Wafer box switching device
By using restriction components, fixing components and induction sensors in wafer cassette fixing devices, combined with transition components, the problems of complex fixation and difficulty in size identification in the prior art are solved, and stable fixation of wafer cassettes of different sizes is achieved. and quick identification, simplifying operational processes and improving equipment flexibility.
Patent Information
- Application Number
- CN202323659504.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-29
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2033-12-29
AI Technical Summary
The prior art is complicated when fixing wafer cassettes and cannot intuitively judge the size of the wafer cassettes, making it difficult to achieve efficient and fast fixing and size identification.
A device including a base, a restriction component, a fixed component and a plurality of induction sensors is designed. By restricting the movement of the wafer cassette, the fixed component is further fixed, the induction sensor recognizes and feedbacks the size of the wafer cassette, and uses transition components to achieve different Compatibility of size box.
The stable fixation and rapid identification of wafer cassettes of different sizes are achieved, ensuring stable position during processing, simplifying the operation process and improving the flexibility of the equipment.
Smart Images
Figure CN222260989U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a wafer box switching device, belonging to the technical field of wafer box fixing equipment. Background Art
[0002] At present, with the rapid development of technologies such as 5G, Internet of Things, and artificial intelligence, the demand for the semiconductor industry continues to grow. In today's automated operations, the bearing and fixing of wafer boxes has become a problem that needs attention. After searching, it was found that the Chinese patent with publication number CN216547443U discloses a wafer box fixing platform. In this patent, a compatible groove is provided on the tail of the wafer box corresponding to the limit compatible block. The wafer box is pushed to the floor so that the compatible groove at the tail of the wafer box is matched with the limit compatible block for positioning, and the card block is moved so that the card blocks on both sides are stuck on both sides of the wafer box. Finally, the card block is fixed to the mounting slot through the fixing hole with bolts; a pressure sensor is provided between the card blocks on the mounting slot. When the wafer box is placed on the mounting slot, the pressure sensor detects the wafer box, which can inform the operator that the wafer box is in place and can proceed to the next step. However, the fixed installation method of the patent is relatively complicated, and the size of the wafer box cannot be intuitively judged. Summary of the invention
[0003] The technical problem to be solved by the utility model is to overcome the defects of the prior art and provide a wafer box switching device, which can well fix the wafer box, is efficient and fast, and can also detect and identify the size of the wafer box.
[0004] In order to solve the above technical problems, the technical solution of the utility model is: a wafer box switching device, comprising:
[0005] Base;
[0006] A limiting component, the limiting component is mounted on the base, and the limiting component is suitable for limiting the movement of the wafer box;
[0007] A fixing component, the fixing component comprising a fixing seat, the fixing seat being fixedly mounted on the base;
[0008] Multiple inductive sensors are installed on the base, and the multiple inductive sensors are located at different positions on the base. Each inductive sensor at a different position corresponds to identifying a wafer box of a certain size. The inductive sensors are suitable for feeding back information about the identified wafer box size to the host computer.
[0009] Furthermore, the base is provided with a through hole, and the sensing column of the sensing sensor is suitable for passing through the through hole.
[0010] Furthermore, in order to ensure that the wafer box maintains a stable position during processing and avoids deviation, the limiting component includes a limiting bottom plate, and the limiting bottom plate is longitudinally mounted on the base.
[0011] Furthermore, a rear limit block device is provided on the limiting base plate, and the rear limit block device includes a rear limit block. A front limit block is also installed on the base, and the rear limit block is installed on the limiting base plate. The front limit block and the rear limit block are suitable for limiting the forward and backward movement of the wafer box.
[0012] Furthermore, a left and right limiting device is also provided on the limiting base plate, and the left and right limiting device includes a left limit block and a right limit block. The left limit block is installed on the left side of the limiting base plate, and the right limit block is installed on the right side of the limiting base plate. The left limit block and the right limit block are arranged opposite to each other.
[0013] Furthermore, a slide groove is also provided on the limiting bottom plate.
[0014] Furthermore, in order to achieve compatibility with wafer boxes of different sizes, a wafer box switching device also includes a transition component, which is suitable for being installed on the base and clamped with the limiting base plate, and the transition component includes a transition base plate and a transition limiting plate, and a first limit block and a transition column are installed on the transition base plate, and the transition column is suitable for limiting the movement of the wafer box.
[0015] Furthermore, a second limit block, a third limit block and a fourth limit block are installed on the transition limit plate, the second limit block is arranged opposite to the third limit block, the third limit block and the fourth limit block are suitable for limiting the left and right movement of the wafer box, and the first limit block and the second limit block are suitable for limiting the forward and backward movement of the wafer box.
[0016] Furthermore, in order to fix and stabilize the transition component, a slide plate is installed on the transition limiting plate, the slide plate is adapted to the slide groove, and the slide plate is clamped in the slide groove.
[0017] Furthermore, in order to facilitate the holding operation, the transition limiting plate is also provided with a handle, and the handle is suitable for conveniently moving the position of the transition limiting plate.
[0018] After adopting the above technical solution, the utility model has the following beneficial effects:
[0019] In the present invention, an 8-inch wafer box is placed on the base, and the inductive sensor senses the size of the wafer box and feeds back to the host computer to obtain the size of the wafer box; the limiting component limits the front and back and left and right movement of the wafer box to ensure that the wafer box maintains a stable position during the installation process, and the fixing component further fixes the wafer box. When it is necessary to install and fix a 4-inch or 6-inch wafer box, a transition component is required, and the 4-inch or 6-inch wafer box is placed on the transition base plate, and the 4-inch or 6-inch wafer box is limited and fixed by the first limit block, the second limit block, the third limit block and the fourth limit block. At this time, the transition limit plate can be moved by the handle to make the transition component and the limit base plate snap-fit, the inductive sensor senses the size of the wafer box and feeds back to the host computer to obtain the size of the wafer box, the transition component realizes compatibility with wafer boxes of different sizes, and the cooperation of the slide plate and the slide groove fixes and stabilizes the transition component to ensure the smooth switching process of the wafer box. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 It is a structural schematic diagram of a 4-inch or 6-inch wafer box of the utility model in use;
[0021] Figure 2 This is a schematic diagram of the structure of the 8-inch wafer box of the utility model when in use;
[0022] Figure 3 It is a connection diagram of the limiting component and the fixing component of the utility model;
[0023] Figure 4 It is a structural schematic diagram of the transition component of the utility model;
[0024] Figure 5 It is a connection diagram of the limiting component, the fixing component and the transition component of the utility model. DETAILED DESCRIPTION
[0025] In order to make the content of the utility model more clearly understood, the utility model is further described in detail below based on specific embodiments and in conjunction with the accompanying drawings.
[0026] like Figure 1-5 As shown, a wafer box switching device includes:
[0027] Base 1;
[0028] A limiting component 2, which is mounted on the base 1 and is suitable for limiting the movement of the wafer box;
[0029] A fixing component, the fixing component includes a fixing seat 31, and the fixing seat 31 is fixedly mounted on the base 1;
[0030] A plurality of sensing sensors 41 are installed on the base 1, and the plurality of sensing sensors 41 are located at different positions on the base 1, and the sensing sensors 41 at each different position correspond to identifying a wafer box of a certain size, and the sensing sensors 41 are suitable for feeding back information of the identified wafer box size to the host computer.
[0031] Furthermore, a through hole 11 is provided on the base 1 , and the sensing column 42 of the sensing sensor 41 is suitable for passing through the through hole 11 .
[0032] In this embodiment, the sensing sensors 41 are divided into three groups, namely, 4-inch sensing sensors corresponding to 4-inch wafer boxes, 6-inch sensing sensors corresponding to 6-inch wafer boxes, and 8-inch sensing sensors corresponding to 8-inch wafer boxes. They are distributed on the base 1 according to the size of the wafer boxes. The host computer is a PC or a central control system. When the wafer box is placed, it will be sensed by the sensing column 42 of the sensing sensor 41 of the corresponding size. At this time, the corresponding sensing sensor 41 will feedback a signal to the host computer, and the host computer can display the corresponding information, so that the size of the wafer box can be intuitively known.
[0033] In this embodiment, the induction sensor 41 may specifically be a proximity sensor, which is a prior art and will not be described in detail in this embodiment.
[0034] Specifically, Figure 3 As shown, in this embodiment, there are six through holes 11 in total, and one group of inductive sensors corresponds to two through holes 11 .
[0035] Specifically, Figure 2 As shown, the limiting component 2 includes a limiting bottom plate 21 , and the limiting bottom plate 21 is longitudinally mounted on the base 1 .
[0036] Specifically, Figure 3 As shown, a rear limit block device is provided on the limiting bottom plate 21, and the rear limit block device includes a rear limit block 23. A front limit block 22 is also installed on the base 1, and the rear limit block 23 is installed on the limiting bottom plate 21. The front limit block 22 and the rear limit block 23 are suitable for limiting the front and rear movement of the wafer box;
[0037] Specifically, Figure 3 As shown, the limiting bottom plate 21 is also provided with a left and right limiting device, which includes a left limiting block 24 and a right limiting block 25. The left limiting block 24 is installed on the left side of the limiting bottom plate 21, and the right limiting block 25 is installed on the right side of the limiting bottom plate 21. The left limiting block 24 and the right limiting block 25 are arranged opposite to each other.
[0038] Specifically, Figure 3 As shown, a slide groove 26 is also provided on the limiting bottom plate 21 .
[0039] Specifically, Figure 5 As shown, a wafer box switching device also includes a transition component, which is suitable for being installed on the base 1 and clamped with the limiting bottom plate 21. The transition component includes a transition bottom plate 51 and a transition limiting plate 52. A first limit block 53 and a transition column 54 are installed on the transition bottom plate 51. The transition column 54 is suitable for limiting the movement of the wafer box.
[0040] Specifically, Figure 5 As shown, the transition limiting plate 52 is equipped with a second limit block 55, a third limit block 56 and a fourth limit block 57, the second limit block 55 and the third limit block 56 are arranged opposite to each other, the third limit block 56 and the fourth limit block 57 are suitable for limiting the left and right movement of the wafer box, and the first limit block 53 and the second limit block 55 are suitable for limiting the front and back movement of the wafer box. In this embodiment, the transition limiting plate 52 has the functions of improving positioning accuracy, preventing collision, and enhancing stability.
[0041] Specifically, Figure 5 As shown, a slide plate 58 is installed on the transition limiting plate 52, and the slide plate 58 is adapted to the slide slot 26. The slide plate 58 is clamped in the slide slot 26. In this embodiment, the setting of the slide plate 58 being adapted to the slide slot 26 realizes smooth switching and stable fixation of wafer boxes of different sizes.
[0042] Specifically, Figure 5 As shown, a handle 59 is also provided on the transition limiting plate 52. The handle 59 is suitable for conveniently moving the position of the transition limiting plate 52. The handle 59 can conveniently move the transition limiting plate 52 to achieve switching of wafer boxes of different sizes, thereby improving the flexibility of the equipment.
[0043] In this embodiment, an 8-inch wafer box is placed on the base 1, and the inductive sensor senses the size of the wafer box and feeds back to the host computer to obtain the size of the wafer box; the limiting component 2 limits the front and back and left and right movement of the wafer box to ensure that the wafer box maintains a stable position during the installation process, and the fixing component further fixes the wafer box. When it is necessary to install and fix a 4-inch or 6-inch wafer box, a transition component is required. The 4-inch or 6-inch wafer box is placed on the transition base plate, and the 4-inch or 6-inch wafer box is limited and fixed by the first limit block 53, the second limit block 55, the third limit block 56 and the fourth limit block 57. At this time, the transition limit plate 52 can be moved by the handle 59 to make the transition component and the limit base plate 21 snap-fit, and the inductive sensor senses the size of the wafer box and feeds back to the host computer to obtain the size of the wafer box. The transition component realizes compatibility with wafer boxes of different sizes, and the slide plate 58 and the slide groove 26 cooperate to fix and stabilize the transition component to ensure the smooth progress of the wafer box switching process.
[0044] The specific embodiments described above further illustrate the technical problems, technical solutions and beneficial effects solved by the present invention. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A wafer box switching device, characterized in that: include: Base (1); A limiting component (2), the limiting component being mounted on the base (1), the limiting component (2) being suitable for limiting the movement of the wafer box; A fixing component, the fixing component comprising a fixing seat (31), the fixing seat (31) being fixedly mounted on the base (1); A plurality of inductive sensors (41), wherein the inductive sensors (41) are mounted on the base (1), and the plurality of inductive sensors (41) are located at different positions on the base (1), and each inductive sensor (41) at a different position corresponds to identifying a wafer box of a certain size, and the inductive sensors (41) are suitable for feeding back information of the identified wafer box size to a host computer.
2. A wafer box switching device according to claim 1, characterized in that: The base (1) is provided with a through hole (11), and the sensing column (42) of the sensing sensor (41) is suitable for passing through the through hole (11).
3. A wafer box switching device according to claim 1, characterized in that: The limiting component (2) comprises a limiting bottom plate (21), and the limiting bottom plate (21) is longitudinally mounted on the base (1).
4. A wafer box switching device according to claim 3, characterized in that: The limiting bottom plate (21) is provided with a rear limit block device, the rear limit block device comprising a rear limit block (23); the base (1) is also provided with a front limit block (22), the rear limit block (23) is mounted on the limiting bottom plate (21), and the front limit block (22) and the rear limit block (23) are suitable for limiting the forward and backward movement of the wafer box.
5. The wafer box switching device according to claim 3, characterized in that: The limiting bottom plate (21) is also provided with a left and right limiting device, the left and right limiting device comprising a left limiting block (24) and a right limiting block (25), the left limiting block (24) being mounted on the left side of the limiting bottom plate (21), the right limiting block (25) being mounted on the right side of the limiting bottom plate (21), the left limiting block (24) being arranged opposite to the right limiting block (25).
6. The wafer box switching device according to claim 3, characterized in that: The limiting bottom plate (21) is also provided with a sliding groove (26).
7. A wafer box switching device according to claim 6, characterized in that: Also includes: A transition component, the transition component is suitable for being mounted on the base (1) and being clamped with the limiting base plate (21), the transition component comprising a transition base plate (51) and a transition limiting plate (52), a first limit block (53) and a transition column (54) being mounted on the transition base plate (51), the transition column (54) being suitable for limiting the movement of the wafer box.
8. The wafer box switching device according to claim 7, characterized in that: A second limit block (55), a third limit block (56) and a fourth limit block (57) are mounted on the transition limit plate (52); the second limit block (55) is arranged opposite to the third limit block (56); the third limit block (56) and the fourth limit block (57) are suitable for limiting left and right movement of the wafer box; and the first limit block (53) and the second limit block (55) are suitable for limiting front and back movement of the wafer box.
9. The wafer box switching device according to claim 7, characterized in that: A slide plate (58) is mounted on the transition limiting plate (52), the slide plate (58) is adapted to the slide groove (26), and the slide plate (58) is clamped in the slide groove (26).
10. The wafer box switching device according to claim 7, characterized in that: The transition limiting plate (52) is also provided with a handle (59), and the handle (59) is suitable for conveniently moving the position of the transition limiting plate (52).