Wireless optical communication module

Abstract

The utility model relates to a wireless optical communication module which comprises an E84 sensor, the E84 sensor comprises an MCU microcontroller, the MCU microcontroller is connected with an RS232 module, and the RS232 module is connected with a data interface connector which is used for controlling pairing and connection of the E84 sensor; the wireless radio frequency module and the NFC communication module are respectively connected with the MCU microcontroller and are respectively used for wireless communication between different E84 sensors and parameter configuration of the E84 sensors. The wireless radio frequency module and the NFC communication module are respectively connected with the MCU microcontroller of the E84 sensor, the E84 sensor is endowed with a wireless radio frequency communication function and an NFC near field communication function, and the problems that a traditional infrared E84 sensor is prone to being interfered by light, high in installation precision requirement and the like are solved to a certain degree.

Description

Technical Field

[0001] The present application relates to the field of semiconductor device technology, and in particular to a wireless optical communication module. Background Art

[0002] The E84 interface is widely used in semiconductor equipment and is a universal communication interface for the automatic transfer process of wafer boxes. E84 sensors need to be used in pairs, with one side connected to the transmitter and the other side connected to the receiver. After the two sensor heads are docked, non-contact IO signal interaction can be performed. The data exchanged between the two sensors includes 8 digital inputs and 8 digital outputs, as well as a normal pairing signal between the transmitter and receiver sensors.

[0003] In existing semiconductor factories, automatic material handling systems are generally used for wafer processing, such as AGV equipment and OHT equipment. Optical communication equipment, generally infrared E84 sensors, are required to connect the AGV equipment and OHT equipment.

[0004] The infrared E84 sensor has some technical deficiencies, such as being easily affected by light interference, requiring the device to be aligned without obstructions when installed, and having certain limitations on communication distance. Utility Model Content

[0005] The purpose of this application is to provide a wireless optical communication module that can effectively solve the technical problems caused by the infrared E84 sensor during use.

[0006] In order to achieve the above object, the utility model provides a wireless optical communication module, including an E84 sensor, the E84 sensor including an MCU microcontroller, the MCU microcontroller is connected to an RS232 module, the RS232 module is connected to a data interface connector, and is used to control the pairing and connection of the E84 sensor;

[0007] A wireless radio frequency module and an NFC communication module, wherein the wireless radio frequency module and the NFC communication module are respectively connected to the MCU microcontroller, and are respectively used for wireless communication between different E84 sensors and parameter configuration of the E84 sensors.

[0008] In an optional implementation, the MCU microcontroller is connected to an infrared transceiver module, and the infrared transceiver module is used for optical communication between the E84 sensors.

[0009] In an optional implementation, the MCU microcontroller is connected to a storage module, and the storage module includes an E2PROM storage chip.

[0010] In an optional implementation, the MCU microcontroller is connected to an input interface circuit and an output interface circuit, and the input interface circuit and the output interface circuit are respectively equipped with LED indicator screens.

[0011] In an optional implementation, the input interface circuit and the output interface circuit are both connected to an interface protection circuit, and the interface protection circuit is connected to a DB25 connector.

[0012] In an optional implementation, the MCU microcontroller is connected to a clock module, a reset module and a debugging information module.

[0013] By connecting the MCU microcontroller of the E84 sensor to the RS232 module and combining it with the data interface connector connected to the RS232 module, the pairing and connection of different E84 sensors can be controlled.

[0014] The wireless radio frequency module and NFC communication module are respectively connected to the MCU microcontroller of the E84 sensor, giving the E84 sensor wireless radio frequency communication function and NFC near-field communication function, which to a certain extent solves the problems of traditional infrared E84 sensors being easily affected by light interference and requiring high installation accuracy.

[0015] Other features and advantages of the present application will be described in detail in the subsequent detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the structure of the wireless optical communication module in this application.

[0018] icon:

[0019] 1-MCU microcontroller; 2-RS232 module; 3-data interface connector; 4-wireless radio frequency module; 5-NFC communication module; 6-infrared transceiver module; 7-storage module; 8-input interface circuit; 9-output interface circuit; 10-LED indicator screen; 11-interface protection circuit; 12-DB25 connector; 13-clock module; 14-reset module; 15-debugging information module; 16-power module. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0021] In the description of this application, it should be noted that the terms "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0022] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0023] The wireless optical communication module in the present application is mainly used in an automatic material handling system, and is specifically used in the communication of data transmission between fixed equipment and mobile equipment.

[0024] Based on the functional application of the above-mentioned wireless optical communication module, it is not limited to the automatic material handling system of a specific working scenario. This application is specifically explained in the field of automatic transportation of wafer boxes in the production process of semiconductor equipment.

[0025] In the existing wafer box automatic transfer system, the conventional communication connection includes infrared E84 sensors. By pairing the infrared E84 sensors and installing the infrared E84 sensors on mobile devices and fixed equipment, the orderly operation of the automatic transfer system is maintained through optical communication.

[0026] However, as a conventional optical communication device, the infrared E84 sensor is easily disturbed by light in the external environment and has strict requirements on the use environment. At the same time, the installation accuracy is high, the devices need to be accurately aligned, and there must be no obstructions to block the transmission of light. In addition, the security of infrared data communication is low, and it is impossible to encrypt the transmitted data.

[0027] The utility model adds a wireless communication module on the basis of the existing infrared E84 sensor, breaks through the limitations of different requirements of the infrared E84 sensor during use, and improves the application effect as a whole.

[0028] See also Figure 1 The wireless optical communication module in the utility model is specifically a combination of wireless communication and optical communication to form an E84 sensor with multiple transmission functions, wherein the main structure of the E84 sensor includes an MCU microcontroller 1, and the overall operation of the E84 sensor is controlled by the MCU microcontroller 1.

[0029] The MCU microcontroller 1 is connected to an RS232 module 2, and the RS232 module 2 is connected to a data interface connector 3. The data interface connector 3 can specifically be a DB9 D-type interface for controlling the pairing and connection between different E84 sensors.

[0030] By connecting the wireless radio frequency module 4 and the NFC communication module 5 to the MCU microcontroller 1, they can be used for wireless communication between different E84 sensors and parameter configuration of a single E84 sensor.

[0031] The wireless RF module 4 gives the E84 sensor wireless RF communication function, which can be equipped with 2.4GHz or 5GHz open ISM bands, and use low-power Bluetooth, ANT, thread, zigbee, 802.15.4 or 2.4GHz proprietary protocol stack for data transmission.

[0032] Compared with the existing infrared E84 sensor, the wireless radio frequency communication function of the E84 sensor can effectively use wireless communication to transmit IO bus information in real time, reduce the installation accuracy requirements of different sensors, effectively avoid the interference of external ambient light on the infrared sensor, and encrypt the transmitted data, thereby enhancing the safety of use.

[0033] The NFC communication module 5 is mainly used to realize the NFC near field communication of the sensor. The NFC near field communication can be used for the identification of the on-site module and the configuration of the device parameters, which greatly facilitates the installation and debugging of the device.

[0034] Based on the above-mentioned wireless optical communication module, which is a combination of optical communication and wireless communication, the MCU microcontroller 1 is connected with an infrared transceiver module 6, which is used for optical communication between the E84 sensors. Through this setting, the transmission function of the original optical communication can be guaranteed, and the selection of multiple forms of sensor data transmission is enhanced.

[0035] The MCU microcontroller 1 is connected to a storage module 7, which includes an onboard E2PROM storage chip and can be used to store hardware work log information to facilitate problem finding.

[0036] The MCU microcontroller 1 is connected to an input interface circuit 8 and an output interface circuit 9, and the input interface circuit 8 and the output interface circuit 9 are respectively equipped with an LED indicator screen 10. The input interface circuit 8 and the output interface circuit 9 respectively perform 8-bit GPIO input and 8-bit GPIO output, and the LED indicator screen 10 can display the data transmission status.

[0037] The input interface circuit 8 and the output interface circuit 9 are both connected to the interface protection circuit 11, and the interface protection circuit 11 is connected to the DB25 connector 12. The DB25 connector 12 can ensure the docking transmission of data. The interface protection circuit 11 can effectively protect the input interface circuit 8 and the output interface circuit 9, and enhance the security of data transmission.

[0038] The MCU microcontroller 1 is also connected to a clock module 13, a reset module 14 and a debugging information module 15 to ensure the normal operation of the E84 sensor.

[0039] It also includes a power supply module 16, which is connected to the interface protection circuit 11, the MCU microcontroller 1, the wireless radio frequency module 4 and the NFC communication module 5 for supplying power to ensure the effective and reliable operation of the functional modules.

[0040] The wireless optical communication module in the utility model realizes IO signal interaction in two non-contact ways, radio frequency and infrared, by adding a radio frequency module on the basis of the infrared E84 sensor. At the same time, the NFC near-field communication function is added to facilitate the configuration and maintenance of the device at the work site.

[0041] It should be noted that, in the absence of conflict, the features in the embodiments of this application may be combined with each other.

[0042] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A wireless optical communication module, characterized in that: The E84 sensor includes an MCU microcontroller, the MCU microcontroller is connected to an RS232 module, and the RS232 module is connected to a data interface connector for controlling the pairing and connection of the E84 sensor; A wireless radio frequency module and an NFC communication module, wherein the wireless radio frequency module and the NFC communication module are respectively connected to the MCU microcontroller, and are respectively used for wireless communication between different E84 sensors and parameter configuration of the E84 sensors.

2. The wireless optical communication module according to claim 1, characterized in that: The MCU microcontroller is connected to an infrared transceiver module, and the infrared transceiver module is used for optical communication between the E84 sensors.

3. The wireless optical communication module according to claim 1, characterized in that: The MCU microcontroller is connected to a storage module, and the storage module includes an E2PROM storage chip.

4. The wireless optical communication module according to claim 1, characterized in that: The MCU microcontroller is connected to an input interface circuit and an output interface circuit, and the input interface circuit and the output interface circuit are respectively equipped with LED indicator screens.

5. The wireless optical communication module according to claim 4, characterized in that: The input interface circuit and the output interface circuit are both connected to an interface protection circuit, and the interface protection circuit is connected to a DB25 connector.

6. The wireless optical communication module according to claim 1, characterized in that: The MCU microcontroller is connected to a clock module, a reset module and a debugging information module.

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