Synchronous rotating mechanism for lower shaft of zone melting furnace

Abstract

The utility model relates to a zone melting furnace lower shaft synchronous rotating mechanism which is structurally characterized in that the lower end of a lower main shaft is connected with a movable rotor of a large direct-drive motor through a main shaft connecting plate, the large direct-drive motor is arranged at the inner bottom of a lower drive tray, and the upper end of the lower main shaft and a lower furnace chamber transition plate are positioned through a bearing bin; a direct-drive motor support is arranged at the bottom of the bearing bin, the outer side of the upper end of the direct-drive motor support is connected with the inner end of a top panel of the lower lifting frame, the lower end of the direct-drive motor support is fixedly connected with a small direct-drive motor shell, and a transition flange is installed at the bottom end of a movable rotor of the bearing bin and connected with a movable rotor of the small direct-drive motor. The top end of the bearing cabin moving rotor is connected with a large disc which is provided with a steel wire rope fixing nut. The lower main shaft can rotate along with the movable rotor of the large direct-drive motor, the bearing bin can rotate along with the small direct-drive motor, and the connection of the movable rotor of the bearing bin and the large disc can ensure the synchronism requirement of the rotation of the large disc and the lower main shaft. And the single crystal forming rate can be improved.

Description

Technical Field

[0001] The utility model relates to a synchronous rotating mechanism for the lower shaft of a zone melting furnace, belonging to the technical field of zone melting equipment. Background Art

[0002] A zone furnace is a device for producing single crystal silicon. The temperature gradient is controlled so that a narrow molten zone moves through the material to grow a single crystal.

[0003] The upper end of the bearing bin of the zone melting furnace (such as the bearing bin assembly in CN102877118A) drives the rotating disk to rotate, and three steel wires for retracting and releasing the single crystal clamping plates are fixed on the disk. During operation, the rotation of the lower spindle must be absolutely synchronized with the bearing bin, and the total length of the lower shaft exceeds three meters. Due to the limitation of the equipment process, the maximum end jump of the spindle during the working process should be ≤0.1mm. Therefore, the synchronous rotation accuracy is positively correlated with the single crystal success rate. The synchronous rotation mechanism of the prior art has the problem that the lateral force affects the rotation accuracy of the spindle, resulting in the single crystal crystallization rate cannot meet production needs. Utility Model Content

[0004] The utility model provides a synchronous rotation mechanism of the lower shaft of a zone melting furnace, which aims to overcome the above-mentioned shortcomings of the prior art, improve the rotation accuracy of the lower shaft, and improve the single crystal crystallization rate.

[0005] The technical solution of the utility model is: a synchronous rotation mechanism of the lower shaft of a zone melting furnace, the structure of which includes a lower main shaft, the lower end of the lower main shaft is connected to the moving rotor of a large direct drive motor through a main shaft connecting plate, the large direct drive motor is arranged at the bottom of the lower driving tray, the upper end of the lower main shaft is positioned between the lower furnace chamber transition plate and the bearing bin, the upper end of the lower main shaft is connected to the moving rotor of the bearing bin, a direct drive motor bracket is arranged at the bottom of the bearing bin, the outer side of the upper end of the direct drive motor bracket is connected to the inner end of the top panel of the lower lifting frame, the lower end of the direct drive motor bracket is fixedly connected to the small direct drive motor housing, the bottom end of the moving rotor of the bearing bin is equipped with a transition flange, the transition flange is connected to the moving rotor of the small direct drive motor, the lower main shaft, the large direct drive motor, the small direct drive motor and the bearing bin are arranged concentrically, the top end of the moving rotor of the bearing bin is connected to the large disk, and the large disk is equipped with a wire rope fixing nut. The lower main shaft can rotate with the rotation of the moving rotor of the large direct drive motor, and the bearing bin can rotate with the rotation of the small direct drive motor. The connection between the moving rotor of the bearing bin and the large disk can ensure the synchronization requirement of the rotation of the large disk and the rotation of the lower main shaft.

[0006] Preferably, an adjustable gap margin is provided between the bottom end of the large direct drive motor and the inner side of the lower drive tray, and top blocks are provided on both sides of the lower drive tray, the inner ends of which contact the side walls of the large direct drive motor. This is used to adjust the position of the large direct drive motor to facilitate the subsequent adjustment of the concentricity of the lower spindle, the large direct drive motor, the small direct drive motor and the bearing compartment, and ensure that the rotation end jump of the lower spindle meets the requirements.

[0007] Preferably, a ring is provided between the inner side of the movable rotor of the bearing bin and the lower main shaft, respectively, to ensure that the lower main shaft is concentric with the bearing bin.

[0008] Preferably, the ring is a T43 ring. Good thermal expansion performance and a small friction coefficient can largely ensure smooth movement between the main shaft and the bearing compartment.

[0009] The advantages of the utility model are as follows: the structure is reasonably designed, and the synchronous rotation of the zone melting furnace main shaft and the bearing bin is realized. The dual direct drive synchronous rotation structure is adopted. The lower main shaft is installed on the large direct drive motor rotor fixed on the lower drive tray. The lower main shaft is concentric with the direct drive motor rotor. The upper end of the lifting frame (the bottom end of the lower furnace body) is connected to the bearing bin. The small direct drive motor is fixed below the bearing bin rotor, and the large plate is fixed above the bearing bin rotor. One end of the wire rope can be fixed on the large plate. The inner side of the bearing bin contacts the lower main shaft, and the large direct drive motor, the small direct drive motor, the bearing bin, and the lower main shaft are concentrically rotated. The influence of the lateral force on the spindle rotation precision movement can be effectively eliminated, thereby improving the spindle rotation precision and further improving the single crystal crystallization rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a structural schematic diagram of the synchronous rotating mechanism of the lower shaft of the zone melting furnace of the utility model.

[0011] Figure 2 yes Figure 1 Enlarged schematic diagram of part I in the middle.

[0012] Figure 3 yes Figure 1 Enlarged schematic diagram of part II.

[0013] In the figure, 1 is the lower spindle, 2 is the spindle connecting plate, 3 is the large direct drive motor, 4 is the lower drive tray, 5 is the lower furnace chamber transition plate, 6 is the bearing bin, 7 is the ring, 8 is the direct drive motor bracket, 9 is the lower pulling frame, 10 is the small direct drive motor, 11 is the transition flange, 12 is the large plate, and 13 is the wire rope fixing nut. DETAILED DESCRIPTION

[0014] The present invention is further described in detail below in conjunction with embodiments and specific implementation methods.

[0015] like Figure 1-3As shown, a synchronous rotation mechanism of the lower shaft of a zone melting furnace is provided, and its structure includes a lower main shaft 1, the lower end of the lower main shaft 1 is connected to the moving rotor of a large direct-drive motor 3 through a main shaft connecting plate 2, the large direct-drive motor 3 is arranged at the inner bottom of a lower driving tray 4, the upper end of the lower main shaft 1 is positioned between a lower furnace chamber transition plate 5 and a bearing bin 6, the upper end of the lower main shaft 1 is connected to the moving rotor of the bearing bin 6, a direct-drive motor bracket 8 is provided at the bottom of the bearing bin 6, the outer side of the upper end of the direct-drive motor bracket 8 is connected to the inner end of the top panel of a lower lifting frame 9, the lower end of the direct-drive motor bracket 8 is fixedly connected to the outer shell of a small direct-drive motor 10, a transition flange 11 is provided at the bottom end of the moving rotor of the bearing bin 6, the transition flange 11 is connected to the moving rotor of the small direct-drive motor 10, the lower main shaft 1, the large direct-drive motor 3, the small direct-drive motor 10 and the bearing bin 6 are arranged concentrically, the top end of the moving rotor of the bearing bin 6 is connected to a large plate 12, and a wire rope fixing nut 13 is provided on the large plate 12.

[0016] According to the above structure, the concentric lower spindle 1 and the large direct-drive motor 3 can realize that the lower spindle 1 rotates along with the moving rotor of the large direct-drive motor 3, and the bearing magazine 6 can rotate along with the small direct-drive motor 10. The connection between the moving rotor of the bearing magazine 6 and the large disk 12 can ensure that the synchronization requirements of the rotation of the large disk 12 and the rotation of the lower spindle 1 meet the equipment process requirements.

[0017] An adjustable gap margin is set between the bottom end of the large direct-drive motor 3 and the inner side of the lower drive tray 4. Top blocks with inner ends contacting the side walls of the large direct-drive motor 3 are set on both sides of the lower drive tray 4, preferably one block on each side, for a total of four blocks, which can be used to adjust the position of the large direct-drive motor 3 and for subsequent concentricity adjustment, and can ensure the concentricity of the lower spindle 1, the large direct-drive motor 3, the small direct-drive motor 10 and the bearing magazine 6, thereby ensuring that the rotation end jump of the lower spindle 1 is ≤0.1mm.

[0018] A ring 7 is provided between the upper and lower inner sides of the moving rotor of the bearing bin 6 and the lower main shaft 1. The material of the ring 7 is preferably T43, which is used to ensure that the lower main shaft 1 is concentric with the bearing bin 6. The T43 material has good thermal expansion performance and a small friction coefficient, which can largely ensure smooth movement between the main shaft 1 and the bearing bin 6.

[0019] All the components mentioned above are prior art, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0020] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the protection scope of the present invention.

Claims

1. A synchronous rotation mechanism for the lower shaft of a zone melting furnace, characterized in that: The invention comprises a lower spindle (1), the lower end of the lower spindle (1) is connected to the moving rotor of a large direct drive motor (3) through a spindle connecting plate (2), the large direct drive motor (3) is arranged at the bottom of a lower drive tray (4), the upper end of the lower spindle (1) and a lower furnace chamber transition plate (5) are positioned through a bearing bin (6), the upper end of the lower spindle (1) is connected to the moving rotor of the bearing bin (6), a direct drive motor bracket (8) is arranged at the bottom of the bearing bin (6), and the outer side of the upper end of the direct drive motor bracket (8) is connected to a lower pull frame (9) ) at the inner end of the top panel, the lower end of the direct drive motor bracket (8) is fixedly connected to the housing of the small direct drive motor (10), the bottom end of the moving rotor of the bearing bin (6) is provided with a transition flange (11), the transition flange (11) is connected to the moving rotor of the small direct drive motor (10), the lower main shaft (1), the large direct drive motor (3), the small direct drive motor (10) and the bearing bin (6) are concentrically arranged, the top end of the moving rotor of the bearing bin (6) is connected to the large disk (12), and the large disk (12) is provided with a wire rope fixing nut (13).

2. A synchronous rotation mechanism for the lower shaft of a zone melting furnace as claimed in claim 1, characterized in that: An adjustable gap margin is provided between the bottom end of the large direct drive motor (3) and the inner side of the lower drive tray (4), and top blocks whose inner ends contact the side walls of the large direct drive motor (3) are provided on both sides of the lower drive tray (4).

3. A synchronous rotation mechanism for the lower shaft of a zone melting furnace as claimed in claim 1, characterized in that: A circular ring (7) is respectively arranged between the upper and lower inner sides of the movable rotor of the bearing bin (6) and the lower main shaft (1).

4. A synchronous rotation mechanism for the lower shaft of a zone melting furnace as claimed in claim 3, characterized in that: The ring (7) is a T43 ring.

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