Precise coating machine for polishing pad material production
By using structures such as cover covers, L-shaped plates, and scrapers in precision coating machines for polishing pad production, the problem of debris forming during the drying and curing process of paint is solved, achieving a high-quality polishing layer and convenient Debris collection.
Patent Information
- Application Number
- CN202421131654.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-23
- Publication Date
- 2025-01-21
- Estimated Expiration
- 2034-05-23
AI Technical Summary
During the polishing pad production process, the coating is prone to debris during drying and curing, and it is difficult for the coating machine to clean it in time, affecting the quality of the pad.
A precision coating machine for the production of polishing pads is designed. It adopts a combined structure of a covering cover, an L-shaped plate, a scraper, a limit block, a limit bolt and a limit hole. The solidified debris is cleaned by the movement of the scraper. , and collect them into square bins.
It effectively avoids the residue of paint chips and improves the cleanliness inside the processing box, thereby improving the quality of the polishing layer and saving time and energy in subsequent cleaning work.
Smart Images
Figure CN222369407U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of polishing pad material production, in particular to a precision coating machine for polishing pad material production. Background Art
[0002] The precision coater for polishing pad production is a kind of equipment specially used for polishing pad production. Its main function is to evenly apply the coating on the substrate through coating technology to form the polishing layer of the polishing pad. The working principle of the precision coater usually involves a coating gun applying the coating to the substrate, while using airflow or other technologies to control the thickness and uniformity of the coating. Polishing pads include CMP polishing pads and grinding polishing pads. These polishing pads are widely used in semiconductor manufacturing, optical device processing, precision machining and other fields.
[0003] The coating machine can spray the coating on the surface of the pad material to form a polishing layer. Some coatings may easily form debris, especially during the drying and curing process. The coating will gradually form debris and adhere to the surface of the processing box. The coating machine cannot scrape and clean the debris in time. The remaining debris may continue to adhere to the surface of the pad material to be processed, affecting the quality of the pad material. Therefore, it is particularly important to design a precision coating machine for the production of polishing pads, which can clean the solidified debris after polishing and facilitate collection. Utility Model Content
[0004] The utility model aims to provide a precision coating machine for producing polishing pads, so as to solve the problem in the above-mentioned background technology that during the drying and curing process, the coating gradually forms debris and adheres to the surface of the processing box.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a precision coating machine for producing polishing pads, comprising a coating machine body, a coating rack, a material storage barrel and a plurality of coating guns, wherein the coating rack is arranged on the top of the coating machine body, the material storage barrel is arranged on the top of the coating rack, and the plurality of coating guns are respectively arranged on the top of the coating machine body, and two limit rods are arranged on the top of the coating machine body, and an arc block is arranged at one end of each of the limit rods, and a processing box is arranged between the inner walls of the two arc blocks, and a covering cover is arranged on the outside of the processing box, and a reinforcing rod is arranged inside the covering cover, and one end of the reinforcing rod is arranged on an L-shaped plate, and a plurality of scraping strips are arranged at the bottom of the L-shaped plate.
[0006] As a preferred technical solution of the utility model, two limiting blocks are arranged on both sides of the covering cover, and a plurality of limiting holes are opened on both sides of the processing box.
[0007] As a preferred technical solution of the utility model, one side of the four limiting blocks is provided with limiting bolts, and one end of the four limiting bolts is respectively connected to the internal threads of the plurality of limiting holes.
[0008] As a preferred technical solution of the utility model, a plurality of blanking grooves are provided at the bottom end of the processing box, and the positions of the plurality of blanking grooves are arranged at equal intervals.
[0009] As a preferred technical solution of the utility model, the L-shaped plate is movably sleeved with one end of the reinforcement rod, and a pull ring is fixedly installed on one side of the L-shaped plate.
[0010] As a preferred technical solution of the utility model, four L-shaped frames are arranged at the bottom of the coating machine body, and a support plate is arranged on one side of two adjacent L-shaped frames.
[0011] As a preferred technical solution of the utility model, a square box is placed on the top of the two support plates.
[0012] Compared with the prior art, the beneficial effects of the utility model are:
[0013] 1. The utility model discloses a precision coating machine for producing polishing pad materials. The covering hood increases the range of shielding the paint and avoids large-scale splashing of the paint. During the curing process of the paint, debris may be formed. At this time, the pull ring is moved left and right to drive the L-shaped plate to move left and right at one end of the reinforcement rod. The multiple scraping strips are made of stainless steel with good hardness and wear resistance. The debris can be scraped off during the contact with the solidified debris, thereby improving the cleanliness of the inside of the processing box and the quality of the polishing layer of the subsequent polishing pad material processing.
[0014] 2. The utility model is a precision coating machine for producing polishing pad materials. By setting an L-shaped frame, a support plate, a square box and a material drop chute, as the scraper bar scrapes and cleans the debris, the diameter of the debris is smaller than the diameter of the material drop chute, and the scraped debris will fall into the interior of the square box along a number of material drop chutes for collection. The bottom of the square box is supported by two support plates, so the scraped debris can be collected in a centralized manner in a timely manner, saving the time and energy of subsequent staff in cleaning up the debris on the ground. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is a front view structural schematic diagram of the utility model;
[0016] Figure 2 For the utility model Figure 1 The enlarged view of point A in the middle;
[0017] Figure 3It is a schematic diagram of the top view structure of the utility model;
[0018] Figure 4 It is a partial side structural schematic diagram of the utility model.
[0019] In the figure: 1. coating machine body; 2. coating frame; 3. material storage barrel; 4. coating gun; 5. limiting rod; 6. arc block; 7. processing box; 8. material drop chute; 9. covering cover; 10. limiting block; 11. limiting bolt; 12. limiting hole; 13. reinforcing rod; 14. L-shaped plate; 15. pull ring; 16. scraper; 17. L-shaped frame; 18. support plate; 19. square box. DETAILED DESCRIPTION
[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] See also Figure 1-4 The utility model provides a technical solution for a precision coating machine for producing polishing pads:
[0022] Embodiment 1:
[0023] like Figure 1-3 As shown, a precision coating machine for producing polishing pad materials comprises a coating machine body 1, a coating frame 2, a material storage barrel 3 and a plurality of coating guns 4. The coating frame 2 is arranged on the top of the coating machine body 1, the material storage barrel 3 is arranged on the top of the coating frame 2, and the plurality of coating guns 4 are respectively arranged on the top of the coating machine body 1. Two limiting rods 5 are arranged on the top of the coating machine body 1, and arc blocks 6 are arranged at one end of the two limiting rods 5. A processing box 7 is arranged between the inner walls of the two arc blocks 6, and a covering cover 9 is arranged on the outside of the processing box 7. A reinforcement rod 13 is provided inside the covering hood 9, and an L-shaped plate 14 is sleeved on one end of the reinforcement rod 13. A plurality of scraping strips 16 are provided at the bottom of the L-shaped plate 14. The pull ring 15 is moved left and right, driving the L-shaped plate 14 to move left and right at one end of the reinforcement rod 13. The plurality of scraping strips 16 are made of stainless steel and have good hardness and wear resistance. During the contact with the solidified debris, the debris can be scraped off, thereby improving the cleanliness of the interior of the processing box 7, and also improving the quality of the polishing layer of the subsequent polishing pad processing.
[0024] Embodiment 2:
[0025] Based on the first embodiment, Figure 1 and Figure 4As shown, the L-shaped plate 14 is movably sleeved with one end of the reinforcing rod 13, a pull ring 15 is fixedly installed on one side of the L-shaped plate 14, four L-shaped frames 17 are arranged at the bottom of the coating machine body 1, and a support plate 18 is arranged on one side of two adjacent L-shaped frames 17. The utility model is a precision coating machine for the production of polishing pads, which is provided with an L-shaped frame 17, a support plate 18, a square box 19 and a blanking chute 8. As the scraping bar 16 scrapes and cleans the debris, the diameter of the debris is smaller than the diameter of the blanking chute 8, and the scraped debris will fall into the interior of the square box 19 along a number of blanking chutes 8 for collection.
[0026] Working principle: The precision coating machine for polishing pad production is a kind of equipment specially used for polishing pad production. Its main function is to evenly coat the coating on the substrate through coating technology to form a polishing layer of the polishing pad. The working principle of the precision coating machine usually involves the coating gun 4 coating the coating to the substrate, and using the airflow to control the thickness and uniformity of the coating. The polishing pad includes CMP polishing pad and grinding polishing pad, which are widely used in the fields of semiconductor manufacturing, optical device processing and precision machining. The polishing pad to be processed is manually placed into the processing box 7, and then, multiple coating guns 4 can spray polishing coating on the surface of the polishing pad respectively to form a polishing layer. The covering cover 9 increases the range of coating shielding and avoids large-scale splashing of coating. After the polishing pad is polished, a certain amount of coating will remain on the inner surface of the processing box 7. As time goes by, the coating may form debris during the curing process. The pad after polishing can be taken out, and then, at this time, the staff can move the pull ring 15 left and right, driving the L-shaped plate 14 to move left and right at one end of the reinforcement rod 13. The scraping strips 16 are made of stainless steel and have good hardness and wear resistance. The bottom surfaces of the scraping strips 16 are in contact with the inner surfaces of the processing box 7 respectively. During the movement, they will contact with the solidified debris, and the debris can be scraped off, thereby improving the cleanliness of the interior of the processing box 7, and thus improving the quality of the polishing layer of the subsequent polishing pad material processing, and avoiding the residual debris from adhering to the surface of other polishing pad materials. As the scraping strips 16 scrape and clean the debris, the diameter of the debris is smaller than the diameter of the drop groove 8, and the scraped debris will fall into the plurality of drop grooves 8 along the drop grooves 8. The debris is collected inside the square box 19, and the bottom of the square box 19 is supported by two support plates 18, so that the scraped debris can be collected in time, saving the time and energy of subsequent staff in cleaning up the debris on the ground. The covering cover 9 can move up and down on the outside of the processing box 7, so the covering area of the two can be continuously adjusted, which is convenient for storing the covering cover 9, and the corresponding limiting bolts 11 are respectively embedded in the limiting holes 12. The two are threadedly connected, so the processing box 7 and the covering cover 9 can be limited and fixed, ensuring the firmness of the covering cover 9.
[0027] In the description of the present invention, it is necessary to understand that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0028] In the present invention, unless otherwise clearly stipulated and limited, for example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, for ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.
[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A precision coating machine for producing polishing pad materials, comprising a coating machine body (1), a coating frame (2), a material storage barrel (3) and a plurality of coating guns (4), wherein the coating frame (2) is arranged on the top of the coating machine body (1), the material storage barrel (3) is arranged on the top of the coating frame (2), and the plurality of coating guns (4) are respectively arranged on the top of the coating machine body (1), characterized in that: Two limiting rods (5) are arranged on the top of the coating machine body (1), one end of each of the two limiting rods (5) is provided with an arc block (6), a processing box (7) is arranged between the inner walls of the two arc blocks (6), the outside of the processing box (7) is provided with a covering cover (9), the inside of the covering cover (9) is provided with a reinforcing rod (13), one end of the reinforcing rod (13) is provided with an L-shaped plate (14), and the bottom of the L-shaped plate (14) is provided with a plurality of scraping strips (16).
2. A precision coating machine for producing polishing pads according to claim 1, characterized in that: Two limiting blocks (10) are provided on both sides of the covering cover (9), and a plurality of limiting holes (12) are provided on both sides of the processing box (7).
3. A precision coating machine for producing polishing pads according to claim 2, characterized in that: A limiting bolt (11) is provided on one side of each of the four limiting blocks (10), and one end of each of the four limiting bolts (11) is respectively connected to the internal threads of the plurality of limiting holes (12).
4. The precision coating machine for producing polishing pads according to claim 2, characterized in that: A plurality of material dropping grooves (8) are provided at the bottom end of the processing box (7), and the plurality of material dropping grooves (8) are arranged at equal intervals.
5. The precision coating machine for producing polishing pads according to claim 1, characterized in that: The L-shaped plate (14) is movably sleeved with one end of the reinforcing rod (13), and a pull ring (15) is fixedly mounted on one side of the L-shaped plate (14).
6. The precision coating machine for producing polishing pads according to claim 1, characterized in that: Four L-shaped frames (17) are arranged at the bottom of the coating machine body (1), and a support plate (18) is arranged on one side of two adjacent L-shaped frames (17).
7. A precision coating machine for producing polishing pads according to claim 6, characterized in that: A square box (19) is placed on the top of the two support plates (18).