Balanced light beam generation device for surface treatment and laser lift-off system
By using a semiconductor pumped solid laser and a balanced beam generation device in the surface treatment process, the problem of high maintenance costs of traditional high-power lasers is solved, beam generation with uniform energy distribution is achieved, and production efficiency is improved.
Patent Information
- Application Number
- CN202323425307.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-15
- Publication Date
- 2025-01-21
- Estimated Expiration
- 2033-12-15
AI Technical Summary
In traditional large-area surface treatment and peeling processes, the use of high-power lasers leads to high maintenance costs and affects production efficiency.
A semiconductor pumped solid laser is used to replace the high-power laser, and a balanced beam generating device composed of a multi-beam splitter, a homogenizer and a cutter is used to generate a linear beam with balanced energy.
It reduces maintenance costs, improves the balance of the beam, reduces the influence of thermal factors, and obtains a beam with even energy distribution.
Smart Images
Figure CN222370660U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of laser processing technology, and in particular to a balanced beam generating device and a laser peeling system for surface processing. Background Art
[0002] In traditional large-area surface treatment and stripping processes, lasers can be used to evenly irradiate the surface of the product with a certain amount of energy. In order to perform large-area surface treatment, high-power lasers are usually used, but the corresponding high-power laser costs are much higher than the unit price of product production, and the maintenance cost is also high, which brings many problems to the production efficiency of the product. Summary of the invention
[0003] Based on this, it is necessary to provide a balanced beam generating device and laser stripping system for surface treatment in response to the above technical problems. A semiconductor-pumped solid laser can be used to replace a high-power laser, which has a low maintenance cost. The emitted single point beam is divided into multiple beams by a multi-beam splitter. In order to achieve energy balance, a homogenizer composed of lenses at different angles is used to obtain a straight beam with high balance. Finally, the thermal effect elements that may be far away from the center and the beams that exceed the overlapping area are removed by a cutter to obtain a balanced beam.
[0004] In a first aspect, the present application provides a balanced beam generating device for surface treatment, comprising a multi-beam splitter, a homogenizer and a cutter,
[0005] The multi-beam splitter is used to input a point-shaped light beam in a flat-top shape to obtain a plurality of parallel straight light beams, and the number of the straight light beams is the same as the number of reflective lenses in the beam splitter;
[0006] The homogenizer is used to input the multiple parallel linear light beams to obtain overlapping linear light beams;
[0007] The cutter is used to adjust the shape of the slit in the cutter according to the shape of the preset light beam, so that the slit cuts the overlapping linear light beams to obtain the preset light beam with balanced energy.
[0008] In one embodiment, the multi-beam splitter includes a plurality of parallel reflective lenses arranged in layers;
[0009] The reflective lens of the previous level obtains a transmitted light beam based on the input point light beam and transmits it to the reflective lens of the next level, wherein the reflective lens at the first level is used to input the point light beam in the form of a flat top;
[0010] The reflective lenses at each level reflect the input point light beams to obtain corresponding reflected light beams, and the energy of each reflected light beam is within a preset energy threshold.
[0011] In one embodiment, the reflective lens at the last level is a total reflection lens.
[0012] In one embodiment, the homogenizer includes a first lens combination and a second lens combination, wherein the first lens combination is used to perform multiple refractions on the multiple parallel straight light beams input thereto to obtain refracted light beams with reduced beam widths, and the second lens combination is used to focus corresponding light beams in each refracted light beam.
[0013] In one embodiment, the first lens combination includes a double-row fly-eye lens array, and the fly-eye lens array is composed of a plurality of sub-lenses;
[0014] The sub-lenses of the first row of fly-eye lens arrays and the sub-lenses of the second row of fly-eye lens arrays are mirror-imaged, and the spacing between the first row of fly-eye lens arrays and the second row of fly-eye lens arrays is greater than the focal length of the sub-lenses and less than twice the focal length of the sub-lenses.
[0015] In one embodiment, the number of sub-lenses in the fly-eye lens array matches the number of the plurality of parallel linear light beams.
[0016] The multiple parallel linear light beams are successively input into the first row of fly-eye lens arrays and the second row of fly-eye lens arrays and then output to the second lens combination, so that the light beams passing through the second lens combination form multiple linear light beams with overlapping rectangular areas at a preset distance position.
[0017] In one embodiment, the energy density of the preset light beam is 250-400 millijoules per square centimeter.
[0018] In one of the embodiments, the balanced light beam generating device further comprises a telecentric lens for achieving beam expansion of the preset light beam.
[0019] In one embodiment, the balanced beam generating device further comprises a solid laser and a beam shaper, wherein the solid laser is used to generate a Gaussian beam to be input into the beam shaper, and the beam shaper is used to shape the beam into a flat-top point beam to be output into a multi-beam splitter.
[0020] In the second aspect, the present application also provides a laser peeling system, comprising a displacement platform and the balanced beam generating device as described in any of the above items, wherein the displacement platform is used to adjust the position of the product to be processed carried by it so that the preset beam generated by the balanced beam generating device acts on the product.
[0021] The above-mentioned balanced beam generating device for surface treatment has at least the following beneficial effects:
[0022] The embodiment scheme provided by the present disclosure can deform the shape of the light beam and obtain multiple parallel straight light beams through a multi-beam splitter, and then overlap the dispersed multiple parallel straight light beams to obtain multiple overlapping straight light beams, which can improve the balance of the light beam. Finally, the excess light beam caused by the overlapping error can be cut through the slit, reducing the influence of thermal effect factors and obtaining a light beam with balanced energy.
[0023] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present disclosure, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0025] Figure 1 A diagram of the application environment of a balanced beam generating device for surface treatment;
[0026] Figure 2 is a schematic diagram of a cross section of a product in one embodiment;
[0027] Figure 3 is a schematic diagram of the configuration of a reflector in a multi-beam splitter in one embodiment;
[0028] Figure 4 A schematic diagram of the relationship between input beam energy, transmission-reflection ratio, and output beam energy in one embodiment;
[0029] Figure 5 is a schematic diagram of a homogenizer in one embodiment;
[0030] Figure 6 is a schematic diagram of a double-row fly-eye lens array in one embodiment;
[0031] Figure 7 Schematic diagram of light beams of different shapes in one embodiment. DETAILED DESCRIPTION
[0032] In order to enable ordinary persons in the art to better understand the technical solutions of the present disclosure, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings.
[0033] It should be noted that the terms "first", "second", etc. in the specification and claims of the present disclosure and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present disclosure described here can be implemented in an order other than those illustrated or described here. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. On the contrary, they are only examples of devices and methods consistent with some aspects of the present disclosure as detailed in the attached claims. The terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, product or device including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also includes elements inherent to such process, method, product or device. In the absence of more restrictions, it is not excluded that there are other identical or equivalent elements in the process, method, product or device including the elements. For example, if the words first, second, etc. are used to represent the name, they do not represent any specific order.
[0034] The present disclosure provides a balanced light beam generating device for surface treatment, which can be applied to Figure 1 In the application environment shown, the laser 102 is used to emit a Gaussian point beam; the beam shaper 104 is used to change the shape of the beam; the multi-beam splitter 106 includes a plurality of parallel reflective lenses, and the reflective lenses are used to separate the incident beam into a reflected beam and a transmitted beam; the homogenizer 108 includes a first lens combination and a second lens combination, the first lens array is used to adjust the angle of the beam, and the second lens array is used to focus the beam; the cutter 110 includes a slit, and the slit is used to cut the beam to obtain a beam of a preset shape.
[0035] In some embodiments of the present disclosure, the multi-beam splitter is used to input a point-shaped light beam in a flat-top form to obtain a plurality of parallel straight light beams, and the number of the straight light beams is the same as the number of reflective lenses in the beam splitter;
[0036] The homogenizer is used to input the multiple parallel linear light beams to obtain overlapping linear light beams;
[0037] The cutter is used to adjust the shape of the slit in the cutter according to the shape of the preset light beam, so that the slit cuts the overlapping linear light beams to obtain the preset light beam with balanced energy.
[0038] A plurality of parallel reflectors are arranged in the multi-beam splitter. The reflection and transmission ratio of each reflector can be determined according to the number of beams that need to be split in actual operation. When the incident light is irradiated onto the reflective lens, a reflected beam and a direct beam can be obtained. The reflected beam obtained by the first reflective lens is irradiated onto the next reflective lens, and multiple parallel reflected beams can be obtained by irradiating in sequence.
[0039] A homogenizer is an optical component that makes the intensity distribution of a beam more uniform, eliminating local intensity variations in the beam distribution and smoothing the overall envelope of the beam. A homogenizer can disrupt the phase of the beam passing through it, scatter the beam that hits it, and scatter each point on the front end of the beam to multiple angles, overlapping with the scattering from other points, resulting in a uniform intensity distribution, with the same number of overlapping straight beams as the number of point beams.
[0040] The slit in the cutter can be regarded as a mask to cut multiple overlapping linear light beams, wherein the shape of the mask can be adjusted according to a preset beam shape, and the light beam passing through the mask is the final energy-balanced light beam. Figure 2 The schematic diagram of the cross section of the product in one embodiment. The outer corner of the light beam may have a shadow portion of the inclined surface shown in the figure, and the light beam to be used is the portion marked as 1 in the figure. The light beam can be cut using a slit to remove excess light beams, reduce heat influence factors, and obtain a light beam with uniform energy distribution.
[0041] In the above-mentioned balanced beam generating device for surface treatment, the shape of the light beam can be deformed and a plurality of parallel straight light beams can be obtained through a multi-beam separator. Then, the dispersed plurality of parallel straight light beams can be overlapped to obtain a plurality of overlapping straight light beams, which can improve the balance of the light beam. Finally, the excess light beam caused by the overlapping error can be cut through the slit to reduce the influence of thermal effect factors and obtain a light beam with uniform energy distribution.
[0042] In some embodiments of the present disclosure, the multi-beam splitter includes a plurality of reflective lenses arranged in parallel and in layers;
[0043] The reflective lens of the previous level obtains a transmitted light beam based on the input point light beam and transmits it to the reflective lens of the next level, wherein the reflective lens at the first level is used to input the point light beam in the form of a flat top;
[0044] The reflective lenses at each level reflect the input point light beams to obtain corresponding reflected light beams, and the energy of each reflected light beam is within a preset energy threshold.
[0045] Figure 3The figure is a schematic diagram of the configuration of the reflector in a multi-beam splitter in one embodiment. The multi-beam splitter may include a plurality of parallel reflective lenses arranged in a hierarchical manner. The reflective lens of the previous level obtains a transmitted light beam based on the point light beam input therein and transmits it to the reflective lens of the next level adjacent thereto, thereby obtaining a reflected light beam and a transmitted light beam. The transmitted light beam is sequentially transmitted and passes through the reflective lens to obtain a plurality of parallel reflected light beams. A single light beam can be divided into a plurality of split light beams by using a reflective lens, and finally the plurality of split light beams are overlapped to obtain a uniform light beam. Therefore, the parameters of the reflective lenses in the multi-beam splitter are the same, which can ensure that the reflectivity of the separated light beams is the same, and the uniformity of the light beam obtained by the final overlap is high.
[0046] Figure 4 The figure is a schematic diagram of the relationship between the input beam energy, the transmission-reflection ratio, and the output beam energy in one embodiment. For example, the input beam energy of the first level is 100, and the ratio of transmittance to reflectance is 90:10, so the transmitted beam energy is 90 and the reflected beam energy is 10. The input beam energy of the second level is the transmitted beam energy of the first level, that is, 90, and the ratio of transmittance to reflectance of the second level reflective lens is 90:10, so 90*10%=9. And so on. The last level, the tenth level, is a total reflection lens, which has no transmitted beam energy, saving energy consumption, and all input energy is not wasted.
[0047] In some embodiments of the present disclosure, the reflective lens at the last level in the multi-beam splitter is a total reflection lens.
[0048] Among them, the reflective lens at the last level in the multi-beam separator is a total reflection lens, that is, the reflective lens at the previous level obtains a transmitted light beam based on its input point light beam and transmits it to the reflective lens at the last level. There is no transmitted light beam energy, which saves energy consumption and there is no waste of input energy.
[0049] In some embodiments of the present disclosure, the homogenizer includes a first lens combination and a second lens combination, the first lens combination is used to perform multiple refractions on the multiple parallel straight light beams input thereto to obtain refracted light beams with reduced beam widths, and the second lens combination is used to focus the corresponding light beams in each refracted light beam.
[0050] Figure 5Schematic diagram of a homogenizer in one embodiment. The homogenizer may include a first lens combination 502 and a second lens combination 504, wherein the first lens combination may be composed of a compound eye lens array, which is used to perform multiple refractions on the multiple parallel straight light beams input thereto to obtain refracted light beams with reduced beam widths, and the second lens combination may be a focusing lens, which is used to focus the corresponding light beams in each refracted light beam. If parallel light is used as a light source to pass through the homogenizer, a uniform illumination distribution can be obtained. In actual use, it is difficult for the input light to be completely parallel. The uniformity of the illumination plane can be improved by adding a second compound eye lens array. The first compound eye lens array is usually called an objective lens array, and the second compound eye lens array along the optical axis is called a field lens array. The field lens array is located at the image plane position of the objective lens array. The function of the field lens array is to overlap the light beams of different field angles emitted by the light source on the illumination plane.
[0051] In some embodiments of the present disclosure, the first lens combination includes a double-row fly-eye lens array, and the fly-eye lens array is composed of a plurality of sub-lenses;
[0052] The sub-lenses of the first row of fly-eye lens arrays and the sub-lenses of the second row of fly-eye lens arrays are mirror-imaged, and the spacing between the first row of fly-eye lens arrays and the second row of fly-eye lens arrays is greater than the focal length of the sub-lenses and less than twice the focal length of the sub-lenses.
[0053] Figure 6 Schematic diagram of a double-row fly-eye lens array in an embodiment, D is the incident light diameter, f1 is the focal length of the first row of fly-eye lens array, a is the spacing between the first row of fly-eye lens array and the second row of fly-eye lens array, and d is the incident light diameter of the sub-lens. The first lens combination includes a double-row fly-eye lens array, and the fly-eye lens array is composed of a plurality of sub-lenses. The two rows of fly-eye lens arrays are placed in parallel front and back, and the spacing a between the first row of fly-eye lens array 602 and the second row of fly-eye lens array 604 is greater than the focal length of the sub-lenses and less than twice the focal length of the sub-lenses, and the sub-lenses of the first row of fly-eye lens array and the sub-lenses of the second row of fly-eye lens array are mirror-imaged. The sub-lenses in each row of fly-eye lens array elements split the incident light beam into sub-beams and focus them on the second row of fly-eye lens array, and the sub-lenses in the second row of fly-eye lens array and the focusing lens jointly overlap the corresponding sub-beams on the focal plane of the focusing lens.
[0054] In some embodiments of the present disclosure, the number of sub-lenses in the fly-eye lens array matches the number of the plurality of parallel linear light beams.
[0055] The multiple parallel linear light beams are successively input into the first row of fly-eye lens arrays and the second row of fly-eye lens arrays and then output to the second lens combination, so that the light beams passing through the second lens combination form multiple linear light beams with overlapping rectangular areas at a preset distance position.
[0056] The number of sub-lenses in the fly-eye lens array matches the number of multiple parallel linear light beams. Multiple parallel linear light beams are successively input into the first row of fly-eye lens arrays and the second row of fly-eye lens arrays to divide the light into multiple small areas of light sources, which are output to the second lens combination to form multiple linear light beams with overlapping rectangular areas at a preset distance.
[0057] In some embodiments of the present disclosure, the energy density of the preset light beam is 250-400 millijoules per square centimeter.
[0058] In some embodiments of the present disclosure, the balanced light beam generating device further includes a telecentric lens for achieving beam expansion of the preset light beam.
[0059] In order to form a uniform light characteristic, a telecentric lens may be used in combination with the built-in dilator depending on the situation. The uniform light formed by the above method is irradiated on the displacement platform. According to the length and area of the uniform light, the stich mark between the straight beam is less than that of the point beam, and the productivity of the same area under the same energy conditions can also be increased.
[0060] In some embodiments of the present disclosure, the balanced beam generating device further includes a solid laser and a beam shaper, wherein the solid laser is used to generate a Gaussian beam which is input into the beam shaper, and the beam shaper is used to shape the beam into a flat-top point beam which is output to a multi-beam splitter.
[0061] The laser emitted by a diode-pumped solid-state laser (DPSS) has the characteristic of Gaussian energy distribution, with high energy in the middle and low energy around. This makes the uneven energy distribution limit the use of such lasers in some applications. For example, in laser welding, the weld produced by Gaussian light is uneven; in solar cell dicing, Gaussian light will damage the material substrate; in biological experiments, the excessive central energy of Gaussian light will kill cells in the central area, etc. Figure 7 Schematic diagram of light beams of different shapes in one embodiment. A Gaussian point light beam can be converted into a flat-top point light beam, which has the characteristic of uniform spatial distribution of light intensity. A beam shaper, a microlens array, or the like can be used to convert a Gaussian point light beam into a flat-top point light beam.
[0062] In some embodiments of the present disclosure, a displacement platform and any of the above-described balanced beam generating devices are included, wherein the displacement platform is used to adjust the position of the product to be processed carried by the displacement platform so that the preset beam generated by the balanced beam generating device acts on the product.
[0063] It should be understood that, although the various steps in the flowcharts involved in the above-mentioned embodiments are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear explanation in this article, the execution of these steps does not have a strict order restriction, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above-mentioned embodiments can include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily to be carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.
[0064] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0065] The above-described embodiments only express several implementation methods of the present disclosure, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present disclosure, and these all belong to the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the attached claims.
Claims
1. A balanced beam generating device for surface treatment, characterized in that: Including multi-beam splitters, homogenizers and cutters, The multi-beam splitter is used to input a point-shaped light beam in a flat-top shape to obtain a plurality of parallel straight light beams, and the number of the straight light beams is the same as the number of reflective lenses in the multi-beam splitter; The homogenizer is used to input the multiple parallel linear light beams to obtain overlapping linear light beams; The cutter is used to adjust the shape of the slit in the cutter according to the shape of the preset light beam, so that the slit cuts the overlapping linear light beams to obtain the preset light beam with balanced energy.
2. The balanced light beam generating device according to claim 1, characterized in that: The multi-beam splitter comprises a plurality of parallel and hierarchically arranged reflective lenses; The reflective lens of the previous level obtains a transmitted light beam based on the input point light beam and transmits it to the reflective lens of the next level, wherein the reflective lens at the first level is used to input the point light beam in the form of a flat top; The reflective lenses at each level reflect the input point light beams to obtain corresponding reflected light beams, and the energy of each reflected light beam is within a preset energy threshold.
3. The balanced light beam generating device according to claim 2, characterized in that: The reflective lens at the last level in the multi-beam splitter is a total reflection lens.
4. The balanced light beam generating device according to claim 1, characterized in that: The homogenizer includes a first lens combination and a second lens combination. The first lens combination is used to perform multiple refractions on the multiple parallel linear light beams input thereto to obtain refracted light beams with reduced beam widths. The second lens combination is used to focus corresponding light beams in each refracted light beam.
5. The balanced light beam generating device according to claim 4, characterized in that: The first lens combination includes a double-row fly-eye lens array, and the fly-eye lens array is composed of a plurality of sub-lenses; The sub-lenses of the first row of fly-eye lens arrays and the sub-lenses of the second row of fly-eye lens arrays are mirror-imaged, and the spacing between the first row of fly-eye lens arrays and the second row of fly-eye lens arrays is greater than the focal length of the sub-lenses and less than twice the focal length of the sub-lenses.
6. The balanced light beam generating device according to claim 5, characterized in that: The number of sub-lenses in the fly-eye lens array matches the number of the plurality of parallel linear light beams, The multiple parallel linear light beams are successively input into the first row of fly-eye lens arrays and the second row of fly-eye lens arrays and then output to the second lens combination, so that the light beams passing through the second lens combination form multiple linear light beams with overlapping rectangular areas at a preset distance position.
7. The balanced light beam generating device according to claim 1, characterized in that: The energy density of the preset light beam is 250-400 millijoules per square centimeter.
8. The balanced light beam generating device according to claim 1, characterized in that: The balanced light beam generating device further comprises a telecentric lens for realizing beam expansion of the preset light beam.
9. The balanced light beam generating device according to claim 1, characterized in that: The balanced beam generating device further comprises a solid laser and a beam shaper, wherein the solid laser is used to generate a Gaussian beam and input it into the beam shaper, and the beam shaper is used to shape the beam into a flat-top point beam and output it to the multi-beam splitter.
10. A laser lift-off system, characterized in that: It comprises a displacement platform and the balanced light beam generating device as described in any one of claims 1 to 9, wherein the displacement platform is used to adjust the position of the product to be processed carried by it so that the preset light beam generated by the balanced light beam generating device acts on the product.