Strong cooling device for glass substrate of display
By using a dual cooling source of cold water and cold air in the refrigeration device of the glass substrate, combining heat conduction and convection, the problem of uneven cooling of the glass substrate is solved, and rapid and uniform cooling is achieved and production efficiency is improved.
Patent Information
- Application Number
- CN202420413484.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-04
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-03-04
AI Technical Summary
During the rapid cooling process after baking, existing glass substrates are prone to uneven cooling, resulting in thermal stress and static charge, increasing the damage rate of glass substrates, and slow cooling rate, limiting production efficiency.
A strong cooling cooling device including refrigeration plate, cold water channel, glass plate nail and air supply hood is designed. The dual cooling source of cold water and cold air is used to improve the heat transfer efficiency through heat conduction, convection and radiation to form a uniform low temperature. field, avoid temperature gradients and electrostatic charges.
The rapid and uniform cooling of the glass substrate is achieved, the risk of temperature gradient and electrostatic charge is reduced, the cooling speed and production efficiency are significantly improved, and the protection of the glass substrate is enhanced.
Smart Images
Figure CN222250441U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to production equipment for a glass substrate of a liquid crystal flat panel display, in particular to a refrigeration device capable of forcibly cooling a baked glass substrate. Background Art
[0002] The etching process of the display glass substrate pattern is to evenly coat the photoresist on the clean and dry conductive glass substrate, and then bake the glass substrate coated with the photoresist at a certain temperature for a period of time to volatilize the solvent in the photoresist and increase the adhesion to the glass surface. Since the glass substrate after baking has a high baking temperature, it must be cooled to room temperature (such as 23°C) before the subsequent exposure, development, hardening, etching, film removal and cleaning and drying processes can be carried out to complete the etching of the electrode pattern. However, since the glass substrate is a thin glass flat plate with a large surface area, it is easy to form uneven cooling when it is rapidly cooled, and this uneven cooling will cause thermal stress on the substrate due to the temperature gradient, resulting in cracking and glass breakage of the substrate glass, and reducing the yield of the baked finished product; and the use of slow cooling such as air cooling will become a bottleneck process in the entire substrate production line, which seriously restricts the improvement of the production efficiency of the entire line.
[0003] At present, the glass substrate cooling process is to transfer the baked conductive glass substrate to a cooling metal plate with a surface slightly larger than the glass substrate. The cooling metal plate is provided with a flowing cold water cavity to cool the high-temperature glass substrate through the cooling metal plate. At the same time, the glass substrate is not directly placed on the cooling metal plate, but is kept at a certain distance from the cooling metal. This structure can reduce the generation of unbalanced glass plate temperature stress and glass static charge, but the cooling source is not in direct contact with the glass substrate, so that the heat transfer between the two is mainly heat radiation.
[0004] Therefore, the existing glass substrate only relies on the cooling metal plate to provide a cooling source. The cooling source is single, and the heat transfer method is limited to thermal radiation, which easily forms uneven cooling on the surface of the glass substrate. Therefore, the heat transfer efficiency is low, and the high-temperature glass substrate cools down slowly, which directly restricts the production efficiency of the assembly line. In addition, it is easy to form a cooling gradient on the surface of the glass substrate, increasing the damage rate of the cooling glass sheet. Utility Model Content
[0005] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the utility model is to provide a display glass substrate strong cooling device which can quickly cool the glass substrate and form balanced cooling on the plate.
[0006] In order to solve the above technical problems, the utility model discloses a strong cooling device for a display glass substrate, comprising a refrigeration plate, wherein a cold water channel is arranged inside the refrigeration plate, and the plate surface of the refrigeration plate is covered with a cold plate protective layer; a glass plate support nail is installed on the upper plate surface of the refrigeration plate, and an air supply hood is sealedly installed on the lower plate surface of the refrigeration plate; air supply holes are arranged on the refrigeration plate along the plate thickness direction, and the air supply fan leads to the air supply cavity of the air supply hood through the cold air channel of the air cooler, and the air supply holes are connected to the air supply cavity of the air supply hood; a cold water channel is also arranged on the air cooler, and the two ends of the cold water channel are respectively connected to the water outlet and the return water outlet of the chiller.
[0007] In the above technical solution, since a cold water channel is provided inside the refrigeration plate, the cooling water flowing in the cold water channel has the characteristics of large heat capacity, fast heat absorption and strong refrigeration capacity, and can form a stable low temperature field; the surface of the refrigeration plate is covered with a cold plate protective layer, which can not only have the effect of anti-static, avoiding the harm caused by static electricity to the glass substrate, but also has the protective effect of anti-corrosion. In addition, since a glass plate support pin is installed on the surface of the refrigeration plate, the cooled glass substrate is placed on the glass plate support pin for cooling, rather than directly attached to the refrigeration plate, so that the glass substrate is in the refrigeration space, which can avoid the destructive temperature gradient formed by the direct attachment and cooling of the refrigeration plate to the glass substrate, which not only improves the consistency and uniformity of the cooling and cooling of the entire glass substrate, but also effectively avoids the breakage of the substrate glass caused by static electricity generated on the glass substrate. Furthermore, since an air supply hood is sealedly installed on the lower plate surface of the refrigeration plate, the cold air flow cooled and cooled by the air cooler is blown into the air supply cavity of the air supply hood under the action of the air supply fan, and the cold air entering the air supply cavity is directly blown to the high-temperature glass substrate surface through the air supply holes on the refrigeration plate. In this way, a flowing cooling air flow field can be formed between the glass plate and the refrigeration plate, thereby forming a forced cooling of the high-temperature glass substrate. At the same time, the refrigeration plate of the cooling water also forms a cooling source for the glass substrate. The dual cooling effects of the cold air cooling source and the cold water cooling source on the glass substrate and the refrigeration plate include both heat conduction and heat convection and heat radiation, which greatly improves the heat transfer efficiency and makes the cooling speed of the glass substrate faster. At the same time, the forced cooling formed by the blowing of cold air can produce a uniform and stable cooling air flow field, form a balanced cooling on the surface of the glass substrate, effectively avoid the generation of temperature gradient and static charge on the glass plate, and is particularly beneficial to the rapid cooling of thin and large-plate glass substrates.
[0008] In a further embodiment of the utility model, the upper plate surface and / or the lower plate surface of the refrigeration plate is coated with a cold plate protective layer, and the cold plate protective layer is an antistatic coating or a graphene conductive film or a graphene-based antistatic material coating. It has a better electrostatic effect and can effectively avoid the harm caused by static electricity.
[0009] In a preferred embodiment of the utility model, the cold water channels on the refrigeration plate include 5-15 independent water channels, each of which includes a water inlet port and a water outlet port. The refrigeration plate is a metal plate with a plurality of cold water channels; the cold water channels are zigzag and swivel arranged in the plate body of the refrigeration plate through a water channel swivel block, and the refrigeration plate is fixedly mounted on the refrigeration plate support. A cold water refrigeration area controlled and managed by different regions is formed on the refrigeration plate.
[0010] In a preferred embodiment of the utility model, 2-10 groups of air supply hoods are sealedly installed on the lower plate surface of the refrigeration plate; the air supply cavities of the same group of air supply hoods are connected to each other and connected to the same air supply main pipe; the air supply main pipe is connected to the cold air channel of the air cooler through the corresponding cold air valve. A sealing member is embedded between the port periphery of the air supply hood and the plate surface of the refrigeration plate, and the air supply hood and the refrigeration plate form an air supply cavity; the air supply holes arranged on the refrigeration plate lead to the corresponding air supply hood air supply cavity. Cold air forced cooling areas in different areas can be formed on the plate surface, which is conducive to the control and management of temperature reduction and cooling.
[0011] In a preferred embodiment of the utility model, the air cooler is provided with a cold air channel and a cold water channel, and the cold water channel is provided around the outer periphery of the cold air channel. The outer periphery of the air cooler is covered with a heat preservation structure layer; the two ends of the cold water channel are respectively connected to the corresponding end water distributor; the two ends of the cold water channel are respectively connected to the water outlet and the return water outlet of the chiller through the corresponding end water distributor. The structure is simple and reasonable, which is conducive to regulating the temperature of the cold air.
[0012] In a preferred embodiment of the utility model, an air filter is provided at the air inlet or outlet of the blower; a cold air valve is connected to the inlet or outlet of the cold air channel of the air cooler; and the water chiller is a normal temperature water chiller. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] The device for cooling the display glass substrate by forced cooling of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0014] Figure 1 This is a front structural view of a specific implementation of the display glass substrate forced cooling device of the utility model;
[0015] Figure 2 yes Figure 1 A-direction view;
[0016] Figure 3 yes Figure 1 The enlarged structural diagram of Part I in the middle;
[0017] Figure 4 yes Figure 1 Front view of the middle glass plate support nail;
[0018] Figure 5 yes Figure 4 A top view of
[0019] Figure 6 yes Figure 1 Schematic diagram of the gas path under the refrigeration plate;
[0020] Figure 7 yes Figure 6 Schematic diagram of the lower plate structure of the middle cooling plate;
[0021] Figure 8 yes Figure 7 A top view of
[0022] Fig. 9 yes Figure 7 B-B section view;
[0023] Fig.10 yes Fig. 9 A magnified view of the situation;
[0024] Fig.11 yes Figure 6 A schematic diagram of the cross-sectional structure of the intercooler;
[0025] Fig.12 yes Fig.11 C-C section view.
[0026] In the figure, 1 is a cooling plate, 2 is an air supply hole, 3 is a cold water channel, 4 is a water channel rotating block, 5 is a glass substrate, 6 is a glass plate support nail, 7 is a cooling plate support foot, 8 is a rotating block bolt, 9 is a rotating block water hole, 10 is a water distributor, 11 is an air cooler, 12 is a cold air valve, 13 is an air supply cover, 14 is an air supply pipe, 15 is an air supply main pipe, 16 is a water chiller, 17 is an air supply fan, 18 is an air filter, 19 is a cold plate protective layer, 20 is an air supply cover bolt, 21 is a seal, 22 is a cold water channel, 23 is an insulation structure layer, 24 is a cold air channel, 25 is a cold water pipe joint, and 26 is a cold air pipe joint. DETAILED DESCRIPTION
[0027] like Figure 1 and Figure 2 The strong cooling device for display glass substrate shown in the figure comprises a cooling plate 1, which is an aluminum rectangular plate, whose plate area is larger than the plate area of the glass substrate 5 to be cooled, and the plate thickness of the cooling plate 1 is 35 mm. In addition to the aluminum plate, the cooling plate 1 can also be a metal plate such as copper or steel. A tortuous cold water channel 3 is arranged in parallel in the plate body of the cooling plate 1. In this embodiment, the cold water channel 3 is divided into 8 cold water channels with curved flow, and the corresponding water channel rotating block 4 is connected to the bending part of the hole end of each cold water channel 3, and the water channel rotating block 4 is fixedly installed on the end faces of both sides of the cooling plate 1. Each cold water channel 3 corresponds to a water inlet port I and a water outlet port O. Figure 1 The cooling water output from the PCW system (cooling water system) flows from the water inlet port I at the left end of the cold water channel 3 to the water outlet port O at the right end. The cooling water takes away the heat of the cooling plate 1 through the cold water channel 3 and then flows back to the PCW system (cooling water system). After being cooled again, it flows back to the water inlet port I at the left end. This cycle maintains the low-temperature cooling state of the cooling plate 1. The use of a cold water channel 3 with a curved flow that can be controlled and adjusted separately is conducive to adjusting the temperature of each area of the cooling plate 1 to achieve the effect of precise temperature control. The cold water channels 3 on the cooling plate 1 are not limited to 8, and the cold water channels 3 on the cooling plate 1 are preferably 5-15.
[0028] The top of the glass plate support pin 6 fixedly mounted on the upper surface of the refrigeration plate 1 is 0.35mm above the surface of the refrigeration plate 1. If the distance is too large, the refrigeration effect will be reduced exponentially, and if the distance is too small, it is easy to generate regional temperature difference and static electricity. The regional temperature difference will generate temperature difference stress and static charge on the surface of the glass substrate 5. The surface stress and static charge are extremely destructive to the thin and large-area glass substrate 5. After repeated cold air flow field analysis and a large number of actual tests, the applicant has obtained more preferred data. The distance should be controlled in the range of 0.3mm-0.5mm for the best effect.
[0029] like Figure 3 As shown, a water channel rotating block 4 fixedly mounted on the side end of the refrigeration plate 1 by a rotating block bolt 8 is provided with a rotating block water hole 9 with both ends closed, and the water channels adjacent to and in the same cold water channel 3 are connected through the rotating block water hole 9.
[0030] like Figure 4 , Figure 5 The glass plate support pin 6 shown is screwed to the refrigeration plate 1 through a threaded joint at the lower end. Two wrench holes are provided on the upper end surface of the glass plate support pin 6 so as to screw the glass plate support pin 6 to the refrigeration plate 1. A spherical crown-shaped boss portion is provided on the upper end surface of the glass plate support pin 6. The upper end surface of the glass plate support pin 6 and the upper plate surface of the refrigeration plate 1 are in the same plane. The distance between the top of the boss of the glass plate support pin 6 and the plate surface of the refrigeration plate 1 is L=0.35mm, preferably L=0.3mm-0.5mm. The tops of the bosses of several glass plate support pins 6 constitute the supporting plane of the glass substrate 5.
[0031] like Figure 6 , Figure 7 and Figure 8 As shown, a glass plate support pin 6 is installed on the upper plate surface of the refrigeration plate 1, and the glass plate support pin 6 is used to support the glass substrate 5. The cold plate support feet 7 located on the lower plate surface of the refrigeration plate 1 fix the refrigeration plate 1 on the refrigeration plate seat.
[0032] Eighteen air supply covers 13 are sealedly installed on the lower plate surface of the refrigeration plate 1, and three air supply covers 13 form a group, and the eighteen air supply covers 13 are divided into six groups. The air supply chambers of the same group of air supply covers 13 are connected to the corresponding air supply main pipe 15 of the group through the air supply pipe 14 thereon. The three groups of air supply covers 13 located on the left side of the lower plate surface of the refrigeration plate 1 correspond to the air supply fan 17 and the air filter 18 on the left side; similarly, the three groups of air supply covers 13 located on the right side of the lower plate surface of the refrigeration plate 1 correspond to the air supply fan 17 and the air filter 18 on the right side.
[0033] The blower 17 is connected in parallel with three air coolers 11 through the air filter 18 located at the air outlet thereof. The air cooler 11 body is provided with a cold air channel 24 and a cold water channel 22 which are connected along the length direction. The clean air outputted by the blower 17 and the air filter 18 is connected to the air supply main pipe 15 through the cold air channel 24 and the cold air valve 12 of the air cooler 11 in turn. The air supply main pipe 15 and other pipelines adopt flexible plastic hoses. The air filter 18 can also be installed at the inlet end of the blower 17. The blower 17 adopts an axial flow fan, and the blower 17 can also adopt a centrifugal fan; the air filter 18 needs to be a high efficiency filter or an ultra-high efficiency filter to ensure the cleanliness of the blown air. The cold air valve 12 is an electromagnetic air valve, and the cold air valve 12 can also be an electric air valve, so as to adjust the blowing air volume and the flow rate of the cold air in the control air path.
[0034] Since a plurality of through cold water channels 22 are provided on the main body of the air cooler 11, water distributors 10 are provided at both ends of the air cooler 11. The water distributor 10 is actually a parallel connection device for the plurality of cold water channels 22. A water cavity is provided on the water distributor 10. One side of the water distributor 10 is provided with a pipe joint connected to the cold water outlet of the chiller 16, and the other side of the water distributor 10 is provided with a plurality of pipe joints connected to the corresponding sides of the cold water channels 22 of the air cooler 11. The cold water at the cold water output port of the chiller 16 flows into the multiple cold water channels 22 of the air cooler 11 through the water distributor 10 on one side, then flows out through the water distributor 10 on the other side and flows back to the return water port of the chiller 16 for cooling, and then output through the output port. This cycle is repeated to extract the heat of the air flowing through the cold air channel 24 on the air cooler 11. Therefore, the function of the air cooler 11 is to cool the air blown in by the blower 17 and the air filter 18 and convert it into clean cold air to be input into the air supply cavity of the air supply hood 13.
[0035] like Fig. 9 , Fig.10As shown, a plurality of air supply holes 2 are provided through the refrigeration plate 1 along the plate thickness direction. The air supply hood 13 is in a rectangular box shape, and the air supply hood 13 is formed by stamping a steel plate. A seal 21 is embedded between the port periphery of the rectangular box-shaped air supply hood 13 and the lower plate surface of the refrigeration plate 1. The seal 21 is an O-ring, and a static sealing structure such as a sealing gasket can also be used. A closed air supply cavity is formed between the air supply hood 13 and the plate surface of the refrigeration plate 1. Each air supply cavity corresponds to a plurality of air supply holes 2, and an air supply pipe 14 is installed on the bottom wall of the air supply hood 13, and the air supply pipe 14 is connected to the corresponding air supply main pipe 15. During operation, the air flow output by the blower 17 passes through the air filter 18, the cold air channel 24 of the cooler 11, the cold air valve 12, the main air supply pipe 15 and the air supply pipe 14 and enters the air supply cavity of the air supply cover 13. The clean cold air in the air supply cavity of the air supply cover 13 is blown toward the glass substrate 5 from the air supply holes 2 on the refrigeration plate 1, thereby accelerating the cooling speed of the glass substrate 5 after baking.
[0036] The upper plate surface of the refrigeration plate 1 (the plate surface on which the glass plate support pins 6 are installed) is covered with a cold plate protective layer 19, which is mainly used to avoid the generation of static charges. Therefore, the cold plate protective layer 19 in this embodiment is coated with an antistatic coating. The cold plate protective layer 19 can also be a graphene conductive film coating, or a graphene-based electrostatic material coating. The cold plate protective layer 19 is not limited to being covered on the upper plate surface of the refrigeration plate 1, and the upper plate surface and the lower plate surface and the surrounding areas of the refrigeration plate 1 can also be covered with a cold plate protective layer 19, and the upper and lower plate surfaces of the refrigeration plate 1 can be coated with different material layers, such as the upper plate surface of the refrigeration plate 1 is covered with an antistatic layer, and the lower plate surface and the surrounding areas of the refrigeration plate 1 are coated with an anti-corrosion material layer.
[0037] like Fig.11 , Fig.12 As shown, the air cooler 11 is an aluminum cylinder, and a cold air channel 24 is provided through the axis position of the cylinder, and seven cold water channels 22 are evenly provided on the outer circumference of the cold air channel 24, and each cold water channel 22 is located on the same circumference and parallel to the cold air channel 24. The cold air pipe joints 26 at both ends of the cold air channel 24 are connected to the output pipe of the air filter 18 and the interface of the cold air valve 12 respectively. The cold water joints 25 at both ends of the cold water channel 22 are connected to the water distributor 10 at the corresponding end and the water distribution cavity thereon respectively. The outer circumference of the aluminum cylindrical body of the air cooler 11 is coated with a thermal insulation structure layer 23. In this embodiment, the thermal insulation structure layer 23 is formed by wrapping aerogel felt, but the material of the thermal insulation structure layer is not limited to aerogel felt, and can also be other inorganic thermal insulation materials or organic thermal insulation materials.
Claims
1. A device for cooling a display glass substrate by forced cooling, comprising a cooling plate (1), characterized in that: The refrigeration plate (1) is provided with a cold water channel (3) in the plate, and the plate surface of the refrigeration plate (1) is covered with a cold plate protective layer (19); the upper plate surface of the refrigeration plate (1) is installed with a glass plate support nail (6), and the lower plate surface of the refrigeration plate (1) is sealed with an air supply cover (13); air supply holes (2) are provided on the refrigeration plate (1) along the plate thickness direction, and the air supply fan (17) is connected to the air supply cavity of the air supply cover (13) through the cold air channel (24) of the air cooler (11), and the air supply hole (2) is connected to the air supply cavity of the air supply cover (13); the air cooler (11) is also provided with a cold water channel (22), and the two ends of the cold water channel (22) are respectively connected to the water outlet and the water return port of the chiller (16).
2. The display glass substrate forced cooling device according to claim 1, characterized in that: The upper plate surface and / or the lower plate surface of the refrigeration plate (1) are coated with a cold plate protective layer (19); the cold plate protective layer (19) is an antistatic paint coating or a graphene conductive film or a graphene-based antistatic material coating.
3. The display glass substrate forced cooling device according to claim 1, characterized in that: The cold water channels (3) on the refrigeration plate (1) include 5 to 15 independent water channels, and each water channel includes a water inlet port and a water outlet port.
4. The display glass substrate forced cooling device according to claim 1 or 3, characterized in that: The refrigeration plate (1) is a metal plate with a plurality of cold water channels (3); the cold water channels (3) are arranged in a zigzag manner in the plate body of the refrigeration plate (1) through a water channel rotating block (4); and the refrigeration plate (1) is fixedly mounted on a refrigeration plate support foot (7).
5. The display glass substrate forced cooling device according to claim 1, characterized in that: The lower plate surface of the refrigeration plate (1) is sealed with 2 to 10 groups of air supply hoods (13); the air supply cavities of the same group of air supply hoods (13) are connected to each other and communicated to the same air supply main pipe (15); the air supply main pipe (15) is connected to the cold air channel (24) of the cold air device (11) through the corresponding cold air valve (12).
6. The display glass substrate forced cooling device according to claim 5, characterized in that: A sealing member (21) is embedded between the port periphery of the air supply hood (13) and the plate surface of the refrigeration plate (1), and the air supply hood (13) and the refrigeration plate (1) form an air supply cavity; the air supply holes (2) arranged on the refrigeration plate (1) lead to the corresponding air supply cavity of the air supply hood (13).
7. The display glass substrate forced cooling device according to claim 1, characterized in that: The air cooler (11) is provided with a cold air channel (24) and a cold water channel (22) extending therethrough, and the cold water channel (22) is arranged around the outer peripheral side of the cold air channel (24).
8. The display glass substrate forced cooling device according to claim 1 or 7, characterized in that: The outer periphery of the air cooler (11) is coated with a heat-insulating structural layer (23); the two ends of the cold water channel (22) are respectively connected to the corresponding end water distributors (10); the two ends of the cold water channel (22) are respectively connected to the water outlet and the water return port of the chiller (16) through the corresponding end water distributors (10).
9. The display glass substrate forced cooling device according to claim 1, characterized in that: An air filter (18) is provided at the air inlet or outlet of the air blower (17); and a cold air valve (12) is connected at the inlet or outlet of the cold air channel (24) of the cold air device (11).
10. The device for cooling the display glass substrate by forced cooling according to claim 9, characterized in that: The cold air valve (12) is an electric air valve or an electromagnetic air valve; the air supply fan (17) is a centrifugal fan or an axial flow fan; the air filter (18) is a high efficiency filter or an ultra-high efficiency filter; and the chiller (16) is a normal temperature chiller.