Sample table supporting jig with vacuum adsorption function

Abstract

The utility model relates to the field of sample supporting equipment, and particularly discloses a sample table supporting jig with a vacuum adsorption function, the sample table supporting jig comprises a vacuum seat, a microwell plate and a vacuum pump, the vacuum seat is of a box-shaped structure with an opening in the top, a plurality of evenly-distributed tiny holes are formed in the microwell plate, the microwell plate is embedded in the opening in the top of the vacuum seat, and the vacuum pump is arranged in the vacuum seat. The vacuum pump is communicated with the interior of the vacuum seat, the vacuum pump is driven to extract air from the interior of the vacuum seat, and air flows into the interior of the vacuum seat from pores of the microplate to form an adsorption effect, so that the sample table is adsorbed on the surface of the microplate, and the stability of the sample table is improved. The adsorption device has the advantages of stable adsorption, simple structure and convenience in use.

Description

Technical Field

[0001] The present application relates to the field of sample support equipment, and in particular to a sample stage support fixture with a vacuum adsorption function. Background Art

[0002] Secondary Ion Mass Spectrometry (SIMS) bombards the sample surface with a high-energy primary ion beam, causing atoms or atomic groups on the sample surface to absorb energy and sputter from the surface to produce secondary particles. These charged particles pass through a mass analyzer to obtain a spectrum of information about the sample surface.

[0003] Before analyzing the samples using a secondary mass spectrometer, the samples need to be loaded onto a sample stage. However, due to the small size and light weight of the sample stage, the sample stage can easily slide on the desktop during the process of loading the samples onto the sample stage, affecting the sample loading process. Utility Model Content

[0004] In order to improve the stability of the sample stage when loading samples, the present application provides a sample stage supporting fixture with a vacuum adsorption function, which has the advantages of stable adsorption, simple structure and easy use.

[0005] The sample stage support fixture with vacuum adsorption function provided in this application adopts the following technical solution:

[0006] A sample stage supporting fixture with a vacuum adsorption function comprises a vacuum seat, a microporous plate and a vacuum pump, wherein the vacuum seat is a box-shaped structure with an opening at the top, an installation opening is provided on the inner side wall of the vacuum seat located at the top opening, the microporous plate is embedded in the installation opening, an exhaust hole is provided on the side wall of the vacuum seat, an exhaust pipe is connected to the vacuum seat at the exhaust hole, and the exhaust pipe is connected to the vacuum pump.

[0007] By adopting the above technical solution, the vacuum seat is evacuated through the vacuum pipe using a vacuum pump, and the air flows into the vacuum seat from the pores of the microporous plate, thereby forming an adsorption effect on the surface of the microporous plate. The sample stage is placed on the microporous plate, and the sample stage can be adsorbed on the microporous plate, which can effectively avoid the movement of the sample stage when loading the sample, thereby improving the convenience and efficiency of loading the sample; and because the pores of the microporous plate are small and uniform, the adsorption effect formed on the surface of the microporous plate is relatively uniform, and the sample stage can be stably adsorbed at any place on the microporous plate; in addition, the sample stage can be removed from the microporous plate by turning off the vacuum pump, which is convenient to use.

[0008] Optionally, the microporous plate is a microporous ceramic plate.

[0009] By adopting the above technical solution, the microporous ceramic plate has high strength, wear resistance, chemical stability and corrosion resistance, and can meet the needs of long-term use; at the same time, ceramics are insulating materials and can effectively dissipate static electricity.

[0010] Optionally, the top of the micro-well plate is flush with the top of the vacuum seat, a mounting frame is installed on the top of the vacuum seat, and the edge of the micro-well plate is clamped between the mounting frame and the vacuum seat.

[0011] By adopting the above technical solution and utilizing the clamping cooperation between the mounting frame and the vacuum seat, the stability of the microplate on the top of the vacuum seat can be improved, the shaking of the microplate can be avoided, and the convenience and accuracy of sample loading can be further improved; at the same time, the mounting frame and the vacuum seat form a sealing effect on the side of the microplate to avoid air from entering through the gap between the microplate and the vacuum seat, thereby improving the adsorption effect on the sample stage.

[0012] Optionally, a breathable film is provided on the top of the microporous plate, and the breathable film is clamped between the mounting frame and the microporous plate.

[0013] By adopting the above technical solution, the adsorption pressure on the surface of the microporous plate is dispersed by using a breathable film, so as to avoid uneven adsorption caused by deformation of the pores of the microporous plate after long-term use; at the same time, the vacuum leakage can be reduced, and the adsorption effect can be further improved.

[0014] Optionally, the mounting frame is connected to the vacuum seat via bolts.

[0015] By adopting the above technical solution, the convenience of installing and disassembling the installation frame is improved through bolt connection, which facilitates the updating and maintenance of the breathable film and the microporous plate.

[0016] Optionally, a positioning plate is fixed to the bottom of the vacuum seat, and the positioning plate is used to fix the vacuum seat on the desktop.

[0017] By adopting the above technical solution, the positioning plate is used to improve the stability of the vacuum seat on the desktop, so as to avoid vibration of the vacuum pump when working, which may affect the stability of the vacuum seat.

[0018] Optionally, the positioning plate is provided with a screw hole, and a bolt is passed through the screw hole and screwed into the table top.

[0019] By adopting the above technical solution, the fixing method of the bolt connection is stable and detachable, and the setting cost is low.

[0020] Optionally, the positioning plate is made of magnetic material and is used to be adsorbed on the desktop.

[0021] By adopting the above technical solution, the position of the vacuum seat is more easily adjusted by magnetic attraction, which improves the convenience of movement while ensuring the stability of the vacuum seat.

[0022] Optionally, the inner wall of the air extraction hole is provided with an internal thread, and the air extraction pipe cooperates with the air extraction hole thread.

[0023] By adopting the above technical solution and utilizing the threaded cooperation between the air extraction pipe and the air extraction hole, the sealing performance of both can be improved, thereby improving the adsorption effect on the surface of the microporous plate.

[0024] In summary, the present application includes at least one of the following beneficial technical effects:

[0025] 1. Use a vacuum pump to evacuate the vacuum seat through the vacuum pipe, and the air will flow into the vacuum seat from the pores of the microplate, thereby forming an adsorption effect on the surface of the microplate. The sample stage can be placed on the microplate, and the sample stage can be adsorbed on the microplate, which can effectively avoid the movement of the sample stage when loading the sample, and improve the convenience and efficiency of loading the sample; and because the pores of the microplate are small and uniform, the adsorption effect formed on the surface of the microplate is relatively uniform, and the sample stage can be stably adsorbed at any place on the microplate; in addition, the sample stage can be removed from the microplate by turning off the vacuum pump, which is convenient to use;

[0026] 2. The clamping cooperation between the mounting frame and the vacuum seat can improve the stability of the microplate on the top of the vacuum seat, prevent the microplate from shaking, and further improve the convenience and accuracy of sample loading; at the same time, the mounting frame and the vacuum seat form a sealing effect around the microplate to prevent air from entering from the gap between the microplate and the vacuum seat, thereby improving the adsorption effect on the sample stage;

[0027] 3. Use breathable film to disperse the adsorption pressure on the surface of the microporous plate to avoid uneven adsorption caused by deformation of the pores of the microporous plate after long-term use; at the same time, it can reduce vacuum leakage and further improve the adsorption effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application;

[0029] Figure 2 This is an exploded schematic diagram showing a microplate according to an embodiment of the present application.

[0030] Figure numerals: 1. vacuum seat; 2. microporous plate; 3. vacuum pump; 4. mounting port; 5. exhaust hole; 6. exhaust pipe; 7. mounting frame; 8. breathable film; 9. positioning plate; 10. screw hole. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1-2 This application is described in further detail.

[0032] The present application discloses a sample stage support fixture with a vacuum adsorption function. Figure 1, including a vacuum seat 1, a microporous plate 2 and a vacuum pump 3. The vacuum seat 1 is a rectangular box-shaped structure with an opening at the top, and the vacuum seat 1 has an installation opening 4 at the inner side wall of the top opening. A number of uniform tiny pores are formed inside the microporous plate 2. The microporous plate 2 matches the installation opening 4 in shape and is embedded in the installation opening 4. The microporous plate 2 blocks the top opening of the vacuum seat 1. The microporous plate 2 and the vacuum seat 1 form a vacuum cavity. At the same time, a vacuum hole 5 is penetrated through one side wall of the vacuum seat 1. The vacuum hole 5 is connected to the vacuum cavity. The vacuum seat 1 is connected to an exhaust pipe 6 at the exhaust hole 5, and the end of the exhaust pipe 6 away from the exhaust hole 5 is connected to the vacuum pump 3.

[0033] During specific operation, the vacuum pump 3 draws air from the vacuum chamber through the exhaust pipe 6, the air pressure in the vacuum chamber decreases, and the air flows into the vacuum seat 1 from the pores of the microporous plate 2, thereby forming an adsorption effect on the surface of the microporous plate 2. By placing the sample stage on the microporous plate 2, the sample stage can be stably adsorbed on the surface of the microporous plate 2, thereby avoiding the movement of the sample stage when loading the sample.

[0034] In this embodiment, the microporous plate 2 is a microporous ceramic plate, which has high strength, wear resistance, chemical stability, and corrosion resistance, and can meet the needs of long-term use; at the same time, ceramics are insulating materials and can effectively dissipate static electricity.

[0035] Reference Figure 1 , the top of the micro-well plate 2 is kept flush with the top of the vacuum seat 1, that is, the micro-well plate 2 and the vacuum seat 1 form a complete rectangular box body with a cavity inside, and the top of the vacuum seat 1 is fitted with a mounting frame 7, which is a rectangular frame, and the outer wall of the mounting frame 7 is flush with the outer wall of the vacuum seat 1, and the inner wall of the mounting frame 7 extends to the top of the edge of the micro-well plate 2, and the edges around the micro-well plate 2 are clamped between the vacuum seat 1 and the mounting frame 7. The mounting frame 7 and the vacuum seat 1 form a sealing effect around the micro-well plate 2, and when the vacuum pump 3 is evacuated, air is prevented from rushing in from the gap between the micro-well plate 2 and the vacuum seat 1, thereby improving the adsorption effect.

[0036] In this embodiment, the mounting frame 7 and the vacuum seat 1 are connected by bolts, which is stable and easy to install and disassemble.

[0037] Further, refer to Figure 1 A breathable film 8 is disposed on the top of the microporous plate 2. The breathable film 8 is attached to the upper surface of the microporous plate 2 and is consistent with the size of the microporous plate 2. The mounting frame 7 clamps the edges of the breathable film 8 between the microporous plate 2 and the mounting frame 7 to fix the breathable film 8. The breathable film 8 can disperse the adsorption pressure on the surface of the microporous plate 2 to avoid uneven adsorption caused by deformation of the pores of the microporous plate 2 after long-term use. At the same time, the breathable film 8 can reduce vacuum leakage and improve the adsorption effect.

[0038] Further, refer to Figure 1The inner wall of the air extraction hole 5 is provided with an internal thread, and one end of the air extraction pipe 6 connected to the air extraction hole 5 is provided with an external thread, and the air extraction pipe 6 is threadedly matched with the air extraction hole 5. The structure of the threaded match between the two can improve the convenience of installing the air extraction pipe 6, and at the same time, the threaded connection structure has good sealing performance, which can prevent air leakage at the connection between the two, and improve the adsorption effect on the surface of the microporous plate 2.

[0039] Reference Figure 1 A positioning plate 9 is fixedly provided at the bottom of the vacuum seat 1, and the positioning plate 9 extends from the four sides of the vacuum seat 1. The positioning plate 9 is used to stably fix the vacuum seat 1 on the desktop to improve the stability of the vacuum seat 1 on the desktop and avoid displacement of the vacuum seat 1 due to vibration of the vacuum pump 3.

[0040] In a further embodiment, referring to Figure 2 The positioning plate 9 is provided with screw holes 10 at four corners, and bolts are passed through the screw holes 10 and screwed into the table top. The above structure is stably connected and detachable, and can effectively improve the stability of the vacuum seat 1.

[0041] In another further embodiment, the positioning plate 9 can be made of magnetic material. When the table top on which the supporting jig is placed is made of metal, the magnetic positioning plate 9 can be directly adsorbed on the table top, thereby improving the stability of the supporting jig and making it more convenient to adjust the position of the supporting jig.

[0042] The implementation principle of a sample stage supporting fixture with a vacuum adsorption function disclosed in an embodiment of the present application is: driving the vacuum pump 3 to extract the air in the vacuum chamber, generating an air pressure difference inside and outside the vacuum chamber, and the air flows into the vacuum chamber from the pores of the microporous plate 2, thereby forming an adsorption effect on the surface of the microporous plate 2, adsorbing the sample stage above the microporous plate 2, and improving the stability of the sample stage.

[0043] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A sample stage support fixture with vacuum adsorption function, characterized in that: The invention comprises a vacuum seat (1), a microporous plate (2) and a vacuum pump (3); the vacuum seat (1) is a box-shaped structure with an opening at the top; the vacuum seat (1) is provided with a mounting opening (4) on the inner side wall of the top opening; the microporous plate (2) is embedded in the mounting opening (4); a plurality of uniform tiny pores are formed inside the microporous plate (2); a side wall of the vacuum seat (1) is provided with an exhaust hole (5); the vacuum seat (1) is connected to an exhaust pipe (6) at the exhaust hole (5); and the exhaust pipe (6) is connected to the vacuum pump (3).

2. The sample stage support fixture with vacuum adsorption function according to claim 1, characterized in that: The microporous plate (2) is a microporous ceramic plate.

3. The sample stage support fixture with vacuum adsorption function according to claim 1, characterized in that: The top of the microporous plate (2) is flush with the top of the vacuum seat (1); a mounting frame (7) is mounted on the top of the vacuum seat (1); and the edge of the microporous plate (2) is clamped between the mounting frame (7) and the vacuum seat (1).

4. The sample stage support fixture with vacuum adsorption function according to claim 3, characterized in that: A breathable film (8) is arranged on the top of the microporous plate (2), and the breathable film (8) is clamped between the mounting frame (7) and the microporous plate (2).

5. The sample stage support fixture with vacuum adsorption function according to claim 3, characterized in that: The mounting frame (7) is connected to the vacuum seat (1) via bolts.

6. The sample stage support fixture with vacuum adsorption function according to claim 1, characterized in that: A positioning plate (9) is fixed to the bottom of the vacuum seat (1), and the positioning plate (9) is used to fix the vacuum seat (1) on the desktop.

7. The sample stage support fixture with vacuum adsorption function according to claim 6, characterized in that: The positioning plate (9) is provided with a screw hole (10), and a bolt is passed through the screw hole (10) and screwed into the table top.

8. The sample stage support fixture with vacuum adsorption function according to claim 6, characterized in that: The positioning plate (9) is made of magnetic material and is used for adsorbing on the desktop.

9. The sample stage support fixture with vacuum adsorption function according to claim 1, characterized in that: The inner wall of the air extraction hole (5) is provided with an internal thread, and the air extraction pipe (6) is threadably matched with the air extraction hole (5).

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