Rack and vacuum coating equipment

Abstract

The utility model discloses a rack and vacuum coating equipment, the rack is applied to the vacuum coating equipment, the vacuum coating equipment comprises an equipment body, the equipment body comprises a mechanical structure part and an electrical structure part, and the rack comprises a frame assembly and an isolation assembly. The frame assembly is provided with a mounting space; the isolation assembly is connected with the frame assembly, the isolation assembly is arranged in the installation space to divide the installation space into a first installation space and a second installation space, the first installation space is used for placing the electrical structure part, and the second installation space is used for placing the mechanical structure part. According to the rack, a mechanical structure part and an electrical structure part in the vacuum coating equipment can be separated.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating equipment, and in particular to a frame and vacuum coating equipment. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating equipment that needs to be coated under a high vacuum degree. The frame is a component of the vacuum coating machine, which plays the role of carrying and fixing the various parts and components of the vacuum coating machine so that the vacuum coating machine can operate normally. In traditional vacuum coating machines, the frame of the vacuum coating machine cannot completely separate the mechanical structure part from the electrical structure part inside the vacuum coating machine. The mechanical structure part and the electrical structure part are basically placed in the same space. In this way, various vibrations, oil stains and dust of the mechanical structure part will cause damage to the electrical structure part, further affecting the safety and service life of the electrical structure part. Utility Model Content

[0003] In view of this, the purpose of the present application is to overcome the deficiencies in the prior art and to provide a frame that can separate the mechanical structure part and the electrical structure part inside the vacuum coating equipment.

[0004] The present application also provides a vacuum coating device.

[0005] To achieve the above objectives, the technical solutions adopted in this application are as follows:

[0006] The frame according to the first aspect of the present application is applied to a vacuum coating device, wherein the vacuum coating device comprises a device body, wherein the device body comprises a mechanical structure part and an electrical structure part, and the frame comprises:

[0007] A frame assembly, wherein the frame assembly is provided with an installation space;

[0008] An isolation component is connected to the frame component and is disposed in the installation space to divide the installation space into a first installation space and a second installation space, wherein the first installation space is used for placing the electrical structure part and the second installation space is used for placing the mechanical structure part.

[0009] The rack of the present application has the following advantages:

[0010] In the above-mentioned rack, the isolation component can be arranged in the installation space of the frame component to divide the installation space into a first installation space and a second installation space. At the same time, the electrical structure part of the equipment body can be placed in the first installation space, and the mechanical structure part can be placed in the second installation space. In this way, the mechanical structure part and the electrical structure part can be isolated by the isolation component to avoid various vibrations, oil stains and dust of the mechanical structure part from causing damage to the electrical structure part, thereby further reducing the impact on the safety of use and service life of the electrical structure part.

[0011] According to a rack of an embodiment of the first aspect of the present application, the frame assembly includes a first frame, a second frame, a third frame and a fourth frame, the first frame and the second frame are spaced apart along a first direction, one end of the third frame along the first direction is connected to one end of the first frame along a second direction, the other end of the third frame along the first direction is connected to one end of the second frame along the second direction, one end of the fourth frame along the first direction is connected to the other end of the first frame along the second direction, and the other end of the fourth frame along the first direction is connected to the other end of the second frame along the second direction;

[0012] The first direction is perpendicular to the second direction, and the first frame, the second frame, the third frame and the fourth frame are arranged to define the installation space.

[0013] According to the rack of the embodiment of the first aspect of the present application, the frame assembly also includes a fifth frame, the fifth frame is arranged between the first frame and the second frame, and the fifth frame is arranged parallel to the first frame and the second frame along the first direction, one end of the fifth frame along the second direction is connected to the third frame, the other end of the fifth frame along the second direction is connected to the fourth frame, and the isolation assembly is connected to the fifth frame.

[0014] According to the rack of the embodiment of the first aspect of the present application, the fifth frame has a first connection portion and a second connection portion spaced apart from the first connection portion along a third direction, in the second direction, two ends of the first connection portion are respectively connected to the third frame and the fourth frame, and two ends of the second connection portion are connected to the third frame and the fourth frame, the fifth frame further has a third connection portion and a fourth connection portion, two ends of the third connection portion are respectively connected to the first connection portion and the second connection portion, two ends of the fourth connection portion are respectively connected to the third frame and the fourth frame, the third connection portion and the fourth connection portion are cross-arranged to define a plurality of connection planes between the first connection portion and the second connection portion, and the isolation assembly includes a plurality of isolation members, each of which is arranged on one of the connection planes;

[0015] Wherein, the third direction is perpendicular to the second direction and the first direction.

[0016] According to the rack of the embodiment of the first aspect of the present application, the frame assembly further includes a sixth frame, the sixth frame is arranged between the fifth frame and the first frame, and the sixth frame is arranged parallel to the first frame, one end of the sixth frame along the second direction is connected to the third frame, and the other end of the sixth frame along the second direction is connected to the fourth frame;

[0017] Wherein, the sixth frame is arranged close to the fifth frame.

[0018] According to the rack of the embodiment of the first aspect of the present application, the frame assembly further includes a seventh frame, the seventh frame is arranged between the fifth frame and the first frame, and the seventh frame is arranged at an angle to the first frame, one end of the seventh frame along the second direction is connected to the third frame, and the other end of the seventh frame along the second direction is connected to the fourth frame;

[0019] The seventh frame is disposed close to one end of the first frame along a third direction, and the third direction is perpendicular to the second direction and the first direction.

[0020] According to the rack of the embodiment of the first aspect of the present application, the frame assembly further includes an eighth frame, the eighth frame is arranged between the fifth frame and the first frame, and the eighth frame is arranged at an angle to the first frame, one end of the eighth frame along the first direction is connected to the fifth frame, and the other end of the eighth frame along the first direction is connected to the first frame;

[0021] Wherein, the eighth frame and the seventh frame are respectively arranged at two ends of the first frame along the third direction.

[0022] According to the rack of the embodiment of the first aspect of the present application, the frame assembly also includes a ninth frame, the ninth frame is arranged between the second frame and the fifth frame, and the ninth frame is arranged parallel to the fourth frame, one end of the ninth frame along the first direction is connected to the fifth frame, and the other end of the ninth frame along the first direction is connected to the second frame.

[0023] According to the rack of the embodiment of the first aspect of the present application, the frame assembly also includes a tenth frame, which is arranged between the second frame and the fifth frame, one end of the tenth frame along the first direction is connected to the fifth frame, and the other end of the tenth frame along the first direction is connected to the second frame.

[0024] A vacuum coating device according to an embodiment of the second aspect of the present application includes:

[0025] The device body includes a mechanical structure part and an electrical structure part;

[0026] As for the rack as described above, the first installation space of the rack is used for placing the mechanical structure part, and the second installation space of the rack is used for placing the electrical structure part.

[0027] The vacuum coating equipment of the present application has the following advantages:

[0028] In the above-mentioned vacuum coating equipment, since the above-mentioned frame can isolate the mechanical structure part and the electrical structure part of the equipment body, it is possible to avoid various vibrations, oil stains and dust of the mechanical structure part from causing damage to the electrical structure part, thereby further reducing the impact on the safety of use and service life of the electrical structure part. In this way, the above-mentioned vacuum coating equipment has a longer service life and better quality of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 The structure diagram of the rack of the present application is shown Figure 1 ;

[0031] Figure 2 The structure diagram of the rack of the present application is shown Figure 2 ;

[0032] Figure 3 The schematic diagram shows the structure of the frame assembly and the isolation assembly of the present application. Figure 1 ;

[0033] Figure 4 The schematic diagram shows the structure of the frame assembly and the isolation assembly of the present application. Figure 2 ;

[0034] Figure 5 A schematic diagram showing the structure of the framework assembly of the present application is shown;

[0035] Figure 6 A schematic diagram of the exploded structure of the frame assembly of the present application is shown;

[0036] Figure 7 A schematic diagram showing the structure of the isolation assembly and the fifth frame of the present application is shown;

[0037] Figure 8 The structure diagram of the vacuum coating equipment of the present application is shown in FIG. Figure 1 ;

[0038] Fig. 9 The structure diagram of the vacuum coating equipment of the present application is shown in FIG. Figure 2 .

[0039] Description of main component symbols:

[0040] 10- rack;

[0041] 100-frame assembly; 101-installation space; 1011-first installation space; 1012-second installation space; 102-first frame; 103-second frame; 104-third frame; 105-fourth frame; 1051-avoidance space; 106-fifth frame; 1061-first connection part; 1062-second connection part; 1063-third connection part; 1064-fourth connection part; 1065-connection plane; 107-sixth frame; 108-seventh frame; 109-eighth frame; 110-ninth frame; 111-tenth frame; 112-detachable connection part;

[0042] 200-isolating component; 210-isolating member; 211-avoiding through hole;

[0043] 300-First cabinet door sealing plate;

[0044] 400-Second cabinet door sealing plate;

[0045] 500- Third cabinet door sealing plate;

[0046] 600-first closing board;

[0047] 700-second sealing plate; 710-heat dissipation hole;

[0048] 20-equipment body; 21-mechanical structure part; 22-electrical structure part; 201-vacuum coating structure; 202-heat dissipation structure; 203-vacuum pump. DETAILED DESCRIPTION

[0049] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0050] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0051] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0052] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0053] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0054] Reference Figure 3 , Figure 4 , Figure 5 as well as Figure 8 As shown, the rack 10 involved in the embodiment of the present application is applied to a vacuum coating device (not shown). The vacuum coating device includes an equipment body 20 (not shown). The equipment body 20 includes a mechanical structure part 21 (not shown) and an electrical structure part 22 (not shown). The rack 10 includes: a frame assembly 100 and an isolation assembly 200.

[0055] Specifically, the frame assembly 100 is provided with an installation space 101; the isolation assembly 200 is connected to the frame assembly 100, and the isolation assembly 200 is arranged in the installation space 101 to divide the installation space 101 into a first installation space 1011 and a second installation space 1012, the first installation space 1011 is used for placing the electrical structure part 22, and the second installation space 1012 is used for placing the mechanical structure part 21.

[0056] In the above-mentioned rack 10, the isolation component 200 can be set in the installation space 101 of the frame component 100 to divide the installation space 101 into a first installation space 1011 and a second installation space 1012. At the same time, the electrical structure part 22 of the equipment body 20 can be placed in the first installation space 1011, and the mechanical structure part 21 can be placed in the second installation space 1012. In this way, the mechanical structure part 21 and the electrical structure part 22 can be isolated by the isolation component 200 to prevent various vibrations, oil stains and dust of the mechanical structure part 21 from damaging the electrical structure part 22, thereby further reducing the impact on the safety of use and service life of the electrical structure part 22.

[0057] Reference Figure 3 , Figure 4 as well as Figure 6As shown, the frame assembly 100 includes a first frame 102, a second frame 103, a third frame 104 and a fourth frame 105. The first frame 102 and the second frame 103 are spaced apart along the first direction, one end of the third frame 104 along the first direction is connected to one end of the first frame 102 along the second direction, the other end of the third frame 104 along the first direction is connected to one end of the second frame 103 along the second direction, one end of the fourth frame 105 along the first direction is connected to the other end of the first frame 102 along the second direction, and the other end of the fourth frame 105 along the first direction is connected to the other end of the second frame 103 along the second direction;

[0058] The first direction is perpendicular to the second direction, and the first frame 102 , the second frame 103 , the third frame 104 and the fourth frame 105 are arranged to define the installation space 101 .

[0059] It should be noted that the first direction is Figure 3 The direction indicated by x, the second direction is Figure 3 The direction that y points to.

[0060] It can be understood that since the other end of the third frame 104 along the first direction is connected to one end of the second frame 103 along the second direction, one end of the fourth frame 105 along the first direction is connected to the other end of the first frame 102 along the second direction, and the other end of the fourth frame 105 along the first direction is connected to the other end of the second frame 103 along the second direction, a hexahedron can be formed by connecting the first frame 102, the second frame 103, the third frame 104 and the fourth frame 105. Preferably, in the above-mentioned embodiment, the hexahedron is a rectangular parallelepiped. In this way, the interior of the rectangular parallelepiped is the installation space 101, and the mechanical structure part 21 and the electrical structure part 22 can be installed in the installation space 101.

[0061] Specifically, in the above-mentioned embodiment, the first frame 102 and the second frame 103 are both arranged perpendicular to the ground, and the third frame 104 and the fourth frame 105 are both arranged parallel to the ground.

[0062] Continue to refer to Figure 3 , Figure 4 as well as Figure 6 As shown, the frame assembly 100 also includes a fifth frame 106, which is arranged between the first frame 102 and the second frame 103, and the fifth frame 106 is arranged parallel to the first frame 102 and the second frame 103 along the first direction, one end of the fifth frame 106 along the second direction is connected to the third frame 104, and the other end of the fifth frame 106 along the second direction is connected to the fourth frame 105, and the isolation assembly 200 is connected to the fifth frame 106.

[0063] It can be understood that since the fifth frame 106 is arranged parallel to the first frame 102 and the second frame 103 along the first direction, one end of the fifth frame 106 along the second direction is connected to the third frame 104, and the other end of the fifth frame 106 along the second direction is connected to the fourth frame 105, therefore, the fifth frame 106 can be fixed in the installation space 101, and since the isolation component 200 is connected to the fifth frame 106, the isolation component 200 can be connected to the frame component 100 through the fifth frame 106, so that the isolation component 200 can be fixed in the installation space 101, and the installation space 101 is divided into a first installation space 1011 and a second installation space 1012, so as to isolate the mechanical structure part 21 from the electrical structure part 22, avoid various vibrations, oil stains and dust of the mechanical structure part 21 from causing damage to the electrical structure part 22, and further reduce the impact on the safety of use and service life of the electrical structure part 22.

[0064] Reference Figure 7 As shown, the fifth frame 106 has a first connection portion 1061 and a second connection portion 1062 spaced apart from the first connection portion 1061 along the third direction. In the second direction, two ends of the first connection portion 1061 are connected to the third frame 104 and the fourth frame 105 respectively, and two ends of the second connection portion 1062 are connected to the third frame 104 and the fourth frame 105. The fifth frame 106 also has a third connection portion 1063 and a fourth connection portion 1064. Two ends of the third connection portion 1063 are connected to the first connection portion 1061 and the second connection portion 1062 respectively, and two ends of the fourth connection portion 1064 are connected to the third frame 104 and the fourth frame 105 respectively. The third connection portion 1063 and the fourth connection portion 1064 are cross-arranged to define a plurality of connection planes 1065 between the first connection portion 1061 and the second connection portion 1062. The isolation assembly 200 includes a plurality of isolation members 210, and each isolation member 210 is arranged on a connection plane 1065.

[0065] The third direction is perpendicular to the second direction and the first direction.

[0066] It should be noted that the third party Figure 3 The direction indicated by z.

[0067] Specifically, in the above-mentioned embodiment, an isolation member 210 can be set on each connection plane 1065, or part of the connection plane 1065 can be hollowed out. The specific situation depends on the installation position of the mechanical structure part 21 and must meet the conditions of isolating the mechanical structure part 21 from the electrical structure part 22.

[0068] It can be understood that since the third connection part 1063 and the fourth connection part 1064 are cross-arranged between the first connection part 1061 and the second connection part 1062, the plane between the first connection part 1061 and the second connection part 1062 can be divided into multiple connection planes 1065 by the third connection part 1063 and the fourth connection part 1064, so as to install the isolation part 210 on the multiple connection planes 1065. In this way, the isolation part 210 can be easily installed and disassembled. At the same time, the installation quantity of the isolation part 210 can be determined according to the installation position of the mechanical structure part 21, so as to reduce costs and facilitate the connection of pipelines or lines.

[0069] Specifically, in the above-mentioned embodiment, each isolating member 210 is provided with an avoidance through hole 211 , and the mechanical structure portion 21 can be electrically connected to the electrical structure portion 22 through the avoidance through hole 211 .

[0070] Reference Figure 3 , Figure 6 as well as Figure 8 As shown, the frame assembly 100 further includes a sixth frame 107, which is disposed between the fifth frame 106 and the first frame 102, and the sixth frame 107 is disposed parallel to the first frame 102, one end of the sixth frame 107 along the second direction is connected to the third frame 104, and the other end of the sixth frame 107 along the second direction is connected to the fourth frame 105;

[0071] The sixth frame 107 is disposed close to the fifth frame 106 .

[0072] It can be understood that the sixth frame 107 is used to fix a part of the structure of the electrical structure part 22. Since the sixth frame 107 is arranged in parallel with the first frame 102 and the sixth frame 107 is arranged close to the fifth frame 106, a part of the structure of the electrical structure part 22 can be fixed at a position close to the fifth frame 106 and arranged parallel to the fifth frame 106. Therefore, a part of the structure of the electrical structure part 22 can be integrated on a plane parallel to the fifth frame 106 to facilitate maintenance of the electrical structure part 22 of this part. At the same time, heat dissipation space can be reserved between the electrical structure part 22 and the first frame 102.

[0073] Specifically, refer to Figure 1 As shown, in the above-mentioned embodiment, a first cabinet door sealing plate 300 is installed on the first frame 102, and the first installation space 1011 can be closed by the first cabinet door sealing plate 300 to protect the electrical structure part 22 in the first installation space 1011. At the same time, when the first cabinet door sealing plate 300 is opened, a part of the structure of the electrical structure part 22 arranged on the sixth frame 107 can be directly inspected and maintained.

[0074] Reference Figure 3 , Figure 6 as well as Figure 8 As shown, the frame assembly 100 further includes a seventh frame 108, which is disposed between the fifth frame 106 and the first frame 102, and the seventh frame 108 is disposed at an angle to the first frame 102, one end of the seventh frame 108 along the second direction is connected to the third frame 104, and the other end of the seventh frame 108 along the second direction is connected to the fourth frame 105;

[0075] The seventh frame 108 is disposed close to one end of the first frame 102 along the third direction.

[0076] It can be understood that the seventh frame 108 is used to fix a part of the structure of the electrical structure part 22. Since the seventh frame 108 is arranged at an angle with the first frame 102, and the seventh frame 108 is arranged close to one end of the first frame 102 along the third direction, a part of the structure of the electrical structure part 22 can be gathered at one end of the first frame 102 along the third direction to facilitate maintenance of the electrical structure part 22 of this part. At the same time, heat dissipation space can be reserved between the electrical structure part 22 and the first frame 102.

[0077] Continue to refer to Figure 3 , Figure 6 as well as Figure 8 As shown, the frame assembly 100 further includes an eighth frame 109, which is disposed between the fifth frame 106 and the first frame 102, and the eighth frame 109 is disposed at an angle to the first frame 102, one end of the eighth frame 109 along the first direction is connected to the fifth frame 106, and the other end of the eighth frame 109 along the first direction is connected to the first frame 102;

[0078] The eighth frame 109 and the seventh frame 108 are respectively disposed at two ends of the first frame 102 along the third direction.

[0079] It can be understood that the eighth frame 109 is used to fix and place a part of the structure of the electrical structure part 22. Since the eighth frame 109 is set at an angle with the first frame 102, and the eighth frame 109 and the seventh frame 108 are respectively set at the two ends of the first frame 102 along the third direction, a part of the structure of the electrical structure part 22 can be gathered at one end of the first frame 102 away from the seventh frame 108 along the third direction, so as to facilitate the maintenance of the electrical structure part 22 of this part. At the same time, a heat dissipation space can be reserved between the electrical structure part 22 and the first frame 102. In this way, the electrical structure part 22 can be fixed in the rack 10 by the sixth frame 107, the seventh frame 108 and the eighth frame 109. At the same time, a heat dissipation space can be reserved between the electrical structure part 22 and the first frame 102, thereby improving the heat dissipation performance of the electrical structure part 22 and extending the service life of the electrical structure part 22.

[0080] Specifically, in the above-mentioned embodiment, the sixth frame 107, the seventh frame 108 and the eighth frame 109 can all be detachably arranged between the fifth frame 106 and the first frame 102, and the sixth frame 107 can adjust the installation position along the first direction, the seventh frame 108 can adjust the installation position along the third direction, and the eighth frame 109 can adjust the installation position along the second direction, which can better adapt to the size and installation position of the electrical control components.

[0081] Reference Figure 4 , Figure 6 as well as Fig. 9 As shown, the frame assembly 100 also includes a ninth frame 110, which is disposed between the second frame 103 and the fifth frame 106, and the ninth frame 110 is disposed parallel to the fourth frame 105, one end of the ninth frame 110 along the first direction is connected to the fifth frame 106, and the other end of the ninth frame 110 along the first direction is connected to the second frame 103.

[0082] It can be understood that the ninth frame 110 is used for fixing the vacuum coating structure 201 of the mechanical structure part 21. Since the ninth frame 110 is arranged in parallel with the fourth frame 105, one end of the ninth frame 110 along the first direction is connected to the fifth frame 106, and the other end of the ninth frame 110 along the first direction is connected to the second frame 103, that is, the ninth frame 110 can be arranged parallel to the ground. In this way, the vacuum coating structure 201 can be fixedly placed on the side of the sixth frame 107 away from the fourth frame 105, so that the vacuum coating structure 201 can be firmly placed on the ninth frame 110.

[0083] Continue to refer to Figure 4 , Figure 6 as well as Fig. 9As shown, the frame assembly 100 also includes a tenth frame 111, which is disposed between the second frame 103 and the fifth frame 106, one end of the tenth frame 111 along the first direction is connected to the fifth frame 106, and the other end of the tenth frame 111 along the first direction is connected to the second frame 103.

[0084] It can be understood that the tenth frame 111 is used to fix the heat dissipation structure 202 of the mechanical structure part 21. Since the tenth frame 111 is arranged between the second frame 103 and the fifth frame 106, the heat dissipation structure 202 of the mechanical structure part 21 can be fixed in the second installation space 1012 through the tenth frame 111, so as to dissipate heat for the mechanical structure part 21.

[0085] Reference Figure 4 As shown Fig. 9 As shown, in the above-mentioned embodiment, the portion of the fourth frame 105 located in the second space is provided with an avoidance space 1051, and the vacuum pump 203 of the mechanical structure part 21 is directly fixed to the ground through the avoidance space 1051, thereby preventing the vibration of the vacuum pump 203 from affecting the stability of the electrical connection of the electrical structure part 22.

[0086] Specifically, refer to Figure 4 As shown, in the above embodiment, the connection between the fourth frame 105 and the second frame 103 has a detachable connecting portion 112, and the detachable connecting portion 112 is one of the edges of the avoidance space 1051. When the detachable connecting portion 112 is removed, the vacuum pump 203 can enter the avoidance space 1051 through the gap at the position of the detachable connecting portion 112, so as to facilitate the installation of the vacuum pump 203.

[0087] It is understandable that due to the large size and weight of the vacuum pump 203, it can generally only be hoisted by a crane, and it is very difficult to move it by manpower alone. When the detachable connection is removed, the installation of the vacuum pump 203 can be completed by pushing it, and since the vacuum pump 203 is directly fixed on the ground, the vibration generated by the vacuum pump 203 can be directly absorbed by the ground, thereby reducing the impact on the entire machine.

[0088] Specifically, refer to Figure 2 As shown, in the above-mentioned embodiment, a second cabinet door sealing plate 400 is installed on the second frame 103, and the second installation space 1012 can be closed by the second cabinet door sealing plate 400 to protect the mechanical structure part 21 in the second installation space 1012. At the same time, when the second cabinet door sealing plate 400 is opened, the mechanical structure part 21 in the second installation space 1012 can be directly inspected and maintained.

[0089] Specifically, refer to Figure 2As shown, in the above embodiment, a third cabinet door sealing plate 500 is installed between the first frame 102 and the second frame 103. When the third cabinet door sealing plate 500 is opened, the mechanical structure part 21 and the electrical structure part 22 in the installation space 101 can be inspected and maintained.

[0090] Specifically, refer to Figure 1 As shown, in the above embodiment, a first sealing plate 600 is further installed between the first frame 102 and the second frame 103, and the first sealing plate 600 and the third cabinet door sealing plate 500 are symmetrically arranged at both ends of the fifth frame along the first direction.

[0091] Specifically, refer to Figure 1 As shown, in the above embodiment, a second sealing plate 700 is installed on the fourth frame 105 , and a portion of the second sealing plate 700 corresponding to the electrical structure part 22 is provided with a plurality of heat dissipation holes 710 to achieve heat dissipation of the electrical structure part 22 .

[0092] Reference Figure 8 as well as Fig. 9 As shown, the vacuum coating equipment involved in the embodiment of the present application includes: an equipment body 20 and the above-mentioned frame 10.

[0093] Specifically, the device body 20 includes a mechanical structure part 21 and an electrical structure part 22 ; the first installation space 1011 of the rack 10 is used for placing the mechanical structure part 21 , and the second installation space 1012 of the rack 10 is used for placing the electrical structure part 22 .

[0094] In the above-mentioned vacuum coating equipment, since the above-mentioned frame 10 can isolate the mechanical structure part 21 of the equipment body 20 from the electrical structure part 22, it is possible to avoid various vibrations, oil stains and dust of the mechanical structure part 21 from causing damage to the electrical structure part 22, thereby further reducing the impact on the safety of use and service life of the electrical structure part 22. In this way, the above-mentioned vacuum coating equipment has a longer service life and better quality of use.

[0095] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0096] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A rack, characterized in that: Applied to vacuum coating equipment, the vacuum coating equipment includes an equipment body, the equipment body includes a mechanical structure part and an electrical structure part, and the frame includes: A frame assembly, wherein the frame assembly is provided with an installation space; An isolation component is connected to the frame component and is disposed in the installation space to divide the installation space into a first installation space and a second installation space, wherein the first installation space is used for placing the electrical structure part and the second installation space is used for placing the mechanical structure part.

2. The rack according to claim 1, characterized in that: The frame assembly comprises a first frame, a second frame, a third frame and a fourth frame, the first frame and the second frame are spaced apart along a first direction, one end of the third frame along the first direction is connected to one end of the first frame along a second direction, the other end of the third frame along the first direction is connected to one end of the second frame along the second direction, one end of the fourth frame along the first direction is connected to the other end of the first frame along the second direction, and the other end of the fourth frame along the first direction is connected to the other end of the second frame along the second direction; The first direction is perpendicular to the second direction, and the first frame, the second frame, the third frame and the fourth frame are arranged to define the installation space.

3. The rack according to claim 2, characterized in that: The frame assembly also includes a fifth frame, which is arranged between the first frame and the second frame, and is arranged parallel to the first frame and the second frame along the first direction, one end of the fifth frame along the second direction is connected to the third frame, and the other end of the fifth frame along the second direction is connected to the fourth frame, and the isolation assembly is connected to the fifth frame.

4. The rack according to claim 3, characterized in that: The fifth frame comprises a first connection portion and a second connection portion spaced apart from the first connection portion along a third direction. In the second direction, two ends of the first connection portion are connected to the third frame and the fourth frame respectively, and two ends of the second connection portion are connected to the third frame and the fourth frame respectively. The fifth frame further comprises a third connection portion and a fourth connection portion. Two ends of the third connection portion are connected to the first connection portion and the second connection portion respectively, and two ends of the fourth connection portion are connected to the third frame and the fourth frame respectively. The third connection portion and the fourth connection portion are cross-arranged to define a plurality of connection planes between the first connection portion and the second connection portion. The isolation assembly comprises a plurality of isolation members, and each of the isolation members is arranged on one of the connection planes. Wherein, the third direction is perpendicular to the second direction and the first direction.

5. The rack according to claim 3, characterized in that: The frame assembly further includes a sixth frame, which is disposed between the fifth frame and the first frame and is disposed in parallel with the first frame, one end of the sixth frame along the second direction is connected to the third frame, and the other end of the sixth frame along the second direction is connected to the fourth frame; Wherein, the sixth frame is arranged close to the fifth frame.

6. The frame according to claim 3, characterized in that: The frame assembly further includes a seventh frame, the seventh frame is arranged between the fifth frame and the first frame, and the seventh frame is arranged at an angle with the first frame, one end of the seventh frame along the second direction is connected to the third frame, and the other end of the seventh frame along the second direction is connected to the fourth frame; The seventh frame is disposed close to one end of the first frame along a third direction, and the third direction is perpendicular to the second direction and the first direction.

7. The frame according to claim 6, characterized in that: The frame assembly further includes an eighth frame, the eighth frame is arranged between the fifth frame and the first frame, and the eighth frame is arranged at an angle with the first frame, one end of the eighth frame along the first direction is connected to the fifth frame, and the other end of the eighth frame along the first direction is connected to the first frame; Wherein, the eighth frame and the seventh frame are respectively arranged at two ends of the first frame along the third direction.

8. The frame according to claim 3, characterized in that: The frame assembly also includes a ninth frame, which is arranged between the second frame and the fifth frame, and the ninth frame is arranged parallel to the fourth frame, one end of the ninth frame along the first direction is connected to the fifth frame, and the other end of the ninth frame along the first direction is connected to the second frame.

9. The frame according to claim 3, characterized in that: The frame assembly further includes a tenth frame, which is disposed between the second frame and the fifth frame, one end of the tenth frame along the first direction is connected to the fifth frame, and the other end of the tenth frame along the first direction is connected to the second frame.

10. A vacuum coating device, characterized in that: include: The device body includes a mechanical structure part and an electrical structure part; The rack according to any one of claims 1 to 9, wherein the first installation space of the rack is used for placing the mechanical structure part, and the second installation space of the rack is used for placing the electrical structure part.

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