Magnetic type gripper module
Through the design of the magnetic gripper module, the installation guide groove and magnetic suction nozzle assembly are used to achieve rapid position adjustment of the suction nozzle assembly, solving the long time-consuming process of grabbing frames of different specifications and models in the prior art. Problems, improving work efficiency.
Patent Information
- Application Number
- CN202323273048.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-01
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2033-12-01
AI Technical Summary
In semiconductor processing equipment, the prior art requires the disassembly and adjustment of the nozzle assembly when grabbing etching frames of different specifications and models, which takes a long time and low working efficiency.
A magnetic gripper module is designed, using mounting guide grooves and magnetic nozzle assembly, through magnetic embedding and screw mechanism, the nozzle assembly can be quickly adjusted and adapted to different specifications and models of etching frames without additional requirements. tool.
It greatly improves work efficiency, simplifies the adjustment process, saves a lot of time, and can quickly match etched frames of different specifications and models.
Smart Images
Figure CN222261005U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor chip processing equipment, and in particular relates to a magnetic suction gripper module for grabbing an etching frame. Background Art
[0002] In semiconductor processing equipment, a gripper module with a nozzle is often used to grab the etching frame. The nozzle assembly on the conventional gripper module is fixed on the nozzle mounting seat by fasteners. When grabbing etching frames of different specifications and models, an auxiliary wrench is required for disassembly and adjustment. It takes a long time and has low work efficiency. Summary of the invention
[0003] The utility model aims to address the defects of the prior art and provide a magnetic gripper module that can quickly disassemble and adjust the position of a nozzle assembly and is suitable for grabbing etching frames of different specifications and models.
[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions:
[0005] The magnetic gripper module is characterized in that: it includes a nozzle mounting bracket, a gripper fixing seat, and a vacuum pipeline assembly; the nozzle mounting bracket has a mounting guide groove, and a plurality of magnetic suction nozzle assemblies are arranged in the mounting guide groove; the nozzle mounting bracket is arranged on the gripper fixing seat, and the vacuum pipeline assembly is connected to the magnetic suction nozzle assembly to provide negative pressure. The magnetic suction nozzle assembly is stably embedded and adsorbed in the mounting guide groove by magnetic force. When replacing etching frames of different specifications and models, it is only necessary to push the magnetic suction nozzle assembly in the mounting guide groove to adjust the position of the magnetic suction nozzle assembly without using other tools, which greatly improves the work efficiency.
[0006] Its further features are: there are two nozzle mounting brackets, which are arranged opposite to each other and connected by screw threads; the gripper fixing seat includes a guide rail and a fixing block arranged on the guide rail, and the nozzle mounting bracket is arranged on the guide rail through the fixing block. The two nozzle mounting brackets arranged opposite to each other can ensure that the magnetic suction nozzle assembly can stably grasp the two sides of the etching frame, and at the same time, by adjusting the positions of the two nozzle mounting brackets on the guide rail, it can adapt to grasping etching frames of different specifications and models.
[0007] Further: the vacuum pipeline assembly includes a manifold, a vacuum main pipe connector, a plurality of gas connectors and a guide rail mounting seat; the plurality of gas connectors are arranged on the manifold, the vacuum main pipe connector is arranged at one end of the manifold; the guide rail mounting seat is cross-fixed on the manifold, and the guide rail is fixed on the guide rail mounting seat. The vacuum main pipe provides negative pressure for a plurality of magnetic suction nozzle assemblies through the manifold and the plurality of gas connectors for sucking the etching frame.
[0008] Further: the guide rail is fixedly connected to the guide rail mounting seat through a clamping seat. The entire magnetic gripper module is fixedly connected to the robot through the clamping seat.
[0009] Its further feature is that the magnetic suction nozzle assembly includes a magnet, a nozzle fixing part, a nozzle and a nozzle air joint; the magnet is arranged on the nozzle fixing part; the nozzle is connected to the nozzle air joint and is fixedly arranged on the nozzle fixing part.
[0010] Preferably, an adjusting knob is provided on the screw rod, and the required width can be achieved by adjusting the knob to adapt to etching frames of different widths.
[0011] The utility model cooperates with the magnetic suction nozzle assembly and the installation guide groove to conveniently adjust the position of the suction nozzle assembly without the need for additional tools. In addition, the distance between the two sets of suction nozzle assemblies is adjusted by the screw mechanism, so that the grabbing of etching frames of different specifications and models can be quickly matched. The utility model has a simple structure, can save a lot of adjustment time, and greatly improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] FIG1 is a schematic diagram of the structure of the utility model.
[0013] FIG2 is a schematic diagram of the exploded structure of the utility model.
[0014] FIG. 3 is a schematic diagram of the nozzle mounting bracket structure.
[0015] FIG. 4 is a schematic diagram of the structure of the magnetic suction nozzle assembly. DETAILED DESCRIPTION
[0016] like Figure 1-4 As shown, a magnetic gripper module includes two nozzle mounting brackets 1, a gripper fixing seat 5, and a vacuum pipeline assembly 6.
[0017] Two nozzle mounting brackets 1 are arranged opposite to each other and are threadedly connected by a screw rod 2, and an adjusting knob 3 is arranged on the screw rod 2. The spacing between the two nozzle mounting brackets is adjusted by adjusting the knob 3 to achieve the required width to adapt to etching frames of different widths. The nozzle mounting bracket 1 is provided with a mounting guide groove 11, and a plurality of magnetic suction nozzle assemblies 4 are arranged in the mounting guide groove 11. The magnetic suction nozzle assembly 4 includes a magnet 41, a nozzle fixing part 42, a nozzle 43 and a nozzle air joint 44; the magnet 41 is arranged on the nozzle fixing part 42; the nozzle 43 is connected to a nozzle air joint 44, which is fixedly arranged on the nozzle fixing part 42.
[0018] The two nozzle mounting brackets 1 are respectively arranged on the gripper fixing base 5 . The gripper fixing base 5 includes a guide rail 51 and a fixing block 52 arranged on the guide rail 51 . The nozzle mounting bracket 1 is arranged on the guide rail 51 through the fixing block 52 .
[0019] The vacuum pipeline assembly 6 is connected to the magnetic suction nozzle assembly 4 to provide negative pressure, including a junction block 62, a vacuum main pipe connector 61, multiple air joints 64 and a guide rail mounting seat 63. Multiple air joints 64 are arranged on the junction block 62, and the vacuum main pipe connector 61 is arranged at one end of the junction block 62. The guide rail mounting seat 63 is cross-fixed on the junction block 62, and the guide rail 51 is fixed on the guide rail mounting seat 63. The vacuum main pipe provides negative pressure to multiple magnetic suction nozzle assemblies 4 through the junction block 62 and multiple air joints 64 for sucking the etching frame. The guide rail 51 is fixedly connected to the guide rail mounting seat 63 through the clamping seat 53. The entire magnetic suction gripper module is fixedly connected to the robot through the clamping seat 53.
[0020] The magnetic suction nozzle assembly 4 is stably embedded and adsorbed in the installation guide groove 11 by magnetic force. When replacing etching frames of different specifications and models, it is only necessary to push the magnetic suction nozzle assembly 4 in the installation guide groove 11 to adjust the position of the magnetic suction nozzle assembly 4 without using other tools, which greatly improves the work efficiency. In addition, the distance between the two sets of magnetic suction nozzle assemblies 4 is adjusted by the screw mechanism, so that the grabbing of etching frames of different specifications and models can be quickly matched.
Claims
1. Magnetic gripper module, characterized by: It includes a nozzle mounting bracket, a gripper fixing seat, and a vacuum pipeline assembly; the nozzle mounting bracket is provided with a mounting guide groove, and a plurality of magnetic suction nozzle assemblies are arranged in the mounting guide groove; the nozzle mounting bracket is arranged on the gripper fixing seat, and the vacuum pipeline assembly is connected to the magnetic suction nozzle assembly to provide negative pressure.
2. The magnetic gripper module according to claim 1, characterized in that: The nozzle mounting brackets are two, arranged opposite to each other and threadedly connected by a screw rod; the gripper fixing seat includes a guide rail and a fixing block arranged on the guide rail, and the nozzle mounting bracket is arranged on the guide rail through the fixing block.
3. The magnetic gripper module according to claim 2, characterized in that: The vacuum pipeline assembly includes a manifold, a vacuum main pipe connector, a plurality of gas joints and a guide rail mounting seat; the plurality of gas joints are arranged on the manifold, and the vacuum main pipe connector is arranged at one end of the manifold; the guide rail mounting seat is cross-fixed on the manifold, and the guide rail is fixedly arranged on the guide rail mounting seat.
4. The magnetic gripper module according to claim 3, characterized in that: The guide rail is fixedly connected to the guide rail mounting seat via a clamping seat.
5. The magnetic gripper module according to any one of claims 1 to 4, characterized in that: The magnetic suction nozzle assembly includes a magnet, a nozzle fixing part, a nozzle and a nozzle air joint; the magnet is arranged on the nozzle fixing part; the nozzle is connected to the nozzle air joint and is fixedly arranged on the nozzle fixing part.
6. The magnetic gripper module according to any one of claims 2 to 4, characterized in that: An adjusting knob is arranged on the screw rod.