Air tightness detection device for optical path transposition module

Abstract

The utility model provides an air tightness detection device of a light path transposition module. The light path transposition module to be detected comprises a transposition shell, a light guide pipe, a first sealing assembly and a pressurization mechanism. A fixing hole is formed in the first side wall of the transposition shell; one end of the light guide pipe is arranged on the first side wall through the fixing hole, and the other end of the light guide pipe is arranged outside the transposition shell; the side wall of the light guide pipe is fixedly connected with the edge of the fixing hole, and the joint is an area to be detected; the first sealing assembly is arranged in the transposition shell; the first sealing assembly is of a telescopic structure and comprises a fixed end and a movable end. The fixing end is arranged on the first side wall and covers the fixing hole, so that an inner cavity of the fixing end is communicated with the cavity of the light guide pipe; the movable end abuts against the second side wall of the transposition shell. And the light guide pipe is connected with the pressurizing mechanism.

Description

Technical Field

[0001] The utility model relates to the technical field of precision optical-mechanical structures, in particular to an airtightness detection device for an optical path transposition module. Background Art

[0002] At present, the development level of lithography technology determines the quality and grade of chips, and the development and application of chips affect all industries in society. As one of the four major components of a lithography machine, the performance of the excimer laser light source directly affects lithography technology. Excimer lasers produce deep ultraviolet lasers. The laser transmission will cause the air to ionize and produce ozone. At the same time, the irradiation of laser hotspots will form local light field fluctuations. Therefore, it is often purged by filling positive pressure inert gas under closed light path conditions to stabilize the irradiated light field. The optical path transposition module in the laser is a link in the closed optical path, which is used to change the transmission path of the laser. Therefore, the transposition module needs to be sealed and able to withstand gas transmission at a certain pressure.

[0003] The optical lens in the optical path transposition module changes the transmission direction of the optical path, and the modules in the optical path are connected by the light guide on the transposition module. Since the deep ultraviolet laser has a long transmission optical path in the laser, the light guide of the transposition module has high precision requirements, especially when the light guide is required to have a certain inclination angle: first, it is difficult to ensure the processing and installation accuracy by using a threaded installation method for the light guide alone; second, the integrally processed transposition module shell, although the accuracy is guaranteed, is too expensive. Therefore, an effective solution is to first weld the light guide to the transposition module shell, and then perform local processing, which can both ensure accuracy and reduce costs. This welding method requires strict measurement of the sealing of the light guide weld so that it can withstand a certain pressure of inert gas.

[0004] In the prior art, there is no device and method for detecting the tightness of the light guide pipe weld of the optical path transposition module. For the detection device of pipeline welding tightness, such as application number 2019114024023 "A device for detecting air tightness for metal pipeline welding", a method of sealing one end of the pipeline by a second sealing component and enveloping the weld with a detection tube is proposed to achieve the purpose of detecting the air tightness of the weld. This detection device is suitable for pipeline splicing welding or pipeline butt weld detection with a small difference in pipe diameter, but not suitable for the detection of right-angle welds formed by splicing pipelines on a plane; such as application number 2020107582865 "A device and method for detecting air tightness of pipelines" proposes an adsorption-type pipeline weld air tightness detection device. This device requires a sufficiently large installation space and the area to be detected is processed to a roughness of Ra3.2. It is not suitable for the air tightness detection of the light guide pipe weld on the transposition module because of limited space and complicated operation and installation. Utility Model Content

[0005] The utility model aims to provide an airtightness detection device for an optical path transposition module to solve at least one technical problem existing in the prior art.

[0006] In order to solve the above technical problems, the utility model provides an airtightness detection device for an optical path transposition module, wherein the optical path transposition module to be tested comprises: a transposition housing, a light guide, a first sealing component and a pressurizing mechanism;

[0007] The inner end of the light guide is fixedly arranged on the outer side surface of the first side wall of the transposition housing;

[0008] The first side wall is provided with a through hole for connecting the light guide tube with the inner cavity of the transposed housing;

[0009] The first sealing assembly is arranged in the transposed housing;

[0010] The first sealing assembly includes a first sealing member and a telescopic mechanism;

[0011] The telescopic mechanism forces the first sealing member to be closely attached to the inner side surface of the first side wall, thereby covering the through hole;

[0012] The pressurizing mechanism is sealed and connected to the outer end of the light guide tube, and is used to input high-pressure gas into the light guide tube, and is used to detect the sealing performance of the connection between the light guide tube and the transposed housing.

[0013] Furthermore, the transposition housing includes a second side wall arranged opposite to the first side wall, one end of the telescopic mechanism is connected to the first sealing member, and the other end abuts against the second side wall.

[0014] Preferably, the first sealing member can be a cover plate structure, and the telescopic mechanism can be a pneumatic, hydraulic or electric telescopic mechanism. A blind hole is preferably provided inside the cover plate structure, and the annular boss of the cover plate is tightly attached to the edge of the through hole.

[0015] Further, the first sealing member is a cylindrical first sealing component; the opening end of the first sealing component abuts against the edge of the through hole;

[0016] The telescopic mechanism comprises a screw rod, which is screwed on a threaded hole on the bottom plate of the first sealing component.

[0017] Furthermore, the inner end of the screw is connected to a piston, and the piston is slidably disposed in the first sealing assembly; the piston is sealedly connected to the cylinder wall of the first sealing assembly.

[0018] Optionally, the piston is fixedly connected to the screw;

[0019] More preferably, the screw and the piston are relatively fixedly connected in the axial direction and relatively rotatably connected in the circumferential direction. For example, an annular connecting groove is provided on the back of the piston, and an annular boss is provided on the inner end of the screw, and the annular boss can be relatively rotatably inserted into the annular connecting groove.

[0020] Furthermore, a seat plate is fixedly arranged at the outer end of the screw rod, and a buffer pad is arranged between the seat plate and the second side wall. The buffer pad can effectively protect the second side wall from being scratched during the detection process.

[0021] Typically, the inner end of the light guide is fixed to the outer surface of the first side wall of the transposed housing by welding; the welding seam is the main detection position of the detection device of the present application.

[0022] Preferably, a sealing ring is arranged between the opening end of the first sealing component and the edge of the through hole to improve the sealing between the two.

[0023] Furthermore, it also includes a second sealing component for sealing the outer end of the light guide tube; the pressurizing mechanism is connected to the outer end of the light guide tube through the second sealing component.

[0024] Furthermore, a connecting flange is provided at the outer end of the light guide tube;

[0025] The second sealing assembly includes a front end cover, and the front end cover is sealed and connected to the connecting flange by fasteners such as bolts and screws;

[0026] An air inlet is provided on the front end cover, and the air inlet is connected to the pressurizing mechanism through an air delivery pipeline.

[0027] Preferably, a sealing gasket is provided between the front end cover and the connecting flange.

[0028] The pressurizing mechanism may be a high-pressure air pump.

[0029] Furthermore, the second sealing assembly also includes a rear end cover, and the front end cover and the rear end cover clamp the connecting flange from the front and rear sides respectively, and the front end cover and the rear end cover are connected and fixed by fasteners such as screws or bolts.

[0030] That is, the front end cover is connected and fixed to the connecting flange by means of the rear end cover, thereby improving the versatility of the second sealing assembly of the present application.

[0031] Preferably, a countersunk hole is provided inside the front end cover, and the connecting flange is inserted into the countersunk hole. And / or, a countersunk hole is provided inside the rear end cover, and the connecting flange is inserted into the countersunk hole.

[0032] Furthermore, the rear end cover is an annular body as a whole, and the diameter of the middle through hole of the annular body is larger than the outer diameter of the connecting flange;

[0033] It also includes a pressing block, which is arranged in the middle through hole of the annular body through a screw rod or a pin; both ends of the screw rod or the pin are inserted into the connecting hole of the annular body;

[0034] During installation, the pressing block abuts against the back side of the connecting flange, the front end cover presses the front end face of the connecting flange, and the connecting flange is clamped and fixed after the front end cover and the rear end cover are connected and fixed by fasteners.

[0035] Furthermore, a pressure gauge is provided on the gas transmission pipeline.

[0036] Preferably, the gas delivery pipeline is connected to the front end cover by means of threads.

[0037] By adopting the above technical solution, the utility model has the following beneficial effects:

[0038] 1. The utility model is a light path transposition module airtightness detection device, which detects the airtightness of the light guide weld on the transposition module of the light path transmission in the light path light source. The device has a simple structure, occupies a small space, and is easy to install, disassemble, operate and detect.

[0039] 2. The air tightness detection device of the optical path transposition module of the utility model is also suitable for the air tightness detection of welds with the following characteristics: fillet welds formed by plane welded pipes, spliced ​​welds of straight pipes or bent pipes, and welds with narrow surrounding space. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0041] Figure 1 This is a schematic diagram of the overall structural assembly of an airtightness detection device of an optical path transposition module of the present application;

[0042] Figure 2 This is a schematic diagram of the overall structure assembly of an airtightness detection device of an optical path transposition module of the present application from another perspective;

[0043] Figure 3 This is a schematic diagram of the assembly structure of a first sealing component of an airtightness detection device of an optical path transposition module of the present application;

[0044] Figure 4 This is an enlarged schematic diagram of the assembly structure of a second sealing component of an airtightness detection device of an optical path transposition module of the present application;

[0045] Figure 5 This is a schematic diagram of the transposed housing structure of an airtightness detection device of an optical path transposition module of the present application;

[0046] Figure 6 This is a schematic diagram of the front view structure of an airtightness detection device of an optical path transposition module of the present application;

[0047] Figure 7 for Figure 6 Schematic diagram of the AA section;

[0048] Figure 8 for Figure 7 Partial enlargement of B in the middle and schematic diagram of gas flow.

[0049] Reference numerals:

[0050] 1-transposed housing; 2-first sealing assembly; 3-second sealing assembly; 4-buffer pad; 6-pressure gauge; 7-light guide; 8-connecting seam; 11-sealing ring; 12-connecting flange; 13-front cover; 14-sealing gasket; 15-rear cover; 17-pressing block; 19-first side wall; 20-second side wall; 21-first sealing member; 22-telescopic mechanism; 23-through hole; 24-air inlet. DETAILED DESCRIPTION

[0051] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0052] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0053] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] The present invention will be further explained below in conjunction with specific implementation methods.

[0055] like Figure 1-8 As shown, the present embodiment provides an air tightness detection device for an optical path transposition module, comprising: a transposition housing 1, a light guide 7, a first sealing assembly 2 and a pressurizing mechanism;

[0056] The inner end of the light guide tube 7 is fixedly disposed on the outer surface of the first side wall 19 of the transposed housing 1 and forms a connecting seam 8;

[0057] A through hole 23 is provided on the first side wall 19 for connecting the light guide 7 with the inner cavity of the transposed housing 1;

[0058] The first sealing assembly 2 is arranged in the transposed housing 1;

[0059] The first sealing assembly 2 includes a first sealing member 21 and a telescopic mechanism 22;

[0060] The telescopic mechanism 22 forces the first sealing member 21 to be closely attached to the inner side surface of the first side wall 19, thereby covering the through hole 23;

[0061] The pressurizing mechanism is sealedly connected to the outer end of the light guide tube 7 and is used to input high-pressure gas into the light guide tube 7 and to detect the sealing performance of the connection between the light guide tube 7 and the transposed housing 1 .

[0062] When the air tightness detection device of the optical path transposition module of the present application is working, the transposition housing 1 and the light guide 7 are connected to form a connection seam 8, and the detection device of the present application detects the air tightness at the connection seam 8. The device is inflated with air using a pressurizing mechanism, and the device is immersed in water. If the air tightness of the device does not meet the standard, bubbles will be generated at the place where the air tightness has a loophole, and the leak point can be determined. Further sealing processing can be taken for the leak point later.

[0063] As a further solution of the present application, the transposition housing 1 includes a second side wall 20 arranged opposite to the first side wall 19 , and one end of the telescopic mechanism 22 is connected to the first sealing member 21 , and the other end abuts against the second side wall 20 .

[0064] As a preferred solution of the present application, the first sealing member 21 can be a cover plate structure, and the telescopic mechanism 22 can be a pneumatic, hydraulic or electric telescopic mechanism 22. A blind hole is preferably provided inside the cover plate structure, and the annular boss of the cover plate is closely attached to the edge of the through hole 23.

[0065] As a further solution of the present application, the first sealing member 21 is a cylindrical first sealing component 2; the opening end of the first sealing component 2 abuts against the edge of the through hole 23;

[0066] The telescopic mechanism 22 includes a screw rod, which is screwed on a threaded hole on the bottom plate of the first sealing assembly 2 .

[0067] When the air tightness detection device of the optical path transposition module of the present application is in operation, the telescopic mechanism 22 is telescoped by a screw rod so that the telescopic mechanism 22 abuts against the second side wall 20 , thereby making the first sealing component 2 fit tightly against the first side wall 19 .

[0068] As a further solution of the present application, a piston is connected to the inner end of the screw, and the piston is slidably disposed in the first sealing assembly 2 ; the piston is sealedly connected to the cylinder wall of the first sealing assembly 2 .

[0069] When the air tightness detection device of the optical path transposition module of the present application is working, the piston can be adjusted to the corresponding position according to the different sizes of the transposition housing 1, thereby ensuring the correct installation and operation of the device or system. This structure usually has good adaptability and flexibility, and can meet the needs of transposition housings 1 of different sizes. At the same time, it also ensures the stability and reliability of the device or system, so that the system can better adapt to different working environments and conditions.

[0070] As a preferred solution of the present application, the piston is fixedly connected to the screw rod.

[0071] As a preferred solution of the present application, the screw and the piston are relatively fixedly connected in the axial direction; and are relatively rotatably connected in the circumferential direction. For example, an annular connecting groove is provided on the back of the piston, and an annular boss is provided on the inner end of the screw, and the annular boss can be relatively rotatably inserted into the annular connecting groove.

[0072] When the air tightness detection device of the optical path transposition module of the present application is working, the thread pair cooperates with the thread of the inner cavity of the first sealing component 2 to change the position of the piston. Specifically, the thread pair between the piston and the inner cavity of the first sealing component 2 can ensure the stability and accuracy of the piston in the inner cavity of the first sealing component 2. During the adjustment process, the position of the piston can be changed by rotating the piston or the thread of the inner cavity of the first sealing component 2, thereby achieving precise control of the mechanical system. This structure has high stability and reliability, and can be used to accurately control and adjust the piston position.

[0073] As a preferred solution of the present application, the piston and the first sealing assembly 2 are made of pressure-resistant material.

[0074] When the air tightness detection device of the optical path transposition module of the present application is working, the use of pressure-resistant materials can enhance the pressure resistance of the two components, so that they can withstand greater pressure and load, and improve the durability and reliability of the machine. Since a greater pressure can obtain the air tightness detection result faster and more obviously when detecting the air tightness of the device, the first sealing component 2 and the piston are also required to have a stronger pressure resistance, so these two components are preferably made of pressure-resistant materials.

[0075] As a preferred solution of the present application, the compression-resistant material used is high-strength aluminum alloy, titanium alloy, high-strength steel or carbon fiber reinforced plastic.

[0076] When the air tightness detection device of the optical path transposition module of the present application is working, high-strength aluminum alloy such as aluminum alloy 7050 has high strength, high rigidity and good fatigue resistance, and is suitable for manufacturing the piston and the first sealing component 2. Titanium alloy has excellent corrosion resistance and high strength, and is suitable for manufacturing high-performance pistons and first sealing components 2. High-strength steel has high strength and good toughness, and is suitable for manufacturing pistons and first sealing components 2 that withstand high pressure. Carbon fiber reinforced plastic is a composite material with high strength, light weight and corrosion resistance, and is suitable for manufacturing high-performance pistons and first sealing components 2.

[0077] As a further solution of the present application, a seat plate is fixedly provided at the outer end of the screw rod, and a buffer pad 4 is provided between the seat plate and the second side wall 20. The buffer pad 4 can effectively protect the second side wall 20 from being scratched during the detection process.

[0078] When the air tightness detection device of the optical path transposition module of the present application is working, the rear end of the first sealing component 2 is pressed on the buffer pad 4, so that the relative force on the first sealing component 2 and the transposition housing 1 is more dispersed. In addition, the elasticity of the buffer pad 4 can also facilitate the installation of the first sealing component 2 on the transposition housing 1.

[0079] Typically, the inner end of the light guide 7 is fixed to the outer surface of the first side wall 19 of the transposed housing 1 by welding, and the connecting seam 8 is a welding seam; the welding seam is the main detection position of the detection device of the present application.

[0080] As a preferred solution of the present application, a sealing ring 11 is provided between the opening end of the first sealing component 2 and the edge of the through hole 23 to improve the sealing performance therebetween.

[0081] When the air tightness detection device of the optical path transposition module of the present application is working, the sealing ring 11 can maintain a good sealing function in various operating environments, pressures and temperatures. In addition, the friction between the equipment protected by the sealing ring 11 and the moving parts is small and stable, which plays a very important role in extending the life of the equipment and avoiding damage to the equipment. When replacing the sealing ring 11, the sealing ring 11 also has the advantages of simple structure, easy replacement and low price.

[0082] As a further solution of the present application, a second sealing component 3 is further included, which is used to seal the outer end of the light guide 7 ; the pressurizing mechanism is connected to the outer end of the light guide 7 through the second sealing component 3 .

[0083] As a further solution of the present application, a connecting flange 12 is provided at the outer end of the light guide 7;

[0084] The second sealing assembly 3 includes a front end cover 13, which is sealed and connected to the connecting flange 12 by fasteners such as bolts and screws;

[0085] The connection mode of the front end cover and the connection flange being sealed by fasteners may be direct connection or indirect connection;

[0086] Direct connection is to use fasteners to connect and fix the two through the connection holes on the connection flange and the connection holes on the front end cover;

[0087] Indirect connection means that the front end cover and the connecting flange are sealed and connected by fasteners through other components.

[0088] An air inlet 24 is provided on the front end cover 13 , and the air inlet 24 is connected to the pressurizing mechanism through an air delivery pipeline.

[0089] As a preferred solution of the present application, a sealing gasket 14 is provided between the front end cover 13 and the connecting flange 12 .

[0090] The pressurizing mechanism may be a high-pressure air pump.

[0091] As a further solution of the present application, the second sealing assembly 3 also includes a rear end cover 15, and the front end cover 13 and the rear end cover 15 clamp the connecting flange 12 from the front and rear sides respectively, and the front end cover 13 and the rear end cover 15 are connected and fixed by fasteners such as screws or bolts.

[0092] That is, the front end cover 13 is connected and fixed to the connecting flange 12 by means of the rear end cover 15 , thereby improving the versatility of the second sealing assembly 3 of the present application.

[0093] As a preferred solution of the present application, a countersunk hole is provided inside the front cover 13, and the connecting flange 12 is inserted into the countersunk hole. And / or, a countersunk hole is provided inside the rear cover 15, and the connecting flange 12 is inserted into the countersunk hole.

[0094] The rear end cover 15 can be formed by splicing two semicircular cover plates, and the connection between the two cover plates is connected by a fastener.

[0095] As a further solution of the present application, the rear end cover 15 is an annular body as a whole, and the diameter of the middle through hole of the annular body is larger than the outer diameter of the connecting flange 12;

[0096] It also includes a pressing block 17, which is arranged in the middle through hole of the annular body through a screw or a pin; the two ends of the screw or the pin are inserted into the connecting holes of the annular body;

[0097] During installation, the pressing block 17 abuts against the back of the connecting flange 12, and the front end cover 13 presses the front end surface of the connecting flange 12. The front end cover 13 and the rear end cover 15 are connected and fixed by fasteners to clamp and fix the connecting flange 12.

[0098] When the air tightness detection device of the optical path transposition module of the present application is working, the front cover 13 and the rear cover 15 are in a separated state in the initial state, and the rear cover 15 is also in a separated state from the pressure block 17. First, the rear cover 15 is sleeved on the connecting flange 12, and the pressure block 17 is installed so that the pressure block 17 is tightly attached to the rear end face of the connecting flange 12 (i.e., the end face close to the transposition housing 1), and the sealing gasket 14 is placed between the front cover 13 and the connecting flange 12, and is used for sealing after being pressed and fixed to prevent air leakage. Then the front cover 13 is tightly attached to the front end face of the connecting flange 12 (i.e., the end face away from the transposition housing 1). Finally, the front cover 13 and the rear cover 15 are fastened and connected using fasteners.

[0099] As a further solution of the present application, a pressure gauge 6 is provided on the gas transmission pipeline.

[0100] When the air tightness detection device of the optical path transposition module of the present application is working, the pressurizing mechanism is used to inflate the device, and the inflation is stopped after the threshold pressure is reached to keep the air pressure in the device constant. If the air tightness of the device is good, the pressure gauge 6 will remain stable for a long time; if the air tightness of the device does not meet the standard, the pressure of the pressure gauge 6 will gradually decrease.

[0101] As a preferred solution of the present application, the gas pipeline is connected to the front end cover 13 by means of threads.

[0102] By adopting the above technical solution, the utility model has the following beneficial effects:

[0103] 1. The utility model is a light path transposition module airtightness detection device, which detects the airtightness of the light guide weld on the transposition module of the light path transmission in the light path light source. The device has a simple structure, occupies a small space, and is easy to install, disassemble, operate and detect.

[0104] 2. The optical path transposition module air tightness detection device of the utility model is also suitable for air tightness detection of welds with the following characteristics: fillet welds formed by plane welded pipes, spliced ​​welds of straight pipes or bent pipes, and welds with narrow surrounding space.

[0105] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. An airtightness detection device for an optical path transposition module, wherein the optical path transposition module to be tested comprises a transposition housing and a light guide, wherein the inner end of the light guide is fixedly arranged on the outer surface of a first side wall of the transposition housing; a through hole is arranged on the first side wall for connecting the light guide with the inner cavity of the transposition housing; It is characterized in that Also includes: a first sealing assembly and a pressurizing mechanism; The first sealing assembly is arranged in the transposed housing; The first sealing assembly includes a first sealing member and a telescopic mechanism; The telescopic mechanism forces the first sealing member to be closely attached to the inner side surface of the first side wall, thereby covering the through hole; The pressurizing mechanism is sealed and connected to the outer end of the light guide tube, and is used to input high-pressure gas into the light guide tube, and is used to detect the sealing performance of the connection between the light guide tube and the transposed housing.

2. The airtightness detection device according to claim 1, characterized in that: The transposition housing includes a second side wall arranged opposite to the first side wall. One end of the telescopic mechanism is connected to the first sealing member, and the other end abuts against the second side wall.

3. The airtightness detection device according to claim 2, characterized in that: The first sealing member is a cylindrical first sealing component; the opening end of the first sealing component abuts against the edge of the through hole; The telescopic mechanism comprises a screw rod, which is screwed on a threaded hole on the bottom plate of the first sealing component.

4. The airtightness detection device according to claim 3, characterized in that: The inner end of the screw rod is connected with a piston, and the piston is slidably arranged in the first sealing component; the piston is sealed and connected to the cylinder wall of the first sealing component.

5. The airtightness detection device according to claim 4, characterized in that: The piston is fixedly connected to the screw; Alternatively, in the axial direction, the screw rod and the piston are relatively fixedly connected; in the circumferential direction, the screw rod and the piston are relatively rotatably connected.

6. The airtightness detection device according to claim 3, characterized in that: A seat plate is fixedly arranged at the outer end of the screw rod, and a buffer pad is arranged between the seat plate and the second side wall.

7. The airtightness detection device according to claim 3, characterized in that: A sealing ring is arranged between the opening end of the first sealing component and the edge of the through hole to improve the sealing performance between the two.

8. The airtightness detection device according to claim 1, characterized in that: It also includes a second sealing component for sealing the outer end of the light guide tube; the pressurizing mechanism is connected to the outer end of the light guide tube through the second sealing component.

9. The airtightness detection device according to claim 8, characterized in that: The outer end of the light guide tube is provided with a connecting flange; The second sealing assembly includes a front end cover, and the front end cover is sealed and connected to the connecting flange through a fastener; An air inlet is provided on the front end cover, and the air inlet is connected to the pressurizing mechanism through an air delivery pipeline.

10. The airtightness detection device according to claim 9, characterized in that: A sealing gasket is arranged between the front end cover and the connecting flange.

11. The airtightness detection device according to claim 9, characterized in that: The second sealing assembly also includes a rear end cover. The front end cover and the rear end cover clamp the connecting flange from the front and rear sides respectively. The front end cover and the rear end cover are connected and fixed by fasteners.

12. The airtightness detection device according to claim 11, characterized in that: A countersunk hole is arranged on the inner side of the front end cover, and the connecting flange is inserted into the countersunk hole; and / or, a countersunk hole is arranged on the rear end cover, and the connecting flange is inserted into the countersunk hole.

13. The airtightness detection device according to claim 11, characterized in that: The rear end cover is an annular body as a whole, and the diameter of the middle through hole of the annular body is larger than the outer diameter of the connecting flange; It also includes a pressing block, which is arranged in the middle through hole of the annular body through a screw rod or a pin; both ends of the screw rod or the pin are inserted into the connecting hole of the annular body; During installation, the pressing block is pressed against the back side of the connecting flange, the front end cover presses the front end face of the connecting flange, and the connecting flange is clamped and fixed after the front end cover and the rear end cover are connected and fixed by fasteners.

14. The airtightness detection device according to claim 9, characterized in that: A pressure gauge is provided on the gas transmission pipeline.

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