Drainage tool and loading assembly
By designing the structure of the drainage workpiece, Hg flows directly into the bottom of the quartz tube, solving the problem of Hg sticking to the inner side wall of the quartz tube and protecting the crystal structure of the material sheet.
Patent Information
- Application Number
- CN202420964221.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-07
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-05-07
AI Technical Summary
When loading Hg into a quartz tube, Hg is prone to stick to the inner side wall of the quartz tube, causing Hg to stick to the surface of the material sheet and react with it, destroying the crystal structure.
A drainage tool is designed, including a loading part, a drainage part and a discharge part. By inserting the drainage part and a discharge part into a quartz tube, Hg flows directly into the quartz tube using the structure of the loading trough, a drainage trough and a discharge trough. The bottom is avoided to contact the inner wall.
It effectively avoids contact between Hg and the inner side wall of the quartz tube, prevents Hg from sticking to the material sheet, and protects the crystal structure of the material sheet.
Smart Images
Figure CN222240338U_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the technical field of auxiliary tooling, and specifically relates to a drainage tooling and a loading assembly. Background Art
[0002] Hg is the main raw material for preparing semiconductor materials, and is usually loaded in quartz tubes. At present, Hg is easily attached to the inner wall of the quartz tube during the process of loading Hg in quartz tubes, resulting in Hg adhering to the surface of the material sheet during the subsequent loading process. In the subsequent process, the Hg on the surface of the material sheet will react with the material sheet at high temperature, causing the crystal structure of the material sheet to be destroyed. Utility Model Content
[0003] The technical problem to be solved by the present application is that the existing Hg will adhere to the inner wall of the quartz tube during the process of being loaded into the quartz tube, causing the material sheet to stick to the Hg, and a drainage tool and a loading component are provided to prevent Hg from sticking to the inner wall of the quartz tube.
[0004] The technical solution proposed in this application is:
[0005] A drainage tool, comprising:
[0006] The loading section is provided with a loading trough;
[0007] A drainage portion, one end of which is connected to the charging portion, and the drainage portion extends along a first direction, the drainage portion is provided with a drainage groove, and one end of the drainage groove is connected to the charging groove;
[0008] A discharge part connected to an end of the drainage part away from the loading part, and the discharge part is provided with a discharge trough, and the discharge trough is connected to an end of the drainage trough away from the loading trough;
[0009] Wherein, a side of the charging portion facing away from the charging trough protrudes from the drainage portion.
[0010] Furthermore, the loading portion has a bottom surface and a positioning surface connected to each other on one side away from the loading trough, the bottom surface is spaced apart from the drainage portion in a second direction that is angled with the first direction, and the positioning surface is connected between the bottom surface and the drainage portion.
[0011] Furthermore, the positioning surface is connected to a surface of the drainage portion on one side facing away from the drainage groove.
[0012] Further, in a third direction that is angled with the first direction, a maximum dimension of the loading trough is greater than a maximum dimension of the drainage trough.
[0013] Furthermore, in a third direction that is angled with the first direction, a size of the discharge trough gradually decreases from one end connected to the drainage trough to the other end.
[0014] Furthermore, the discharge trough has a busbar at one end away from the drainage trough, and the busbar includes a first end connected to the bottom wall of the discharge trough and a second end opposite thereto. The busbar is inclined relative to a second direction that is at an angle to the first direction, and the busbar gradually moves away from the drainage trough from the first end to the second end.
[0015] Furthermore, the drainage groove extends along the first direction, and the cross-sectional shape of the drainage groove is arc-shaped.
[0016] A loading assembly, comprising a test tube and the drainage tool as described above:
[0017] The drainage portion and the discharge portion can be inserted into the test tube, and when the loading portion and the drainage portion are inserted into the test tube, the loading portion can abut against the tube opening of the test tube.
[0018] Furthermore, a maximum dimension of the charging portion in a direction perpendicular to the first direction does not exceed an inner diameter of the test tube.
[0019] Further, the side of the charging portion facing away from the charging trough has a bottom surface and a positioning surface connected to each other, the bottom surface is arranged at intervals from the drainage portion in a second direction that is angled with the first direction, and the positioning surface is connected between the bottom surface and the drainage portion;
[0020] Wherein, the positioning surface is a curved surface; or the positioning surface is a plane inclined relative to the second direction.
[0021] The drainage fixture is used to insert the drainage part and the discharge part into the quartz tube, and the loading part abuts against the tube mouth of the quartz tube to achieve the positioning of the drainage fixture. Next, Hg is poured into the loading trough, and Hg flows into the bottom of the quartz tube through the loading trough, the drainage trough and the discharge trough in turn, thereby preventing Hg from contacting the inner wall of the quartz tube. At the same time, after the drainage part and the discharge part are inserted into the test tube, the loading part can abut against the tube mouth of the test tube, thereby achieving the positioning of the drainage fixture relative to the test tube, which is convenient for the subsequent operation of loading the fluid. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] The accompanying drawings are used to provide further understanding of the present application and constitute a part of the specification. They are used to explain the present application together with the embodiments of the present application and do not constitute a limitation of the present application.
[0023] Figure 1 A schematic diagram of the structure of a loading assembly provided in an embodiment of the present application when placed horizontally;
[0024] Figure 2 for Figure 1 A schematic diagram of the top view of the loading assembly shown;
[0025] Figure 3 for Figure 1 The schematic diagram of the structure of the loading assembly when it is placed at an angle is shown;
[0026] Figure 4 for Figure 2 A schematic diagram of the structure of the drainage tooling in the loading assembly shown;
[0027] Figure 5 for Figure 4 A side structural schematic diagram of the drainage tooling shown.
[0028] Description of labels:
[0029] 10. Loading assembly; 100. Drainage tooling; 200. Test tube; 110. Loading section; 120. Drainage section; 130. Discharging section; 111. Loading trough; 121. Drainage trough; 131. Discharging trough; 210. Pipe mouth section; 220. Transition section; 230. Loading section; 112. Bottom surface; 113. Positioning surface; 132. Busbar. DETAILED DESCRIPTION
[0030] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0031] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0032] like Figures 1 to 3 As shown, an embodiment of the present application provides a loading assembly 10, which can load fluid. Further, the loading assembly 10 includes a drainage tool 100 and a test tube 200, and the drainage tool 100 is used to guide the fluid into the test tube 200 and prevent the fluid from adhering to the inner wall of the test tube 200.
[0033] It should be noted that, in this embodiment, the fluid is Hg and the test tube 200 is a quartz tube. In other embodiments, the fluid may be other substances and the test tube 200 may be other materials, which are not limited here. The following description takes Hg and a quartz tube as examples:
[0034] Please also see Figure 4 In one embodiment, the drainage tool 100 includes a loading part 110, a drainage part 120 and a discharge part 130. The drainage part 120 extends along a first direction, and the loading part 110 and the discharge part 130 are respectively connected to the two ends of the drainage part 120. The loading part 110 is provided with a loading trough 111, the drainage part 120 is provided with a drainage trough 121, and the discharge part 130 is provided with a discharge trough 131. The two ends of the drainage trough 121 are respectively connected to the loading trough 111 and the discharge trough 131.
[0035] By inserting the drainage portion 120 and the discharge portion 130 into the test tube 200, and extending the discharge portion 130 into the bottom of the test tube 200, Hg is then poured into the loading trough 111 located outside the test tube 200. The Hg flows directly into the bottom of the test tube 200 through the loading trough 111, the drainage trough 121 and the discharge trough 131 in sequence, thereby preventing Hg from adhering to the inner wall of the quartz tube, thereby preventing subsequent material sheets from being adhered to Hg.
[0036] Furthermore, the side of the loading portion 110 facing away from the loading trough 111 protrudes from the drainage portion 120. In this way, after the drainage portion 120 and the unloading portion 130 are inserted into the test tube 200, the loading portion 110 can abut against the tube mouth of the test tube 200, thereby positioning the drainage tooling 100 relative to the test tube 200, facilitating the subsequent operation of loading the fluid.
[0037] In combination with the above-mentioned embodiment, the drainage fixture 100 is used, the drainage part 120 and the discharge part 130 are inserted into the quartz tube, and the loading part 110 abuts against the tube mouth of the quartz tube to achieve the positioning of the drainage fixture 100. Next, Hg is poured into the loading trough 111, and Hg flows into the bottom of the quartz tube through the loading trough 111, the drainage trough 121 and the discharge trough 131 in sequence, thereby preventing Hg from contacting the inner wall of the quartz tube. At the same time, after the drainage part 120 and the discharge part 130 are inserted into the test tube 200, the loading part 110 can abut against the tube mouth of the test tube 200, thereby achieving the positioning of the drainage fixture 100 relative to the test tube 200, which is convenient for the subsequent operation of loading the fluid.
[0038] In one embodiment, the test tube 200 includes a nozzle section 210, a transition section 220 and a loading section 230 connected in sequence, the nozzle section 210 has a nozzle, and the loading section 230 is located at the bottom for loading fluid. Specifically in the illustrated embodiment, the length of the test tube 200 is 400-1200 mm, the diameter is 10-1000 mm, and the length of the drainage tool 100 is 300-1000 mm.
[0039] It is understandable that the length of the drainage portion 120 can be determined according to the length of the quartz tube. After the loading portion 110 abuts against the tube mouth of the quartz tube, the unloading portion 130 can extend into or approach the loading section 230 to ensure that the fluid can directly flow into the loading section 230.
[0040] See also Figure 4 and Figure 5 In one embodiment, the side of the loading portion 110 away from the loading trough 111 has a bottom surface 112 and a positioning surface 113 connected to each other, the bottom surface 112 is arranged spaced apart from the drainage portion 120 in a second direction that is angled with the first direction, and the positioning surface 113 is connected between the bottom surface 112 and the drainage portion 120 to abut against the tube mouth of the test tube 200. In other words, the bottom surface 112 protrudes from the drainage portion 120, and the positioning surface 113 is connected between the bottom surface 112 and the drainage portion 120.
[0041] Further, the positioning surface 113 is connected to the side of the drainage portion 120 away from the drainage groove 121, that is, the drainage groove 121 and the loading groove 111 are located on the same side of the drainage tool 100. Furthermore, the drainage groove 121, the loading groove 111 and the discharge groove 131 are all located on the same side of the drainage tool 100.
[0042] In one embodiment, in a third direction that is angled with the first direction, the maximum dimension of the loading trough 111 is greater than the maximum dimension of the drainage trough 121, so as to facilitate pouring fluid into the loading trough 111. Specifically in the illustrated embodiment, in the third direction, the dimension of the drainage trough 121 remains unchanged.
[0043] In one embodiment, the maximum dimension of the loading portion 110 in a direction perpendicular to the first direction does not exceed the inner diameter of the test tube 200. In this way, the loading portion 110 can also be loaded into the test tube 200. When transporting an empty test tube 200 and a drainage tool 100, the entire drainage tool 100 can be inserted into the test tube 200 to reduce the occupied space and facilitate loading into the turnover box.
[0044] In one embodiment, the positioning surface 113 is a curved surface or a plane inclined relative to the second direction. In this way, when drainage is required, the positioning surface 113 can abut against the tube mouth to achieve positioning of the drainage tool 100; when the entire drainage tool 100 needs to be inserted into the test tube 200, only external force needs to be applied to push the loading part 110 into the test tube 200, without additional adjustment, which is more convenient.
[0045] It is understandable that if the positioning surface 113 is a plane perpendicular to the first direction, when inserting the loading portion 110 into the test tube 200, it is necessary to adjust the position of the loading portion 110 to ensure that the loading portion 110 is aligned with the tube mouth, which is not conducive to blind insertion; while the positioning surface 113 is a curved surface or an inclined surface, it only needs to apply external force to push it in, which is more convenient.
[0046] In one embodiment, the drainage groove 121 extends along the first direction, and the cross section of the drainage groove 121 is arc-shaped, so as to facilitate the fluid in the loading trough 111 to flow directly into the discharge trough 131. In practical applications, the cross section of the drainage portion 120 is annular, and the length of the drainage portion 120 is 200-800 mm, the outer diameter is 5-80 mm, and the wall thickness is 1-10 mm.
[0047] In one embodiment, the size of the discharge trough 131 in the third direction gradually decreases from one end connected to the drainage trough 121 to the other end. Figure 4 In the illustrated embodiment, the dimension of the discharge portion 130 in the third direction also gradually decreases from one end connected to the drainage portion 120 to the other end.
[0048] Furthermore, the end of the discharge trough 131 away from the drainage trough 121 has a busbar 132, and the fluid can flow into the test tube 200 through the busbar 132. The busbar 132 includes a first end connected to the bottom wall of the discharge trough 131 and a second end opposite thereto, and the busbar 132 is inclined relative to the second direction, and the busbar 132 gradually moves away from the drainage trough 121 from the first end to the second end.
[0049] It can be understood that, since the size of the discharge trough 131 gradually decreases from one end connected to the drainage trough 121 to the other end, a confluence line 132 for the fluid to converge and flow out is formed at the end of the discharge trough 131 .
[0050] Specifically, the bus line 132 has an inclination angle of 5° to 75° and a length of 5 to 20 mm.
[0051] In summary, in a specific embodiment, the first direction, the second direction and the third direction are perpendicular to each other. The length of the test tube 200 is 400-1200 mm, and the tube diameter is 10-1000 mm, while the length of the drainage tool 100 is 300-1000 mm, the length of the charging part 110 is 30-100 mm, and the length of the drainage part 120 is 200-800 mm, the outer diameter is 5-80 mm, and the wall thickness is 1-10 mm. It can be understood that the length is the size of the corresponding component in the first direction.
[0052] In order to facilitate understanding of the technical solution of this application, Figure 1 and Figure 3 The working process of the loading assembly in the above embodiment is described as follows:
[0053] First, the drainage part 120 and the discharge part 130 of the drainage tool 100 are inserted into the test tube 200, and the positioning surface 113 of the loading part 110 is in contact with the tube mouth of the test tube 200, and then Figure 1 As shown, place both horizontally. Next, pour fluid into the charging tank 111, and then Figure 3 As shown, the nozzle section 210 of the test tube 200 is lifted so that the test tube 200 is tilted by 30° to 75°, and the fluid in the loading trough 111 flows into the loading section 230 of the test tube 200 through the drainage trough 121 and the discharge trough 131 in sequence, and finally the drainage tooling 100 is pulled out.
[0054] It is understandable that the fluid may be poured into the loading trough 111 first, and then the drainage part 120 and the discharge part 130 of the drainage tool 100 are inserted into the test tube 200; or the fluid may be poured into the loading trough 111 after the test tube 200 is tilted, which is not limited here.
[0055] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.
Claims
1. A drainage tool, characterized in that: include: The loading section is provided with a loading trough; A drainage portion, one end of which is connected to the charging portion, and the drainage portion extends along a first direction, the drainage portion is provided with a drainage groove, and one end of the drainage groove is connected to the charging groove; A discharge part connected to an end of the drainage part away from the loading part, and the discharge part is provided with a discharge trough, and the discharge trough is connected to an end of the drainage trough away from the loading trough; Wherein, a side of the charging portion facing away from the charging trough protrudes from the drainage portion.
2. The drainage tooling according to claim 1, characterized in that: The side of the loading part away from the loading trough has a bottom surface and a positioning surface connected to each other, the bottom surface is arranged at intervals from the drainage part in a second direction that is angled with the first direction, and the positioning surface is connected between the bottom surface and the drainage part.
3. The drainage tooling according to claim 2, characterized in that: The positioning surface is connected to a surface of the drainage portion on one side facing away from the drainage groove.
4. The drainage tooling according to claim 1, characterized in that: In a third direction that is angled with the first direction, a maximum dimension of the loading trough is greater than a maximum dimension of the drainage trough.
5. The drainage tool according to claim 1, characterized in that: In a third direction that is angled with the first direction, a size of the discharge trough gradually decreases from one end connected to the drainage trough to the other end.
6. The drainage tool according to claim 5, characterized in that: The discharge trough has a busbar at one end away from the drainage trough, and the busbar includes a first end connected to the bottom wall of the discharge trough and a second end opposite thereto. The busbar is inclined relative to a second direction that is at an angle to the first direction, and the busbar gradually moves away from the drainage trough from the first end to the second end.
7. The drainage tooling according to claim 1, characterized in that: The drainage groove extends along the first direction, and a cross-sectional shape of the drainage groove is an arc.
8. A loading assembly, characterized in that: Comprising a test tube and the drainage tooling according to any one of claims 1 to 7: The drainage portion and the discharge portion can be inserted into the test tube, and when the loading portion and the drainage portion are inserted into the test tube, the loading portion can abut against the tube opening of the test tube.
9. The loading assembly according to claim 8, characterized in that: A maximum dimension of the charging portion in a direction perpendicular to the first direction does not exceed an inner diameter of the test tube.
10. The loading assembly according to claim 9, characterized in that: The side of the charging portion facing away from the charging trough has a bottom surface and a positioning surface connected to each other, the bottom surface is arranged at a distance from the drainage portion in a second direction that is angled with the first direction, and the positioning surface is connected between the bottom surface and the drainage portion; Wherein, the positioning surface is a curved surface; or the positioning surface is a plane inclined relative to the second direction.