Horizontal airflow cleaning tool for inner wall of quartz bell jar of SiC epitaxial equipment

Abstract

The utility model discloses a horizontal airflow SiC epitaxial equipment quartz bell jar inner wall cleaning tool, which comprises a handheld rod and a cleaning head, one end of the handheld rod is connected with the cleaning head, the outer side surface of the cleaning head is provided with a middle annular groove and two side annular grooves, the middle annular groove is positioned between the two side annular grooves, and the middle annular groove is connected with the cleaning head. A plurality of vacuum suction holes are formed in the middle annular groove at intervals, a plurality of argon blowing holes are formed in the two side annular grooves at intervals, the handheld rod is of a hollow structure in the axial direction, and a vacuum pipeline and an argon pipeline are arranged in the hollow structure. Three cleaning functions of wiping, dust collection and air blowing can be combined on the inner wall of the cylindrical quartz clock cover, the cleaning coverage is more complete, better fitting performance with the inner wall of the cylindrical quartz clock cover is achieved, and it can be guaranteed that the cleaning effect of the quartz clock cover meets the hearth reaction requirement.

Description

Technical Field

[0001] The utility model relates to silicon carbide epitaxial equipment, in particular to a tool for cleaning the inner wall of a quartz bell of a horizontal airflow SiC epitaxial equipment. Background Art

[0002] The quartz bell jar of the horizontal airflow SiC epitaxial equipment serves as a reaction chamber, and its cleanliness has a great influence on the growth. Given that the quartz tube is fixed on the end of the machine and has certain sealing requirements, the existing cleaning technology mainly relies on manual handheld vacuum cleaners to vacuum the inner wall and then wipe it with a dust-free cloth, or use a simple handheld cleaning brush to clean it. The cleaning effect of manual cleaning with a handheld cloth is poor, and it cannot guarantee that every part of the inner wall of the quartz bell jar is cleaned evenly. In particular, due to the long length of the middle position, there may be missed points when cleaning from both ends to the middle, and the cleaning efficiency is low, which is not suitable for large-scale cleaning operations. The current cleaning tools are relatively simple and the functions are relatively single, and it still requires a combination of multiple tools to complete. Summary of the invention

[0003] In order to overcome the shortcomings and deficiencies in the prior art, the utility model aims to provide a tool for cleaning the inner wall of a quartz bell jar of a horizontal airflow SiC epitaxial equipment.

[0004] The purpose of the utility model is achieved through the following technical solutions: A horizontal airflow SiC epitaxial equipment quartz bell jar inner wall cleaning tool, including a hand-held rod and a cleaning head, one end of the hand-held rod is connected to the cleaning head, the outer side of the cleaning head is provided with a middle annular groove and two side annular grooves, the middle annular groove is located between the two side annular grooves, a plurality of vacuum suction holes are arranged in the middle annular groove, and a plurality of argon blowing holes are arranged in the two side annular grooves, the axial direction of the hand-held rod is a hollow structure, and a vacuum pipe and an argon pipe are arranged in the hollow structure. 12 small holes are evenly distributed in the middle annular groove for middle vacuum suction, and the size is large, which is used to absorb particles on the inner wall of the quartz bell jar. 12 small holes are evenly distributed in the side annular grooves for argon blowing on both sides, and the size is small, which is used to blow the wiped interior again to blow argon to remove dust and dry the inner wall.

[0005] As an improvement of the utility model of the cleaning tool for the inner wall of the quartz bell jar of the horizontal airflow SiC epitaxial equipment, a transverse support rod and a longitudinal support rod are provided inside the cleaning head, a vacuum suction hole connecting pipe is provided inside the longitudinal support rod, an argon blowing hole connecting pipe is provided inside the transverse support rod, the vacuum pipe is connected to the vacuum suction hole connecting pipe, and the argon pipe is connected to the argon blowing hole connecting pipe.

[0006] As an improvement of the utility model of the cleaning tool for the inner wall of the quartz bell of the horizontal gas flow SiC epitaxial equipment, one end of the vacuum pipe extends from the end of the hand-held rod and is provided with a vacuum suction pipe joint, and one end of the argon pipe extends from the end of the hand-held rod and is provided with an argon pipe joint. The argon pipe joint is connected to the argon gas source, and the vacuum suction pipe joint is connected to the vacuum equipment.

[0007] As an improvement of the utility model of the horizontal airflow SiC epitaxial equipment quartz bell inner wall cleaning tool, one end of the hand-held rod is an external threaded connection end, and the middle part of one end of the cleaning head is provided with an internal threaded hole, and the external threaded connection end is screwed with the internal threaded hole.

[0008] As an improvement of the utility model of the cleaning tool for the inner wall of the quartz bell of the horizontal airflow SiC epitaxial equipment, a clamping block is provided at one end of the hand-held rod, a clamping hole is provided at the middle of one end of the cleaning head, and the hand-held rod is clamped with the cleaning head. The hand-held rod and the cleaning head can be replaced with a clamping method, and the clamping block can be clamped into the clamping hole and fixed. It is convenient to connect the hand-held rod and the cleaning head.

[0009] As an improvement of the utility model of the cleaning tool for the inner wall of the quartz bell jar of the horizontal airflow SiC epitaxial equipment, the width of the middle annular groove is larger than the width of the side annular groove. The middle annular groove has 12 evenly distributed small holes, which are larger in size and are used to absorb particles on the inner wall of the quartz bell jar. The two side annular grooves each have 12 evenly distributed small holes, which are smaller in size and are used to blow air to blow argon gas again to remove dust and dry the inner wall after the wiped interior.

[0010] The beneficial effects of the utility model are as follows: the utility model can combine the three cleaning functions of wiping, vacuuming and blowing on the inner wall of the cylindrical quartz bell jar, and the cleaning coverage is more complete: it has better fit with the inner wall of the cylindrical quartz bell jar, and can ensure that the cleaning effect of the quartz bell jar meets the furnace reaction requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is the front view of the utility model;

[0012] Figure 2 It is a schematic diagram of the structure of the cleaning head of the utility model;

[0013] The accompanying drawings are marked as follows: 1. hand-held rod, 2. cleaning head, 3. middle annular groove, 4. side annular groove, 5. vacuum suction hole, 6. argon blowing hole, 7. vacuum pipe, 8. argon pipe, 9. horizontal support rod, 10. longitudinal support rod, 11. vacuum suction pipe joint, 12. argon pipe joint. DETAILED DESCRIPTION

[0014] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0015] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0016] In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0017] like Figure 1 and Figure 2 As shown, a horizontal airflow SiC epitaxial equipment quartz bell jar inner wall cleaning tool includes a hand-held rod 1 and a cleaning head 2. One end of the hand-held rod 1 is connected to the cleaning head 2. The outer side of the cleaning head 2 is provided with a middle annular groove 3 and two side annular grooves 4. The middle annular groove 3 is located between the two side annular grooves 4. A plurality of vacuum suction holes 5 are arranged in the middle annular groove 3. A plurality of argon blowing holes 6 are arranged in the two side annular grooves 4. The axial direction of the hand-held rod 1 is a hollow structure, and a vacuum pipe 7 and an argon pipe 8 are arranged in the hollow structure. Twelve vacuum suction holes 5 are evenly distributed in the middle annular groove 3 for middle vacuum suction, and the size is large, which is used to suck out particles on the inner wall of the quartz bell jar. Twelve argon blowing holes 6 are evenly distributed in the side annular grooves 4 for argon blowing on both sides, and the size is small, which is used to blow the wiped interior again to remove dust with argon and dry the inner wall.

[0018] Preferably, a transverse support rod 9 and a longitudinal support rod 10 are provided inside the cleaning head 2, a vacuum suction hole connecting pipe is provided inside the longitudinal support rod 10, an argon blowing hole connecting pipe is provided inside the transverse support rod 9, the vacuum pipe 7 is connected to the vacuum suction hole connecting pipe, and the argon pipe 8 is connected to the argon blowing hole connecting pipe.

[0019] Preferably, one end of the vacuum pipe 7 extends from the end of the hand-held rod 1 and is provided with a vacuum suction pipe joint 11, and one end of the argon pipe 8 extends from the end of the hand-held rod 1 and is provided with an argon pipe joint 12. The argon pipe joint 12 is connected to the argon gas source, and the vacuum suction pipe joint 11 is connected to the vacuum equipment.

[0020] Preferably, one end of the hand-held rod 1 is an external threaded connection end, an internal threaded hole is provided in the middle of one end of the cleaning head 2, and the external threaded connection end is threadedly connected to the internal threaded hole.

[0021] Preferably, a clamping block is provided at one end of the hand-held rod 1, and a clamping hole is provided at the middle of one end of the cleaning head 2, so that the hand-held rod 1 is clamped with the cleaning head 2. The hand-held rod 1 and the cleaning head 2 can be replaced with a clamping method, and the clamping block can be clamped into the clamping hole and fixed, so as to facilitate the connection between the hand-held rod and the cleaning head.

[0022] Preferably, the width of the middle annular groove 3 is larger than that of the side annular groove 4. The middle annular groove 3 has 12 evenly distributed small holes, which are relatively large in size and are used to absorb particles on the inner wall of the quartz bell jar. The two side annular grooves 4 each have 12 evenly distributed small holes, which are relatively small in size and are used to blow the wiped interior again to remove dust with argon and dry the inner wall.

[0023] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and structures of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A horizontal airflow SiC epitaxial equipment quartz bell jar inner wall cleaning tool, comprising a hand-held rod and a cleaning head, one end of the hand-held rod is connected to the cleaning head, characterized in that: The outer side surface of the cleaning head is provided with a middle annular groove and two side annular grooves, the middle annular groove is located between the two side annular grooves, a plurality of vacuum suction holes are arranged in the middle annular groove, and a plurality of argon blowing holes are arranged in the two side annular grooves, the axial direction of the hand-held rod is a hollow structure, and a vacuum pipe and an argon pipe are arranged in the hollow structure.

2. The horizontal gas flow SiC epitaxial equipment quartz bell jar inner wall cleaning tool according to claim 1, characterized in that: A transverse support rod and a longitudinal support rod are provided inside the cleaning head. A vacuum suction hole connecting pipe is provided inside the longitudinal support rod, and an argon blowing hole connecting pipe is provided inside the transverse support rod. The vacuum pipe is connected to the vacuum suction hole connecting pipe, and the argon pipe is connected to the argon blowing hole connecting pipe.

3. The horizontal gas flow SiC epitaxial equipment quartz bell jar inner wall cleaning tool according to claim 2, characterized in that: One end of the vacuum pipeline extends from the end of the hand-held rod and is provided with a vacuum suction pipe joint, and one end of the argon pipeline extends from the end of the hand-held rod and is provided with an argon pipe joint.

4. The tool for cleaning the inner wall of a quartz bell jar of a horizontal gas flow SiC epitaxial equipment according to claim 1, characterized in that: One end of the hand-held rod is an external thread connection end, and an internal thread hole is provided in the middle of one end of the cleaning head, and the external thread connection end is threadedly connected with the internal thread hole.

5. The tool for cleaning the inner wall of a quartz bell jar of a horizontal gas flow SiC epitaxial equipment according to claim 1, characterized in that: A clamping block is arranged at one end of the hand-held rod, a clamping hole is arranged at the middle part of one end of the cleaning head, and the hand-held rod is clamped with the cleaning head.

6. The tool for cleaning the inner wall of a quartz bell jar of a horizontal gas flow SiC epitaxial equipment according to claim 1, characterized in that: The width of the middle annular groove is greater than the width of the side annular grooves.

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