Re-feeding device

Abstract

The utility model discloses a re-throwing device. The re-throwing device comprises a connecting piece, a re-throwing pipe, a moving assembly and a supporting assembly. The connecting piece is connected to the lower part of the lifting shaft, and a clamping part is formed at the lower part of the connecting piece; materials are stored in the re-feeding pipe, and a clamping groove is formed in the upper part of the re-feeding pipe; the moving assembly has the moving freedom degree and can drive the re-feeding pipe to move so that the clamping part can be located in the clamping groove and connected with the clamping groove in a clamped mode. The supporting assembly is arranged on the re-feeding pipe in a sleeving mode and fixed to the re-feeding pipe, when the clamping part is clamped to the clamping groove, the supporting assembly abuts against the inner wall of the auxiliary furnace chamber, acting force acting on the inner wall of the auxiliary furnace chamber is formed, and the relative position between the auxiliary furnace chamber and the re-feeding pipe can be fixed through the acting force. By means of the arrangement, material re-feeding of the re-feeding device can be achieved, and the disassembly and assembly convenience between the connecting piece and the re-feeding pipe can be improved.

Description

Technical Field

[0001] The present application relates to the field of crystal processing technology, and in particular to a re-investment device. Background Art

[0002] Crystal growth technology is a technology that uses the physical and chemical properties of matter (liquid, solid, gas) to control the phase change process and obtain crystals with a certain structure, size, shape and performance.

[0003] A crystal growth furnace is a professional device used for crystal growth and cultivation. Its purpose is to provide the necessary conditions for crystal growth and increase the speed of crystal growth through environmental control.

[0004] Existing crystal growth furnaces often use the Czochralski method to prepare single crystal silicon rods. The Czochralski method mainly involves filling raw polycrystalline silicon into a quartz crucible, heating the quartz crucible with a heater to melt the raw polycrystalline silicon in the quartz crucible into silicon melt, immersing the seed crystal (single crystal) in the silicon melt, and using a pulling system to rotate and pull the seed crystal so that the silicon melt grows along the pulling direction, thereby obtaining a crystal rod that meets the diameter and length requirements.

[0005] In the actual operation process of the crystal growth furnace, as the crystal rod grows, the silicon melt in the quartz crucible is gradually consumed, and it is necessary to replenish the raw material polycrystalline silicon into the quartz crucible. Since the quartz crucible is located in the main furnace chamber of the crystal growth furnace, it is necessary to open the main furnace chamber to achieve the raw material replenishment of the quartz crucible. Since opening the main furnace chamber is time-consuming and labor-intensive, it is not conducive to improving the processing efficiency of the crystal growth furnace. Therefore, there is an urgent need for a device that can replenish raw materials into the quartz crucible without opening the main furnace chamber to achieve the re-injection of raw material polycrystalline silicon. Utility Model Content

[0006] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide a re-feeding device, which can realize the re-feeding of materials.

[0007] To achieve the above objectives, this application adopts the following technical solutions:

[0008] A re-feeding device is used for re-feeding materials in a crystal growth furnace; the crystal growth furnace comprises a lifting shaft and an auxiliary furnace chamber, the lifting shaft is at least partially located in the auxiliary furnace chamber; the re-feeding device comprises a connecting piece, a re-feeding pipe, a moving assembly and a supporting assembly. The connecting piece is connected to the lower part of the lifting shaft, and a clamping part is formed at the lower part of the connecting piece; materials are stored in the re-feeding pipe, and a clamping groove is formed at the upper part of the re-feeding pipe; the moving assembly has a degree of freedom of movement, and the moving assembly can drive the re-feeding pipe to move so that the clamping part is located in the clamping groove and clamped with the clamping groove; the supporting assembly is sleeved on the re-feeding pipe and fixed to the re-feeding pipe, and when the clamping part is clamped with the clamping groove, the supporting assembly abuts against the inner wall of the auxiliary furnace chamber and forms a force acting on the inner wall of the auxiliary furnace chamber, and the force can fix the relative position between the auxiliary furnace chamber and the re-feeding pipe.

[0009] Furthermore, the re-injection tube includes a tube body and a connection block connected to the upper part of the tube body, and a clamping groove is provided on the upper part of the connection block.

[0010] Furthermore, the connecting piece includes a shaft portion which is basically a shaft body and a clamping portion located on the lower side of the shaft body, the clamping portion is fixedly connected to the shaft portion or is integrally formed with the shaft portion; a through groove connecting the clamping groove is opened on the upper part of the connecting block, and the shaft portion is at least partially inserted into the through groove, wherein the groove width of the through groove is greater than or equal to the diameter of the shaft portion and smaller than the maximum width of the clamping portion along the radial direction of the shaft portion.

[0011] Further, a section plane is defined, the axis of the shaft portion is located on the section plane, and the cross section of the clamping portion cut by the section plane is one of a triangle, a rectangle, a circle, a semicircle and a trapezoid; the outer contour of the clamping portion is consistent with the inner contour of the clamping groove.

[0012] Furthermore, the tube body is extended radially to form an annular protrusion, and the support assembly is connected to the annular protrusion.

[0013] Furthermore, the support assembly includes multiple connecting rods and multiple annular support members distributed axially along the lifting shaft, the multiple annular support members are all sleeved on the re-injection pipe, the multiple annular support members are all abutted against the furnace wall of the auxiliary furnace chamber, each connecting rod is passed through the multiple annular support members and is fixedly connected to the multiple annular support members, and each connecting rod is also fixedly connected to the annular protrusion.

[0014] Furthermore, the support assembly also includes a buffer member installed on the annular support member, and the annular support member is abutted against the furnace wall of the auxiliary furnace chamber through the buffer member.

[0015] Furthermore, the re-injection tube also includes a moving rod passing through the tube body and a sealing piece for sealing the lower part of the tube body, the sealing piece is connected to the lower part of the moving rod, and the upper part of the moving rod is connected to the connecting block; the upper part of the moving rod extends radially along the lifting axis to form an abutment portion, which is located in the connecting block and is clamped with the connecting block.

[0016] Furthermore, the moving component includes a moving part with multiple degrees of freedom of movement and a clamping part located on the moving part, the clamping part is fixedly connected to the moving part, the clamping part has a clamping opening, the maximum opening width of the clamping opening is greater than or equal to the diameter of the moving rod and less than the minimum width of the connecting block along the radial direction of the moving rod.

[0017] A re-feeding device is used for re-feeding materials in a crystal growth furnace; the crystal growth furnace comprises a lifting shaft and an auxiliary furnace chamber, the lifting shaft is at least partially located in the auxiliary furnace chamber; the re-feeding device comprises a connecting piece, a re-feeding pipe, a moving assembly and a supporting assembly. The connecting piece is connected to the lower part of the lifting shaft, and a clamping groove is formed at the lower part of the connecting piece; materials are stored in the re-feeding pipe, and a clamping part is formed at the upper part of the re-feeding pipe; the moving assembly has a degree of freedom of movement, and the moving assembly can drive the re-feeding pipe to move so that the clamping part is located in the clamping groove and clamped with the clamping groove; the supporting assembly is sleeved on the re-feeding pipe and fixed to the re-feeding pipe, and when the clamping part is clamped with the clamping groove, the supporting assembly abuts against the inner wall of the auxiliary furnace chamber and forms a force acting on the inner wall of the auxiliary furnace chamber, and the force can fix the relative position between the auxiliary furnace chamber and the re-feeding pipe.

[0018] The above-mentioned re-injection device can transport the re-injection tube from the outside of the crystal growth furnace to the auxiliary furnace chamber through a moving component, and enable the pulling shaft located in the auxiliary furnace to be connected to the re-injection tube through a connecting piece, thereby realizing the movement and connection of the pulling shaft, and then realizing the material re-injection of the re-injection device; at the same time, the connecting piece and the re-injection tube can be connected through a clamping part and a clamping groove, which is conducive to improving the convenience of disassembly and assembly between the connecting piece and the re-injection tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the structure of a re-investment device and a crystal growth furnace provided in an embodiment of the present application.

[0020] Figure 2 A schematic diagram of the structure of the reinvestment device provided in an embodiment of the present application.

[0021] Figure 3 This is an exploded view of the partial structure of the re-investment device provided in an embodiment of the present application.

[0022] Figure 4 A partial structural cross-sectional view of the re-investment device provided in an embodiment of the present application.

[0023] Figure 5 For the embodiment of this application Figure 2 A partial enlarged view of point A in the middle.

[0024] Figure 6 For the embodiment of this application Figure 4 A partial enlarged view of point B in the middle.

[0025] Figure 7A schematic diagram of the structure of the mobile component of the re-investment device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0027] It should be noted that the words "one" or "an" and the like used in the specification and claims of this application do not indicate a quantitative limitation, but indicate the existence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" and the like are for convenience of description only and are not limited to one position or one spatial orientation. Words such as "include" or "comprise" and the like mean that the elements or objects appearing before "include" or "comprises" include the elements or objects listed after "include" or "comprises" and their equivalents, and do not exclude other elements or objects. Words such as "connected" or "connected" and the like are not limited to physical or mechanical connections, whether direct or indirect.

[0028] The singular forms "a", "an", and "the" used in this specification and the appended claims are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0029] like Figure 1 and Figure 2 As shown, a re-feeding device 100 is used for re-feeding materials to a crystal growing furnace 200, so that the material can be replenished without disassembling the crystal growing furnace 200. The type of material can be adjusted according to the type of crystal produced by the crystal growing furnace 200. For example, when the produced crystal is a single crystal silicon rod, the material is silicon material.

[0030] Specifically, the crystal growth furnace 200 includes a frame 21 , a pulling assembly 22 , a subsidiary furnace chamber 23 , and a main furnace chamber 24 .

[0031] The frame 21 serves as a basic framework of the crystal growth furnace 200 and is used to support the pulling assembly 22 , the auxiliary furnace chamber 23 and the main furnace chamber 24 .

[0032] The auxiliary furnace chamber 23 is located at the lower side of the pulling assembly 22 , and the main furnace chamber 24 is located at the lower side of the auxiliary furnace chamber 23 . The auxiliary furnace chamber 23 is used to place the grown crystal rods, and the main furnace chamber 24 is used to grow the crystal rods.

[0033] A crucible is placed in the main furnace chamber 24 . Materials are placed in the crucible. During the crystal growth process, the materials are melted into a melt to facilitate the crystal growth of the crystal rod.

[0034] The pulling assembly 22 is at least partially arranged on the frame 21. The pulling assembly 22 includes a pulling shaft 221 and a driving member 222. The driving member 222 can drive the pulling shaft 221 to lift and rotate so that the pulling shaft 221 can pass through the auxiliary furnace chamber 23 and the main furnace chamber 24 according to needs. The pulling shaft 221 is used to pull the crystal rod.

[0035] When the crystal growth furnace 200 starts working, the pulling shaft 221 first passes through the auxiliary furnace chamber 23 and then enters the main furnace chamber 24, so as to achieve the pulling growth of the crystal rod. When the crystal rod growth is completed, the pulling shaft 221 is at least partially located in the auxiliary furnace chamber 23, so that the crystal rod can be stored in the auxiliary furnace chamber 23.

[0036] In this embodiment, the re-feeding device 100 is used to feed the material into the crucible.

[0037] In order to clearly explain the technical solution of this application, the following is also defined: Figure 2 Front, back, left, right, up and down as shown.

[0038] like Figure 1 and Figure 2 As shown, as an implementation, the re-projection device 100 includes a connecting piece 11, a re-projection tube 12, a moving component 13 and a supporting component 14.

[0039] Among them, the connecting piece 11 is connected to the lower part of the lifting shaft 221, and the connecting piece 11 is used to connect the re-injection pipe 12 and the lifting shaft 221, so that the lifting shaft 221 can connect to and drive the re-injection pipe 12, thereby realizing the material delivery of the re-injection pipe 12.

[0040] The re-feeding pipe 12 stores materials so that the re-feeding pipe 12 can re-feed materials to the crucible.

[0041] The moving assembly 13 has a degree of freedom of movement. When the moving assembly 13 is connected to the re-injection pipe 12, the moving assembly 13 can drive the re-injection pipe 12 to move until the moving assembly 13 connects the re-injection pipe 12 to the connecting piece 11, after which the moving assembly 13 is separated from the re-injection pipe 12. Through the above arrangement, the moving assembly 13 can transport the re-injection pipe 12 from the outside of the crystal growth furnace 200 to the auxiliary furnace chamber 23, and enable the lifting shaft 221 located in the auxiliary furnace chamber 23 to be connected to the re-injection pipe 12 through the connecting piece 11, thereby realizing the movement and connection of the lifting shaft 221.

[0042] The support assembly 14 is sleeved on the re-dumping pipe 12 and fixed to the re-dumping pipe 12. When the re-dumping pipe 12 is connected to the connecting piece 11, the support assembly 14 abuts against the inner wall of the auxiliary furnace chamber 23 and forms a force acting on the inner wall of the auxiliary furnace chamber 23. The above force can fix the relative position between the auxiliary furnace chamber 23 and the re-dumping pipe 12, so that the support assembly 14 can support the re-dumping pipe 12 through the auxiliary furnace chamber 23, and then the support assembly 14 can fix the position of the re-dumping pipe 12.

[0043] like Figure 2 and Figure 3 As shown, specifically, a clamping portion 111 is formed at the lower portion of the connecting member 11, and a clamping groove 121 is formed at the upper portion of the re-delivery tube 12; the moving component 13 can drive the re-delivery tube 12 to move so that the clamping portion 111 is located in the clamping groove 121 and clamped with the clamping groove 121.

[0044] When the clamping portion 111 is clamped with the clamping groove 121 , the support assembly 14 abuts against the inner wall of the auxiliary furnace chamber 23 and forms a force acting on the inner wall of the auxiliary furnace chamber 23 , which can fix the relative position between the auxiliary furnace chamber 23 and the re-injection pipe 12 .

[0045] Through the above arrangement, the connection piece 11 and the re-injection tube 12 can be connected through the clamping portion 111 and the clamping groove 121, which is conducive to improving the convenience of disassembly and assembly between the connection piece 11 and the re-injection tube 12.

[0046] It should be noted that the connection between the connecting member 11 and the lifting shaft 221 is not limited in the present application, and it is only necessary to realize the connection between the connecting member 11 and the lifting shaft 221. For example, the connecting member 11 may include a columnar structure with external threads, and the lower part of the lifting shaft 221 may be provided with a threaded hole, so that the connecting member 11 and the lifting shaft 221 are connected by threads; or, the connecting member 11 may be provided with a threaded hole, and the lower part of the lifting shaft 221 may be formed with a columnar structure with external threads, so as to realize the connection between the connecting member 11 and the lifting shaft 221; or, the connecting member 11 may also be directly welded to the lifting shaft 221.

[0047] The structures of the moving assembly 13 and the supporting assembly 14 are described below and will not be repeated here.

[0048] As another optional implementation, a snap-in groove is formed at the lower part of the connector 11, and a snap-in portion is formed at the upper part of the re-drop tube 12, so that the re-drop tube 12 and the connector 11 can be snap-connected. Through the above arrangement, the snap-in structure of the re-drop tube 12 and the connector 11 can be adjusted according to actual needs, so as to meet different work needs and processing needs.

[0049] The present application describes in detail the example in which the lower portion of the connecting member 11 is formed with a clamping portion 111 and the upper portion of the re-dropping tube 12 is formed with a clamping groove 121 .

[0050] Exemplarily, the re-injection tube 12 includes a tube body 122 and a connection block 123 connected to the upper part of the tube body 122, and a clamping groove 121 is provided on the upper part of the connection block 123. Through the setting of the connection block 123, the tube body 122 and the connecting member 11 can be indirectly connected through the connection block 123, so as to improve the diversity of the connection mode between the tube body 122 and the connecting member 11 by changing the connection mode between the connection block 123 and the tube body 122 and the connection mode between the connection block 123 and the connecting member 11.

[0051] Specifically, the connecting member 11 includes a shaft portion 112 which is basically an axis body and a clamping portion 111 located at the lower side of the shaft body. The clamping portion 111 is fixedly connected to the shaft portion 112 or is integrally formed, which is not limited in the present application.

[0052] Among them, a through groove 1231 connected to the clamping groove 121 is opened on the upper part of the connecting block 123, and the shaft portion 112 is at least partially penetrated through the through groove 1231. The groove width of the through groove 1231 is greater than or equal to the diameter of the shaft portion 112 and smaller than the maximum width of the clamping portion 111 along the radial direction of the shaft portion 112.

[0053] Through the above arrangement, the clamping portion 111 will not be separated from the clamping groove 121 through the through groove 1231, thereby improving the connection stability between the clamping portion 111 and the clamping groove 121, which is beneficial to the connection stability between the connecting member 11 and the connecting block 123, and improves the connection stability between the re-injection tube 12 and the lifting shaft 221. In addition, the through groove 1231 is connected to the clamping groove 121, so that the shaft portion 112 and the clamping portion 111 can be connected to the connecting block 123 at the same time.

[0054] Exemplarily, a through hole is opened in the upper portion of the connecting block 123, and the through hole extends in any direction parallel to the horizontal plane to form an extension groove passing through the through hole and one side of the connecting block 123, and the through hole and the extension groove constitute a through groove 1231, so that the shaft portion 112 can pass through the extension groove and be in the through groove 1231.

[0055] Exemplarily, the clamping groove 121 also passes through one side of the connecting block 123. Specifically, the clamping groove 121 and the through groove 1231 pass through the same side of the connecting block 123, so that the shaft portion 112 and the clamping portion 111 can be connected to the connecting block 123 at the same time.

[0056] More specifically, the end of the shaft portion 112 away from the clamping portion 111 can be provided with an external thread, and a threaded hole can be opened at the lower portion of the lifting shaft 221 to achieve a threaded connection between the shaft portion 112 and the lifting shaft 221; the end of the shaft portion 112 away from the clamping portion 111 can also be directly connected to the lifting shaft 221 by a fixing method such as welding.

[0057] In the present application, a cross-sectional plane is defined, the axis of the shaft portion 112 is located on the cross-sectional plane, and the cross-section of the clamping portion 111 cut by the cross-sectional plane is defined as the clamping cross-section. The clamping cross-section can be one of a triangle, a rectangle, a circle, a semicircle and a trapezoid. The clamping cross-section can also be an irregular shape. It is only necessary that the diameter of the shaft portion 112 is smaller than the maximum width of the clamping portion 111 along the radial direction of the shaft portion 112. This application does not impose any restrictions.

[0058] Among them, the outer contour of the clamping portion 111 is consistent with the inner contour of the clamping groove 121, so that the connection between the connecting member 11 and the connecting block 123 is more stable, thereby improving the connection stability between the lifting shaft 221 and the re-delivery tube 12.

[0059] It should be noted that the outer contour of the clamping portion 111 and the inner contour of the clamping groove 121 may not be consistent, and it is only necessary to ensure that the clamping portion 111 can be clamped to the clamping groove 121. For example, the clamping groove 121 may also be a square groove, a circular groove, a triangular groove, a trapezoidal groove, a semicircular groove, an irregular groove, etc.

[0060] like Figure 4 and Figure 5 As shown, as an implementation, the tube body 122 is extended along its radial direction to form an annular protrusion 1221, and the support assembly 14 is connected to the annular protrusion 1221. Specifically, the upper part of the tube body 122 is extended along the radial direction of the tube body 122 to form the annular protrusion 1221; or the annular protrusion 1221 can be formed in the middle or lower part of the tube body 122, that is, the annular protrusion 1221 can be formed at any position of both ends of the tube body 122.

[0061] It should be noted that when the annular protrusion 1221 is formed on the upper part of the tube body 122, the support assembly 14 is at least partially located on the lower side of the annular protrusion 1221 and connected to the annular protrusion 1221, thereby avoiding the support assembly 14 being higher than the re-delivery tube 12 and causing interference between the re-delivery tube 12 and the lifting shaft 221, thereby enabling the re-delivery tube 12 and the lifting shaft 221 to work normally.

[0062] For example, when the annular protrusion 1221 is formed in the middle or lower part of the tube body 122, the support assembly 14 can be at least partially located on the upper side or lower side of the annular protrusion 1221, thereby facilitating the arrangement diversity of the support assembly 14 and thus meeting actual work requirements.

[0063] Exemplarily, when the support assembly 14 is at least partially located on the lower side of the annular protrusion 1221, the support assembly 14 may not be connected to the annular protrusion 1221, and the support assembly 14 only needs to abut against the annular protrusion 1221, thereby facilitating the disassembly and assembly of the support assembly 14 and the re-delivery tube 12.

[0064] It can be understood that in order to improve the connection stability between the support assembly 14 and the re-delivery tube 12 , the support assembly 14 can abut against the lower side of the annular protrusion 1221 and be connected to the lower side of the annular protrusion 1221 .

[0065] In the present application, the connection between the annular protrusion 1221 and the support assembly 14 may be a detachable connection such as a bolt connection, or the connection between the annular protrusion 1221 and the support assembly 14 may be a fixed connection such as welding, and the present application does not impose any limitation thereto.

[0066] As an implementation method, the present application describes the example in which the support assembly 14 is at least partially located at the lower side of the annular protrusion 1221 and connected to the annular protrusion 1221 .

[0067] The support assembly 14 includes a plurality of connecting rods 141 and a plurality of annular support members 142 axially distributed along the lifting shaft 221. The plurality of annular support members 142 are all sleeved on the re-injection pipe 12. The plurality of annular support members 142 are all against the furnace wall of the auxiliary furnace chamber 23. Each connecting rod 141 is passed through the plurality of annular support members 142 and is fixedly connected to the plurality of annular support members 142. Each connecting rod 141 is also fixedly connected to the annular protrusion 1221.

[0068] Specifically, the connection between a connecting rod 141 and an annular support member 142 is used as an example for description. The connecting rod 141 may be a rod-shaped structure with an external thread. After the connecting rod 141 is inserted into the annular protrusion 1221, the annular support member 142 is fixed by nuts located at the upper and lower sides of the annular support member 142, that is, the connecting rod 141 is connected to the two nuts, and the two nuts are respectively abutted against the upper and lower sides of the annular support member 142, thereby fixing the annular support member 142.

[0069] Specifically, a threaded hole 1221 a is formed on the lower side of the annular protrusion 1221 , and the connecting rod 141 is connected to the annular protrusion 1221 by threads, thereby achieving a fixed connection between the connecting rod 141 and the annular protrusion 1221 .

[0070] It should be noted that the connecting rod 141 can also be passed through the annular protrusion 1221 and connected to the annular protrusion 1221 by welding or other fixing methods, and this application does not limit this.

[0071] In this embodiment, the support assembly 14 further includes a buffer member 143 mounted on the annular support member 142, and the annular support member 142 is abutted against the furnace wall of the auxiliary furnace chamber 23 through the buffer member 143. The buffer member 143 can be a rubber member or other elastic component. Specifically, the buffer member 143 and the annular support member 142 can be fixedly connected by gluing, bolting, etc.

[0072] There may be a plurality of buffer members 143 , and the plurality of buffer members 143 are disposed around the annular support member 142 , and the plurality of buffer members 143 are all disposed protruding from the annular support member 142 , so as to facilitate the abutment between the buffer member 143 and the inner wall of the auxiliary furnace chamber 23 .

[0073] It should be noted that the buffer member 143 may also be an annular structure, and the maximum diameter of the buffer member 143 is greater than the maximum diameter of the annular support member 142 .

[0074] like Figure 3 , Figure 4 and Figure 6 As shown, as an implementation method, the re-injection tube 12 also includes a moving rod 124 passing through the tube body 122 and a sealing member 125 for sealing the lower part of the tube body 122, the sealing member 125 is connected to the lower part of the moving rod 124, and the upper part of the moving rod 124 is connected to the connecting block 123.

[0075] Specifically, the tube body 122 is basically a hollow tubular structure, the upper portion of the tube body 122 is sealed, and a moving hole 1222 is opened in the upper portion of the tube body 122 for the moving rod 124 to move up and down.

[0076] The blocking member 125 can be configured as a conical structure, and the diameter of the blocking member 125 is greater than or equal to the inner diameter of the tube body 122 , so that the blocking member 125 can block the lower portion of the tube body 122 to prevent material from flowing out of the lower portion of the tube body 122 .

[0077] More specifically, to further improve the sealing performance of the lower portion of the tube body 122 , the diameter of the blocking piece 125 is greater than the inner diameter of the tube body 122 , and the blocking piece 125 is made of elastic material such as rubber, thereby facilitating an interference fit between the blocking piece 125 and the tube body 122 .

[0078] Since the moving rod 124 and the lifting shaft 221 are indirectly connected through the connecting block 123 and the connecting piece 11, the lifting shaft 221 can drive the moving rod 124 to move up and down relative to the tube body 122. Since the supporting assembly 14 fixes the tube body 122 to the auxiliary furnace chamber 23, the movement of the moving rod 124 will not cause the tube body 122 to move, so that the moving rod 124 can drive the blocking member 125 to move. When the re-feeding device 100 re-feeds materials, when the moving rod 124 drives the blocking member 125 to move downward, the material flows out from the lower part of the tube body 122 and is transported to the crucible, thereby realizing the re-feeding of materials by the re-feeding device 100.

[0079] It should be noted that the re-dispensing tube 12 also includes a stopper 126, which is disposed on the moving rod 124 and fixedly connected to the moving rod 124, and the minimum width of the stopper 126 along the radial direction of the moving hole 1222 is greater than the inner diameter of the moving hole 1222. When the blocking member 125 blocks the lower part of the tube body 122, the stopper 126 abuts against the lower edge of the moving hole 1222, thereby limiting the moving rod 124 from continuing to move upward. In particular, when the blocking member 125 blocks the lower part of the tube body 122, the moving assembly 13 can be engaged with the moving rod 124, so that when the moving assembly 13 moves the re-dispensing tube 12, the moving rod 124 will not move upward, and then when the moving assembly 13 moves the re-dispensing tube 12, the tube body 122 is prevented from moving downward relative to the moving rod 124, so as to prevent the tube body 122 from colliding with the ground, the moving assembly 13, etc.

[0080] It is understandable that when the blocking member 125 blocks the lower portion of the tube body 122 , the moving rod 124 can be prevented from further moving upward only through the cooperation between the blocking member 125 and the tube body 122 .

[0081] In this embodiment, the blocking member 125 and the moving rod 124 can be fixed by bolts. Specifically, a threaded hole is provided at the lower end of the moving rod 124, and the bolt passes through the blocking member 125 and is threadedly connected with the threaded hole to achieve the connection between the blocking member 125 and the moving rod 124.

[0082] Alternatively, the lower end of the moving rod 124 has an external thread, the blocking member 125 has a nut built in, and the moving rod 124 at least partially passes through the blocking member 125 and is threadedly connected to the nut built in the blocking member 125.

[0083] Exemplarily, the upper portion of the moving rod 124 extends radially along the lifting shaft 221 to form an abutment portion 1241, which is located in the connecting block 123 and is engaged with the connecting block 123. Specifically, the connecting block 123 is further provided with a connecting groove 1232, which is arranged through one side of the connecting block 123, so that the abutment portion 1241 can be engaged with the connecting groove 1232 from one side of the connecting block 123.

[0084] Specifically, the lower part of the connection block 123 may further include a connection through groove 1233 in communication with the connection groove 1232, so that the connection rod 124 can enter from the connection through groove 1233 and the abutment portion 1241 can be located in the connection groove 1232. The groove width of the connection through groove 1233 is greater than or equal to the diameter of the moving rod 124 and less than the minimum width of the connection groove 1232 along the radial direction of the moving rod 124, so as to facilitate the clamping of the abutment portion 1241 and the connection groove 1232.

[0085] It should be noted that the connecting groove 1232 and the snap-fit ​​groove 121 may be connected to facilitate the processing of the connecting groove 1232 and the snap-fit ​​groove 121; the connecting groove 1232 and the snap-fit ​​groove 121 may not be connected, and this application does not impose any limitation thereto.

[0086] It should be noted that the connection groove 1232 and the snap-in groove 121 may pass through the same side of the connection block 123 , or the connection groove 1232 and the snap-in groove 121 may pass through different sides of the connection block 123 , and this application does not impose any limitation thereto.

[0087] Optionally, the connecting groove 1232 and the snap-fit ​​groove 121 can be configured as the same groove body, which runs through one side of the connecting block 123, thereby facilitating the processing of the connecting groove 1232 and the snap-fit ​​groove 121 and enabling the snap-fit ​​portion 111 and the abutment portion 1241 to snap-fit ​​with the groove body.

[0088] like Figure 3 and Figure 7 As shown, as an implementation method, the moving assembly 13 includes a moving member 131 with multiple degrees of freedom of movement and a clamping member 132 located on the moving member 131, the clamping member 132 is fixedly connected to the moving member 131, and the clamping member 132 is provided with a clamping opening 1321, and the maximum opening width of the clamping opening 1321 is greater than or equal to the diameter of the moving rod 124 and less than the minimum width of the connecting block 123 along the radial direction of the moving rod 124. Through the above arrangement, the clamping member 132 can be clamped with the moving rod 124, thereby facilitating the connection convenience between the moving assembly 13 and the re-investment tube 12, so as to improve the connection efficiency and re-investment efficiency of the re-investment device 100.

[0089] Among them, the moving part 131 can be set as a mechanical arm with multiple degrees of freedom of movement; the clamping part 132 can be fixedly connected to the moving part 131 by bolt connection, welding, etc., which is not limited in this application.

[0090] Specifically, the clamping member 132 is connected to the front side of the moving member 131, so that the clamping member 132 can clamp the re-injection tube 12. The clamping opening 1321 is formed at one end of the clamping member 132 away from the moving member 131, and the clamping opening 1321 passes through one end of the clamping member 132 away from the moving member 131, so that the clamping opening 1321 is formed with an opening at one end of the clamping member 132 away from the moving member 131, and the moving rod 124 can be located in the clamping opening 1321 after passing through the opening, thereby realizing the connection between the clamping member 132 and the moving rod 124.

[0091] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. A re-feeding device for re-feeding materials into a crystal growth furnace; The crystal growth furnace comprises a pulling shaft and an auxiliary furnace chamber, wherein the pulling shaft is at least partially located in the auxiliary furnace chamber; It is characterized in that The reinvestment device comprises: A connecting member, the connecting member is connected to the lower part of the lifting shaft, and a clamping portion is formed at the lower part of the connecting member; A re-injection tube, in which materials are stored, and a clamping groove is formed on the upper part of the re-injection tube; A moving assembly, wherein the moving assembly has a degree of freedom of movement and can drive the re-injection tube to move so that the clamping portion is located in the clamping groove and is clamped with the clamping groove; A support assembly, wherein the support assembly is sleeved on the re-injection pipe and fixed to the re-injection pipe, and when the clamping portion is clamped with the clamping groove, the support assembly abuts against the inner wall of the auxiliary furnace chamber and forms a force acting on the inner wall of the auxiliary furnace chamber, and the force can fix the relative position between the auxiliary furnace chamber and the re-injection pipe.

2. The reinvestment device according to claim 1, characterized in that: The re-injection tube comprises a tube body and a connection block connected to the upper part of the tube body, and the upper part of the connection block is provided with the clamping groove.

3. The reinvestment device according to claim 2, characterized in that: The connecting member comprises a shaft portion which is substantially a shaft body and the clamping portion located at the lower side of the shaft body, wherein the clamping portion is fixedly connected to or integrally formed with the shaft portion; A through slot connected to the snap-fit ​​slot is formed on the upper portion of the connection block, and the shaft portion is at least partially inserted into the through slot, wherein a slot width of the through slot is greater than or equal to a diameter of the shaft portion and smaller than a maximum width of the snap-fit ​​portion along a radial direction of the shaft portion.

4. The reinvestment device according to claim 3, characterized in that: A section plane is defined, the axis of the shaft portion is located on the section plane, and the cross section of the clamping portion cut by the section plane is one of a triangle, a rectangle, a circle, a semicircle and a trapezoid; The outer contour of the clamping portion is consistent with the inner contour of the clamping groove.

5. The reinvestment device according to claim 2, characterized in that: The tube body is formed with an annular protrusion along its radial extension, and the support assembly is connected to the annular protrusion.

6. The reinvestment device according to claim 5, characterized in that: The support assembly includes a plurality of connecting rods and a plurality of annular support members distributed axially along the lifting shaft, the plurality of annular support members are all sleeved on the re-injection pipe, the plurality of annular support members are all abutted against the furnace wall of the auxiliary furnace chamber, each of the connecting rods is passed through the plurality of annular support members and is fixedly connected to the plurality of annular support members, and each of the connecting rods is also fixedly connected to the annular protrusion.

7. The reinvestment device according to claim 6, characterized in that: The support assembly further includes a buffer member installed on the annular support member, and the annular support member is abutted against the furnace wall of the auxiliary furnace chamber through the buffer member.

8. The reinvestment device according to claim 2, characterized in that: The re-injection tube further comprises a moving rod passing through the tube body and a blocking member for sealing the lower part of the tube body, wherein the blocking member is connected to the lower part of the moving rod, and the upper part of the moving rod is connected to the connecting block; The upper portion of the moving rod extends radially along the lifting shaft to form an abutment portion, and the abutment portion is located in the connecting block and is engaged with the connecting block.

9. The reinvestment device according to claim 8, characterized in that: The moving component includes a moving part with multiple degrees of freedom of movement and a clamping part located on the moving part, the clamping part is fixedly connected to the moving part, the clamping part is provided with a clamping opening, the maximum opening width of the clamping opening is greater than or equal to the diameter of the moving rod and is smaller than the minimum width of the connecting block along the radial direction of the moving rod.

10. A re-feeding device for re-feeding materials into a crystal growth furnace; The crystal growth furnace comprises a pulling shaft and an auxiliary furnace chamber, wherein the pulling shaft is at least partially located in the auxiliary furnace chamber; It is characterized in that The reinvestment device comprises: A connecting member, the connecting member is connected to the lower part of the lifting shaft, and a clamping groove is formed at the lower part of the connecting member; A re-injection tube, wherein materials are stored in the re-injection tube, and a clamping portion is formed on the upper portion of the re-injection tube; A moving assembly, wherein the moving assembly has a degree of freedom of movement and can drive the re-injection tube to move so that the clamping portion is located in the clamping groove and is clamped with the clamping groove; A support assembly, wherein the support assembly is sleeved on the re-injection pipe and fixed to the re-injection pipe, and when the clamping portion is clamped with the clamping groove, the support assembly abuts against the inner wall of the auxiliary furnace chamber and forms a force acting on the inner wall of the auxiliary furnace chamber, and the force can fix the relative position between the auxiliary furnace chamber and the re-injection pipe.

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