Gas distributor and bubble tower

Abstract

The utility model provides a gas distributor and a bubble tower, and belongs to the technical field of dehydration devices. The gas distributor comprises a breather pipe and a main gas distribution disc, the breather pipe penetrates through the main gas distribution disc and is communicated with the main gas distribution disc, and gas in the breather pipe can flow into the main gas distribution disc; anti-suck-back gas spraying holes are uniformly distributed in the main gas distribution disc; the anti-suck-back air injection hole is composed of a conical hole diameter section and a straight hole diameter section from bottom to top. A baffle is arranged in the middle of the straight aperture section, a plurality of air holes are evenly formed in the baffle, and a ball is arranged below the baffle. According to the device provided by the utility model, gas can be uniformly distributed, the removal efficiency of moisture in the negative photoresist stripping liquid can be improved, and a product is not easy to oxidize.

Description

Technical Field

[0001] The utility model belongs to the technical field of dehydration devices, in particular to a gas distributor and a bubbling tower. Background Art

[0002] In chemical production, it is often necessary to dry and dehydrate products, and many products are often easy to oxidize and decompose at high temperatures. For example, in the semiconductor field, it is often required to use a negative photoresist stripping solution with a low water content. This negative photoresist stripping solution has the characteristics of being easy to decompose at high temperatures, high viscosity, and easy to oxidize. It is difficult to quickly remove the water in the negative photoresist stripping solution by distillation alone, and it is easy to cause product oxidation. This is because the photoresist stripping solution decomposes at a temperature above 60°C, and at the same time, it has high viscosity. It is difficult for the distillation process to quickly form a gas-liquid two-phase to achieve the effect of mass transfer and heat transfer.

[0003] The water in the solution can be removed by introducing dry gas. The simplest way is to insert the vent pipe directly into the bottom of the tower kettle. However, the gas distribution at the bottom of the material is relatively uneven and backflow is prone to occur. The product is easily oxidized and the water removal efficiency is low. Utility Model Content

[0004] The utility model provides a gas distributor and a bubbling tower. The device provided by the utility model can make the gas evenly distributed, which can not only improve the removal efficiency of water in the negative resist stripping solution, but also make the product not easy to be oxidized.

[0005] In order to achieve the above object, the utility model provides a gas distributor, comprising:

[0006] vent pipe and main gas distribution plate;

[0007] The vent pipe passes through the main gas distribution plate and is connected to the main gas distribution plate, and the gas in the vent pipe can flow into the main gas distribution plate;

[0008] The main gas distribution plate is evenly distributed with anti-backflow jet holes; the anti-backflow jet holes are composed of a conical aperture section and a straight aperture section from bottom to top; a baffle is arranged in the middle of the straight aperture section, and a number of air holes are evenly arranged on the baffle, and a sphere is arranged below the baffle.

[0009] Preferably, it also includes auxiliary gas conical blades; the auxiliary gas conical blades are located above the main gas distribution plate and are connected to the ventilation pipe, so that the gas in the ventilation pipe can flow into the auxiliary gas conical blades.

[0010] Preferably, anti-backflow jet holes are evenly distributed in the secondary gas cone blade.

[0011] Preferably, 2 to 4 auxiliary gas cone blades form a layer and are evenly arranged around the ventilation pipe.

[0012] Preferably, the number of paddle blade layers is 2 to 4, the distance between two adjacent layers of paddle blades is 50 to 100 cm, and the paddle blades of two adjacent layers are cross-distributed.

[0013] Preferably, the secondary gas cone blades are inclined upward or downward, and the inclination direction is consistent.

[0014] Preferably, the diameter of the bottom end of the conical aperture section is 1 to 5 cm, the diameter of the top end is 5 to 10 cm, and the top end diameter is greater than the bottom end diameter; the diameter of the straight aperture section is 5 to 10 cm, and is equal to the top end diameter of the conical aperture section; the diameter of the sphere is between the bottom end diameter and the top end diameter of the conical aperture section.

[0015] The utility model provides a bubbling tower, comprising any one of the gas distributors described above, and also comprising a bubbling tower body, a heat-insulating shell layer, a feed inlet, a feed outlet, an air inlet and an air outlet;

[0016] The feed port and the discharge port are located above the main gas distribution plate, and the feed port is located higher than the discharge port; the gas outlet is located at the top of the bubbling tower; and the gas inlet is located at the bottom of the bubbling tower.

[0017] Preferably, a vacuum pump is further included, and the vacuum pump is connected to the air outlet.

[0018] Preferably, the inner diameter of the main gas distribution plate is equal to the inner diameter of the bubbling tower body; the edge of the secondary gas conical blade is 5 to 10 cm away from the inner wall of the bubbling tower body.

[0019] Compared with the prior art, the advantages and positive effects of the utility model are:

[0020] The gas distributor provided by the utility model includes: a vent pipe and a main gas distribution plate. The main gas distribution plate is used to initially disperse the gas in the liquid from the bottom. The water partial pressure of the bubbles increases during the rising process, and at the same time, it can promote the mixing of gas and liquid materials, so that the gas-liquid contact is more sufficient, and solves the problems of uneven gas distribution, poor gas-liquid mixing effect, and high local water content of the material caused by the traditional vent pipe. At the same time, the gas injection hole in the main gas distribution plate is set as an anti-backflow structure, so as to prevent backflow and be safer.

[0021] Furthermore, the gas distributor provided by the utility model is also provided with auxiliary gas conical blades to further disperse the gas upwards, further increase the water partial pressure of the bubbles, and at the same time promote the mixing of gas-liquid materials, make the gas-liquid contact more complete, and improve the dehydration efficiency.

[0022] The bubbling tower provided by the utility model comprises the above-mentioned gas distributor, through which the gas in the bubbling tower is evenly distributed, the gas-liquid mass transfer and heat transfer are more sufficient, the partial pressure of water in the gas is increased, the dehydration time is shortened, the risk of product oxidation is effectively suppressed, material loss and production cost are reduced, and the production of the bubbling tower is safe and stable. The gas distributor of the bubbling tower can achieve rapid and uniform mixing of gas and liquid. At the same time, it has a simple structure and is suitable for large-scale production. After the gas is dispersed, it is mixed with the liquid phase to fully react, which can improve the gas utilization rate, while improving the dehydration speed, and can also avoid the problem of high local water content caused by uneven gas distribution, with the advantages of low loss, safe and stable production and high production efficiency. The bubbling tower has a simple structure, and the temperature distribution inside the tower body is adjusted by the gas distributor to avoid local overheating of the material, improve the safety and stability of the production process, and ensure that the bubbling tower can operate stably and efficiently within the entire operating range. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of the bubbling tower of the utility model;

[0024] Figure 2 This is a schematic diagram of the top view of the gas distribution plate in the bubbling tower of the utility model;

[0025] Figure 3 This is a schematic diagram of the top view of the gas distribution blade in the bubbling tower of the utility model;

[0026] Figure 4 It is a structural schematic diagram of the anti-backflow jet hole of the utility model;

[0027] Among them: 1-ventilation pipe, 2-main gas distribution plate, 3-anti-backflow jet hole, 4-conical aperture section, 5-straight aperture section, 6-baffle, 7-sphere, 8-auxiliary gas conical blade, 9-bubbling tower body, 10-insulation shell layer, 11-feed port, 12-discharge port, 13-air inlet, 14-air outlet. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] like Figures 1 to 4 As shown, the utility model provides a gas distributor, comprising:

[0030] Ventilation pipe 1 and main gas distribution plate 2;

[0031] The vent pipe 1 passes through the main gas distribution plate 2 and is in communication with the main gas distribution plate 2, so that the gas in the vent pipe 1 can flow into the main gas distribution plate 2;

[0032] The main gas distribution plate 2 is evenly distributed with anti-backflow jet holes 3; the anti-backflow jet holes 3 are composed of a conical aperture section 4 and a straight aperture section 5 from bottom to top; a baffle 6 is arranged in the middle of the straight aperture section 5, and a plurality of air holes are evenly arranged on the baffle 6, and a sphere 7 is arranged below the baffle 6.

[0033] The utility model is provided with a main gas distribution plate 2, and a plurality of anti-backflow jet holes 3 are evenly distributed on the main gas distribution plate 2. When working, the gas flows from the vent pipe 1 into the main gas distribution plate 2, and the main gas distribution plate 2 evenly distributes the gas concentrated in the vent pipe 1 to the bubbling tower, and injects the gas into the material of the bubbling tower through a plurality of jet holes, so that the gas-liquid two phases can be fully mixed, the water partial pressure of the gas is increased, and the dehydration efficiency is accelerated. At the same time, the anti-backflow jet hole 3 is provided. When the gas is introduced, the ball 7 located below the baffle 6 floats upward, and the gas flows into the pores of the baffle 6. When it is in a non-ventilated state, the ball 7 falls down and blocks the conical aperture section 4, and the jet hole is in a sealed state, thereby achieving an anti-backflow effect.

[0034] In the present utility model, in order to facilitate the floating of the ball 7, further, the diameter of the bottom end of the conical aperture section 4 is 1 to 5 cm, the diameter of the top end is 5 to 10 cm, and the top end diameter is greater than the bottom end diameter; the diameter of the straight aperture section 5 is 5 to 10 cm, and is equal to the top end diameter of the conical aperture section 4; the diameter of the ball 7 is between the bottom end diameter and the top end diameter of the conical aperture section 4.

[0035] In the present invention, in order to facilitate the floating of the ball 7 and to be acid and alkali resistant, the ball 7 is preferably made of polyfluorite.

[0036] In the utility model, in order to further improve the dehydration rate and evenly distribute the gas so that the gas-liquid mass transfer is more sufficient, it further includes an auxiliary gas conical blade 8; the auxiliary gas conical blade 8 is located above the main gas distribution plate 2 and is connected to the ventilation pipe 1, and the gas in the ventilation pipe 1 can flow into the auxiliary gas conical blade 8.

[0037] In the utility model, further, the secondary gas conical blade 8 is evenly distributed with anti-back-inhalation air injection holes 3 .

[0038] In the present invention, in order to further evenly distribute the gas and make the gas-liquid mass transfer more sufficient, every 2 to 4 auxiliary gas conical blades 8 form a layer and evenly surround the ventilation pipe 1.

[0039] In the present invention, the number of blade layers is preferably 2 to 4, the spacing between two adjacent layers of blades is preferably 50 to 100 cm, and the adjacent layers of blades are preferably cross-distributed. In the present invention, the above arrangement can prevent the upper and lower auxiliary gas cone blades 8 from overlapping in the vertical projection direction, thereby causing wear and jetting of the upper blade outer wall.

[0040] In the present invention, further, the auxiliary gas conical blade 8 is preferably tilted upward or downward, and the tilting direction is consistent. In the present invention, the auxiliary gas conical blade 8 is tilted to make the ejected gas flow field irregular, enhance the mass transfer and heat transfer effect of the gas-liquid two-phase, further increase the contact area of ​​the gas-liquid two-phase, and improve the overall mixing effect of the gas-liquid.

[0041] The utility model provides a bubbling tower, comprising any one of the above-mentioned gas distributors.

[0042] In the present utility model, the bubbling tower further comprises a bubbling tower body 9, a heat-insulating shell 10, a feed inlet 11, a discharge port 12, an air inlet 13 and an air outlet 14;

[0043] The feed port 11 and the discharge port 12 are located above the main gas distribution plate 2, and the feed port 11 is located higher than the discharge port 12; the gas outlet is located at the top of the bubbling tower; and the gas inlet 13 is located at the bottom of the bubbling tower.

[0044] In the present invention, a vacuum pump is further included, and the vacuum pump is connected to the gas outlet 14. The boiling point of a liquid is the temperature at which its vapor pressure is equal to the external pressure, so the boiling point of the liquid changes with the external pressure. In the present invention, a vacuum pump is provided, and the pressure inside the system can be reduced by means of the vacuum pump, thereby reducing the boiling point of the liquid, which is particularly suitable for substances that are easily decomposed and oxidized at high temperatures.

[0045] In the present invention, in order to prevent material leakage and facilitate dehydration, further, the inner diameter of the main gas distribution plate 2 is equal to the inner diameter of the bubbling tower body 9; the edge of the secondary gas conical blade 8 is 5 to 10 cm away from the inner wall of the bubbling tower body 9.

[0046] In the present invention, in order to facilitate operation, a thermometer and a pressure gauge are further provided on the bubbling tower.

[0047] In order to further illustrate the present invention, the technical solutions provided by the present invention are described in detail below in conjunction with embodiments, but they should not be construed as limiting the protection scope of the present invention.

[0048] Example 1

[0049] The bottom diameter of the conical aperture section of each jet hole on the main gas distribution plate is 1 cm, and the top diameter of the connection with the straight aperture section is 5 cm. The diameter of the straight aperture section is 5 cm. There is a 2 cm diameter sphere under the baffle. The auxiliary gas conical blades are distributed in a ring around the middle ventilation pipe. The blades are tilted downward. Each layer has 2 blades. There are 2 layers of blades, and the height difference between the upper and lower blades is 100 cm. Each layer of auxiliary gas distribution conical blades is 5 cm away from the inner wall of the tower body.

[0050] The reaction temperature was set at 60°C and the gauge pressure was -13psi. 50 kg of photoresist stripping liquid was introduced into the bubbling tower from the feed port. The bubbling gas flow rate was 5 L / min. The dehydration time was 5 hours. The reaction result was that the water content of the photoresist stripping liquid was 8.5%.

[0051] Example 2

[0052] The bottom diameter of the conical aperture section of each jet hole on the main gas distribution plate is 5cm, and the top diameter of the connection with the straight aperture section is 10cm. The diameter of the straight aperture section is 10cm. There is a sphere with a diameter of 6cm under the baffle. The auxiliary gas conical blades are distributed in a ring around the middle ventilation pipe. The blades are tilted upward, each layer has 4 blades, the number of blade layers is 4, and the height difference between the upper and lower blades is 50cm. Each layer of blades of the gas distributor is 10cm away from the inner wall of the tower body.

[0053] The reaction temperature was set at 60°C and the gauge pressure was -13psi. 50 kg of photoresist stripping liquid was introduced into the bubbling tower from the feed port. The bubbling gas flow rate was 5 L / min. The dehydration time was 5 h. The reaction result was that the water content of the photoresist stripping liquid was 0.5%.

[0054] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A gas distributor, characterized in that: include: vent pipe and main gas distribution plate; The vent pipe passes through the main gas distribution plate and is connected to the main gas distribution plate, and the gas in the vent pipe can flow into the main gas distribution plate; The main gas distribution plate is evenly distributed with anti-backflow jet holes; the anti-backflow jet holes are composed of a conical aperture section and a straight aperture section from bottom to top; a baffle is arranged in the middle of the straight aperture section, and a number of air holes are evenly arranged on the baffle, and a sphere is arranged below the baffle.

2. The gas distributor according to claim 1, characterized in that It also includes an auxiliary gas conical blade; the auxiliary gas conical blade is located above the main gas distribution plate and is connected to the ventilation pipe, and the gas in the ventilation pipe can flow into the auxiliary gas conical blade.

3. The gas distributor according to claim 2, characterized in that: Anti-back-inhalation jet holes are evenly distributed in the auxiliary gas conical blade.

4. The gas distributor according to claim 2, characterized in that: 2 to 4 auxiliary gas cone blades form a layer and are evenly arranged around the ventilation pipe.

5. The gas distributor according to claim 4, characterized in that: The number of paddle blade layers is 2 to 4, the distance between two adjacent layers of paddle blades is 50 to 100 cm, and the paddle blades of two adjacent layers are cross-distributed.

6. The gas distributor according to claim 2, characterized in that: The secondary gas cone blades are inclined upward or downward, and the inclination direction is consistent.

7. The gas distributor according to claim 1, characterized in that: The diameter of the bottom end of the conical aperture section is 1 to 5 cm, the diameter of the top end is 5 to 10 cm, and the top end diameter is greater than the bottom end diameter; the diameter of the straight aperture section is 5 to 10 cm, and is equal to the top end diameter of the conical aperture section; the diameter of the sphere is between the bottom end diameter and the top end diameter of the conical aperture section.

8. A bubbling tower, characterized in that: A gas distributor comprising any one of claims 1 to 7, further comprising a bubbling tower body, a heat-insulating shell layer, a feed inlet, a feed outlet, an air inlet and an air outlet; The feed inlet and the discharge outlet are located above the main gas distribution plate, and the feed inlet is located higher than the discharge outlet; The gas outlet is located at the top of the bubbling tower; the gas inlet is located at the bottom of the bubbling tower.

9. The bubbling tower according to claim 8, characterized in that A vacuum pump is also included, and the vacuum pump is connected to the gas outlet.

10. The bubbling tower according to claim 8, characterized in that The inner diameter of the main gas distribution plate is equal to the inner diameter of the bubbling tower body; the edge of the auxiliary gas conical blade is 5 to 10 cm away from the inner wall of the bubbling tower body.

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