Series pressure type epoxy film curing jig

Abstract

The utility model provides a series pressure type epoxy film curing jig which comprises a machine frame, a pressing plate, a pressing plate, a pressing plate, a pressing plate and a sliding rail, wherein the machine frame comprises a front side plate, a rear side plate, a bottom plate and a sliding rail; the plurality of pressure plates are configured to be horizontally stacked in the rack in series through a sliding rail; the head pressing plate is configured to be horizontally stacked in the rack together with a plurality of pressing plates in series through a sliding rail, and is in contact with the outermost pressing plate in the plurality of pressing plates through an ejector rod; and the pressure handle is configured to be connected with the rack through a pressure handle shaft hole and press the head pressing plate by rotating around the pressure handle shaft hole.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, and more specifically to a series pressure epoxy film curing fixture. Background Art

[0002] In the manufacturing process of surface acoustic wave filter CSP packaging devices, it is necessary to attach and wrap the epoxy film on the tube core (die) to protect and isolate the environment. Therefore, it is necessary to cover a layer of epoxy film on the ceramic substrate (for example, a substrate of 95mm*95mm size) with the tube core welded, and the total thickness of the coated substrate (hereinafter referred to as "film-coated substrate") is about 0.5mm.

[0003] In the lamination process, the epoxy film generally needs to undergo a curing process at 150°C for 3 hours in an oven.

[0004] In addition, a certain amount of pressure needs to be applied to the "laminated substrate" during the curing process to prevent thermal stress deformation caused by different thermal expansion coefficients of different materials.

[0005] The prior art uses two flat pressing plates to clamp the "laminated substrate" between them, and uses the gravity of the pressing plates or a spring clip to clamp it, and based on this, a jig is made. The jig according to the prior art is large in size and heavy in weight, and thus the space utilization rate of the oven is not high, and it is difficult to carry.

[0006] In addition, there are also jigs that stack the pressing plate and the "laminated substrate" at intervals and use gravity to flatten them. Although this jig solves the problems of weight and volume, the pressure on the upper and lower layers may gradually increase, making the pressure uneven and affecting the uniformity of the process. Utility Model Content

[0007] One aspect of the utility model provides a serial pressure epoxy film curing jig, comprising: a frame, comprising a front side plate, a rear side plate, a bottom plate, and a slide rail; a plurality of pressure plates, the plurality of pressure plates being configured to be horizontally serially stacked in the frame through the slide rail; a first pressure plate, which is configured to be horizontally serially stacked with the plurality of pressure plates in the frame through the slide rail, and to contact the outermost pressure plate of the plurality of pressure plates through a push rod; and a pressure handle, which is configured to be connected to the frame through a pressure handle shaft hole, and to press the first pressure plate by rotating around the pressure handle shaft hole.

[0008] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that a first pressure plate among the plurality of pressure plates is fixed on a front side plate.

[0009] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that the rear side plate is configured to have an axial hole designed thereon for installing a pressure handle, and the rear side plate is also configured with a pressure handle through hole so that the pressure handle contacts the first pressure plate through the pressure handle through hole.

[0010] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that the front side of the pressure plate is provided with a groove, and the back side of the pressure plate is provided with a protrusion. When a plurality of pressure plates are stacked together, the protrusion on the back side is pressed into the groove on the front side of the next pressure plate to form a cavity for accommodating the coated substrate.

[0011] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that the pressure plate is also provided with a connecting rod hole and a connecting rod long hole for installing a connecting rod and a hinge shaft.

[0012] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that it also includes a connecting rod and a hinge shaft, one end of the connecting rod is connected to the connecting rod hole of the pressure plate through the hinge shaft so that it can rotate around the hinge shaft, and the other end of the connecting rod is configured to be constrained in the connecting rod long hole of the adjacent pressure plate through the hinge shaft so that it can slide up and down along the connecting rod long hole.

[0013] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that the hinge shaft is configured as a three-step shaft to constrain the hinge shaft to only slide or rotate in the groove of the connecting rod long hole, or rotate in the connecting rod hole.

[0014] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that the first pressure plate comprises: a push rod cylinder, an adjusting bolt, a pressure spring, a push rod, and a slide rail hole, the adjusting bolt being threadedly connected to the push rod cylinder, and the pressure on the pressure spring is adjusted by adjusting the screw-in distance relative to the push rod cylinder, thereby adjusting the pressure applied by the push rod to the pressure plate.

[0015] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that the pressure handle is configured in an L shape.

[0016] One aspect of the utility model provides a serial pressure epoxy film curing jig, characterized in that the pressure handle is configured to have a self-locking function when in a clamped state by making the clamping force generated by the pressure spring equal to and in opposite directions to the supporting force of the rear side plate on the pressure handle. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram showing a serial pressure epoxy film curing jig according to an embodiment of the utility model;

[0018] Figure 2 Schematic diagram showing a frame of a serial pressure epoxy film curing jig according to an embodiment of the utility model;

[0019] Figure 3 1 is a schematic diagram showing the front side of a pressure plate of a serial pressure epoxy film curing jig according to an embodiment of the utility model;

[0020] Figure 4 1 is a schematic diagram showing the back side of a pressure plate of a serial pressure epoxy film curing jig according to an embodiment of the utility model;

[0021] Figure 5 1 is a schematic diagram showing a first pressing plate of a serial pressing epoxy film curing jig according to an embodiment of the utility model;

[0022] FIG6( a ) is a schematic diagram showing a pressure handle of a serial pressure epoxy film curing jig in a loading state according to an embodiment of the present invention;

[0023] FIG6( b ) is a schematic diagram showing a pressure handle of a serial pressure epoxy film curing jig in a compressed state according to an embodiment of the present invention; and

[0024] Figure 7 It is a schematic diagram showing the hinge shaft and connecting rod of the pressure plate of the serial pressure epoxy film curing fixture according to an embodiment of the utility model. DETAILED DESCRIPTION

[0025] Before the following detailed description, it may be advantageous to set forth the definitions of certain words and phrases used throughout the utility model document. The terms "coupling", "connection" and their derivatives refer to any direct or indirect communication between two or more elements, whether or not those elements are in physical contact with each other. The terms "transmission", "reception" and "communication" and their derivatives cover direct and indirect communication. The terms "include" and "comprising" and their derivatives refer to including but not limited to. The term "or" is inclusive, meaning and / or. The phrase "associated with..." and its derivatives refer to including, including within, interconnecting, containing, contained within, connecting or with...connecting, coupling or with...coupling, communicating with, cooperating, interweaving, parallel, approaching, binding or with...binding, having, having attributes, having a relationship or with...having a relationship, etc. The term "controller" refers to any device, system or part thereof that controls at least one operation. Such a controller can be implemented with hardware, or a combination of hardware and software and / or firmware. The functions associated with any particular controller can be centralized or distributed, whether local or remote. The phrase "at least one of", when used with a list of items, means that different combinations of one or more of the listed items may be used, and only one of the items in the list may be required. For example, "at least one of A, B, C" includes any of the following combinations: A, B, C, A and B, A and C, B and C, A and B and C.

[0026] Definitions for other specific words and phrases are provided throughout this document. Those of ordinary skill in the art should understand that in many, if not most instances, such definitions apply to prior and future uses of such defined words and phrases.

[0027] In the present utility model document, the application combination of circuit blocks and the division of sub-circuit blocks are only used for illustration, and the application combination of circuit blocks and the division of sub-circuit blocks may have different modes without departing from the scope of the present disclosure.

[0028] The following discussion Figures 1 to 7 The various embodiments used to describe the principles of the present invention are for illustration only and should not be interpreted in any way as limiting the scope of the present disclosure. It will be understood by those skilled in the art that the principles of the present disclosure can be implemented in any appropriately arranged system or device.

[0029] In view of the problems of uneven pressure, poor adjustability, bulky size and heavy weight of existing jigs that are not suitable for transportation, the utility model provides a serial pressure epoxy film curing jig. According to the jig of the utility model, the elastic force generated by spring compression is used as the acting force, and the pressure is adjusted by adjusting the compression amount of the spring.

[0030] Figure 1Schematic diagram of a serial pressure epoxy film curing jig according to an embodiment of the utility model.

[0031] like Figure 1 As shown, the serial pressure epoxy film curing fixture of the embodiment of the utility model comprises: a frame 1-1; a plurality of pressure plates 1-2, which are horizontally stacked in the frame; a first pressure plate 1-3, which is configured to contact the outermost pressure plate of the plurality of pressure plates through a push rod; and a pressure handle 1-4, which is configured to be connected to the frame through a pressure handle shaft hole, and to press the first pressure plate by rotating around the pressure handle shaft hole. The plurality of pressure plates 1-2 are also connected through a hinge shaft 1-5 and a connecting rod 1-6.

[0032] Figure 2 Schematic diagram showing a frame of a serial pressure epoxy film curing fixture according to an embodiment of the utility model.

[0033] refer to Figure 2 The frame according to the embodiment of the utility model includes a front side plate 2-1, a rear side plate 2-2, a bottom plate 2-3, and a slide rail 2-4. The front side plate 2-1, the rear side plate 2-2, the bottom plate 2-3, and the slide rail 2-4 constitute a structure for supporting the jig to bear the pressure load during the film pressing operation.

[0034] According to an embodiment of the utility model, a plurality of pressure plates and a front pressure plate are stacked in series on the slide rail 2 - 4 and slide along the axis of the slide rail 2 - 4 .

[0035] According to an embodiment of the present utility model, the first pressure plate among the plurality of pressure plates is fixed on the front side plate 2 - 1 .

[0036] According to an embodiment of the utility model, the rear side plate 2-2 is configured to have an axial hole 2-5 designed thereon for installing a pressure handle. In addition, the rear side plate 2-2 is configured to have a pressure handle through hole 2-6 so that the pressure handle contacts the first pressure plate through the through hole 2-6.

[0037] According to an embodiment of the utility model, the rear side plate 2-2 is also configured to be provided with a through hole 2-7 thereon, so that the push rod cylinder of the first pressure plate is installed through the through hole 2-7.

[0038] Figure 3 and Figure 4 The schematic diagrams respectively show the front and back sides of the pressure plate of the serial pressure epoxy film curing jig according to the embodiment of the utility model.

[0039] refer to Figure 3 and Figure 4The front of the pressure plate is designed with a groove, and the "laminated substrate" is placed in the groove. The back of the pressure plate is convex. When multiple pressure plates are stacked together, the convex part on the back is pressed into the groove on the front of the next pressure plate to form a cavity, and the "laminated substrate" is inserted into the cavity. When pressure is applied, the "laminated substrate" is flattened.

[0040] According to the embodiment of the utility model, a slide rail hole 3-1 is designed on the pressure plate to enable the pressure plate to slide along the slide rail.

[0041] According to the embodiment of the utility model, a connecting rod hole 3-2 and a connecting rod long hole 3-3 are also designed on the pressure plate for installing the connecting rod and the hinge shaft to constrain the movement of the pressure plate.

[0042] According to the embodiment of the utility model, a sheet taking slot 3-4 is also designed on the pressure plate to facilitate taking and placing the "film-covered substrate".

[0043] Figure 5 Schematic diagram showing the first pressing plate of the serial pressing epoxy film curing fixture according to an embodiment of the utility model.

[0044] refer to Figure 5 The first pressure plate is configured to include: a push rod cylinder 5-1, an adjusting bolt 5-2, a pressure spring 5-3, a push rod 5-4, and a slide rail hole 5-5. The adjusting bolt 5-2 is connected to the push rod cylinder 5-1 by a thread, and the pressure on the pressure spring 5-3 is adjusted by adjusting the screwing distance relative to the push rod cylinder 5-1, thereby adjusting the pressure applied by the push rod 5-4 to the pressure plate to achieve the push operation.

[0045] According to an embodiment of the utility model, the first pressure plate is configured to be pushed by the pressure handle to press the pressure plate.

[0046] In addition, according to an embodiment of the utility model, by adjusting the bolt 5-2 to control the compression amount of the pressure spring 5-3, pressure control during extrusion is achieved to provide further control and adjustment of the pressure between the pressure handle and the pressure plate.

[0047] According to an embodiment of the utility model, the first pressure plate is configured to be designed with a slide rail hole 5 - 5 for being installed on the slide rail and sliding thereon.

[0048] FIG. 6( a ) and FIG. 6( b ) are schematic diagrams showing the pressure handle of the serial pressure epoxy film curing jig in the loading state and the pressing state respectively according to the embodiment of the present invention.

[0049] 6(a) and 6(b), the pressure handle 6-4 is configured in an L-shape and is configured to be connected to the frame through the pressure handle shaft hole 6-5.

[0050] According to an embodiment of the utility model, the pressure handle 6-4 is configured to have a working length R to meet the cavity distance a1 between multiple pressure plates 6-2 when in a loading state; and when in a clamping state, the cavity distance a2, that is, the thickness of the "laminated substrate 6-1".

[0051] By turning the pressure handle, the distance between the front end of the first pressure plate 6-3 and the rear side plate changes between c1-c2, and by adjusting the bolt, the length of the pressure spring changes between b1-b2 to provide further adjustment of the pressure of the first pressure plate.

[0052] According to an embodiment of the utility model, the pressure handle is also configured to have a self-locking function in a clamped state. When the pressure handle is in a clamped state, the pressure handle is constrained by the rear side plate of the frame, so that the clamping force generated by the pressure spring is equal to the supporting force of the rear side plate on the pressure handle, and the directions are opposite, thereby achieving self-locking.

[0053] Those skilled in the art should understand that, although according to an embodiment of the present invention, the pressure handle is configured in an L shape, and the rear side plate is configured with a pressure handle through hole so that the pressure handle contacts the first pressure plate through the through hole, the above example is only for demonstration and does not limit the scope of the present invention. Without departing from the scope of the present invention, it can also be configured in other shapes, for example, the pressure handle is configured in the shape of an eccentric wheel, and the first pressure plate is pressed by rotating around the pressure handle shaft hole provided on the surface of the rear side plate facing the first pressure plate.

[0054] Figure 7 It is a schematic diagram showing the hinge shaft and connecting rod of the pressure plate of the serial pressure epoxy film curing fixture according to an embodiment of the utility model.

[0055] refer to Figure 7 One end of the connecting rod 7-2 is connected to the connecting rod hole of the pressure plate through the hinge shaft 7-1 so that it can rotate around the hinge shaft 7-1; and the other end of the connecting rod 7-2 is configured to be constrained in the connecting rod long hole of the adjacent pressure plate through the hinge shaft so that it can slide up and down. According to an embodiment of the utility model, the hinge shaft 7-1 is configured as a three-step shaft to constrain the hinge shaft 7-1 to only slide or rotate in the groove of the connecting rod long hole, or rotate in the connecting rod hole.

[0056] According to the embodiment of the utility model, the connecting rod is configured so that multiple pressure plates can move in the direction of the slide rail at the same time and at equal distances. Since the pressure plate is constrained by the slide rail of the frame, the connecting rod, the hinge shaft, the connecting rod hole of the pressure plate and the connecting rod long hole, when loading, if any one of the pressure plates is pulled apart along the axis of the slide rail, all the stacked pressure plates will be separated at equal distances.

[0057] According to the serial pressure epoxy film curing jig of the utility model, by designing concave and convex pressure plates, the pressure plates are embedded in each other when stacked in series to form a cavity for loading, thereby saving the types of parts and the volume of the jig; by designing a slide rail on the frame, the movement of the pressure plate along the axial direction of the slide rail is constrained; by designing a pressure handle on the frame, when the pressure plate is pushed to perform a pressing work, it can self-lock in the pressing state; by designing a first pressure plate, the first pressure plate is between the pressure handle and the pressure plate, and is used to adjust and control the pressure of the pressing work; by designing a connecting rod constraint between the pressure plates, the movement distance between all the pressure plates is always equal.

[0058] Although the present disclosure has been described with exemplary embodiments, various changes and modifications may be suggested to one skilled in the art. The present disclosure is intended to encompass such changes and modifications as fall within the scope of the appended claims.

[0059] Any description in the utility model should not be understood as implying that any particular element, step or function is an essential element that must be included in the scope of the claims. The scope of the utility model subject matter is limited only by the claims.

Claims

1. A series pressure epoxy film curing fixture, characterized in that: include: A rack, including a front side panel, a rear side panel, a bottom panel, and a slide rail; A plurality of pressure plates, the plurality of pressure plates being configured to be horizontally stacked in a frame via slide rails; A first pressing plate, which is configured to be stacked horizontally in a frame with a plurality of pressing plates through a slide rail, and to contact an outermost pressing plate among the plurality of pressing plates through a push rod; as well as The pressure handle is configured to be connected to the frame through the pressure handle shaft hole and to press the first pressure plate by rotating around the pressure handle shaft hole.

2. The serial pressure epoxy film curing fixture according to claim 1, characterized in that: A first pressure plate of the plurality of pressure plates is fixed to the front side plate.

3. The serial pressure epoxy film curing fixture according to claim 1, characterized in that: The rear side plate is configured to have an axial hole designed thereon for mounting a pressure handle. The rear side plate is also configured with a pressure handle through hole, so that the pressure handle contacts the first pressure plate through the pressure handle through hole.

4. The serial pressure epoxy film curing fixture according to claim 1, characterized in that: The front side of the pressure plate is provided with a groove, and the back side of the pressure plate is provided with a protrusion. When a plurality of pressure plates are stacked together, the protrusion on the back side is pressed into the groove on the front side of the next pressure plate to form a cavity for accommodating the laminated substrate.

5. The serial pressure epoxy film curing jig according to claim 1, characterized in that: The pressure plate is also provided with a connecting rod hole and a connecting rod long hole for installing the connecting rod and the hinge shaft.

6. The serial pressure epoxy film curing jig according to claim 5, characterized in that: It also includes connecting rods and hinge shafts. One end of the connecting rod is connected to the connecting rod hole of the pressure plate through a hinge shaft so that it can rotate around the hinge shaft, and the other end of the connecting rod is configured to be constrained in the connecting rod long hole of the adjacent pressure plate through the hinge shaft so that it can slide up and down along the connecting rod long hole.

7. The serial pressure epoxy film curing jig according to claim 6, characterized in that: The hinge shaft is configured as a three-step shaft to constrain the hinge shaft to only slide or rotate in the groove of the connecting rod long hole, or rotate in the connecting rod hole.

8. The serial pressure epoxy film curing jig according to claim 1, characterized in that: The first pressure plate includes: a push rod cylinder, an adjusting bolt, a pressure spring, a push rod, and a slide rail hole. The adjusting bolt is connected to the push rod cylinder through a thread, and the pressure on the pressure spring is adjusted by adjusting the screw-in distance relative to the push rod cylinder, thereby adjusting the pressure applied by the push rod to the pressure plate.

9. The serial pressure epoxy film curing jig according to claim 1, characterized in that: The pressure handle is configured in an L-shape.

10. The serial pressure epoxy film curing jig according to claim 8, characterized in that: The pressure handle is configured to have a self-locking function when in a compressed state by making the compression force generated by the pressure spring equal to and opposite to the supporting force of the rear side plate on the pressure handle.

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