 50. The distance measuring mechanism 30 is arranged on the conveying mechanism 20, and is used to obtain the distance information from the bottom silicon wafer 60 of the multiple silicon wafers 60 stacked in the flower basket 50 to the conveying mechanism 20. The lifting mechanism is connected to the flower basket frame 10, and the lifting mechanism is in communication connection with the distance measuring mechanism 30. The lifting mechanism can drive the flower basket frame 10 to descend a corresponding distance according to the distance information obtained by the distance measuring mechanism 30, so as to release the silicon wafers 60 in the flower basket 50 one by one onto the conveying mechanism 20. The “lifting mechanism can drive the flower basket frame 10 to descend a corresponding distance according to the distance information obtained by the distance measuring mechanism 30” means that the distance that the lifting mechanism drives the flower basket frame 10 to descend each time is equal to the distance from the bottom silicon wafer 60 to the conveying mechanism 20 obtained by the distance measuring mechanism 30 each time.

[0043] Specifically, in one embodiment, when the above-mentioned loading device is working, the flower basket 50 loaded with silicon wafers 60 is first sent into the flower basket rack 10, and then one end of the conveying mechanism 20 extends into the flower basket 50, and then the distance measuring mechanism 30 on the conveying mechanism 20 measures the distance from the bottom layer of silicon wafers 60 in the flower basket 50 to the conveying mechanism 20. The lifting mechanism then drives the basket frame 10 to descend the same distance according to the distance measured by the distance measuring mechanism 30, so as to release the silicon wafer 60 at the bottom layer onto the conveying mechanism 20, and the conveying mechanism 20 then delivers the silicon wafer 60 out of the basket 50; then the distance measuring mechanism 30 again measures the distance from the silicon wafer 60 at the bottom layer in the basket 50 to the conveying mechanism 20, and the lifting mechanism again drives the basket frame 10 to descend the same distance according to the distance measured by the distance measuring mechanism 30, so as to release the silicon wafer 60 at the bottom layer onto the conveying mechanism 20, so that the conveying mechanism 20 delivers the silicon wafer 60 out of the basket 50 and delivers it to the next process, and this cycle is repeated until all the silicon wafers 60 in the basket 50 are delivered by the conveying mechanism 20, and the loading of one basket 50 is completed.

[0044] In the above-mentioned loading device, by setting the distance measuring mechanism 30 on the conveying mechanism 20, the distance measuring mechanism 30 can obtain the distance from the silicon wafer 60 at the bottom layer in the flower basket 50 to the conveying mechanism 20, and the lifting mechanism can drive the flower basket frame 10 to descend the same distance according to the distance measured by the distance measuring mechanism 30, so as to ensure that the flower basket frame 10 can accurately release the silicon wafer 60 at the bottom layer in the flower basket 50 into the conveying mechanism 20 each time it descends, so that the conveying mechanism 20 can deliver the silicon wafer 60. Compared with the traditional loading device in which the flower basket frame 10 descends a fixed distance each time, the loading device of the present application can avoid the frequent airdrop phenomenon of the flower basket frame 10 when the flower basket 50 is not full, thereby reducing the waiting time of the conveying mechanism 20 and improving the production speed and output of the production line. At the same time, the lifting mechanism drives the flower basket frame 10 to descend the same distance according to the distance measured by the distance measuring mechanism 30, and also ensures that when the specifications of the flower basket 50 are changed, the lifting mechanism can adjust the descending distance of the flower basket frame 10 according to the actual distance from the silicon wafer 60 at the bottom layer in the flower basket 50 to the conveying mechanism 20, so as to ensure that the silicon wafers 60 in the flower basket 50 after the specification is changed can still be placed one by one on the conveying mechanism 20, so that the loading operation of the loading device is not limited by the specifications of the flower basket 50, thereby improving the versatility of the loading device.

[0045] Optionally, in one embodiment, the conveying mechanism 20 is a retractable conveyor belt 21, that is, the conveying mechanism 20 is retractable. When the conveying mechanism 20 is extended, one end of the conveying mechanism 20 extends into the flower basket 50 to receive the silicon wafer 60 placed under the flower basket 50; when the conveying mechanism 20 is shortened, the conveying mechanism 20 withdraws from the flower basket 50 to avoid interference between the flower basket 50 and the conveying mechanism 20 when the flower basket rack 10 replaces the flower basket 50.

[0046] Referring to FIG. 4 , in one embodiment, the conveying mechanism 20 includes a baffle 22 and two conveyor belts 21, the two conveyor belts 21 are arranged in parallel and at intervals, the baffle 22 is arranged between the two conveyor belts 21, and the distance measuring mechanism 30 is arranged on the baffle 22. The baffle 22 provides a mounting mechanism for the distance measuring mechanism 30, and does not affect the conveying mechanism 20 conveying the silicon wafer 60. The two parallel and spaced conveyor belts 21 can ensure that when the silicon wafer 60 is conveyed, both sides of the silicon wafer 60 are balanced, thereby improving the stability of conveying the silicon wafer 60.

[0047] Further, referring to Fig. 4 and Fig. 5, each conveyor belt 21 is provided with a driving wheel 211 that rolls with the conveyor belt 21, and the conveying mechanism further includes a synchronous shaft 212, and both ends of the synchronous shaft 212 are respectively connected to the driving wheels of the two conveyor belts 21. In this way, it can be ensured that the two conveyor belts 21 can run synchronously, thereby improving the stability of conveying the silicon wafer 60.

[0048] 6 , the baffle 22 is provided with an avoidance hole 221 penetrating both sides of the baffle 22, and the synchronization shaft 212 is rotatably arranged in the avoidance hole 221, thereby avoiding interference between the synchronization shaft 212 and the baffle 22. Specifically, the synchronization shaft 212 is arranged in the avoidance hole 221 through a bearing.

[0049] Referring to FIG. 4 , in one embodiment, the distance measuring mechanism 30 includes an ultrasonic transmitter 31 and an ultrasonic receiver 32. Both the ultrasonic transmitter 31 and the ultrasonic receiver 32 are arranged on the conveying mechanism 20. The ultrasonic transmitter is used to transmit ultrasonic waves to the silicon wafer 60, and the ultrasonic receiver 32 is used to receive ultrasonic waves reflected by the silicon wafer 60. Specifically, the propagation speed of ultrasonic waves in the air is 340 m / s. By utilizing the property that the propagation speed of ultrasonic waves in the same medium remains unchanged, ultrasonic waves are transmitted to the silicon wafer 60 through the transmitter. After encountering the shielding of the silicon wafer 60 at the bottom layer in the flower basket 50, the ultrasonic waves will be reflected back to the ultrasonic receiver 32. Based on the propagation speed of the sound wave and its return time, the distance from the bottom layer of the silicon wafer 60 to the conveying mechanism 20 can be calculated by a single chip microcomputer or other equipment.

[0050] 2 and 3, the loading device further includes a support arm 41, which extends in a vertical direction and is slidably connected to the flower basket frame 10, and the lifting mechanism is used to drive the flower basket frame 10 to perform lifting motion along the support arm 41. The guiding effect of the support arm 41 can improve the lifting stability of the flower basket frame 10, thereby reducing the risk of the silicon wafer 60 in the flower basket 50 accidentally falling.

[0051] Furthermore, there are two support arms 41, which are arranged at intervals, and the flower basket stand 10 is arranged between the two support arms 41, and the two sides of the flower basket stand 10 are respectively slidably matched with the two support arms 41. In this way, the lifting stability of the flower basket stand 10 is further improved.

[0052] Optionally, in one embodiment, the lifting mechanism includes a lead screw (not shown), a slider (not shown) and a motor (not shown), wherein the lead screw is rotatably disposed in the support arm 41 and extends in the vertical direction. The slider is threadedly engaged with the lead screw and is slidably connected to the support arm 41, and the slider is connected to the flower basket 10. The motor is connected to the lead screw, and the motor is used to drive the lead screw to rotate. In this way, the lead screw can be driven to rotate in different directions by rotating the motor forward or reverse, so as to drive the slider to rise or fall along the lead screw, thereby driving the flower basket 10 to rise or fall. It is understandable that in other embodiments, the lifting mechanism is a lifting cylinder or an electric push rod, etc., which is not limited here.

[0053] 3 , the flower basket stand 10 includes a bottom plate 11, a top plate 12, and a column 13 connected between the bottom plate 11 and the top plate 12. The bottom plate 11, the top plate 12, and the column 13 together enclose a receiving cavity for receiving the flower basket 50. The flower basket 50 can be fixed by placing the flower basket 50 in the receiving cavity.

[0054] Optionally, in one embodiment, a detection sensor is provided on the flower basket stand 10, and the detection sensor is in communication connection with the conveying mechanism 20. The detection sensor is used to detect whether the flower basket 50 in the flower basket stand 10 has a silicon wafer 60, and to control the conveying mechanism 20 to withdraw the flower basket 50 when there is no silicon wafer 60 in the flower basket 50, so as to move the empty flower basket 50 out of the flower basket stand 10, and then put a new flower basket 50 with silicon wafer 60 into the flower basket stand 10. In one embodiment, the detection sensor may be an infrared sensor.

[0055] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0056] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A feeding device, characterized in that: include: A flower basket stand, the flower basket stand being used to carry a flower basket containing silicon wafers; A conveying mechanism, at least a portion of which can extend into or out of the flower basket, and the conveying mechanism is used to convey the silicon wafer out of the flower basket; a distance measuring mechanism, the distance measuring mechanism being arranged on the conveying mechanism, the distance measuring mechanism being used to obtain distance information from the bottommost silicon wafer of the plurality of silicon wafers stacked at intervals in the flower basket to the conveying mechanism; and A lifting mechanism is connected to the flower basket frame, and the lifting mechanism is in communication connection with the distance measuring mechanism. The lifting mechanism can drive the flower basket frame to descend a corresponding distance according to the distance information obtained by the distance measuring mechanism, so as to release the silicon wafers in the flower basket onto the conveying mechanism one by one.

2. The feeding device according to claim 1, characterized in that: The conveying mechanism comprises a baffle and two conveyor belts, the two conveyor belts are arranged in parallel and at intervals, the baffle is arranged between the two conveyor belts, and the distance measuring mechanism is arranged on the baffle.

3. The feeding device according to claim 2, characterized in that: Each of the conveyor belts is provided with a moving wheel that rolls with the conveyor belt, and the conveying mechanism also includes a synchronous shaft, and the two ends of the synchronous shaft are respectively connected to the moving wheels of the two conveyor belts.

4. The feeding device according to claim 3, characterized in that: The baffle plate is provided with an avoidance hole which passes through both sides of the baffle plate, and the synchronization shaft is rotatably arranged in the avoidance hole.

5. The feeding device according to claim 1, characterized in that: The distance measuring mechanism includes an ultrasonic transmitter and an ultrasonic receiver. Both the ultrasonic transmitter and the ultrasonic receiver are arranged on the conveying mechanism. The ultrasonic transmitter is used to transmit ultrasonic waves to the silicon wafer, and the ultrasonic receiver is used to receive the ultrasonic waves reflected by the silicon wafer.

6. The feeding device according to claim 1, characterized in that: The feeding device further comprises a supporting arm, which extends in a vertical direction and is slidably connected to the flower basket stand. The lifting mechanism is used to drive the flower basket stand to perform lifting motion along the supporting arm.

7. The feeding device according to claim 6, characterized in that: There are two support arms, which are arranged at an interval, and the flower basket stand is arranged between the two support arms, and two sides of the flower basket stand are respectively slidably matched with the two support arms.

8. The feeding device according to claim 6, characterized in that: The lifting mechanism comprises: A lead screw, the lead screw being rotatably disposed in the support arm and extending along the vertical direction; a slider, the slider is threadably matched with the lead screw and is slidably connected to the support arm, the slider is connected to the flower basket; and, A motor is connected to the lead screw, and the motor is used to drive the lead screw to rotate.

9. The feeding device according to claim 6, characterized in that: The flower basket frame comprises a bottom plate, a top plate and a column connected between the bottom plate and the top plate. The bottom plate, the top plate and the column together enclose a receiving cavity for receiving the flower basket.

10. The feeding device according to any one of claims 1 to 9, characterized in that: The flower basket stand is provided with a detection sensor, which is in communication connection with the conveying mechanism. The detection sensor is used to detect whether the flower basket in the flower basket stand has silicon wafers, and to control the conveying mechanism to withdraw from the flower basket when there are no silicon wafers in the flower basket.

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