Clamp for semiconductor tail gas treatment device

Abstract

The utility model relates to a clamp for a semiconductor tail gas treatment device, which comprises semicircles, a third fixing block, a fourth fixing block, a driving plate and a fixing plate, the end parts of the two semicircles are rotationally connected through a rotating mechanism, and the ends, far away from the rotating mechanism, of the two semicircles are fixedly connected with the third fixing block and the fourth fixing block respectively. The driving plate is rotationally connected with the third fixing block, the fixing plate is rotationally connected with the driving plate, and the fixing plate is arranged on the outer side of the fourth fixing block in a sleeving mode and makes contact with the fourth fixing block when the two semicircular arcs are fixed. The clamp is used for fixing the cavity and the pipeline, flange connection is not needed, disassembly and assembly are convenient, and the problems that the fixing steps of the cavity and the pipeline are tedious, and consumed time is long are solved; the nut can rotate relative to the adjusting stud, so that the size of the interior of the hoop is adjusted to adapt to pipelines and cavities with different diameters within the error range.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor tail gas treatment device fixing, in particular to a clamp for a semiconductor tail gas treatment device. Background Art

[0002] In semiconductor tail gas treatment equipment, various chambers and pipelines such as gas mixing chambers and reaction chambers need to be fixed. The existing fixing method is flange connection, which has complicated steps and takes a long time, which is not conducive to the disassembly, assembly and maintenance of semiconductor tail gas treatment equipment. Utility Model Content

[0003] The utility model aims to solve the above-mentioned problem and provides a clamp for a semiconductor tail gas treatment device, which solves the problem that the chamber and pipeline fixing steps are complicated and time-consuming.

[0004] A clamp for a semiconductor tail gas treatment device comprises: a semicircular arc, a third fixed block, a fourth fixed block, a drive plate and a fixed plate, wherein the ends of the two semicircular arcs are rotatably connected via a rotating mechanism, and the ends of the two semicircular arcs away from the rotating mechanism are respectively fixedly connected to the third fixed block and the fourth fixed block, the drive plate is rotatably connected to the third fixed block, the fixed plate is rotatably connected to the drive plate, and the fixed plate is sleeved on the outside of the fourth fixed block and contacts the fourth fixed block when the two semicircular arcs are fixed.

[0005] Based on the above technical solution, the rotating mechanism includes a first fixed block, a second fixed block, a first shaft, an adjusting stud and a nut. The first fixed block and the second fixed block are respectively fixedly connected to the ends of different semicircular arcs, the end of the adjusting stud is fixedly connected to the side of the first shaft, the first shaft is rotatably connected to the second fixed block, the nut is threadedly connected to the adjusting stud, and the first fixed block is formed with a through hole, which is used to stop the nut.

[0006] Based on the above technical solution, the first fixing block includes a first accommodating groove body and a first outer convex plate, the first outer convex plate is located on the outside of the first accommodating groove body and is integrally formed with the first accommodating groove body, and the two semicircular arc ends are respectively located inside the first accommodating groove body, and one of the semicircular arcs is fixedly connected to the first accommodating groove body.

[0007] Based on the above technical solution, the through hole is located on the first outer convex plate, the nut is connected to the end of the adjusting stud away from the first axis, and a conical surface is formed on the end of the nut close to the through hole, and the conical surface contacts the inner wall of the through hole.

[0008] Based on the above technical solution, the fourth fixed block includes a second accommodating groove body and a second outer convex plate. The second outer convex plate on the outside of the second accommodating groove body is integrally formed, and the ends of the two semicircular arcs away from the rotating mechanism are respectively located in the second accommodating groove body, and one of the semicircular arcs is fixedly connected to the second accommodating groove body.

[0009] On the basis of the above technical solution, a third shaft is further included, the fixing plate is U-shaped, and both ends of the fixing plate are rotatably connected to the third shaft through the third shaft.

[0010] On the basis of the above technical solution, it also includes a second shaft, the end of the driving plate is rotatably connected to the third fixed block through the second shaft, and the third shaft is located in the middle of the driving plate.

[0011] Based on the above technical solution, a bent extension plate is formed at one end of the driving plate away from the second axis.

[0012] Based on the above technical solution, the driving plate contacts one semicircular arc when the two semicircular arcs are fixed.

[0013] Based on the above technical solution, a fixing groove is formed on the inner side of the semicircular arc, and the fixing groove is formed with an inner wall that gradually narrows from the inside to the outside.

[0014] The utility model has the following advantages: a clamp is used to fix the chamber and the pipeline, and flange connection is not required, which is convenient for disassembly and assembly, and solves the problem that the chamber and pipeline fixing steps are complicated and time-consuming; the nut can be rotated relative to the adjusting stud, thereby adjusting the size of the inside of the clamp to adapt to pipelines and chambers of different diameters within the error range. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0016] Figure 1 : A schematic diagram of the main structure of the utility model;

[0017] Figure 2 : A schematic diagram of the main cross-sectional structure of the utility model;

[0018] Figure 3 : Figure 2 A schematic diagram of the local enlarged structure at point A in the middle;

[0019] Figure 4 : A schematic diagram of the side cross-sectional structure of the utility model when it is fixed;

[0020] Figure 5 : Figure 4 Schematic diagram of the local enlarged structure at point B in the middle. DETAILED DESCRIPTION

[0021] The utility model is further described below with reference to the accompanying drawings and examples:

[0022] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0023] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] like Figures 1 to 5 As shown, this embodiment provides a clamp for a semiconductor exhaust treatment device, including: a semicircular arc 1, a third fixed block 4, a fourth fixed block 5, a drive plate 6 and a fixed plate 7, the ends of the two semicircular arcs 1 are rotatably connected by a rotating mechanism, and the ends of the two semicircular arcs 1 away from the rotating mechanism are respectively fixedly connected to the third fixed block 4 and the fourth fixed block 5, the drive plate 6 is rotatably connected to the third fixed block 4, the fixed plate 7 is rotatably connected to the drive plate 6, and the fixed plate 7 is sleeved on the outside of the fourth fixed block 5 and contacts with the fourth fixed block 5 when the two semicircular arcs 1 are fixed.

[0026] Based on the above technical solution, the rotating mechanism includes a first fixed block 2, a second fixed block 3, a first shaft 31, an adjusting stud 32 and a nut 33. The first fixed block 2 and the second fixed block 3 are respectively fixedly connected to the ends of different semicircular arcs 1, the end of the adjusting stud 32 is fixedly connected to the side of the first shaft 31, the first shaft 31 is rotatably connected to the second fixed block 3, the nut 33 is threadedly connected to the adjusting stud 32, and the first fixed block 2 is formed with a through hole 20, and the through hole 20 is used to stop the nut 33.

[0027] Based on the above technical solution, the first fixing block 2 includes a first accommodating groove body 21 and a first outer convex plate 22, the first outer convex plate 22 is located on the outside of the first accommodating groove body 21 and is integrally formed with the first accommodating groove body 21, and the ends of the two semicircular arcs 1 are respectively located inside the first accommodating groove body 21, and one of the semicircular arcs 1 is fixedly connected to the first accommodating groove body 21.

[0028] Based on the above technical solution, the through hole 20 is located on the first outer convex plate 22, the nut 33 is connected to the end of the adjusting stud 32 away from the first axis 31, and a conical surface 331 is formed on the end of the nut 33 close to the through hole 20, and the conical surface 331 contacts the inner wall of the through hole 20.

[0029] When adjusting the size of the clamp, the nut 33 is rotated on the stud 32 to change the distance between the conical surface 331 and the first axis 31 .

[0030] Based on the above technical solution, the fourth fixed block 5 includes a second accommodating groove body 51 and a second outer convex plate 52. The second outer convex plate 52 on the outer side of the second accommodating groove body 51 is integrally formed, and the ends of the two semicircular arcs 1 away from the rotating mechanism are respectively located in the second accommodating groove body 51, and one of the semicircular arcs 1 is fixedly connected to the second accommodating groove body 51.

[0031] Preferably, the second outer convex plate 52 is formed with a rounded corner on the outside, and the fixing plate 7 contacts the rounded corner during the downward rotation process, and then rotates to Figure 1 Location.

[0032] On the basis of the above technical solution, a third shaft 61 is further included, the fixing plate 7 is U-shaped, and both ends of the fixing plate 7 are rotatably connected to the third shaft 61 through the third shaft 61 .

[0033] On the basis of the above technical solution, it further includes a second shaft 41 , through which the end of the driving plate 6 is rotatably connected to the third fixing block 4 , and the third shaft 61 is located in the middle of the driving plate 6 .

[0034] Based on the above technical solution, a bent extension plate 62 is formed at one end of the driving plate 6 away from the second axis 41, and the extension plate 62 is bent toward the side away from the semicircular arc 1, thereby providing a force point for the human hand.

[0035] Based on the above technical solution, the driving plate 6 contacts one semicircular arc 1 when the two semicircular arcs 1 are fixed. Preferably, when fixed, the semicircular arc 1 is partially inserted into the driving plate 6, and the driving plate 6 presses the semicircular arc 1 from both sides, and fixes the semicircular arc 1 and the driving plate 6 by friction.

[0036] Based on the above technical solution, a fixing groove 10 is formed inside the semicircular arc 1 , and the fixing groove 10 is formed with an inner wall 101 which gradually narrows from the inside to the outside. Narrowing means that the distance between the two inner walls 101 gradually decreases.

[0037] Based on the above technical solution, the semicircular arc 1, the first fixing block 2, the second fixing block 3, the fourth fixing block 5, the driving plate 6 and the fixing plate 7 are made of metal, preferably stainless steel.

[0038] During use, the sealing ring 8 is put on the outside of the tubular member 9, and then the annular flanges 91 of the two tubular members 9 to be fixed are aligned and fitted. The semicircular arc 1 is rotated to expand the distance between the two semicircular arcs 1 at the end away from the rotating mechanism, and then the two semicircular arcs 1 are wrapped around the outside of the two annular flanges 91. The sealing ring 8 is moved to the connection between the two annular flanges 91, and then the two semicircular arcs 1 at the end away from the rotating mechanism move toward each other. The semicircular arc 1 presses the sealing ring 8 against the connection between the two annular flanges 91. At this time, the annular flange 91 is located in the fixing groove 10 and contacts the inner wall 101. The fixing plate 7 is rotated so that the fixing plate 7 and the inner wall 101 are in contact with each other. Figure 1 The right side surface of the second outer convex plate 52 is contacted, and then the driving plate 6 is rotated until the driving plate 6 contacts the semicircular arc 1, thereby fixing and sealing the two tubular members 9 together.

[0039] It should be noted that the tubular member 9 is in the chamber or pipeline of the semiconductor tail gas treatment device.

[0040] It should be noted that the sealing ring 8 may not be used depending on the situation.

[0041] When opening the clamp, the extension plate 62 is manually pulled to drive the driving plate 6 to rotate away from the semicircular arc 1, thereby separating the fixing plate 7 from the second outer convex plate 52, and finally removing the clamp from the outer side of the annular flange 91.

[0042] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A clamp for a semiconductor tail gas treatment device, characterized in that: include: A semicircular arc (1), a third fixed block (4), a fourth fixed block (5), a driving plate (6) and a fixed plate (7); the ends of the two semicircular arcs (1) are rotatably connected via a rotating mechanism; the ends of the two semicircular arcs (1) away from the rotating mechanism are respectively fixedly connected to the third fixed block (4) and the fourth fixed block (5); the driving plate (6) is rotatably connected to the third fixed block (4); the fixed plate (7) is rotatably connected to the driving plate (6); and the fixed plate (7) is sleeved on the outside of the fourth fixed block (5) and in contact with the fourth fixed block (5) when the two semicircular arcs (1) are fixed.

2. The clamp for semiconductor tail gas treatment device according to claim 1, characterized in that: The rotating mechanism comprises a first fixed block (2), a second fixed block (3), a first shaft (31), an adjusting stud (32) and a nut (33); the first fixed block (2) and the second fixed block (3) are respectively fixedly connected to the ends of different semicircular arcs (1); the end of the adjusting stud (32) is fixedly connected to the side of the first shaft (31); the first shaft (31) is rotatably connected to the second fixed block (3); the nut (33) is threadedly connected to the adjusting stud (32); the first fixed block (2) is formed with a through hole (20); the through hole (20) is used to stop the nut (33).

3. The clamp for semiconductor tail gas treatment device according to claim 2, characterized in that: The first fixing block (2) comprises a first receiving groove body (21) and a first outer convex plate (22), wherein the first outer convex plate (22) is located outside the first receiving groove body (21) and is integrally formed with the first receiving groove body (21), and the ends of the two semicircular arcs (1) are respectively located inside the first receiving groove body (21), and one of the semicircular arcs (1) is fixedly connected to the first receiving groove body (21).

4. The clamp for semiconductor tail gas treatment device according to claim 3, characterized in that: The through hole (20) is located on the first outer convex plate (22), the nut (33) is connected to the end of the adjusting stud (32) away from the first shaft (31), and a conical surface (331) is formed on the end of the nut (33) close to the through hole (20), and the conical surface (331) contacts the inner wall of the through hole (20).

5. The clamp for semiconductor tail gas treatment device according to claim 1, characterized in that: The fourth fixing block (5) comprises a second receiving groove body (51) and a second outer convex plate (52); the second outer convex plate (52) is integrally formed outside the second receiving groove body (51); one end of the two semicircular arcs (1) away from the rotating mechanism is respectively located in the second receiving groove body (51); one of the semicircular arcs (1) is fixedly connected to the second receiving groove body (51).

6. The clamp for semiconductor tail gas treatment device according to claim 5, characterized in that: It also includes a third shaft (61), the fixing plate (7) is U-shaped, and both ends of the fixing plate (7) are rotatably connected to the third shaft (61) via the third shaft (61).

7. The clamp for semiconductor tail gas treatment device according to claim 6, characterized in that: It also includes a second shaft (41), and the end of the driving plate (6) is rotatably connected to the third fixing block (4) via the second shaft (41), and the third shaft (61) is located in the middle of the driving plate (6).

8. The clamp for semiconductor tail gas treatment device according to claim 7, characterized in that: A bent extension plate (62) is formed at one end of the driving plate (6) away from the second shaft (41).

9. The clamp for semiconductor tail gas treatment device according to claim 1, characterized in that: The driving plate (6) contacts one semicircular arc (1) when the two semicircular arcs (1) are fixed.

10. The clamp for semiconductor tail gas treatment device according to claim 1, characterized in that: A fixing groove (10) is formed on the inner side of the semicircular arc (1), and the fixing groove (10) is formed with an inner wall (101) that gradually narrows from the inside to the outside.

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