Gas transmission pipeline and atomic layer deposition equipment
By designing a gas pipeline without public pipelines, using straight pipelines and one-way valves to ensure one-way flow of special gas sources, the blockage problem caused by the advance reaction of special gas sources in the prior art is solved, and the gas source is realized Improved purity and equipment life.
Patent Information
- Application Number
- CN202421165569.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-05-24
AI Technical Summary
The common pipelines in existing atomic layer deposition equipment cause special gas sources to contact and react in advance in the gas pipeline, causing blockage, affecting gas flow and purity, and shortening the service life of the equipment.
Design a gas pipeline, by connecting the first and second intake pipes with the source bottle and the spraying device respectively, avoiding contact between the two special gas sources in the public pipeline in the gas pipeline, and adopting straight pipelines and one-way valves The design ensures unidirectional flow of the gas source, and uses polishing and small to large pipeline combination to achieve no backflow and mixing.
It effectively avoids gas reaction blockage in the gas pipeline, ensures the purity and input of the special gas source, extends the service life of the equipment, and reduces the number of maintenance times.
Smart Images
Figure CN222250967U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of atomic layer deposition, and in particular relates to a gas transmission pipeline and atomic layer deposition equipment. Background Art
[0002] Atomic layer deposition (ALD) is a chemical vapor deposition technology used to deposit ultra-thin films on substrate surfaces. The principle is to alternately introduce different reaction precursor gases to cause self-limiting chemical reactions on the substrate surface to form a single atomic layer of deposits. Each reaction cycle only forms a layer of atomic thickness, and a film of the desired thickness can be obtained by cycling multiple cycles.
[0003] The existing atomic layer deposition gas pipeline structure includes two left and right pipelines. Two special gas sources enter the left and right pipelines from source bottles respectively, and are merged into the reaction chamber through the common pipeline in the middle.
[0004] Due to the existence of the common pipeline, the two special gas sources will contact and react in advance in the gas pipeline. The accumulated powder produced by the reaction will block the gas pipeline, hindering or stopping the gas flow. This will not only affect the amount and purity of the special gas source entering the reaction chamber later, thereby affecting the experimental results, but also shorten the service life of the gas pipeline, so it needs to be maintained frequently. Utility Model Content
[0005] The utility model provides a gas transmission pipeline and atomic layer deposition equipment, aiming to solve the problem that the existence of a public pipeline may cause a special gas source to contact and react in advance in the gas transmission pipeline, thereby causing blockage of the pipeline.
[0006] The embodiment of the utility model is implemented as follows: the gas delivery pipeline provided by the utility model includes: a first air intake pipeline, one end of which is connected to a first source bottle; a first spraying device, the first spraying device is connected to the other end of the first air intake pipeline; a second air intake pipeline, one end of which is connected to a second source bottle; a second spraying device, the second spraying device is connected to the other end of the second air intake pipeline. Furthermore, a reaction chamber is provided on the spraying path of the first spraying device and the spraying path of the second spraying device.
[0007] Furthermore, a reaction chamber is provided on the spraying path of the first spraying device and the spraying path of the second spraying device.
[0008] Furthermore, the special gas source in the first source bottle is unidirectionally introduced into the first air inlet pipe; the special gas source in the second source bottle is unidirectionally introduced into the second air inlet pipe.
[0009] Furthermore, a first small-to-large pipe is provided in the first spraying device, the small pipe of the first small-to-large pipe is connected to the other end of the first air intake pipe, and the large pipe of the first small-to-large pipe is connected to the first spraying device; a second small-to-large pipe is provided in the second spraying device, the small pipe of the second small-to-large pipe is connected to the other end of the second air intake pipe, and the large pipe of the two small-to-large pipes is connected to the second spraying device.
[0010] Furthermore, a first one-way valve is provided between the first source bottle and the first air intake pipe; and a second one-way valve is provided between the second source bottle and the second air intake pipe.
[0011] Furthermore, the first air intake pipeline is provided with a third one-way valve; the second air intake pipeline is provided with a fourth one-way valve.
[0012] Furthermore, the first air intake pipe is a straight pipe; the second air intake pipe is a straight pipe.
[0013] Furthermore, a connecting pipe is provided between the first spraying device and the second spraying device.
[0014] Furthermore, the inner pipe of the first air intake pipe is a pipe that has been polished; the inner pipe of the second air intake pipe is a pipe that has been polished.
[0015] An embodiment of the utility model further provides an atomic layer deposition device, which includes: a gas pipeline as described in any one of the above items.
[0016] The utility model provides a gas pipeline and atomic layer deposition equipment, in which the first air intake pipeline in the gas pipeline is connected to the first source bottle and the first spraying device respectively, and the second air intake pipeline is connected to the second source bottle and the second spraying device respectively. Therefore, the two special gas sources in the first source bottle and the second source bottle can directly enter the first spraying device and the second spraying device and be sprayed out during the flow transportation in the first air intake pipeline and the second air intake pipeline respectively. There is no common pipeline for the two special gas sources during the flow transportation, so the two special gas sources will not react in advance in the gas pipeline, that is, there will be no gas remaining in the gas pipeline, thereby achieving the effect of avoiding clogging of the gas pipeline. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 A schematic diagram of the structure of the gas transmission pipeline in the prior art;
[0018] Figure 2 A schematic diagram of the structure of a gas transmission pipeline provided by an embodiment of the utility model;
[0019] Figure 3 This is a schematic diagram of the arrangement structure of the gas transmission pipeline and the reaction chamber provided in one embodiment of the utility model;
[0020] Figure 4 It is a side structural diagram of a first small-to-large pipeline in a gas transmission pipeline provided by an embodiment of the utility model;
[0021] Figure 5 It is a side structural diagram of a second small-to-large pipeline in a gas transmission pipeline provided by an embodiment of the utility model;
[0022] Figure 6 It is a structural schematic diagram of a gas transmission pipeline provided by an embodiment of the utility model, in which a first one-way valve and a second one-way valve are provided;
[0023] Figure 7 It is a structural schematic diagram of a gas transmission pipeline provided with a third one-way valve and a fourth one-way valve according to an embodiment of the utility model.
[0024] Explanation of main component symbols: 10, first air inlet pipe; 20, second air inlet pipe; 30, first spraying device; 31, first small to large pipe; 40, second spraying device; 41, second small to large pipe; 50, first one-way valve; 60, second one-way valve; 70, third one-way valve; 80, fourth one-way valve; 90, connecting pipe; 200, first source bottle; 300, second source bottle; 400, reaction chamber; A, common pipeline; B, angle pipe. DETAILED DESCRIPTION
[0025] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0026] like Figure 1 As shown, for the existing gas pipeline used for atomic layer deposition, its structure includes two left and right pipelines, and the two special gas sources enter the left and right pipelines respectively, and merge into the reaction chamber through the main pipeline in the middle. Due to the existence of the common pipeline A, the two special gas sources will contact and react in advance in the gas pipeline to produce reaction gas. Therefore, after the special gas source is transported, the two special gas sources react in advance in the gas pipeline, and the accumulated powder produced by the reaction will block the gas pipeline, thereby hindering or stopping the gas flow. This not only affects the subsequent amount of special gas source entering the reaction chamber, but also affects the purity of the special gas source, and then the experimental results. In addition, it will affect the service life of the gas pipeline, and the gas pipeline needs to be maintained frequently.
[0027] In addition, due to the existence of common pipelines, there are multiple angled pipes B in the gas transmission pipeline. Therefore, after the special gas source is transported, gas will remain in these angled pipes B, which will further cause the two special gas sources to react prematurely in the gas transmission pipeline. The accumulated powder produced by the reaction will block the gas transmission pipeline.
[0028] Therefore, in order to solve the above technical problems, the utility model provides a gas pipeline and an atomic layer deposition device. Since the first air intake pipe in the gas pipeline is connected to the first source bottle and the first spraying device respectively, and the second air intake pipe is connected to the second source bottle and the second spraying device respectively. Therefore, the two special gas sources in the first source bottle and the second source bottle can directly enter the first spraying device and the second spraying device and be sprayed out during the flow transportation in the first air intake pipe and the second air intake pipe respectively. There is no common pipeline for the two special gas sources during the flow transportation, so the two special gas sources will not react prematurely in the gas pipeline, that is, there will be no gas remaining in the gas pipeline, thereby achieving the effect of avoiding blockage of the gas pipeline.
[0029] Embodiment 1
[0030] Please refer to Figures 2 to 7 The gas delivery pipeline of the embodiment of the utility model can be applied to atomic layer deposition, and the gas delivery pipeline includes: a first air intake pipeline 10, a second air intake pipeline 20, a first spraying device 30 and a second spraying device 40. One end of the first air intake pipeline 10 is connected to the first source bottle 200, the first spraying device 30 is connected to the other end of the first air intake pipeline 10, one end of the second air intake pipeline 20 is connected to the second source bottle 300, and the second spraying device 40 is connected to the other end of the second air intake pipeline 20.
[0031] Specifically, two different special gas sources are respectively arranged in the first source bottle 200 and the second source bottle 300, the first air intake pipe 10 is respectively connected to the first source bottle 200 and the first spraying device 30, and the second air intake pipe 20 is respectively connected to the second source bottle 300 and the second spraying device 40. Therefore, in the gas transmission pipeline, the special gas source in the first source bottle 200 will directly pass through the first air intake pipe 10 into the first spraying device 30 and be sprayed out from the first spraying device 30, and the special gas source in the second source bottle 300 will directly pass through the second air intake pipe 20 into the second spraying device 40 and be sprayed, and there is no common pipeline in the gas transmission pipeline through which the two special gas sources pass together.
[0032] Therefore, the two special gas sources in the first source bottle 200 and the second source bottle 300 can directly enter the first spray device 30 and the second spray device 40 and be sprayed out during the flow transportation in the first air intake pipeline 10 and the second air intake pipeline 20 respectively. The two special gas sources will not pass through the common pipeline, that is, they will not react in advance in the gas pipeline, thereby achieving the effect of avoiding clogging the gas pipeline. And it will not affect the subsequent amount of special gas sources entering the reaction chamber 400, achieving the effect of ensuring the purity of the special gas sources entering the reaction chamber 400. In addition, it can also achieve the effect of increasing the service life of the gas pipeline and reducing the number of maintenance times.
[0033] Furthermore, in a possible implementation, the first air intake pipeline 10 is a straight pipeline, and the second air intake pipeline 20 is a straight pipeline, that is, both the first air intake pipeline 10 and the second air intake pipeline 20 are straight pipelines. Therefore, there is no angle pipe B in the gas pipeline, that is, no gas will remain in the gas pipeline during the flow and transportation of the two special gas sources, which can further achieve the effect of preventing the two special gas sources from reacting prematurely in the gas pipeline.
[0034] Further, in a possible implementation, a reaction chamber 400 is provided on the spraying path of the first spraying device 30 and the spraying path of the second spraying device 40. The reaction chamber 400 is where the two special gas sources react, and the reaction chamber 400 is provided on the spraying paths of the first spraying device 30 and the second spraying device 40, so that the special gas sources sprayed from the first spraying device 30 and the second spraying device 40 can be directly sprayed into the reaction chamber 400 for reaction.
[0035] Embodiment 2
[0036] In some optional embodiments, based on the first embodiment, the special gas source in the first source bottle 200 enters the first air inlet pipeline 10 and the special gas source in the second source bottle 300 enters the second air inlet pipeline 20. The special gas source in the first source bottle 200 is one-way into the first air inlet pipeline 10; the special gas source in the second source bottle 300 is one-way into the second air inlet pipeline 20.
[0037] In the embodiment of the present application, in order to ensure that the two special gas sources will not communicate with each other when flowing in the gas pipeline, so as to ensure the purity and input amount of the special gas sources. In the embodiment of the present application, the first air intake pipe 10 and the second air intake pipe 20 are both one-way. In this way, Figures 2 to 7As shown, the first air inlet pipe 10 only allows gas to be introduced from the direction toward the first spray device 30, but not from the direction toward the first source bottle 200, so the special gas source in the second source bottle 300 cannot be introduced into the first air inlet pipe 10; the second air inlet pipe 20 only allows gas to be introduced from the direction toward the second spray device 40, but not from the direction toward the second source bottle 300, so the special gas source in the first source bottle 200 cannot be introduced into the second air inlet pipe 20. This ensures that the two special gas sources will not communicate with each other, so that the two special gas sources will not react prematurely in the gas transmission pipeline, thereby achieving the effect of ensuring the purity and input amount of the special gas source input into the reaction chamber 400.
[0038] Specifically, a one-way valve or a small-to-large pipeline can be set to ensure that the special gas source in the first source bottle 200 can be unidirectionally passed into the first air intake pipeline 10 and the special gas source in the second source bottle 300 can be unidirectionally passed into the second air intake pipeline 20.
[0039] Embodiment 3
[0040] On the basis of Example 2, the special gas source in the first source bottle 200 is set to unidirectionally enter the first air intake pipe 10 and the special gas source in the second source bottle 300 is set to unidirectionally enter the second air intake pipe 20.
[0041] like Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, in some optional embodiments, a first small-to-large pipe 31 is provided in the first spraying device 30, and the first small-to-large pipe 31 is respectively connected to the first spraying device 30 and the first air intake pipe 10; a second small-to-large pipe 41 is provided in the second spraying device 40, and the second small-to-large pipe 41 is respectively connected to the second spraying device 40 and the second air intake pipe 20.
[0042] Specifically, the small pipe of the first small-to-large pipe 31 is connected to the other end of the first air intake pipe 10, and the large pipe of the first small-to-large pipe 31 is connected to the first spraying device 30; the small pipe of the second small-to-large pipe 41 is connected to the other end of the second air intake pipe 20, and the large pipe of the second small-to-large pipe 41 is connected to the second spraying device 40.
[0043] The design of a small-to-large pipe can utilize the principles of fluid dynamics to generate a pressure gradient, so that the gas moves in a specific direction, forming a one-way flow. When the gas flows through a small-diameter pipe, the gas velocity increases due to the small cross-sectional area of the pipe, thereby generating higher kinetic energy. When the gas flows through a large-diameter pipe, the cross-sectional area of the pipe increases, and the gas velocity decreases, but the momentum and inertia of the gas still keep it flowing. This combination of large and small pipes will cause changes in inertia and momentum of the gas during the flow and transportation process, thus forming a one-way flow effect.
[0044] Therefore, in the embodiment of the present application, the small pipe of the first small-to-large pipe 31 is connected to the first air intake pipe 10, and the large pipe of the first small-to-large pipe 31 is connected to the first spraying device 30, thereby realizing the unidirectional flow of the special gas source in the first source bottle 200; similarly, the small pipe part of the second small-to-large pipe 41 is connected to the second air intake pipe 20, and the large pipe part of the second small-to-large pipe 41 is connected to the second spraying device 40, thereby realizing the unidirectional flow of the special gas source in the second source bottle 300. It is ensured that the special gas source in the first source bottle 200 and the second source bottle 300 can only flow in one direction, achieving the effect of preventing the special gas source gas from flowing back and mixing in the gas transmission pipeline.
[0045] Specifically, the first small-to-large pipe 31 and the second small-to-large pipe 41 can be a reducer.
[0046] Embodiment 4
[0047] On the basis of the second embodiment, the setting mode of the special gas source in the first source bottle 200 unidirectionally passing into the first air inlet pipe 10 and the setting mode of the special gas source in the second source bottle 300 unidirectionally passing into the second air inlet pipe 20. Different from the setting mode of the third embodiment, the unidirectional flow of the first air inlet pipe 10 and the second air inlet pipe 20 can be achieved by setting a one-way valve.
[0048] See also Figure 6In some optional embodiments, a first one-way valve 50 is provided between the first source bottle 200 and the first air intake pipe 10; and a second one-way valve 60 is provided between the second source bottle 300 and the second air intake pipe 20. Through the first one-way valve 50, it can be ensured that the special gas source in the first source bottle 200 can only enter the first air intake pipe 10 from the first source bottle 200 and pass through the first spraying device 30, and cannot flow back; and through the setting of the second one-way valve 60, it can be ensured that the special gas source in the second source bottle 300 can only enter the second air intake pipe 20 from the second source bottle 300 and pass through the second spraying device 40. Therefore, this embodiment ensures that the special gas source in the first source bottle 200 and the second source bottle 300 can only flow in one direction by connecting the one-way valves to the first source bottle 200 and the second source bottle 300, thereby achieving the effect of preventing the special gas source gas from flowing back and mixing in the gas transmission pipeline.
[0049] Embodiment 5
[0050] On the basis of the second embodiment, the setting mode of the special gas source in the first source bottle 200 unidirectionally passing into the first air inlet pipe 10 and the setting mode of the special gas source in the second source bottle 300 unidirectionally passing into the second air inlet pipe 20. Different from the setting mode of the one-way valve in the fourth embodiment, the first air inlet pipe 10 and the second air inlet pipe 20 can also be installed with a one-way valve.
[0051] See also Figure 7 In some optional embodiments, the first air intake duct 10 is provided with a third one-way valve 70 ; the second air intake duct 20 is provided with a fourth one-way valve 80 .
[0052] That is, Figure 7 As shown, a third one-way valve 70 can be provided on the first air intake pipe 10, and of course, a third one-way valve 70 can also be provided inside the first air intake pipe 10 to ensure that the special gas source in the first source bottle 200 can only flow in one direction toward the first spraying device 30. Similarly, a fourth one-way valve 80 can be provided on the second air intake pipe 20, and of course, a fourth one-way valve 80 can also be provided inside the second air intake pipe 20 to ensure that the special gas source in the second source bottle 300 can only flow in one direction toward the second spraying device 40.
[0053] Therefore, this embodiment ensures that the special gas source in the first source bottle 200 and the second source bottle 300 can only flow in one direction by setting a one-way valve in the first air intake pipe 10 and the first air intake pipe 10, thereby preventing the special gas source gas from flowing back and mixing in the gas transmission pipeline.
[0054] Embodiment 6
[0055] See also Figure 2 , Figure 3 , Figure 6and Figure 7 In some optional embodiments, the inner pipe of the first air intake pipe 10 is a polished pipe; the inner pipe of the second air intake pipe 20 is a polished pipe. Because when the special gas source flows in the first air intake pipe 10 and the second air intake pipe 20, the rough and uneven inner pipe will intercept the special gas source, causing the special gas source to remain and stagnate in the uneven part of the pipe, which will cause the pipe to be blocked and polluted.
[0056] Therefore, in the embodiment of the present application, the internal pipe of the first air intake pipe 10 and the internal pipe of the second air intake pipe 20 are both polished internal pipes, so that the internal pipe of the first air intake pipe 10 and the internal pipe of the second air intake pipe 20 are smooth pipes. This can prevent the special gas source from being retained in the first air intake pipe 10 and the second air intake pipe 20, and avoid the blockage and pollution of the pipes.
[0057] Embodiment 7
[0058] See also Figure 2 , Figure 3 , Figure 6 and Figure 7 In some optional embodiments, based on the first embodiment, a connecting pipe 90 is provided between the first spraying device 30 and the second spraying device 40, wherein the connecting pipe 90 is a connected connecting pipe 90, and the first spraying device 30 and the second spraying device 40 can be connected together by using the connecting pipe 90, thereby reducing the number and complexity of pipelines. This not only reduces the cost of the gas transmission pipeline, but also simplifies the layout of the gas transmission pipeline, thereby achieving the effect of improving the maintainability and stability of the gas transmission pipeline.
[0059] Among them, the internal pipeline of the connecting pipe 90 can also be set to a polished pipeline to prevent the special gas source from being retained in the internal pipeline of the connecting pipe 90.
[0060] Thus, the entire gas pipeline forms a π-shaped pipeline structure by setting the connecting pipe 90. The π-shaped pipeline structure can connect two spraying devices together, making the layout of the entire gas pipeline more compact, which can achieve the effect of saving space, and is particularly suitable for laboratories or production environments with limited space.
[0061] Embodiment 8
[0062] The atomic layer deposition device of the embodiment of the utility model includes the gas transmission pipeline of any one of the embodiments 1 to 7. Figures 2 to 7 .
[0063] Therefore, the atomic layer deposition equipment of the embodiment of the utility model can directly enter the first spray device 30 and the second spray device 40 and spray out during the flow transportation of the two special gas sources in the first source bottle 200 and the second source bottle 300 in the first air inlet pipeline 10 and the second air inlet pipeline 20 respectively. The two special gas sources will not pass through the common pipeline, that is, they will not react in advance in the gas pipeline, thereby avoiding the blockage of the gas pipeline. And it will not affect the subsequent amount of special gas sources entering the reaction chamber 400, so as to ensure the purity of the special gas sources entering the reaction chamber 400. In addition, it can also achieve the effect of increasing the service life of the gas pipeline and reducing the number of maintenance times.
[0064] In the description of this specification, the description with reference to the terms "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.
[0065] In addition, the above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims
1. A gas transmission pipeline, characterized in that: The gas transmission pipeline comprises: a first air inlet pipeline, one end of which is connected to a first source bottle; a first spraying device, the first spraying device being connected to the other end of the first air intake pipe; a second air inlet pipeline, one end of which is connected to a second source bottle; A second spraying device is connected to the other end of the second air intake pipe.
2. The gas transmission pipeline according to claim 1, characterized in that: A reaction chamber is arranged on the spraying path of the first spraying device and the spraying path of the second spraying device.
3. The gas transmission pipeline according to claim 2, characterized in that: The special gas source in the first source bottle is unidirectionally connected to the first air inlet pipeline; the special gas source in the second source bottle is unidirectionally connected to the second air inlet pipeline.
4. The gas transmission pipeline according to claim 3, characterized in that: The first spraying device is provided with a first small-to-large pipe, the small pipe of the first small-to-large pipe is connected to the other end of the first air intake pipe, and the large pipe of the first small-to-large pipe is connected to the first spraying device; A second small-to-large pipe is provided in the second spraying device, the small pipe of the second small-to-large pipe is connected to the other end of the second air intake pipe, and the large pipe of the second small-to-large pipe is connected to the second spraying device.
5. The gas transmission pipeline according to claim 3, characterized in that: A first one-way valve is arranged between the first source bottle and the first air inlet pipe; a second one-way valve is arranged between the second source bottle and the second air inlet pipe.
6. The gas transmission pipeline according to claim 3, characterized in that: The first air intake pipeline is provided with a third one-way valve; the second air intake pipeline is provided with a fourth one-way valve.
7. The gas transmission pipeline according to claim 2, characterized in that: The first air intake pipe is a straight pipe; the second air intake pipe is a straight pipe.
8. The gas transmission pipeline according to claim 2, characterized in that: A connecting pipe is provided between the first spraying device and the second spraying device.
9. The gas transmission pipeline according to claim 2, characterized in that: The inner pipe of the first air intake pipe is a polished pipe; The inner pipe of the second air intake pipe is a polished pipe.
10. An atomic layer deposition device, characterized in that: The atomic layer deposition equipment comprises: a gas pipeline as described in any one of claims 1 to 9.