Drawing type carrier boat sliding table and tubular PECVD (plasma enhanced chemical vapor deposition) purification table

Abstract

The utility model provides a pull-out type boat carrying sliding table and a tubular PECVD purification table. The pull-out type boat carrying sliding table comprises a hand-held handle and a bearing structure, the hand-held handle extends in the transverse direction perpendicular to the push-pull direction and is provided with a first end and a second end which are opposite, the bearing structure is used for bearing the graphite boat, and the bearing structure is arranged on the side, facing the temporary storage frame, of the hand-held handle in the push-pull direction; the first end of the hand-held handle and the second end of the hand-held handle are both fixedly connected with the bearing structure, and the sliding assembly is in sliding connection with the two sides of the bearing structure in the transverse direction so that the bearing structure can move horizontally in the push-pull direction relative to the buffering frame along with the push-pull action of the hand-held handle; and the fixing assembly is fixedly arranged on the side, opposite to the hand-held handle, of the sliding assembly in the transverse direction, and the fixing assembly is used for being fixedly connected with a stand column of the temporary storage frame. According to the drawing type boat carrying sliding table, the body injury of a carrying worker is avoided, the carrying safety of the graphite boat is ensured, the boat falling in the carrying process is avoided, and the production quality of battery pieces is improved.

Description

Technical Field

[0001] The present application relates to the technical field of graphite boat handling equipment, and in particular to a pull-out boat carrier slide and a tubular PECVD clean bench. Background Art

[0002] There are two types of coating processes in the production process of silicon solar cells: front coating and back coating. The front and back coating are carried out using tubular PECVD (plasma enhanced chemical vapor deposition) equipment. The coating process of tubular PECVD equipment is to use a graphite boat as a carrier to insert the cell into the graphite boat, and then place the graphite boat in the reactor tube of the tubular PECVD equipment for chemical vapor deposition to complete the coating. The graphite boat of a single tubular PECVD device needs to be cleaned after being used 50-60 times. The single tubular PECVD device is provided with a tubular PECVD clean bench to store multiple graphite boats. The graphite boats to be cleaned need to be manually carried out of the tubular PECVD clean bench for cleaning. The bearing parts of the graphite boats in each buffer position in the buffer rack for storing the graphite boats on the tubular PECVD clean bench are fixed on the buffer rack and cannot move relative to the rack. When carrying the graphite boat, the porter needs to bend down and lean into the buffer position. Due to the heavy weight of the graphite boat, the handling process involves sideways twisting of the waist and bending over and lifting up, which are easy to cause twisting injuries to the body. Therefore, the porter is prone to physical injury, which increases the risk of falling off the boat, making the graphite boat easily damaged, and affecting the production quality of the battery cells. Utility Model Content

[0003] The present application provides a pull-out boat-carrying slide, which is used to carry a graphite boat in a buffer rack of a tubular PECVD clean bench and to transport the graphite boat in a horizontal push-pull manner, comprising:

[0004] The hand handle extends in a lateral direction perpendicular to the push-pull direction and has a first end and a second end opposite to each other.

[0005] The bearing structure is used to bear the graphite boat. In the push-pull direction, the bearing structure is arranged on the side of the hand handle facing the buffer rack. The first end of the hand handle and the second end of the hand handle are fixedly connected to the bearing structure.

[0006] A sliding assembly is slidably connected to both sides of the bearing structure in the lateral direction, so that the bearing structure moves horizontally relative to the buffer rack along the push-pull direction following the push-pull action of the hand-holding handle;

[0007] The fixed component is fixedly arranged on the side of the sliding component facing away from the hand handle in the transverse direction, and the fixed component is used to be fixedly connected to the column of the cache rack.

[0008] The first aspect of the present application provides a pull-out boat carrier slide, and the porter can stand independently and hold the handgrip to pull the bearing structure carrying the graphite boat horizontally out of the buffer rack through the setting of the sliding component. The porter can easily and labor-savingly carry the graphite boat to the graphite boat transport vehicle and then send it for cleaning without bending over or leaning into the buffer rack. The empty bearing structure can be pulled out of the buffer rack by the handgrip, and the cleaned graphite boat can be placed on the bearing structure, and then the bearing structure can be pushed into the buffer rack by the handgrip, so as to realize horizontal push-pull transportation of the graphite boat on the buffer rack (including sending out the graphite boat and inputting the graphite boat). The setting of the pull-out boat carrier slide avoids physical injury to the porter, ensures the safety of graphite boat transportation, avoids the boat from falling during transportation, and improves the production quality of battery cells.

[0009] In some optional embodiments of the first aspect of the present application, the bearing structure includes:

[0010] The handrail fixing plate assembly is fixedly connected to the bearing structure and includes two handrail fixing plates respectively arranged at the first end and the second end of the handrail.

[0011] The hand handle fixing plate is an L-shaped plate and its thickness direction is in the same direction as the horizontal direction. The hand handle fixing plate includes a short rectangular plate portion and a long rectangular plate portion. The short rectangular plate portion is fixedly connected to the end of the hand handle and is perpendicular to each other. The long rectangular plate portion is located below the hand handle and the length direction of the long rectangular plate portion is perpendicular to the horizontal direction.

[0012] In some optional embodiments of the first aspect of the present application, the bearing structure further includes:

[0013] The press-type sensor is arranged on the pressure-bearing side in the thickness direction of the long rectangular plate and is located at the part of the pressure-bearing side away from the short rectangular plate. The pressure-bearing side is arranged facing the hand handle. The press-type sensor is used to detect whether the graphite boat is installed in place when placing the graphite boat.

[0014] In some optional embodiments of the first aspect of the present application, the sliding assembly is a two-stage sliding assembly, and the sliding assembly is slidably connected to the hand handle fixing plate group.

[0015] In some optional embodiments of the first aspect of the present application, the sliding assembly includes:

[0016] The first-stage sliding assembly comprises two sets of first-stage guide rails and first sliders which are respectively located at the first end and the second end and which are slidably matched with each other. The first-stage guide rails are fixedly connected to the fixing assembly.

[0017] The second-stage sliding assembly is disposed laterally on the side of the first-stage sliding assembly facing away from the fixed assembly. The second-stage sliding assembly includes two second-stage sliding subassemblies located at the first end and the second end, respectively. The second-stage sliding subassembly includes a folding plate seat and a second sliding block and a second-stage guide rail slideway that slide with each other.

[0018] The folding plate seat includes a vertical plate portion and a horizontal plate portion which are perpendicular to each other. The vertical plate portion is arranged parallel to the long rectangular plate portion and is fixedly connected to the first slider. A second-level guide rail is fixedly arranged on the horizontal plate portion, and the second slider is fixedly connected to the long rectangular plate portion.

[0019] In some optional embodiments of the first aspect of the present application, the second sliding block is located on the bottom side surface in the thickness direction of the long rectangular plate portion, and the bottom side surface is opposite to the pressure-bearing side surface.

[0020] The load-bearing structure also includes:

[0021] The carrier plate has one end fixedly connected to the second slider at the first end facing away from the long rectangular plate portion in the horizontal direction, and the other end fixedly connected to the second slider at the second end facing away from the long rectangular plate portion.

[0022] In some optional embodiments of the first aspect of the present application, a tank chain is provided on the side of the transverse plate portion of the folding plate seat facing away from the second-stage guide rail slide, and the tank chain is used to accommodate and protect the external circuit of the push-type sensor.

[0023] In some optional embodiments of the first aspect of the present application, the fixing component includes:

[0024] A fixed side plate, used for fixed connection with the column of the cache rack;

[0025] A buckle-type fastener, used for locking the sliding assembly, comprises a hanging plate buckle body and a positioning pin. In the transverse direction, the hanging plate buckle body is in the shape of a long strip, the first end of the hanging plate buckle body and the positioning pin are arranged at intervals on the side of the fixed side plate facing the hand handle, the first end of the hanging plate buckle body is rotatably arranged on the fixed side plate, the hanging plate buckle body is formed with a card slot corresponding to the position of the positioning pin near the first end, and the second end of the hanging plate buckle body is a free end;

[0026] In some optional embodiments of the first aspect of the present application, when the hanging plate buckle body is fixed to the outer periphery of the positioning pin through the card slot, the hanging plate buckle body blocks the end of the folding plate seat close to the hand handle and the end of the hand handle fixing plate close to the hand handle to lock the sliding assembly.

[0027] When the hanging plate type buckle body is separated from the positioning pin, the locking of the sliding component is released, and the bearing structure can move horizontally along the push-pull direction relative to the fixed component.

[0028] A second aspect of the present application provides a tubular PECVD clean bench, comprising a buffer rack for storing graphite boats, on which the pull-out boat-carrying slide of the first aspect of the present application is arranged.

[0029] The tubular PECVD clean bench provided in the second aspect of the present application can realize the storage of multiple graphite boats. Since a pull-out boat carrier slide is provided, it is convenient for workers to take out the graphite boat placed on the pull-out boat carrier slide, and it is also convenient for workers to put the cleaned graphite boat into the empty pull-out boat carrier slide, thereby avoiding physical injuries caused by large movements (such as twisting or bending) during the transportation process of workers, improving the transportation efficiency, ensuring the safety and efficiency of battery production, avoiding the boat from falling due to improper transportation, and ensuring the smooth progress of the PECVD process.

[0030] In some optional embodiments of the second aspect of the present application, a plurality of graphite boat cache positions are vertically arranged on the cache rack, and among the plurality of graphite boat cache positions, a cache position whose height from the ground is equal to the height of the graphite boat transport vehicle is selected as a graphite boat pick-up and placement cache position, and the graphite boat pick-up and placement cache position is provided with a pull-out boat carrying slide.

[0031] In some optional embodiments of the second aspect of the present application, the height of the pull-out boat carrier slide from the ground is 75 cm to 85 cm. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0033] Figure 1 This is a simplified diagram of the structure of the cache rack in the tubular PECVD clean bench;

[0034] Figure 2 It is a schematic diagram of the three-dimensional structure of an embodiment of a pull-out boat carrier slide in the first aspect of the present application at an inclined viewing angle;

[0035] Figure 3 2. It is a top view of an embodiment of a pull-out boat carrier slideway according to the first aspect of the present application;

[0036] Figure 4 The first aspect of the present application is a pull-out boat slide Figure 1 a rear view of the illustrated embodiment;

[0037] Figure 5 It is a left view of the pull-out boat carrier slide of the first aspect of the present application;

[0038] Figure 6 This is a simplified structural diagram of a cache rack in an embodiment of a tubular PECVD clean bench in the second aspect of the present application;

[0039] Description of reference numerals:

[0040] Pull-out boat slide-10;

[0041] Handle-1; first end-1a; second end-1b;

[0042] Handle fixing plate-21; short rectangular plate portion-211; long rectangular plate portion-212; push-type sensor-22; push-type sensor mounting hole-221; carrier plate-23; tank chain-24;

[0043] First-stage sliding assembly-31; first-stage guide rail slide-311; first slider-312; second-stage sliding subassembly-32; folding plate seat-321; vertical plate portion-3211; horizontal plate portion-3212;

[0044] Second slider-322; Second guide rail slide-323;

[0045] Fixed side plate-41; hanging plate type buckle body-42; card slot-421; positioning pin-43;

[0046] Cache rack-5; column-51; graphite boat cache position-52; graphite boat pick-and-place cache position-53;

[0047] Graphite boat transporter-6;

[0048] Push and pull direction - Y; horizontal direction - X. DETAILED DESCRIPTION

[0049] The following will be combined with the attached Figure 1 To Attachment Figure 6 The technical solution of this application is described in detail.

[0050] like Figure 1 As shown, a tubular PECVD clean bench corresponding to the furnace tube is provided in the tubular PECVD equipment. In some examples, the buffer rack 5 in the tubular PECVD clean bench is used to store the cleaned or to-be-cleaned graphite boat. The cache rack 5 is divided into a plurality of graphite boat cache positions 52 by a plurality of graphite boat carrier plates 23. In a general tubular PECVD clean bench, the graphite boat carrier plates 23 are fixed to the columns 51 and cannot move relative to the columns 51. Therefore, when workers move the graphite boat onto or off the cache rack 5, they need to bend over and stretch their bodies, and put their hands into the cache rack 5 to move the graphite boat out, which can easily cause physical injuries. Various complex carrying movements can easily cause the porters to twist their shoulders or waists when carrying the graphite boat on or off the rack. When two people carry the graphite boat at the same time, the small space of the graphite boat cache position 52 may cause the two people to use uneven force and drop the boat, resulting in personal injury. The small space of the graphite boat cache position 52 may also easily cause the graphite boat to be bumped when lifting the boat. After the graphite boat is bumped and damaged, its conductivity is affected. During the process, interruptions, spraying of the boat, and other reasons may occur, resulting in failed slices, affecting the preparation quality of the battery cells.

[0051] In view of this, this application is filed.

[0052] like Figures 2 to 5 As shown, the first aspect of the present application provides a pull-out boat carrier slide 10 (the application environment of the pull-out boat carrier slide is as follows Figure 6 ), used for carrying a graphite boat in a buffer rack 5 of a tubular PECVD clean bench and for transporting the graphite boat in a horizontal push-pull manner, comprising:

[0053] The hand handle 1 extends in a horizontal direction X perpendicular to the push-pull direction Y, and has a first end 1a and a second end 1b opposite to each other.

[0054] The bearing structure is used to bear the graphite boat. In the push-pull direction Y, the bearing structure is arranged on the side of the hand-held handle 1 facing the buffer rack 5. The first end 1a of the hand-held handle 1 and the second end 1b of the hand-held handle 1 are both fixedly connected to the bearing structure.

[0055] A sliding assembly is slidably connected to the bearing structure on both sides in the transverse direction X, so that the bearing structure moves horizontally relative to the buffer shelf 5 along the push-pull direction Y following the push-pull action of the hand-held handle 1;

[0056] The fixed component is fixedly arranged on the side of the sliding component facing away from the hand handle 1 in the horizontal direction X, and the fixed component is used to be fixedly connected to the column 51 of the cache rack 5.

[0057] The first aspect of the present application provides a pull-out boat carrier slide 10, and the porter can stand independently and hold the handgrip 1 to pull the bearing structure carrying the graphite boat horizontally out of the buffer rack 5 through the setting of the sliding component. The porter can easily and labor-savingly carry the graphite boat to the graphite boat transport vehicle 6 and then send it for cleaning without bending over or leaning into the buffer rack. The empty bearing structure can also be pulled out of the buffer rack 5 by the handgrip 1, and the cleaned graphite boat can be placed on the bearing structure, and then the bearing structure can be pushed into the buffer rack 5 by the handgrip 1, so as to realize the horizontal push-pull transportation of the graphite boat on the buffer rack 5 (including sending out the graphite boat and inputting the graphite boat). The setting of the pull-out boat carrier slide 10 avoids physical injury to the porter, ensures the safety of the graphite boat transportation, avoids the boat from falling during transportation, and improves the production quality of battery cells.

[0058] In some optional embodiments of the first aspect of the present application, the bearing structure includes:

[0059] The handrail fixing plate 21 group is fixedly connected to the bearing structure, and includes two handrail fixing plates 21 respectively arranged at the first end 1a and the second end 1b of the handrail.

[0060] The hand handle fixing plate 21 is an L-shaped plate and its thickness direction is in the same direction as the horizontal direction X. The hand handle fixing plate 21 includes a short rectangular plate portion 211 and a long rectangular plate portion 212. The short rectangular plate portion 211 is fixedly connected to the end of the hand handle and is perpendicular to each other. The long rectangular plate portion 212 is located below the hand handle 1 and the length direction of the long rectangular plate portion 212 is perpendicular to the horizontal direction X.

[0061] In some optional embodiments of the first aspect of the present application, the bearing structure further includes:

[0062] The pressure sensor 22 is arranged on the pressure-bearing side surface in the thickness direction of the long rectangular plate portion 212 and is located at the part of the pressure-bearing side surface away from the short rectangular plate. The pressure-bearing side surface is arranged facing the hand handle 1. The pressure sensor 22 is used to detect whether the graphite boat is installed in place when placing the graphite boat.

[0063] In some examples of these embodiments, a plurality of push-type sensor mounting holes 221 are opened on the long rectangular plate portion 212 , and the push-type sensor 22 can be fixedly mounted on the long rectangular plate portion 212 by using threaded fasteners passing through the push-type sensor mounting holes 221 .

[0064] In some optional embodiments of the first aspect of the present application, the sliding assembly is a two-stage sliding assembly, and the sliding assembly is slidably connected to the hand handle fixing plate 21 group.

[0065] In these embodiments, the graphite boat is heavy, for example, up to 50 kg, and the sliding assembly is configured as a two-stage sliding assembly to enhance the load capacity of the sliding assembly, improve the load-bearing capacity of the sliding assembly, and avoid problems such as overloading of a single-stage sliding assembly causing deformation of the sliding assembly and causing the boat to fall.

[0066] In some optional embodiments of the first aspect of the present application, the sliding assembly includes:

[0067] The first-stage sliding assembly 31 comprises two sets of first-stage guide rails 311 and first sliders 312 respectively located at the first end 1a and the second end 1b and slidingly matched with each other, and the first-stage guide rails 311 are fixedly connected to the fixing assembly;

[0068] The second-stage sliding assembly is arranged on the side of the first-stage sliding assembly 31 facing away from the fixed assembly in the horizontal direction X. The second-stage sliding assembly includes two second-stage sliding subassemblies 32 located at the first end 1a and the second end 1b, respectively. The second-stage sliding subassembly 32 includes a folding plate seat 321 and a second sliding block 322 and a second-stage guide rail 323 that slidably cooperate with each other.

[0069] The folding plate seat 321 includes a vertical plate portion 3211 and a horizontal plate portion 3212 which are perpendicular to each other. The vertical plate portion 3211 is arranged in parallel with the long rectangular plate portion 212, and the vertical plate portion 3211 is fixedly connected to the first slider 312. A second-level guide rail slide 323 is fixedly arranged on the horizontal plate portion 3212, and the second slider 322 is fixedly connected to the long rectangular plate portion 212.

[0070] In some specific examples of these embodiments, a set of mutually slidingly matched first-stage guide rail slideway 311 and first slider 312 includes one first-stage guide rail slideway 311 and two first sliders 312. Each first slider 312 is equipped with a ball bearing that slides with the first-stage guide rail slideway 311 to reduce rotational friction and support radial and axial loads when the first slider 312 slides relative to the first-stage guide rail slideway 311.

[0071] The second slider 322 in the second-stage sliding subassembly 32 is equipped with two ball bearings that slide in cooperation with the second-stage guide rail 323 along its own sliding direction, so as to reduce rotational friction and support radial and axial loads when the second slider 322 slides relative to the second-stage guide rail 323.

[0072] In these examples, the sliding assembly is equipped with four ball bearings at both ends of the hand handle 1, and a total of eight ball bearings are equipped as a whole, so that when the porter holds the hand handle 1, he can easily and smoothly pull the supporting structure out of the cache rack 5 or easily push the supporting structure into the cache rack 5.

[0073] In some optional embodiments of the first aspect of the present application, the second sliding block 322 is located on the bottom side of the long rectangular plate portion 212 in the thickness direction, and the bottom side is opposite to the pressure-bearing side.

[0074] The load-bearing structure also includes:

[0075] The carrier plate 23, in the horizontal direction X, one end of the carrier plate 23 is fixedly connected to the second slider 322 at the first end 1a facing away from the long rectangular plate portion 212, and the other end of the carrier plate 23 is fixedly connected to the second slider 322 at the second end 1b facing away from the long rectangular plate portion 212.

[0076] It should be noted that Figures 3 to 5 In order to more clearly illustrate other structures of the pull-out boat carrying slide 10 in the embodiment of the first aspect of the present application, the carrying plate 23 is hidden.

[0077] In some optional embodiments of the first aspect of the present application, a tank chain 24 is provided on the side of the horizontal plate portion 3212 of the folding plate seat 321 facing away from the second-stage guide rail slideway 323, and the tank chain 24 is used to receive and protect the external circuit of the push-type sensor 22. The tank chain 24 is fixedly arranged on the folding plate seat 321 by a fixing member.

[0078] In some optional embodiments of the first aspect of the present application, the fixing component includes:

[0079] The fixed side plate 41 is used to be fixedly connected to the column 51 of the cache rack 5;

[0080] A buckle-type fastener is used to lock the sliding assembly, including a hanging plate buckle body 42 and a positioning pin 43. In the horizontal direction X, the hanging plate buckle body 42 is in the shape of a long strip. The first end of the hanging plate buckle body 42 and the positioning pin 43 are spaced apart on the side of the fixed side plate 41 facing the hand handle 1. The first end of the hanging plate buckle body 42 is rotatably arranged on the fixed side plate 41. A card groove 421 corresponding to the position of the positioning pin 43 is formed near the first end of the hanging plate buckle body 42, and the second end of the hanging plate buckle body 42 is a free end.

[0081] In some optional embodiments of the first aspect of the present application, when the hanging plate buckle body 42 is fastened to the periphery of the positioning pin 43 through the card slot 421, the hanging plate buckle body 42 blocks the end of the folding plate seat 321 close to the hand handle 1 and the end of the hand handle fixing plate 21 close to the hand handle 1 to lock the sliding assembly. In some examples, when the hanging plate buckle body 42 is fastened to the periphery of the positioning pin 43 through the card slot 421, the second end of the hanging plate buckle body 42 extends to the end of the hand handle fixing plate 21 close to the hand handle 1.

[0082] When the hanging plate buckle body 42 is separated from the positioning pin 43, the locking of the sliding assembly is released, and the bearing structure can move horizontally along the push-pull direction Y relative to the fixed assembly.

[0083] Figures 2 to 5 It is shown in the figure that when the buckle head of the hanging plate buckle body 42 is separated from the positioning pin 43, the buckle-type fastener is not a locking sliding component, the bearing structure can move horizontally along the push-pull direction Y relative to the fixed component, and the bearing structure is partially moved out of the cache rack 5 through the first-stage sliding component 31, which is the structural state of the pull-out boat slide 10.

[0084] When the buckle head of the hanging plate buckle body 42 is hooked with the positioning pin 43, the buckle-type fastener blocks the ends of the folding plate seat 321 and the hand handle fixing plate 21 close to the hand handle 1 from moving relative to the fixed component to lock the sliding component, and the bearing structure is fixed relative to the fixed component. One of the two first sliders 312 disposed closer to the inside abuts against the end of the first-level guide rail slide 311 away from the hand handle 1, and the second slider 322 also abuts against the end of the second-level guide rail slide 323 away from the hand handle 1, and the bearing structure is still located in the cache rack 5 and does not extend out of the cache rack 5. At this time, the end of the first-level guide rail slide 311 close to the hand handle 1 and the end of the second-level guide rail slide 323 close to the hand handle 1 are flush in the horizontal direction X.

[0085] like Figure 6As shown, the second aspect of the present application provides a tubular PECVD clean bench, comprising a buffer rack 5 for storing graphite boats, on which the pull-out boat-carrying slide 10 of the first aspect of the present application is arranged.

[0086] In some optional embodiments of the second aspect of the present application, the cache rack 5 is vertically provided with a plurality of graphite boat cache positions 52, and among the plurality of graphite boat cache positions 52, a position whose height from the ground is equal to the height of the graphite boat transport vehicle 6 is selected as a graphite boat pick-up and placement cache position 53, and the graphite boat pick-up and placement cache position 53 is provided with a pull-out boat carrier slide 10.

[0087] In some optional embodiments of the second aspect of the present application, the pull-out boat carrier slide 10 is 75 cm to 85 cm above the ground.

[0088] In these embodiments, when the graphite boat to be cleaned needs to be moved out of the buffer rack 5 and sent to the cleaning equipment for cleaning, the graphite boat to be cleaned on other buffer positions can be grabbed by a manipulator to the graphite boat pick-up and placement buffer position 53, and the transport vehicle is pushed to the front of the graphite boat pick-up and placement buffer position 53, and the worker holds the handgrip 1 and pulls the pull-out boat slide 10 outward to pull the graphite boat out of the buffer rack 5, and makes the bottom of the graphite boat basically flush with the loading surface of the transport vehicle, and the worker does not need to bend over and can easily carry the graphite boat directly to the transport vehicle horizontally. The overall structure of the pull-out boat slide 10 is made of alloy material, with a load-bearing capacity of more than 100Kg, and the overall structure design is firm and not easy to deform.

[0089] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A pull-out boat slide, characterized in that: Used to carry graphite boats in the buffer rack of tubular PECVD clean bench and to transport graphite boats horizontally by pushing and pulling, including: The hand handle extends in a lateral direction perpendicular to the push-pull direction and has a first end and a second end opposite to each other. The bearing structure is used to bear the graphite boat. The bearing structure is arranged on the side of the hand handle facing the buffer rack in the push-pull direction. The first end of the hand handle and the second end of the hand handle are both fixedly connected to the bearing structure. A sliding assembly is slidably connected to both sides of the bearing structure in the transverse direction, so that the bearing structure moves horizontally relative to the cache rack along a push-pull direction following a push-pull action of the hand-holding handle; A fixed component is fixedly arranged on the side of the sliding component facing away from the hand handle in the transverse direction, and the fixed component is used to be fixedly connected to the column of the cache rack.

2. The pull-out boat-carrying slide according to claim 1, characterized in that: The bearing structure comprises: A hand handle fixing plate assembly is fixedly connected to the bearing structure and comprises two hand handle fixing plates respectively arranged at the first end and the second end of the hand handle. The hand handle fixing plate is an L-shaped plate and its thickness direction is in the same direction as the horizontal direction. The hand handle fixing plate includes a short rectangular plate portion and a long rectangular plate portion. The short rectangular plate portion is fixedly connected to the end of the hand handle and is perpendicular to each other. The long rectangular plate portion is located below the hand handle and the length direction of the long rectangular plate portion is perpendicular to the horizontal direction.

3. The pull-out boat-carrying slide according to claim 2, characterized in that: The bearing structure further comprises: The press-type sensor is arranged on the pressure-bearing side surface in the thickness direction of the long rectangular plate portion and is located at the portion of the pressure-bearing side surface away from the short rectangular plate. The pressure-bearing side surface is arranged facing the hand handle. The press-type sensor is used to detect whether the graphite boat is installed in place when placing the graphite boat.

4. The pull-out boat-carrying slide according to claim 3, characterized in that: The sliding assembly is a two-stage sliding assembly, and the sliding assembly is slidably connected to the hand-holding handle fixing plate group.

5. The pull-out boat-carrying slide according to claim 4, characterized in that: The sliding assembly comprises: The first-stage sliding assembly comprises two sets of first-stage guide rails and first sliders which are respectively located at the first end and the second end and which are slidably matched with each other, and the first-stage guide rails are fixedly connected to the fixed assembly; The second-stage sliding assembly is laterally arranged on the side of the first-stage sliding assembly facing away from the fixed assembly, the second-stage sliding assembly comprises two second-stage sliding subassemblies respectively located at the first end and the second end, the second-stage sliding subassembly comprises a folding plate seat and a second sliding block and a second-stage guide rail slideway which are slidably matched with each other, The folding plate seat includes a vertical plate portion and a horizontal plate portion which are perpendicular to each other. The vertical plate portion is arranged in parallel with the long rectangular plate portion and is fixedly connected to the first slider. The second-level guide rail is fixedly arranged on the horizontal plate portion, and the second slider is fixedly connected to the long rectangular plate portion.

6. The pull-out boat-carrying slide according to claim 5, characterized in that: The second sliding block is located on the bottom side surface of the long rectangular plate portion in the thickness direction, the bottom side surface is opposite to the pressure-bearing side surface, and the bearing structure further includes: The carrier plate has one end fixedly connected to the second slider at the first end facing away from the long rectangular plate in the horizontal direction, and the other end fixedly connected to the second slider at the second end facing away from the long rectangular plate.

7. The pull-out boat-carrying slide according to claim 5, characterized in that: A tank chain is arranged on the side of the transverse plate portion of the folding plate seat facing away from the second-stage guide rail slide, and the tank chain is used to accommodate and protect the external circuit of the push-type sensor.

8. The pull-out boat-carrying slide according to claim 1, characterized in that: The fixing assembly includes: a fixing side plate, which is used to be fixedly connected to the column of the cache rack; A buckle-type fastener is used to lock the sliding assembly, including a hanging plate buckle body and a positioning pin. In the horizontal direction, the hanging plate buckle body is in the shape of a long strip. The first end of the hanging plate buckle body and the positioning pin are spaced apart on the side of the fixed side plate facing the hand handle. The first end of the hanging plate buckle body is rotatably arranged on the fixed side plate. A card groove corresponding to the position of the positioning pin is formed near the first end of the hanging plate buckle body, and the second end of the hanging plate buckle body is a free end.

9. The pull-out boat-carrying slide according to claim 8, characterized in that: When the hanging plate type buckle body is fixed to the outer periphery of the positioning pin through the card slot, the hanging plate type buckle body blocks the end of the folding plate seat close to the hand handle and the end of the hand handle fixing plate close to the hand handle to lock the sliding assembly; when the hanging plate type buckle body is separated from the positioning pin, the sliding assembly is unlocked, and the bearing structure can move horizontally relative to the fixed assembly along the push-pull direction.

10. A tubular PECVD clean bench, characterized in that: The invention comprises a buffer rack for storing graphite boats, and the buffer rack is provided with a pull-out boat-carrying slide as claimed in any one of claims 1 to 9.

11. The tubular PECVD clean bench according to claim 10, characterized in that: The cache rack is vertically provided with a plurality of graphite boat cache positions, among which the graphite boat cache positions whose height from the ground is equal to the height of the graphite boat transport vehicle are selected as graphite boat pick-up and placement cache positions, and the graphite boat pick-up and placement cache positions are provided with the pull-out boat carrying slide.

12. The tubular PECVD clean bench according to claim 11, characterized in that: The pull-out boat-carrying slide is 75 cm to 85 cm above the ground.

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