Flexible temperature sensor and temperature and pressure integrated sensor

Abstract

The utility model relates to the technical field of sensors, and provides a flexible temperature sensor and a temperature and pressure integrated sensor, the flexible temperature sensor comprises a flexible substrate and a temperature sensing assembly, the temperature sensing assembly comprises a first support member and a temperature sensing element which are arranged on the flexible substrate, the first support member forms a support area, and the temperature sensing element is arranged on the flexible substrate. The temperature sensing element is arranged in the supporting area; the temperature sensing element is used for detecting the temperature of a to-be-detected object, and the first supporting piece is used for supporting the to-be-detected object. According to the invention, the temperature sensing element can be prevented from being damaged due to excessive pressure, so that the service life of the sensor is prolonged.

Description

Technical Field

[0001] The present application relates to the field of sensor technology, and in particular provides a flexible temperature sensor and a temperature-pressure integrated sensor. Background Art

[0002] In the prior art, a thin film temperature sensor is used to detect the temperature of an object to be measured. For example, a thin film temperature sensor is placed between batteries to detect the battery temperature. However, due to the structure of the existing thin film temperature sensor, when it is in contact with the object to be measured, especially when it is clamped between two objects, the clamping force often acts completely on the temperature sensor. A large clamping force will damage the temperature sensor to a certain extent, resulting in a shortened service life, which is not conducive to long-term integrated use. Utility Model Content

[0003] The purpose of the embodiments of the present application is to provide a flexible temperature sensor and a temperature-pressure integrated sensor, aiming to solve the problem that traditional thin-film temperature sensors are easily damaged and have a shortened life in high clamping force application environments.

[0004] To achieve the above purpose, the technical solution adopted in this application is:

[0005] The present application provides a flexible temperature sensor, comprising:

[0006] Flexible substrate;

[0007] A temperature sensing assembly, comprising a first support member and a temperature sensing element disposed on the flexible substrate, wherein the first support member is formed with a support area, and the temperature sensing element is disposed in the support area;

[0008] The temperature sensing element is used to detect the temperature of the object to be measured, and the first supporting member is used to support the object to be measured.

[0009] The flexible temperature sensor provided in the present application forms a supporting area by a first supporting member to surround a temperature sensing element, that is, the first supporting member can provide support around the temperature sensing element. When the temperature sensing element is under pressure, the first supporting member can share the pressure to a certain extent, thereby preventing the temperature sensing element from being damaged due to excessive pressure to a certain extent, thereby extending the service life of the temperature sensor.

[0010] Optionally, along a supporting direction of the first supporting member, a thickness of the first supporting member is not greater than a thickness of the temperature sensing element.

[0011] Optionally, the first support member is a metal support member, and a plurality of the metal support members are arranged in an annular manner at intervals to construct the support area.

[0012] Optionally, the flexible substrate has a first surface and a second surface that are arranged opposite to each other;

[0013] The number of the temperature sensing components is at least two groups, and each group of the temperature sensing components is disposed on the first surface and / or the second surface of the flexible substrate.

[0014] Optionally, the flexible substrate has a first surface and a second surface that are arranged opposite to each other, and the flexible substrate is provided with a through hole connecting the first surface and the second surface;

[0015] The first supporting member includes a first supporting portion and a second supporting portion, the first supporting portion is disposed on the first surface and forms a first supporting area, the second supporting portion is disposed on the second surface and forms a second supporting area, and the first supporting area and the second supporting area are disposed corresponding to the through hole;

[0016] The temperature sensing element includes a first temperature sensing portion, a second temperature sensing portion and a connecting portion, wherein the first temperature sensing portion is disposed in the first supporting region, the second temperature sensing portion is disposed in the second supporting region, and at least a portion of the connecting portion is disposed in the through hole to electrically connect the first temperature sensing portion and the second temperature sensing portion;

[0017] The first temperature sensing portion and the second temperature sensing portion are made of different metal materials, and the connecting portion and the first temperature sensing portion or the second temperature sensing portion are made of the same material.

[0018] Optionally, the first supporting portion and the first temperature sensing portion are made of the same metal material, and along a supporting direction of the first supporting portion, a thickness of the first supporting portion is the same as a thickness of the first temperature sensing portion; and / or,

[0019] The second supporting portion and the second temperature sensing portion are made of the same metal material, and along a supporting direction of the second supporting portion, a thickness of the second supporting portion is the same as a thickness of the second temperature sensing portion.

[0020] Optionally, the temperature sensing component further includes:

[0021] The signal transmission wire is arranged on the flexible substrate and connected to the temperature sensing element.

[0022] Optionally, the flexible substrate comprises:

[0023] A first substrate, the temperature sensing component is disposed on the first substrate;

[0024] The second substrate is connected to the first substrate and is provided with a docking terminal. Two ends of the signal transmission wire are respectively connected to the temperature sensing element and the docking terminal.

[0025] Optionally, a reinforcement portion is provided on a side of the second substrate facing away from the signal transmission wire, and the reinforcement portion is arranged corresponding to the signal transmission wire.

[0026] Optionally, the temperature sensing component further includes:

[0027] A plurality of second support members are arranged on the first substrate and outside the support area. The thickness of the second support members is the same as that of the first support members. The second support members are used to support the object to be measured.

[0028] Optionally, the flexible temperature sensor further includes:

[0029] The protective layer is provided between the temperature sensing component and the flexible substrate.

[0030] The present application also provides a temperature-pressure integrated sensor, comprising: a flexible pressure sensor and the above-mentioned flexible temperature sensor, wherein the flexible pressure sensor is adaptively stacked and connected to the flexible temperature sensor.

[0031] The integrated temperature and pressure sensor provided in the present application integrates a flexible pressure sensor and a flexible temperature sensor into one integrated design, which can simultaneously be compatible with temperature detection and pressure detection functions, and has high engineering application value; and through the stacked thin film design, it is conducive to the lightweight and miniaturization of the sensor, so that it can be easily used in environments with limited space. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0033] Figure 1 One of the structural schematic diagrams of the flexible temperature sensor provided in the embodiment of the present application;

[0034] Figure 2 The second structural diagram of the flexible temperature sensor provided in the embodiment of the present application;

[0035] Figure 3 The third structural diagram of the flexible temperature sensor provided in the embodiment of the present application;

[0036] Figure 4 An exploded diagram of the structure of the flexible temperature sensor provided in an embodiment of the present application;

[0037] Figure 5A schematic diagram of the structural assembly of a temperature sensing element provided in an embodiment of the present application;

[0038] Figure 6 A schematic diagram of the structural assembly of the reinforcement part provided in the embodiment of the present application;

[0039] Figure 7 A schematic diagram of the structural assembly of the protective layer provided in an embodiment of the present application;

[0040] Figure 8 A schematic diagram of the structure of the temperature and pressure integrated sensor provided in an embodiment of the present application;

[0041] Fig. 9 An exploded diagram of the structure of the temperature-pressure integrated sensor provided in an embodiment of the present application;

[0042] Fig.10 A schematic diagram of the structure of the flexible pressure sensor provided in an embodiment of the present application.

[0043] Among them, the reference numerals in the figure are:

[0044] 100: flexible temperature sensor;

[0045] 101: flexible substrate; 1011: first surface; 1012: second surface; 1013: through hole;

[0046] 1014: first substrate; 1015: second substrate;

[0047] 102: first support member; 1021: support area; 1022: first support portion;

[0048] 1023: second supporting portion; 1024: first supporting region; 1025: second supporting region;

[0049] 103: temperature sensing element; 1031: first temperature sensing part; 1032: second temperature sensing part;

[0050] 1033: connection part;

[0051] 104: signal transmission wire; 105: docking terminal; 106: reinforcement part;

[0052] 107: second support member; 108: protective layer;

[0053] 200: Flexible pressure sensor;

[0054] 201: pressure sensing material layer; 202: sensing electrode layer; 203: sensing electrode;

[0055] 300: Adhesive layer. DETAILED DESCRIPTION

[0056] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limiting the present application.

[0057] In the description of the embodiments of the present application, it should be understood that the terms "up", "down", "left", "right", "top", "bottom", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the embodiments of the present application.

[0058] In addition, the terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0059] In the embodiments of the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0060] According to the embodiment of the first aspect of the present application, referring to Figure 1-Figure 3 As shown, the present application provides a flexible temperature sensor 100, which mainly includes: a flexible substrate 101 and a temperature sensing component, the temperature sensing component includes a first support member 102 and a temperature sensing element 103 arranged on the flexible substrate 101, the first support member 102 is formed with a supporting area 1021, and the temperature sensing element 103 is arranged in the supporting area 1021; wherein, the temperature sensing element 103 is used to detect the temperature of an object to be measured, and the first support member 102 is used to support the object to be measured.

[0061] In this embodiment of the present application, the use of the flexible substrate 101 enables the temperature sensor to better adapt to objects of different shapes and surfaces, especially in scenarios where close fitting or curved installation is required, such as temperature monitoring between batteries or other complex structures. This not only improves the accuracy of the measurement, but also increases the convenience of installation.

[0062] It can be understood that, since the temperature sensing element 103 disposed on the flexible substrate 101 will protrude from the surface of the flexible substrate 101 to a certain extent, when the temperature sensor contacts the object to be measured, for example, when it is clamped between two batteries to detect the temperature of the battery surface, the protruding temperature sensing element 103 will first contact the battery, and at the same time, the battery will continue to exert pressure on the temperature sensing element 103, causing the pressure on the temperature sensing element 103 to continue to increase, and the continuously applied large squeezing force is likely to cause damage to the temperature sensing element 103.

[0063] To this end, the present application arranges a first support member 102 on the flexible substrate 101, and allows the first support member 102 to form a support area 1021 to surround the temperature sensing element 103. This design can effectively disperse the external pressure. The first support member 102 serves as a supporting buffer structure, which can absorb and disperse part of the pressure when the temperature sensing element 103 is under pressure. The pressure dispersion design can effectively reduce the direct pressure on the temperature sensing element 103 and reduce its damage caused by extrusion, thereby extending the service life and reliability of the entire sensor, making it more suitable for long-term integrated use and reducing maintenance costs.

[0064] According to an embodiment of the present application, along the supporting direction of the first supporting member 102 , the thickness of the first supporting member 102 is not greater than the thickness of the temperature sensing element 103 .

[0065] It can be understood that the supporting direction of the first supporting member 102 is a direction A perpendicular to the supporting surface of the first supporting member 102 .

[0066] When the thickness of the first support member 102 is less than the thickness of the temperature sensing element 103, since the flexible substrate 101 has a certain elasticity, the first support member 102 disposed on the flexible substrate 101 can also play a certain supporting role under the elastic effect of the flexible substrate 101. Preferably, the thickness of the first support member 102 is the same as the thickness of the temperature sensing element 103.

[0067] Furthermore, if the thickness of the first support member 102 is too large, the object to be measured will first contact the first support member 102 , which may cause a gap between the temperature sensing element 103 and the object to be measured, thereby affecting the temperature detection result.

[0068] To this end, the embodiment of the present application designs the thickness of the first support member 102 so that the thickness of the first support member 102 is not greater than the thickness of the temperature sensing element 103. This allows the temperature sensing element 103 to better contact the object to be measured, thereby improving the accuracy of temperature detection.

[0069] According to one embodiment of the present application, referring to Figure 3 As shown, the first support member 102 is a metal support member, and a plurality of metal support members are arranged in an annular shape at intervals to form a support area 1021. The annular arrangement described here is not limited to a circular arrangement, and may also be a triangular, square, prismatic, hexagonal, or other arrangement.

[0070] In this embodiment of the present application, since metal is not easily deformed in a high temperature environment and has good pressure resistance, the use of metal support members can better ensure the effectiveness of the support area 1021.

[0071] And because metal has good thermal conductivity, the multiple metal support members forming the support area 1021 in this embodiment are discontinuously spaced, so that the gaps between the metal support members form a natural insulation zone. With such a design, the heat transfer between the metal support members can be reduced, thereby protecting the temperature sensing element 103 from the influence of ambient temperature fluctuations. It is understandable that if the multiple metal support members forming the support area 1021 are arranged in contact and continuous, the heat around the temperature sensing element 103 will be transferred to each other by these metal support members, thereby affecting the temperature detection result of the temperature sensing element 103.

[0072] Therefore, in the embodiment of the present application, the first support member 102 is designed as a metal support member and arranged in an interval ring shape, thereby achieving effective protection for the temperature sensing element 103 and improving the temperature measurement accuracy.

[0073] According to one embodiment of the present application, referring to Figure 1 and Figure 2 As shown, the first support member 102 is provided with a hollow area, and the hollow area is the support area 1021 .

[0074] The present application does not impose any specific limitation on the shape of the first support member 102 . For example, the outer contour of the first support member 102 may be a track-like shape, a circle-like shape, a square-like shape, or the like.

[0075] According to one embodiment of the present application, referring to Figure 1-Figure 4 As shown, the temperature sensing component further includes: a signal transmission wire 104 , which is disposed on the flexible substrate 101 and connected to the temperature sensing element 103 .

[0076] In this embodiment of the present application, the signal transmission wire 104 is directly connected to the temperature sensing element 103, and its main function is to transmit the temperature signal detected by the temperature sensing element 103 to an external device such as a temperature collector and a display, thereby realizing real-time monitoring and recording of temperature data. This direct connection method can ensure the efficiency and accuracy of data transmission.

[0077] Furthermore, the signal transmission wire 104 is integrated on the flexible substrate 101, which not only simplifies the assembly process of the sensor, but also helps to reduce the overall volume of the sensor and improve its installation flexibility in a limited space.

[0078] It is understandable that the present application does not impose any specific limitation on the number of temperature sensing components, and the temperature sensing components may be provided in one group or in multiple groups.

[0079] According to one embodiment of the present application, referring to Figure 3-Figure 5 As shown, the flexible substrate 101 has a first surface 1011 and a second surface 1012 that are oppositely disposed. The number of temperature sensing components is at least two groups, and each group of temperature sensing components is disposed on the first surface 1011 and / or the second surface 1012 of the flexible substrate 101 .

[0080] In this embodiment of the present application, the configuration of multiple sets of temperature sensing components allows for simultaneous temperature detection of different parts of the same object to be detected, achieving multi-point detection. This is critical for applications that require a comprehensive understanding of thermal distribution or rapid identification of local hot spots, such as temperature management in battery packs, electronic equipment cooling systems, or industrial production processes.

[0081] In addition, multi-point detection can provide more detailed and accurate temperature data, help discover potential temperature anomaly areas, and reduce errors or omissions that may be caused by single-point measurement.

[0082] In addition, each group of temperature sensing components can be arranged on the same surface or both surfaces of the flexible substrate 101, that is, the sensor layout can be flexibly adjusted according to actual needs to adapt to various complex geometric shapes and space limitations. This flexibility greatly expands the application scenarios of the sensor.

[0083] According to one embodiment of the present application, referring to Figure 4 and Figure 5 As shown, the flexible substrate 101 has a first surface 1011 and a second surface 1012 that are opposite to each other, and the flexible substrate 101 is provided with a through hole 1013 that connects the first surface 1011 and the second surface 1012 .

[0084] The first support member 102 includes a first support portion 1022 and a second support portion 1023 . The first support portion 1022 is disposed on the first surface 1011 and forms a first support area 1024 . The second support portion 1023 is disposed on the second surface 1012 and forms a second support area 1025 . The first support area 1024 and the second support area 1025 are disposed corresponding to the through hole 1013 .

[0085] The temperature sensing element 103 includes a first temperature sensing portion 1031, a second temperature sensing portion 1032 and a connecting portion 1033. The first temperature sensing portion 1031 is arranged in the first supporting area 1024, the second temperature sensing portion 1032 is arranged in the second supporting area 1025, and at least a portion of the connecting portion 1033 is arranged in the through hole 1013 to electrically connect the first temperature sensing portion 1031 and the second temperature sensing portion 1032, that is, the first temperature sensing portion 1031 and the second temperature sensing portion 1032 can realize mutual transmission of electrical signals through the connecting portion 1033.

[0086] The first temperature sensing portion 1031 and the second temperature sensing portion 1032 are made of different metal materials, the connecting portion 1033 and the first temperature sensing portion 1031 or the second temperature sensing portion 1032 are made of the same material, and the first temperature sensing portion 1031 , the second temperature sensing portion 1032 and the connecting portion 1033 form a temperature sensing element 103 .

[0087] For example, the optional material combinations of the first temperature sensing portion 1031 and the second temperature sensing portion 1032 include: nickel-chromium-nickel silicon, nickel-chromium-constantan, etc. These combinations have the characteristics of high sensitivity and can meet specific usage requirements. When the first temperature sensing portion 1031 is made of nickel-chromium material and the second temperature sensing portion 1032 is made of nickel-silicon material, the connecting portion 1033 can be made of nickel-chromium material or nickel-silicon material.

[0088] In this embodiment of the present application, a unique three-dimensional structure is formed by respectively providing a first supporting portion 1022 and a second supporting portion 1023 on the first surface 1011 and the second surface 1012 of the flexible substrate 101, and connecting the first temperature sensing portion 1031 and the second temperature sensing portion 1032 on both surfaces by using a through hole 1013 and a connecting portion 1033. This design not only optimizes space utilization and facilitates processing and manufacturing, but also can adapt to more diverse installation requirements, especially when space is limited or complex surfaces need to be fitted.

[0089] It is understandable that the embodiment of the present application mainly adopts the thermocouple principle, by setting two different metal materials and electrically connecting the two metal materials to form a temperature sensing point, and measuring the temperature difference based on the thermoelectric potential generated by the contact of the two different metals. The first temperature sensing part 1031 and the second temperature sensing part 1032 are made of different metal materials, and a closed loop is formed through the connecting part 1033, which can accurately capture the temperature difference and convert it into an electrical signal, thereby improving the sensitivity and accuracy of the measurement. For example, the flexible temperature sensor of the present application can be a thermocouple temperature sensor.

[0090] Furthermore, the connection portion 1033 and the first temperature sensing portion 1031 or the second temperature sensing portion 1032 are made of the same material. This design can reduce the thermoelectric potential loss caused by the material interface and ensure the stability of the electrical signal during transmission. At the same time, the connection of the same material also helps to reduce manufacturing costs and improve reliability.

[0091] In addition, the first supporting portion 1022 and the second supporting portion 1023 respectively form a first supporting area 1024 and a second supporting area 1025 on the two sides of the flexible substrate 101, which can effectively disperse the external pressure and protect the corresponding first temperature sensing portion 1031 and the second temperature sensing portion 1032 from mechanical damage. The design of the through hole 1013 ensures the stable connection of the connecting portion 1033, further enhancing the overall structural stability of the sensor and its durability under long-term operation.

[0092] According to one embodiment of the present application, the first support portion 1022 and the first temperature sensing portion 1031 are made of the same metal material, and along the supporting direction of the first support portion 1022, the thickness of the first support portion 1022 is the same as the thickness of the first temperature sensing portion 1031; and / or, the second support portion 1023 and the second temperature sensing portion 1032 are made of the same metal material, and along the supporting direction of the second support portion 1023, the thickness of the second support portion 1023 is the same as the thickness of the second temperature sensing portion 1032.

[0093] It can be understood that the supporting directions of the first supporting portion 1022 and the second supporting portion 1023 are the same, which is a direction B perpendicular to the supporting surfaces of the corresponding supporting portions.

[0094] For example, the first temperature sensing portion 1031 and the first supporting portion 1022 are made of nickel-chromium material; the second temperature sensing portion 1032 and the second supporting portion 1023 are made of nickel-silicon material.

[0095] In this embodiment of the present application, the same metal is used on the same surface of the flexible substrate 101 to design the support portion and the temperature sensing portion, which is beneficial to processing and manufacturing, simplifies the processing steps, and reduces the manufacturing cost.

[0096] And by adopting the same thickness design, the corresponding support part and temperature sensing part can be etched simultaneously on the flexible substrate 101 coated with relevant metal materials in advance, thereby improving the processing efficiency, and also facilitating the control of the relative position relationship between the support part and the temperature sensing part, and ensuring flatness.

[0097] Of course, in other embodiments, the first temperature sensing portion 1031 and the second temperature sensing portion 1032 may also be disposed on the same surface of the flexible substrate 101 . On the same surface, the first temperature sensing portion 1031 and the second temperature sensing portion 1032 at least partially overlap so that the two are electrically connected, thereby achieving temperature detection.

[0098] Furthermore, the thickness of the first support portion 1022 and the second support portion 1023 may be the same, and neither may be greater than the thickness of the overlapping portion of the first temperature sensing portion 1031 and the second temperature sensing portion 1032. Such a design can reduce damage to the temperature sensing portion due to extrusion, and can enable the temperature sensing portion to better contact the object to be measured, thereby improving the accuracy of temperature detection.

[0099] According to one embodiment of the present application, referring to Figure 1-Figure 4 As shown, the flexible substrate includes: a first substrate 1014 and a second substrate 1015, and the temperature sensing component is arranged on the first substrate 1014; the second substrate 1015 is connected to the first substrate 1014, and the second substrate 1015 is provided with a docking terminal 105 connected to an external device (such as a temperature collector), and the two ends of the signal transmission wire 104 are respectively connected to the temperature sensing element 103 and the docking terminal 105.

[0100] In this embodiment of the present application, the first substrate 1014 carries the temperature sensing component and focuses on the temperature detection function; the second substrate 1015 is responsible for signal transmission and the interface with external devices, forming a clear functional partition, that is, the first substrate 1014 is the temperature detection area, and the second substrate 1015 is the port docking area. This partitioned design facilitates the optimization of the performance of each part separately, and also facilitates the maintenance and replacement of the sensor.

[0101] According to one embodiment of the present application, referring to Figure 4 and Figure 6 As shown, a reinforcement portion 106 is provided on a side of the second substrate 1015 facing away from the signal transmission wire 104 , and the reinforcement portion 106 is arranged corresponding to the signal transmission wire 104 . The reinforcement portion 106 is mainly used to improve the structural strength of the second substrate 1015 .

[0102] In this embodiment of the present application, the second substrate 1015, as the port docking area, needs to withstand physical stress from external device connection, such as plug-in force, vibration, etc. The setting of the reinforcement part 106 effectively improves the rigidity of this part of the area, prevents structural deformation or damage caused by repeated plug-in or external force impact during long-term use, and ensures the stability and reliability of signal transmission. Through local reinforcement, the second substrate 1015 becomes more solid in the key area connected to the external device, reducing the failure rate caused by physical wear or fatigue, thereby improving durability and extending the service life of the entire sensor.

[0103] According to an embodiment of the present application, the reinforcing portion 106 and the supporting portion corresponding to the same surface thereof are made of the same material and have the same thickness.

[0104] Such a design can simplify the processing steps, improve processing efficiency, reduce manufacturing costs, and ensure flatness.

[0105] According to one embodiment of the present application, referring to Figure 3 As shown, the temperature sensing assembly further includes: a plurality of second support members 107 , which are disposed on the first substrate 1014 and outside the support area 1021 , and have the same thickness as the first support member 102 , and are used to support the object to be measured.

[0106] Reference Figure 4 As shown, a plurality of second support members 107 may be disposed on both the first surface 1011 and the second surface 1012 of the flexible substrate 101. The second support members 107 on the first surface 1011 are located outside the first support region 1024, and the second support members 107 on the first surface 1011 have the same thickness as the first support portion 1022; the second support members 107 on the second surface 1012 are located outside the second support region 1025, and the second support members 107 on the second surface 1012 have the same thickness as the second support portion 1023.

[0107] It is understandable that the first support member 102 , the first support portion 1022 and the second support portion 1023 are all ring-shaped components to form a support area for accommodating the corresponding temperature sensing element, while the second support member 107 is a component that does not need to form a support area for accommodating the temperature sensing element.

[0108] In this embodiment of the present application, by further laying a plurality of second support members 107 on the periphery of the support area 1021 enclosed by the first support member 102, the flatness of the first substrate 1014 as the temperature detection area can be ensured, so that the temperature sensor is subjected to more uniform force when in use.

[0109] According to one embodiment of the present application, referring to Figure 2 and Figure 7As shown, the flexible temperature sensor further includes: a protective layer 108 , and a temperature sensing component is disposed between the protective layer 108 and the flexible substrate 101 .

[0110] In this embodiment of the present application, the protective layer 108 can be a protective film and is fixed on the flexible substrate 101 by heat pressing or bonding to cover the temperature sensing component to protect the temperature sensing component. The protective layer 108 can further extend the service life of the temperature sensor.

[0111] According to the embodiment of the second aspect of the present application, referring to Figure 8 and Fig. 9 As shown, the present application also provides a temperature-pressure integrated sensor, which mainly includes: a flexible pressure sensor 200 and the flexible temperature sensor 100 of the above embodiment, and the flexible pressure sensor 200 is adaptively stacked and connected to the flexible temperature sensor 100.

[0112] The integrated temperature and pressure sensor provided in the embodiment of the present application includes the flexible temperature sensor 100 of the above embodiment, and therefore has all the technical effects of the flexible temperature sensor 100 of the above embodiment, which will not be elaborated here; and the embodiment of the present application integrates the flexible pressure sensor 200 with the flexible temperature sensor 100 through an integrated design, so as to be compatible with both temperature detection and pressure detection functions, and has a high engineering application value; in addition, the stacked thin film design is conducive to the lightweight and miniaturization of the sensor, so that it can be easily applied to environments with limited space.

[0113] As an implementation method, refer to Fig.10 As shown, the flexible pressure sensor 200 includes a pressure sensing material layer 201 and a sensing electrode layer 202, at least one sensing electrode 203 is arranged on the sensing electrode layer 202, and the pressure sensing material layer 201 covers the sensing electrode 203 to form a pressure sensing part, through which pressure can be detected. The specific detection process is a well-known technology in the art and is not described here. For example, the pressure sensing material layer 201 can be a conductive ink layer, and the sensing electrode 203 can be a cross-finger electrode.

[0114] Reference Fig. 9 As shown, the pressure sensing material layer 201 of the flexible pressure sensor 200 can be bonded to the first substrate 1014 of the flexible temperature sensor 100 through the bonding layer 300 to form an integrated structure.

[0115] In addition, a plurality of second support members 107 can be laid on the first substrate 1014 of the flexible temperature sensor 100 at positions corresponding to the pressure sensing parts of the flexible pressure sensor 200. Such a design can make the area where the pressure sensing part of the flexible pressure sensor 200 is located smoother, thereby reducing the influence of pressure detection caused by the protruding temperature sensing element 103 and improving the accuracy of pressure detection.

[0116] The above are only preferred embodiments of the present application and are not intended to limit the embodiments of the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the embodiments of the present application should be included in the protection scope of the embodiments of the present application.

Claims

1. A flexible temperature sensor, characterized in that: include: Flexible substrate; A temperature sensing assembly, comprising a first support member and a temperature sensing element disposed on the flexible substrate, wherein the first support member is formed with a support area, and the temperature sensing element is disposed in the support area; The temperature sensing element is used to detect the temperature of the object to be measured, and the first supporting member is used to support the object to be measured.

2. The flexible temperature sensor according to claim 1, characterized in that: Along a supporting direction of the first supporting member, a thickness of the first supporting member is not greater than a thickness of the temperature sensing element.

3. The flexible temperature sensor according to claim 1, characterized in that: The first support member is a metal support member, and a plurality of the metal support members are arranged in an annular manner at intervals to construct the support area.

4. The flexible temperature sensor according to claim 1, characterized in that: The flexible substrate has a first surface and a second surface arranged opposite to each other; The number of the temperature sensing components is at least two groups, and each group of the temperature sensing components is disposed on the first surface and / or the second surface of the flexible substrate.

5. The flexible temperature sensor according to claim 1, characterized in that: The flexible substrate has a first surface and a second surface that are arranged opposite to each other, and the flexible substrate is provided with a through hole connecting the first surface and the second surface; The first supporting member includes a first supporting portion and a second supporting portion, the first supporting portion is disposed on the first surface and forms a first supporting area, the second supporting portion is disposed on the second surface and forms a second supporting area, and the first supporting area and the second supporting area are disposed corresponding to the through hole; The temperature sensing element includes a first temperature sensing portion, a second temperature sensing portion and a connecting portion, wherein the first temperature sensing portion is disposed in the first supporting region, the second temperature sensing portion is disposed in the second supporting region, and at least a portion of the connecting portion is disposed in the through hole to electrically connect the first temperature sensing portion and the second temperature sensing portion; The first temperature sensing portion and the second temperature sensing portion are made of different metal materials, and the connecting portion and the first temperature sensing portion or the second temperature sensing portion are made of the same material.

6. The flexible temperature sensor according to claim 5, characterized in that: The first supporting portion and the first temperature sensing portion are made of the same metal material, and along the supporting direction of the first supporting portion, the thickness of the first supporting portion is the same as the thickness of the first temperature sensing portion; and / or, The second supporting portion and the second temperature sensing portion are made of the same metal material, and along a supporting direction of the second supporting portion, a thickness of the second supporting portion is the same as a thickness of the second temperature sensing portion.

7. The flexible temperature sensor according to any one of claims 1 to 6, characterized in that: The temperature sensing component also includes: The signal transmission wire is arranged on the flexible substrate and connected to the temperature sensing element.

8. The flexible temperature sensor according to claim 7, characterized in that: The flexible substrate comprises: A first substrate, the temperature sensing component is disposed on the first substrate; The second substrate is connected to the first substrate and is provided with a docking terminal. Two ends of the signal transmission wire are respectively connected to the temperature sensing element and the docking terminal.

9. The flexible temperature sensor according to claim 8, characterized in that: A reinforcement portion is provided on a side of the second substrate facing away from the signal transmission wire, and the reinforcement portion is arranged corresponding to the signal transmission wire.

10. The flexible temperature sensor according to claim 8, characterized in that: The temperature sensing component also includes: A plurality of second support members are arranged on the first substrate and outside the support area. The thickness of the second support members is the same as that of the first support members. The second support members are used to support the object to be measured.

11. The flexible temperature sensor according to any one of claims 1 to 6, characterized in that: The flexible temperature sensor also includes: The protective layer is provided between the temperature sensing component and the flexible substrate.

12. A temperature and pressure integrated sensor, characterized in that: include: A flexible pressure sensor and the flexible temperature sensor according to any one of claims 1 to 11, wherein the flexible pressure sensor is adaptively connected to the flexible temperature sensor in a stacked manner.

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