Mask plate and evaporation device

Abstract

The utility model provides a mask plate which comprises at least one mask opening and a plurality of flow guide channels, the flow guide channels are arranged on one side of the mask opening, each flow guide channel comprises a first opening and a second opening which are oppositely arranged, and the section width, close to the first opening, of each flow guide channel is larger than the section width of the middle of the corresponding flow guide channel, and / or the section width of each flow guide channel is larger than the section width of the middle of the corresponding flow guide channel. According to the mask plate provided by the invention, liquid medicine can quickly flow out after cleaning, and the risk of liquid medicine residue is avoided.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a mask plate and an evaporation device. Background Art

[0002] In the process of manufacturing OLED display panels, various film layers are formed on the substrate by evaporation through a mask plate. After evaporation, it is usually necessary to clean the organic matter remaining on the frame and mask of the mask plate.

[0003] During the liquid cleaning process, there are areas on the mask where liquid is easily accumulated, and the air-drying time is also long. Long-term use of residual liquid will damage the mask and affect production efficiency. Summary of the invention

[0004] In view of this, the purpose of the present application is to provide a mask plate, which allows the drug solution to flow out quickly after cleaning, thereby reducing the risk of drug solution residue.

[0005] Based on the above purpose, according to the first aspect of the present application, a mask plate is provided, comprising: at least one mask opening; a plurality of guide channels, wherein the guide channels are arranged on one side of the mask opening, and the guide channels include a first opening and a second opening arranged opposite to each other, wherein the cross-sectional width of the guide channel close to the first opening is greater than the cross-sectional width of the middle part of the guide channel, and / or the cross-sectional width of the guide channel close to the second opening is greater than the cross-sectional width of the middle part of the guide channel.

[0006] In one embodiment of the present application, the cross-sectional width of the flow guiding channel close to the first opening is greater than or equal to the cross-sectional width of the flow guiding channel close to the second opening;

[0007] Preferably, the depth of the guide channel gradually increases along the direction from the first opening to the second opening.

[0008] In one embodiment of the present application, the mask further includes a full-thickness area and a half-engraved area, the half-engraved area is located between the mask opening and the full-thickness area, the half-engraved area is at least partially arranged around the mask opening, the thickness of the half-engraved area is less than the thickness of the full-thickness area, the guide channel is arranged in the full-thickness area, and the first opening of the guide channel is connected to the half-engraved area;

[0009] Preferably, a guide outlet penetrating the full thickness area is provided near the second opening of the full thickness area;

[0010] Preferably, the first opening is smoothly connected to the connecting portion of the half-engraved area.

[0011] In one embodiment of the present application, the ratio of the thickness of the half-engraved area to the thickness of the full-thickness area is between 0.4 and 0.6;

[0012] Preferably, the ratio of the depth of the guide channel to the thickness of the half-engraved area is between 1-1.2.

[0013] In one embodiment of the present application, the cross-sectional shape of the flow guide channel is a symmetrical figure;

[0014] Preferably, the cross-sectional shape of the flow guiding channel is in the shape of a hyperbola; or, the projection shape of the flow guiding channel in the full thickness area includes two funnel shapes symmetrically arranged along the middle.

[0015] According to a second aspect of the present application, another mask plate is provided, comprising: at least one mask opening; a plurality of guide channels, wherein the guide channels are arranged on one side of the mask opening, and the guide channels include a first opening and a second opening arranged opposite to each other; wherein, along the direction from the first opening to the second opening, the shape of the guide wall surface of the guide channel is an arc.

[0016] In one embodiment of the present application, the mask further includes a full-thickness area and a half-engraved area, the half-engraved area is located between the mask opening and the full-thickness area, the half-engraved area is at least partially arranged around the mask opening, the thickness of the half-engraved area is less than the thickness of the full-thickness area, the guide channel is arranged in the full-thickness area, and the first opening of the guide channel is connected to the half-engraved area;

[0017] Preferably, the cross-sectional width of the flow guiding channel close to the first opening is greater than the cross-sectional width of the middle portion of the flow guiding channel, and / or the cross-sectional width of the flow guiding channel close to the second opening is greater than the cross-sectional width of the middle portion of the flow guiding channel;

[0018] Preferably, the cross-sectional shape of the flow guide channel is a symmetrical figure;

[0019] Preferably, the cross-sectional shape of the flow guiding channel is in the shape of a hyperbola; or, the projection shape of the flow guiding channel in the full thickness area includes two funnel shapes symmetrically arranged along the middle.

[0020] According to a third aspect of the present application, another mask plate is provided, comprising: at least one mask opening; a plurality of guide channels, wherein the guide channels are arranged on one side of the mask opening, and the guide channels comprise a first opening and a second opening arranged opposite to each other; wherein, along the direction from the first opening to the second opening, the cross-sectional width of the guide channels gradually changes.

[0021] In one embodiment of the present application, the mask further includes a full-thickness area and a half-engraved area, the half-engraved area is located between the mask opening and the full-thickness area, the half-engraved area is at least partially arranged around the mask opening, the thickness of the half-engraved area is less than the thickness of the full-thickness area, the guide channel is arranged in the full-thickness area, and the first opening of the guide channel is connected to the half-engraved area;

[0022] Preferably, the cross-sectional width of the flow guiding channel close to the first opening is greater than the cross-sectional width of the middle portion of the flow guiding channel, and / or the cross-sectional width of the flow guiding channel close to the second opening is greater than the cross-sectional width of the middle portion of the flow guiding channel;

[0023] Preferably, the cross-sectional shape of the flow guide channel is a symmetrical figure;

[0024] Preferably, the cross-sectional shape of the flow guiding channel is in the shape of a hyperbola; or, the projection shape of the flow guiding channel in the full thickness area includes two funnel shapes symmetrically arranged along the middle.

[0025] According to a fourth aspect of the present application, a vapor deposition device is provided, comprising the above-mentioned mask plate.

[0026] Compared with the prior art, the mask plate provided by the present application has a cross-sectional width of the guide channel near the first opening that is greater than the cross-sectional width of the middle part of the guide channel, and / or a cross-sectional width of the guide channel near the second opening that is greater than the cross-sectional width of the middle part of the guide channel, so that the drug solution can quickly flow out to the second opening after entering the guide channel, and is not easy to accumulate in the middle section of the guide channel; at the same time, during the air-drying process, due to the narrowness of the middle channel, the airflow velocity increases when passing through the narrowest part of the guide channel, and the water droplets condensed on the side wall are also more easily carried away, thereby reducing the time used for air-drying, reducing the time required for cleaning, and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the present application or related technologies, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 is a schematic diagram of an existing mask plate structure;

[0029] Figure 2 A schematic diagram of the structure of the mask plate provided in the embodiment of the present application;

[0030] Figure 3 for Figure 2 A schematic diagram of the enlarged structure of part A;

[0031] Figure 4 One of the cross-sectional structural schematic diagrams of the mask plate provided in the embodiment of the present application;

[0032] Figure 5 The second schematic diagram of the cross-sectional structure of the mask plate provided in the embodiment of the present application;

[0033] Figure 6 One of the structural schematic diagrams of the mask plate provided in the embodiment of the present application;

[0034] Figure 7 for Figure 6 A schematic diagram of the enlarged structure of part B;

[0035] Figure 8 The second structural schematic diagram of the mask plate provided in the embodiment of the present application;

[0036] Fig. 9 for Figure 8 Schematic diagram of the enlarged structure of part C. DETAILED DESCRIPTION

[0037] In order to make the objectives, technical solutions and advantages of the present application more clearly understood, the present application is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0038] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present application should be the usual meanings understood by people with ordinary skills in the field to which the present application belongs. The "first", "second" and similar words used in the embodiments of the present application do not represent any order, quantity or importance, but are only used to distinguish different components. "Including" or "comprising" and similar words mean that the elements or objects appearing in front of the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0039] See also Figure 1 The inventor of the present application has found the following problems in the relevant technology during long-term practical work: during the mask cleaning process, the liquid is easily accumulated at the corners, and the air-drying process takes a long time, which affects the production efficiency. The main reason for this is that the existing guide channel is narrow and long, which is not conducive to the rapid flow of the liquid, affecting the production efficiency.

[0040] See also Figure 1 , Figure 1 A schematic structural diagram of an existing mask plate is shown, the mask plate includes at least one mask opening 300 and a half-engraved area 200 arranged around at least part of the mask opening, the full-thickness area 100 is located on a side of the half-engraved area 200 away from the mask opening 300, the thickness of the half-engraved area 200 is less than the thickness of the full-thickness area 100, and a plurality of guide channels 400 are formed on the full-thickness area 300. During the cleaning process, in order to accelerate the discharge of the drug liquid from the mask plate, the mask plate can be placed vertically and a wind-blowing treatment method can be adopted to accelerate the discharge of the drug liquid from the mask plate by the gravity of the drug liquid itself and the action of wind.

[0041] However, the inventors have found that after the above treatment, the corners of the half-engraved area 200 are still prone to accumulation of liquid medicine, and the middle corners of the guide channel 400 are prone to accumulation of solution, which is not conducive to the rapid outflow of the liquid. At the same time, the air-drying time is long, affecting production efficiency.

[0042] In view of this, see Figure 2-Figure 9 The embodiment of the first aspect of the present application proposes a mask plate, which includes at least one mask opening 30 and a plurality of guide channels, wherein the plurality of mask openings 30 are arranged in an array, and the shape of the mask opening 30 can be rectangular, circular or any other shape; a plurality of guide channels 40 are arranged on one side of the mask opening, and the guide channel 40 includes a first opening 41 and a second opening 42 arranged opposite to each other, wherein the cross-sectional width of the guide channel 40 close to the first opening 41 is greater than the cross-sectional width of the middle of the guide channel 40, and / or the cross-sectional width of the guide channel 40 close to the second opening 42 is greater than the cross-sectional width of the middle of the guide channel 40. The peripheral area is arranged around the mask opening, and the peripheral area includes a full thickness area (such as Figure 4 The dotted area) 10 and the half-engraved area (such as Figure 4 In the figure, the area marked by the dotted line) 20, the half-engraved area 20 is located between the mask opening 30 and the full-thickness area 10, the half-engraved area 20 is at least partially arranged around the mask opening 30, the thickness of the half-engraved area 20 is less than the thickness of the full-thickness area 10, the guide channel 40 is arranged on the full-thickness area 10, and the first opening 41 of the guide channel 40 is connected to the half-engraved area 20.

[0043] It should be noted that the cross-sectional width of the guide channel 40 in the present embodiment gradually decreases from the direction of liquid outflow and then gradually increases, so that the liquid medicine can quickly flow out to the second opening 42 after entering the guide channel, and is not easy to accumulate in the middle section of the guide channel. At the same time, during the air-drying process, due to the narrowness of the middle channel, the airflow velocity increases when passing through the narrowest part of the guide channel, and the water droplets condensed on the side wall are also more easily carried away, which reduces the time used for air-drying, reduces the time required for cleaning, and improves production efficiency.

[0044] refer to Figure 3 and Figure 5 In one embodiment, the cross-sectional width of the guide channel 40 near the first opening 41 is greater than or equal to the cross-sectional width of the guide channel 40 near the second opening 42. Such a design is conducive to the rapid outflow and inflow of the liquid medicine. In one embodiment of the present application, the width of the first opening 41 and the width of the second opening 42 can be set to be the same, that is, the width of the second opening 42 is equal to the width of the first opening 41. During the air-drying process, since the width of the first opening 41 is the same as the width of the second opening 42, the airflow passing through the guide channel 40 is relatively stable, which is more conducive to blowing away the water droplets on the inner wall of the guide channel 40.

[0045] refer to Figure 5 In one embodiment, a guide outlet 43 penetrating the full-thickness area 10 is provided near the second opening 42 of the full-thickness area 10. The guide outlet 43 is provided to prevent the length of the liquid outflow direction of the guide channel from being too long, so that the liquid medicine can flow out quickly from the second outlet 42 and the air drying time can be reduced.

[0046] In one embodiment, the projection of the guide channel 40 on the full thickness area 10 is a symmetrical figure. Such a design of the guide channel can achieve a better overlap effect with other layers of MASK. Figure 6 and Figure 7 The projection of the guide channel 40a in the full thickness area 10 is in the shape of a hyperbola. When cleaning the mask plate, the mask plate is placed upright. The liquid medicine in the half-engraved area 20 will flow downward along the guide channel 40a under the action of its own gravity. Since the guide channel 40a is in the form of a hyperbola with a large middle and small ends, the liquid medicine can flow out of the guide channel 40a quickly and is not easy to accumulate in the guide channel. During the air-drying process, since the guide channel 40a is narrow in the middle, the gas flows faster when passing through the guide channel, making it easier to blow away the water droplets on the inner wall. Improve the cleaning efficiency of the mask plate. Optionally, refer to Figure 8 and Fig. 9 The projection pattern of the guide channel 40b in the full-thickness area 10 includes two funnel shapes symmetrically arranged along the middle. The principle is the same as described above. Of course, the cross-sectional shape of the guide channel is not limited to the above two shapes. As long as the cross-sectional width of the guide channel gradually decreases from the liquid outflow direction and then gradually increases, it is within the scope of protection of this application.

[0047] Specifically, in the present embodiment, the formula of the hyperbola is Y^2=NX, where N is a coefficient. In practical applications, we usually first form a guide port 43 on the mask plate, and then determine the size of the hyperbola opening according to the size of the side length of the guide port 43. Therefore, the specific value of N is determined by the size of the side length of the guide port 43. At the same time, the opening direction of the hyperbola can be determined according to Y^2=NX.

[0048] refer to Figure 5 In one embodiment, the depth of the guide channel 40 gradually increases from the first opening 41 to the second opening 42. In this embodiment, the depth of the guide channel 40 is as follows: Figure 5 The value of c shown is used to increase the outflow speed of the liquid medicine so that the depth of the guide channel 40 gradually becomes deeper from the liquid outflow direction (that is, the value of c gradually becomes larger from the liquid outflow direction), and the bottom of the guide channel 40 is inclined. This design is conducive to ensuring the smooth and rapid outflow of the cleaning liquid.

[0049] refer to Figure 3In one embodiment, the first opening 41 is smoothly connected to the connection point of the half-engraved area 20. In the process of cleaning the mask plate, the mask plate is placed vertically. When the liquid medicine flows downward, it will flow to the intersection of the half-engraved area and the full-thickness area. The liquid medicine will accumulate here and is not suitable for flowing out. In order to avoid this phenomenon, the side wall 101 of the full-thickness area 10 and the side wall 401 of the guide channel close to the full-thickness area are designed to be smoothly connected. This design will not form a barrier part (such as a step) of residual liquid, so that the liquid medicine can flow directly into the guide channel.

[0050] Specifically, the ratio of the thickness of the half-engraved area 20 to the thickness of the full-thickness area 10 is between 0.4-0.6, and a guide channel is formed by the height difference between the half-engraved area 20 and the full-thickness area 10. The ratio of the depth of the guide channel to the thickness of the half-engraved area is between 1-1.2. This design allows the liquid medicine to flow out of the first outlet smoothly. In this embodiment, the thickness of the half-engraved area is specifically as follows: Figure 5 The value of b shown in the figure is as follows: Figure 5 The value of a shown in FIG. 1 and the depth of the diversion channel are as follows: Figure 5 Preferably, the ratio of the height of the half-engraved area 20 to the height of the full-thickness area 10 is 0.5, that is, b / a is 0.5, and the ratio of the depth of the guide channel to the thickness of the half-engraved area is 1, that is, c / b is 1.

[0051] In the above-mentioned mask plate, the cross-sectional width of the guide channel gradually decreases from the liquid outflow direction and then gradually increases, so that the liquid medicine can quickly flow out to the second outlet after entering the guide channel, and is not easy to accumulate in the middle section of the guide channel; at the same time, during the air-drying process, due to the narrowness of the middle channel, the air flow velocity increases when passing through the narrowest part of the guide channel, and the water droplets condensed on the side wall are also more easily taken away, which reduces the time used for air-drying, reduces the time required for cleaning, and improves production efficiency.

[0052] See also Figure 2-Figure 9 , the embodiment of the second aspect of the present application proposes a mask plate, which includes at least one mask opening 30, a peripheral area and a plurality of flow guide channels 40; wherein the plurality of mask openings are arranged in an array, and the shape of the mask opening 30 can be rectangular, circular or any other shape; the plurality of flow guide channels 40 are all arranged on one side of the mask opening 30, and the flow guide channel 40 includes a first opening 41 and a second opening 42 arranged opposite to each other, wherein, along the direction from the first opening 41 to the second opening 42, the shape of the flow guide wall of the flow guide channel 40 is an arc. In this embodiment, the wall shape of the flow guide channel 40 is set to an arc, and the morphology of the flow guide channel is changed to avoid a meandering graphic design. The direction of the airflow can be better controlled during the air drying process, and the water droplets condensed on the side wall are also more easily taken away, which reduces the time used for air drying, reduces the time required for cleaning, and improves production efficiency.

[0053] Further, the cross-sectional width of the guide channel 40 near the first opening 41 is greater than the cross-sectional width of the middle portion of the guide channel 40 , and / or the cross-sectional width of the guide channel 40 near the second opening 42 is greater than the cross-sectional width of the middle portion of the guide channel.

[0054] Furthermore, the peripheral region is arranged around the mask opening, and the peripheral region includes the full thickness region 10 (such as Figure 4 The dotted line marks the area) and the half-engraved area 20 (such as Figure 4 In the figure, the area marked by the dotted line, the half-engraved area 20 is located between the mask opening 30 and the full-thickness area 10, the half-engraved area 20 is at least partially arranged around the mask opening 30, the thickness of the half-engraved area 20 is less than the thickness of the full-thickness area 10, the guide channel 40 is arranged on the full-thickness area 10, and the first opening 41 of the guide channel 40 is connected to the half-engraved area 20.

[0055] Please refer to Figure 3 and Figure 5 In one embodiment, the cross-sectional width of the guide channel 40 near the first opening 41 is greater than or equal to the cross-sectional width of the guide channel 40 near the second opening 42. Such a design is conducive to the rapid outflow and inflow of the liquid medicine. In one embodiment of the present application, the width of the first opening 41 and the width of the second opening 42 can be set to be the same, that is, the width of the second opening 42 is equal to the width of the first opening 41. During the air-drying process, since the width of the first opening 41 is the same as the width of the second opening 42, the airflow passing through the guide channel 40 is relatively stable, which is more conducive to blowing away the water droplets on the inner wall of the guide channel 40.

[0056] refer to Figure 5 In one embodiment, a guide outlet 43 penetrating the full-thickness area 10 is provided near the second opening 42 of the full-thickness area 10. The guide outlet 43 is provided to prevent the length of the liquid outflow direction of the guide channel from being too long, so that the liquid medicine can flow out quickly from the second outlet 42 and the air drying time can be reduced.

[0057] In one embodiment, the projection of the guide channel 40 on the full thickness area 10 is a symmetrical figure. Such a design of the guide channel can achieve a better overlap effect with other layers of MASK. Figure 6 and Figure 7The projection of the guide channel 40a in the full thickness area 10 is in the shape of a hyperbola. When cleaning the mask plate, the mask plate is placed upright. The liquid medicine in the half-engraved area 20 will flow downward along the guide channel 40a under the action of its own gravity. Since the guide channel 40a is in the form of a hyperbola with a large middle and small ends, the liquid medicine can flow out of the guide channel 40a quickly and is not easy to accumulate in the guide channel. During the air-drying process, since the guide channel 40a is narrow in the middle, the gas flows faster when passing through the guide channel, making it easier to blow away the water droplets on the inner wall. Improve the cleaning efficiency of the mask plate. Optionally, refer to Figure 8 and Fig. 9 The projection pattern of the guide channel 40b in the full-thickness area 10 includes two funnel shapes symmetrically arranged along the middle. The principle is the same as described above. Of course, the cross-sectional shape of the guide channel is not limited to the above two shapes. As long as the cross-sectional width of the guide channel gradually decreases from the liquid outflow direction and then gradually increases, it is within the scope of protection of this application.

[0058] Specifically, in the present embodiment, the formula of the hyperbola is Y^2=NX, where N is a coefficient. In practical applications, we usually first form a guide port 43 on the mask plate, and then determine the size of the hyperbola opening according to the size of the side length of the guide port 43. Therefore, the specific value of N is determined by the size of the side length of the guide port 43. At the same time, the opening direction of the hyperbola can be determined according to Y^2=NX.

[0059] refer to Figure 5 In one embodiment, the depth of the guide channel 40 gradually increases from the first opening 41 to the second opening 42. In this embodiment, the depth of the guide channel 40 is as follows: Figure 5 The value of c shown is used to increase the outflow speed of the liquid medicine so that the depth of the guide channel 40 gradually becomes deeper from the liquid outflow direction (that is, the value of c gradually becomes larger from the liquid outflow direction), and the bottom of the guide channel 40 is inclined. This design is conducive to ensuring the smooth and rapid outflow of the cleaning liquid.

[0060] refer to Figure 3 In one embodiment, the first opening 41 is smoothly connected to the connection point of the half-engraved area 20. In the process of cleaning the mask plate, the mask plate is placed vertically. When the liquid medicine flows downward, it will flow to the intersection of the half-engraved area and the full-thickness area. The liquid medicine will accumulate here and is not suitable for flowing out. In order to avoid this phenomenon, the side wall 101 of the full-thickness area 10 and the side wall 401 of the guide channel close to the full-thickness area are designed to be smoothly connected. This design will not form a barrier part (such as a step) of residual liquid, so that the liquid medicine can flow directly into the guide channel.

[0061] Specifically, the ratio of the thickness of the half-engraved area 20 to the thickness of the full-thickness area 10 is between 0.4-0.6, and a guide channel is formed by the height difference between the half-engraved area 20 and the full-thickness area 10. The ratio of the depth of the guide channel to the thickness of the half-engraved area is between 1-1.2. This design allows the liquid medicine to flow out of the first outlet smoothly. In this embodiment, the thickness of the half-engraved area is specifically as follows: Figure 5 The value of b shown in the figure is as follows: Figure 5 The value of a shown in FIG. 1 and the depth of the diversion channel are as follows: Figure 5 Preferably, the ratio of the height of the half-engraved area 20 to the height of the full-thickness area 10 is 0.5, that is, b / a is 0.5, and the ratio of the depth of the guide channel to the thickness of the half-engraved area is 1, that is, c / b is 1.

[0062] See also Figure 2-Figure 9 , the embodiment of the third aspect of the present application proposes a mask plate, which includes at least one mask opening 30, a peripheral area and a plurality of guide channels 40; specifically, the plurality of mask openings 30 are arranged in an array, and the shape of the mask opening 30 can be rectangular, circular or any other shape; the plurality of guide channels 40 are all arranged on one side of the mask opening 30, and the guide channel 40 includes a first opening 41 and a second opening 42 arranged opposite to each other, wherein the cross-sectional width of the guide channel 40 changes gradually along the direction from the first opening 41 to the second opening 42. In this embodiment, by setting the cross-sectional width of the guide channel 40 to change gradually, the drug solution can flow out more easily through the guide channel 40, and the drug solution can be prevented from remaining in the guide channel 40.

[0063] Further, the cross-sectional width of the guide channel 40 near the first opening 41 is greater than the cross-sectional width of the middle of the guide channel, and / or the cross-sectional width of the guide channel 40 near the second opening 42 is greater than the cross-sectional width of the middle of the guide channel 40, and the cross-sectional width of the guide channel 40 changes gradually, and the peripheral area is arranged around the mask opening 30, and the peripheral area includes the full thickness area 10 (such as Figure 4 The dotted line marks the area) and the half-engraved area 20 (such as Figure 4 In the figure, the area marked by the dotted line, the half-engraved area 20 is located between the mask opening 30 and the full-thickness area 10, the half-engraved area 20 is at least partially arranged around the mask opening 30, the thickness of the half-engraved area 20 is less than the thickness of the full-thickness area 10, the guide channel 40 is arranged on the corresponding full-thickness area 10 in the length direction of the mask plate, and the first opening of the guide channel 40 is connected to the half-engraved area 20.

[0064] It should be noted that in the present embodiment, the cross-sectional width of the guide channel 40 changes gradually, and the cross-sectional width of the guide channel 40 gradually decreases from the first opening 41 to the middle of the guide channel, and the cross-sectional width of the guide channel 40 gradually decreases from the middle of the guide channel to the second opening 41. This design enables the liquid medicine to quickly flow out to the second opening after entering the guide channel, and is not easy to accumulate in the middle section of the guide channel; at the same time, during the air-drying process, due to the narrowness of the middle channel, the airflow velocity increases when passing through the narrowest part of the guide channel, and the water droplets condensed on the side wall are also more easily carried away, which reduces the time used for air-drying, reduces the time required for cleaning, and improves production efficiency.

[0065] Test Figure 3 and Figure 5 In one embodiment, the cross-sectional width of the guide channel 40 near the first opening 41 is greater than or equal to the cross-sectional width of the guide channel 40 near the second opening 42. Such a design is conducive to the rapid outflow and inflow of the liquid medicine. In one embodiment of the present application, the width of the first opening 41 and the width of the second opening 42 can be set to be the same, that is, the width of the second opening 42 is equal to the width of the first opening 41. During the air-drying process, since the width of the first opening 41 is the same as the width of the second opening 42, the airflow passing through the guide channel 40 is relatively stable, which is more conducive to blowing away the water droplets on the inner wall of the guide channel 40.

[0066] refer to Figure 5 In one embodiment, a guide outlet 43 penetrating the full-thickness area 10 is provided near the second opening 42 of the full-thickness area 10. The guide outlet 43 is provided to prevent the length of the liquid outflow direction of the guide channel from being too long, so that the liquid medicine can flow out quickly from the second outlet 42 and the air drying time can be reduced.

[0067] In one embodiment, the projection of the guide channel 40 on the full thickness area 10 is a symmetrical figure. Such a design of the guide channel can achieve a better overlap effect with other layers of MASK. Figure 6 and Figure 7 The projection of the guide channel 40a in the full thickness area 10 is in the shape of a hyperbola. When cleaning the mask plate, the mask plate is placed upright. The liquid medicine in the half-engraved area 20 will flow downward along the guide channel 40a under the action of its own gravity. Since the guide channel 40a is in the form of a hyperbola with a large middle and small ends, the liquid medicine can flow out of the guide channel 40a quickly and is not easy to accumulate in the guide channel. During the air-drying process, since the guide channel 40a is narrow in the middle, the gas flows faster when passing through the guide channel, making it easier to blow away the water droplets on the inner wall. Improve the cleaning efficiency of the mask plate. Optionally, refer to Figure 8 and Fig. 9The projection pattern of the guide channel 40b in the full-thickness area 10 includes two funnel shapes symmetrically arranged along the middle. The principle is the same as described above. Of course, the cross-sectional shape of the guide channel is not limited to the above two shapes. As long as the cross-sectional width of the guide channel gradually decreases from the liquid outflow direction and then gradually increases, it is within the scope of protection of this application.

[0068] Specifically, in the present embodiment, the formula of the hyperbola is Y^2=NX, where N is a coefficient. In practical applications, we usually first form a guide port 43 on the mask plate, and then determine the size of the hyperbola opening according to the size of the side length of the guide port 43. Therefore, the specific value of N is determined by the size of the side length of the guide port 43. At the same time, the opening direction of the hyperbola can be determined according to Y^2=NX.

[0069] refer to Figure 5 In one embodiment, the depth of the guide channel 40 gradually increases from the first opening 41 to the second opening 42. In this embodiment, the depth of the guide channel 40 is as follows: Figure 5 The value of c shown is used to increase the outflow speed of the liquid medicine so that the depth of the guide channel 40 gradually becomes deeper from the liquid outflow direction (that is, the value of c gradually becomes larger from the liquid outflow direction), and the bottom of the guide channel 40 is inclined. This design is conducive to ensuring the smooth and rapid outflow of the cleaning liquid.

[0070] refer to Figure 3 In one embodiment, the first opening 41 is smoothly connected to the connection point of the half-engraved area 20. In the process of cleaning the mask plate, the mask plate is placed vertically. When the liquid medicine flows downward, it will flow to the intersection of the half-engraved area and the full-thickness area. The liquid medicine will accumulate here and is not suitable for flowing out. In order to avoid this phenomenon, the side wall 101 of the full-thickness area 10 and the side wall 401 of the guide channel close to the full-thickness area are designed to be smoothly connected. This design will not form a barrier part (such as a step) of residual liquid, so that the liquid medicine can flow directly into the guide channel.

[0071] Specifically, the ratio of the thickness of the half-engraved area 20 to the thickness of the full-thickness area 10 is between 0.4-0.6, and a guide channel is formed by the height difference between the half-engraved area 20 and the full-thickness area 10. The ratio of the depth of the guide channel to the thickness of the half-engraved area is between 1-1.2. This design allows the liquid medicine to flow out of the first outlet smoothly. In this embodiment, the thickness of the half-engraved area is specifically as follows: Figure 5 The value of b shown in the figure is as follows: Figure 5 The value of a shown in FIG. 1 and the depth of the diversion channel are as follows: Figure 5 Preferably, the ratio of the height of the half-engraved area 20 to the height of the full-thickness area 10 is 0.5, that is, b / a is 0.5, and the ratio of the depth of the guide channel to the thickness of the half-engraved area is 1, that is, c / b is 1.

[0072] An embodiment of the fourth aspect of the present application provides an evaporation device, comprising the mask plate in any of the above embodiments.

[0073] Although the present application has been described in conjunction with specific embodiments thereof, many alternatives, modifications and variations of these embodiments will be apparent to those skilled in the art in light of the foregoing description.

[0074] The embodiments of the present application are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of the present application.

[0075] It should be noted that the above describes some embodiments of the present application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the above embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0076] The embodiments of the present application are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of the present application.

Claims

1. A mask plate, characterized in that: include: at least one mask opening; A plurality of guide channels, wherein the guide channels are arranged on one side of the mask opening, and the guide channels include a first opening and a second opening that are arranged opposite to each other, wherein the cross-sectional width of the guide channel close to the first opening is greater than the cross-sectional width of the middle portion of the guide channel, and / or the cross-sectional width of the guide channel close to the second opening is greater than the cross-sectional width of the middle portion of the guide channel.

2. The mask plate according to claim 1, characterized in that: A cross-sectional width of the flow guiding channel close to the first opening is greater than or equal to a cross-sectional width of the flow guiding channel close to the second opening.

3. The mask plate according to claim 1, characterized in that: The depth of the guide channel gradually increases from the first opening to the second opening.

4. The mask plate according to claim 1, characterized in that: The mask plate also includes a full-thickness area and a half-engraved area, the half-engraved area is located between the mask opening and the full-thickness area, the half-engraved area is at least partially arranged around the mask opening, the thickness of the half-engraved area is less than the thickness of the full-thickness area, the guide channel is arranged in the full-thickness area, and the first opening of the guide channel is connected to the half-engraved area.

5. The mask plate according to claim 4, characterized in that: The full-thickness area is provided with a guide outlet penetrating through the full-thickness area near the second opening.

6. The mask plate according to claim 4, characterized in that: The first opening is smoothly connected to the connecting portion of the half-engraved area.

7. The mask plate according to claim 4, characterized in that: The ratio of the thickness of the half-engraved area to the thickness of the full-thickness area is between 0.4 and 0.

6.

8. The mask plate according to claim 4, characterized in that: The ratio of the depth of the guide channel to the thickness of the half-engraved area is between 1 and 1.

2.

9. The mask plate according to claim 1, characterized in that: The cross-sectional shape of the flow guiding channel is a symmetrical figure.

10. The mask plate according to claim 4, characterized in that: The cross-sectional shape of the flow guiding channel is in the shape of a hyperbola; or, the projection shape of the flow guiding channel in the full thickness area includes two funnel shapes symmetrically arranged along the middle portion.

11. A mask plate, characterized in that: include: at least one mask opening; A plurality of guide channels are provided on one side of the mask opening, and the guide channels include a first opening and a second opening which are arranged opposite to each other; wherein, along the direction from the first opening to the second opening, the guide wall surface of the guide channel is in an arc shape.

12. The mask plate according to claim 11, characterized in that: The mask plate also includes a full-thickness area and a half-engraved area, the half-engraved area is located between the mask opening and the full-thickness area, the half-engraved area is at least partially arranged around the mask opening, the thickness of the half-engraved area is less than the thickness of the full-thickness area, the guide channel is arranged in the full-thickness area, and the first opening of the guide channel is connected to the half-engraved area.

13. The mask plate according to claim 12, characterized in that: The cross-sectional width of the guide channel close to the first opening is greater than the cross-sectional width of the middle portion of the guide channel, and / or the cross-sectional width of the guide channel close to the second opening is greater than the cross-sectional width of the middle portion of the guide channel.

14. The mask plate according to claim 11, characterized in that: The cross-sectional shape of the flow guiding channel is a symmetrical figure.

15. The mask plate according to claim 13, characterized in that: The cross-sectional shape of the flow guiding channel is in the shape of a hyperbola; or, the projection shape of the flow guiding channel in the full thickness area includes two funnel shapes symmetrically arranged along the middle portion.

16. A mask plate, characterized in that: include: At least one mask opening: A plurality of guide channels are provided on one side of the mask opening, and the guide channels include a first opening and a second opening which are arranged opposite to each other; wherein the cross-sectional width of the guide channels gradually changes along the direction from the first opening to the second opening.

17. The mask plate according to claim 16, characterized in that: The mask plate also includes a full-thickness area and a half-engraved area, the half-engraved area is located between the mask opening and the full-thickness area, the half-engraved area is at least partially arranged around the mask opening, the thickness of the half-engraved area is less than the thickness of the full-thickness area, the guide channel is arranged in the full-thickness area, and the first opening of the guide channel is connected to the half-engraved area.

18. The mask plate according to claim 17, characterized in that: The cross-sectional width of the guide channel close to the first opening is greater than the cross-sectional width of the middle portion of the guide channel, and / or the cross-sectional width of the guide channel close to the second opening is greater than the cross-sectional width of the middle portion of the guide channel.

19. The mask plate according to claim 16, characterized in that: The cross-sectional shape of the flow guiding channel is a symmetrical figure.

20. The mask plate according to claim 18, characterized in that: The cross-sectional shape of the flow guiding channel is in the shape of a hyperbola; or, the projection shape of the flow guiding channel in the full thickness area includes two funnel shapes symmetrically arranged along the middle portion.

21. A vapor deposition device, characterized in that: The invention comprises the mask plate as described in any one of claims 1 to 20.

Images