Processing clamp of semiconductor device
The processing fixture addresses inefficiencies in semiconductor fixing by enabling precise height and angle adjustments through a slide rail and clamping mechanism, facilitating efficient processing of diverse semiconductor devices.
Patent Information
- Application Number
- CN202420302754.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-19
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-02-19
AI Technical Summary
Existing semiconductor fixing devices are cumbersome and prone to errors during height and angle adjustments, leading to inefficiencies in processing semiconductor materials.
A processing fixture with a slide rail mechanism and clamping mechanism, featuring independent control of sliding devices and rotating disks to adjust height and tilt angles, allowing precise positioning and clamping of semiconductor devices.
Enables efficient and accurate positioning of semiconductor devices for processing by allowing independent adjustment of height and tilt angles, accommodating devices of different sizes and models.
Smart Images
Figure CN222269987U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor processing, in particular to a processing fixture for semiconductor devices. Background Art
[0002] Semiconductor processing refers to the process of making semiconductor materials into electronic devices. In semiconductor processing, the semiconductor materials must first be fixed and clamped before processing can be carried out.
[0003] The existing semiconductor fixing processing device is adjusted and locked after disassembling both sides, which is cumbersome and has large errors. There are errors in the height after adjustment and the height after locking. For example, a Chinese patent with publication number CN213560738U discloses a flexible adjustment mechanism and a clamp. By splitting a single part into multiple parts, when there is a difference in height, the position of the pressure claw is adjusted to directly adjust the pressure. However, during the processing, the angle needs to be adjusted, and sometimes the height and inclination angle of the semiconductor device need to be adjusted to assist the operator in completing the processing. Therefore, a processing clamp for semiconductor devices is proposed to solve the above-mentioned problems. Utility Model Content
[0004] The purpose of the utility model is to provide a processing fixture for semiconductor devices to solve the problems raised in the above background technology.
[0005] In order to solve the above technical problems, the utility model provides the following technical solutions: a processing fixture for semiconductor devices, comprising a base, the top of which is provided with a slide rail mechanism and a clamping mechanism;
[0006] The slide rail mechanism includes a slide device, a slide rail No. 1 is arranged on the slide device, and a horizontal plate is connected to the slide rail No. 1, rotating disks are arranged at both ends of the horizontal plate, and a slide plate is arranged above the horizontal plate, and a slide groove is opened on the side;
[0007] The clamping mechanism comprises a placing table, a pad is arranged on the placing table, an electric-controlled folding frame is arranged on the side of the placing table, a first clamping plate is arranged on the electric-controlled folding frame, and a moving groove and a second clamping plate are arranged on the placing table.
[0008] Preferably, the slide rail mechanism is arranged on both sides of the top of the base, the clamping mechanism is arranged on the slide rail mechanism, and two groups of slide devices are arranged, each group of slide devices is connected to the cross plate, and each group of slide devices can be independently controlled.
[0009] Preferably, both ends of each transverse plate are connected to a rotating disk, a sliding groove is opened in the middle of the outer side of the transverse plate, and the sliding plate is arranged on the transverse plate, both ends of the sliding plate extend into the sliding groove, and the placing table is arranged on the sliding plate.
[0010] Through the independent control of two sets of sliding devices, the horizontal plates on the sliding devices are made to present different heights, and the two ends of the sliding plates are connected and engaged with the sliding grooves of the horizontal plates to make the whole body tilt in a coordinated manner. The horizontal plates are rotated on the rotating disk to adjust the tilt angle to assist the operator in processing the device.
[0011] Preferably, the electric-controlled folding frame is arranged on the front and rear sides of the placement table, and the first clamping plate is arranged on the outer top of the electric-controlled folding frame in an inverted L shape, and the horizontal position of the first clamping plate is higher than the pad.
[0012] Preferably, the movable groove is opened on the left and right sides of the pad, and the second clamping plate is arranged above the movable groove.
[0013] Compared with the prior art, the beneficial effects achieved by the utility model are:
[0014] 1. The utility model places the device on a pad, adjusts the front and rear clamping of the device by the first clamping plate through the extension and retraction of the electric-controlled folding frame, and moves the second clamping plate in the moving groove to clamp the left and right sides of the device, and is suitable for devices of different models and sizes.
[0015] 2. The utility model independently controls two sets of sliding devices, so that the horizontal plates on the sliding devices are at different heights. The horizontal plates are rotated on the rotating disk to adjust the inclination angle, so as to assist the operator in processing the device. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0017] Figure 2 This is a schematic diagram of the slide rail mechanism of the utility model;
[0018] Figure 3 It is a schematic diagram of the clamping mechanism of the utility model.
[0019] Among them: 1. base; 2. slide rail mechanism; 21. slide device; 22. slide rail No. 1; 23. cross plate; 24. rotating disk; 25. slide plate; 26. slide groove; 3. clamping mechanism; 31. placement table; 32. pad; 33. electric control folding frame; 34. first clamping plate; 35. moving groove; 36. second clamping plate. DETAILED DESCRIPTION
[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] See also Figure 1-3 , the utility model provides a technical solution: a processing fixture for semiconductor devices, comprising a base 1, a slide rail mechanism 2 and a clamping mechanism 3 are arranged on the top of the base 1;
[0022] The slide rail mechanism 2 includes a slide device 21, a first slide rail 22 is arranged on the slide device 21, and a horizontal plate 23 is connected to the first slide rail 22, rotating disks 24 are arranged at both ends of the horizontal plate 23, and a slide plate 25 is arranged above the horizontal plate 23, and a slide groove 26 is opened on the side;
[0023] The clamping mechanism 3 includes a placing table 31 , on which a pad 32 is arranged, and on the side of the placing table 31 an electric control folding frame 33 is arranged, on which a first clamping plate 34 is arranged, and on which a moving groove 35 and a second clamping plate 36 are arranged.
[0024] Through the above technical solution, the sliding device 21 drives the horizontal plate 23 to adjust the height up and down, which is a prior art and will not be described in detail here;
[0025] When a specific operation plan is needed, the device is placed on the pad 32 and retracted by starting the electric-controlled folding frame 33. When the electric-controlled folding frame 33 retracts, it drives the first clamping plate 34 so that the first clamping plate 34 engages and clamps the front and rear sides of the device, and the second clamping plate 36 moves in the movable groove 35 to clamp the left and right sides of the device and fix the device as a whole. When the angle needs to be adjusted, the sliding device 21 is started to control the cross plate 23 to slide in the No. 1 slide rail 22 to adjust the height, and the placing table 31 is pushed to make the clamping mechanism 3 slide left and right in the sliding groove 26 as a whole. When the tilt angle is required, the two groups of sliding devices 21 are controlled separately to adjust the cross plate 23 so that the cross plate 23 on the sliding device 21 presents different heights, and the cross plate 23 is rotated on the rotating disk 24 to adjust the tilt angle to assist the operator in processing the device.
[0026] Specifically, the slide rail mechanism 2 is arranged on both sides of the top of the base 1, the clamping mechanism 3 is arranged on the slide rail mechanism 2, and two groups of slide devices 21 are arranged, each group of slide devices 21 is connected to the cross plate 23, and each group of slide devices 21 can be independently controlled.
[0027] Specifically, both ends of each transverse plate 23 are connected to a rotating disk 24, a sliding groove 26 is opened in the middle of the outer side of the transverse plate 23, and a sliding plate 25 is set on the transverse plate 23, both ends of the sliding plate 25 extend into the sliding groove 26, and a placement table 31 is set on the sliding plate 25.
[0028] Through the above technical solution, the two sets of sliding devices 21 are independently controlled so that the horizontal plates 23 on the sliding devices 21 are at different heights, and the two ends of the sliding plate 25 are connected and engaged with the sliding grooves 26 of the horizontal plate 23 to make the whole body tilt in a coordinated manner. The horizontal plate 23 is rotated on the rotating disk 24 to adjust the tilt angle to assist the operator in processing the device.
[0029] Specifically, the electric-controlled folding frame 33 is disposed on the front and rear sides of the placement table 31 , and the first clamping plate 34 is disposed on the outer top of the electric-controlled folding frame 33 in an inverted L shape, and the horizontal position of the first clamping plate 34 is higher than the pad 32 .
[0030] Specifically, the moving groove 35 is opened on the left and right sides of the pad 32 , and the second clamping plate 36 is arranged above the moving groove 35 .
[0031] When a specific operation plan is needed, the device is placed on the pad 32 and retracted by starting the electric-controlled folding frame 33. When the electric-controlled folding frame 33 retracts, it drives the first clamping plate 34 so that the first clamping plate 34 engages and clamps the front and rear sides of the device, and the second clamping plate 36 moves in the movable groove 35 to clamp the left and right sides of the device and fix the device as a whole. When the angle needs to be adjusted, the sliding device 21 is started to control the cross plate 23 to slide in the No. 1 slide rail 22 to adjust the height, and the placing table 31 is pushed to make the clamping mechanism 3 slide left and right in the sliding groove 26 as a whole. When the tilt angle is required, the two groups of sliding devices 21 are controlled separately to adjust the cross plate 23 so that the cross plate 23 on the sliding device 21 presents different heights, and the cross plate 23 is rotated on the rotating disk 24 to adjust the tilt angle to assist the operator in processing the device.
[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A semiconductor device processing fixture, comprising a base (1), characterized in that: The top of the base (1) is provided with a slide rail mechanism (2) and a clamping mechanism (3); The slide rail mechanism (2) comprises a slide device (21), a first slide rail (22) is arranged on the slide device (21), and a transverse plate (23) is connected to the first slide rail (22), rotating disks (24) are arranged at both ends of the transverse plate (23), a slide plate (25) is arranged above the transverse plate (23), and a slide groove (26) is opened on the side surface; The clamping mechanism (3) comprises a placing table (31), a pad (32) is arranged on the placing table (31), an electric-controlled folding frame (33) is arranged on the side of the placing table (31), a first clamping plate (34) is arranged on the electric-controlled folding frame (33), and a movable groove (35) and a second clamping plate (36) are arranged on the placing table (31).
2. A semiconductor device processing fixture according to claim 1, characterized in that: The slide rail mechanism (2) is arranged on both sides of the top of the base (1), the clamping mechanism (3) is arranged on the slide rail mechanism (2), and two groups of slide devices (21) are arranged, each group of slide devices (21) is connected to the cross plate (23), and each group of slide devices (21) can be independently controlled.
3. A semiconductor device processing fixture according to claim 1, characterized in that: Both ends of each transverse plate (23) are connected to a rotating disk (24), a sliding groove (26) is opened in the middle of the outer side of the transverse plate (23), and a sliding plate (25) is arranged on the transverse plate (23), both ends of the sliding plate (25) extend into the sliding groove (26), and the placement platform (31) is arranged on the sliding plate (25).
4. A semiconductor device processing fixture according to claim 1, characterized in that: The electric-controlled folding frame (33) is arranged on the front and rear sides of the placing platform (31), and the first clamping plate (34) is arranged on the outer top of the electric-controlled folding frame (33) in an inverted L shape, and the horizontal position of the first clamping plate (34) is higher than the pad (32).
5. A semiconductor device processing fixture according to claim 1, characterized in that: The movable groove (35) is opened on the left and right sides of the pad (32), and the second clamping plate (36) is arranged above the movable groove (35).