Window deposition apparatus

Abstract

A window deposition apparatus is provided. The window deposition apparatus includes: a chamber; a seating part which is disposed in the chamber and on which a window is disposed, and in which an opening part exposing a part of the window is formed; and an ejection portion disposed within the chamber and facing a bottom surface of the seating portion. An inner surface of the seating portion defining the opening portion includes: a first inner surface; an induction surface connecting the first inner surface and a bottom surface of the seating portion to each other; a second inner surface disposed on the first inner surface; and a guide surface connecting the second inner surface and a top surface of the seating portion to each other. The first inner surface protrudes inwardly from the second inner surface.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the priority of Korean Patent Application No. 10-2023-0032531 filed on March 13, 2023 in the Korean Intellectual Property Office, the contents of which are incorporated herein by reference in their entirety. Technical Field

[0003] Embodiments of the present disclosure herein relate to window deposition apparatus. Background Art

[0004] Display devices that provide images to users, such as televisions, monitors, smart phones, and tablet computers, include display panels that display images. Examples of display panels include liquid crystal display panels, organic light emitting display panels, electrowetting display panels, and electrophoretic display panels.

[0005] The surface of the window needs to be uniform and transparent so that the user can see the user's input or the output of the device. Therefore, an anti-reflection layer or the like may be deposited on the window. Utility Model Content

[0006] Embodiments of the present disclosure provide a window deposition apparatus that prevents a deposition material from being deposited on a rear surface of a window when spraying the deposition material toward a window disposed on a seating portion, thereby alleviating a defect rate of the window.

[0007] An embodiment of the present disclosure provides a window deposition device, which includes: a chamber; a placement portion, which is arranged in the chamber and has a window arranged thereon, and in which an opening portion exposing a portion of the window is formed; and an ejection portion, which is arranged in the chamber and faces the bottom surface of the placement portion. The inner surface of the placement portion defining the opening portion includes: a first inner surface, which defines the opening portion; an induction surface, which connects the first inner surface and the bottom surface of the placement portion to each other; a second inner surface, which is arranged on the first inner surface; and a guide surface, which connects the second inner surface and the top surface of the placement portion to each other. The first inner surface protrudes inward from the second inner surface.

[0008] In an embodiment of the present disclosure, a window deposition apparatus includes: a chamber; a placement portion arranged in the chamber and having a window arranged thereon, and an opening portion exposing a portion of the window formed therein; and an ejection portion arranged in the chamber and facing a bottom surface of the placement portion. An inner surface of the placement portion defining the opening portion includes: a first inner surface defining the opening portion; a second inner surface arranged on the first inner surface; and a placement surface connecting an upper end of the first inner surface and a lower end of the second inner surface to each other. The first inner surface protrudes inward from the second inner surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 A window deposition apparatus according to an embodiment of the present disclosure is illustrated.

[0010] Figure 2 Picture shows Figure 1 The resettlement department.

[0011] Figure 3 Picture shows Figure 2 The first area AA1 in.

[0012] Figure 4 is along Figure 3 A cross-sectional view taken along line II' in FIG.

[0013] Figure 5 is along Figure 3 A cross-sectional view taken along line II-II'.

[0014] Figure 6 The diagram shows Figure 1 A display device manufactured using a window deposition apparatus.

[0015] Figure 7 is along Figure 6 A cross-sectional view taken along line III-III'.

[0016] Figure 8 Picture shows Figure 7 Window modules.

[0017] 9A to 9C Picture shows Figure 8 Deposition of window modules. DETAILED DESCRIPTION

[0018] The features of the present disclosure and methods for implementing the same will be explained by referring to the embodiments described in detail with reference to the accompanying drawings. However, the embodiments of the present disclosure may take different forms and should not be construed as being limited to the embodiments set forth herein. Similar reference numerals may always refer to similar elements.

[0019] When an element or layer is referred to as being “on” another element or layer, it can be directly on the other element or layer, or a third element or layer may be interposed between the one element or layer and the other element or layer.

[0020] As used herein, "about" includes the value and means within an acceptable range of deviation for a particular value as determined by one of ordinary skill in the art, taking into account the errors associated with the measurements and the measurements of a particular quantity (i.e., the limitations of the measurement system). For example, "about" may mean within one or more standard deviations, as understood by one of ordinary skill in the art. In addition, it is to be understood that, depending on the embodiment, although a parameter may be described herein as having "about" a particular value, the parameter may be exactly that particular value or approximately that particular value within the measurement error, as will be understood by one of ordinary skill in the art.

[0021] Hereinafter, embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings.

[0022] Figure 1 A window deposition apparatus according to an embodiment of the present disclosure is illustrated. Figure 2 Picture shows Figure 1 The resettlement department.

[0023] For example, Figure 2 It is a floor plan.

[0024] refer to Figure 1 In an embodiment, the window deposition apparatus WSM includes a chamber CH, a heating part HT, a driving part DC, a seating part JG, a rotating part RP, a vacuum part VP, and a spray part SP.

[0025] For example, when viewed in the first direction DR1, Figure 1 The chamber CH in FIG. 1 has a rectangular shape. However, the embodiments of the present disclosure are not necessarily limited thereto, and in other embodiments, the chamber CH may have various other shapes.

[0026] The chamber CH provides an internal space INC. The vacuum part VP is connected to one side of two sides of the chamber CH that are opposite to each other in a second direction DR2 that crosses the first direction DR1. The vacuum part VP extends from one side of the chamber CH in the second direction DR2. One side of the chamber CH is adjacent to the rotating part RP to be described below. The vacuum part VP maintains the internal space INC of the chamber CH in a vacuum state.

[0027] Hereinafter, the third direction DR3 is defined as a direction crossing or substantially perpendicular to a plane defined by the first direction DR1 and the second direction DR2. The statement "in a plan view" used herein refers to a state viewed in the third direction DR3.

[0028] The heating part HT, the driving part DC, the seating part JG, the rotating part RP, and the ejecting part SP are arranged in the internal space INC.

[0029] The spray part SP is adjacent to a lower portion of the chamber CH. The spray part SP is disposed on a bottom surface of the chamber CH when viewed in the first direction DR1.

[0030] The spray part SP includes a heat source HS and a crucible CRB. For example, the heat source HS and the crucible CRB are adjacent to each other in the second direction DR2.

[0031] The deposition material may be arranged in the crucible CRB. The heat source HS heats the deposition material arranged in the crucible CRB. For example, the heat source HS heats the crucible CRB by one of an evaporation method that converts kinetic energy of electrons into thermal energy and a sputtering method that converts electrical energy of plasma into kinetic energy.

[0032] refer to Figure 1 and Figure 2 In an embodiment, the seating portion JG is adjacent to an upper portion of the internal space INC. The seating portion JG is disposed above the ejection portion SP. The ejection portion SP faces a bottom surface of the seating portion JG.

[0033] For example, when viewed in a plan view, the seating portion JG has a fan-shaped shape. However, the shape of the seating portion JG is not necessarily limited thereto, and may have other shapes in other embodiments.

[0034] A plurality of opening portions WOP are formed in the placement portion JG. For example, the opening portions WOP are formed in a plurality of rows. For example, a row corresponds to the second direction DR2. In the second direction DR2 sequence, the number of opening portions WOP formed in the kth row is greater than the number of opening portions WOP formed in the (k+1)th row. Here, k is a positive integer of 1 or greater.

[0035] For example, seven opening portions WOP are formed in the first row, five opening portions WOP are formed in the second row, four opening portions WOP are formed in the third row, and two opening portions WOP are formed in the fourth row.

[0036] For example, each of the plurality of opening portions WOP has a rectangular shape when viewed in a plan view. However, the embodiments of the present disclosure are not necessarily limited thereto, and in other embodiments, the opening portion WOP has other shapes.

[0037] The multiple windows WD described below (see Figure 8 ) are arranged in a plurality of opening portions WOP, respectively. Fig. 9A and Fig. 9B A plurality of windows WD are described in detail (see Figure 8 ) arrangement.

[0038] refer to Figure 1, the driving part DC is arranged on the seating part JG. The seating part JG is rotatably coupled to the driving part DC. The motor is arranged inside the driving part DC. Therefore, the driving part DC can rotate the seating part JG.

[0039] The rotating part RP is arranged between the seating part JG and the ejection part SP. The rotating part RP includes a wing SW and a support SB. The support SB extends from the bottom surface of the inner space INC in each of the third direction DR3 and the second direction DR2. When viewed in the first direction DR1, the support SB has a shape similar to the letter "L".

[0040] The wing SW is arranged above the crucible CRB. The wing SW is rotatably coupled to the support SB. The motor is arranged inside the support SB. Therefore, the wing SW can rotate. As the wing SW rotates, the deposition material discharged from the crucible CRB is evenly dispersed on the placement part JG. This will refer to Fig. 9C Describe in detail.

[0041] The heating parts HT are arranged in the internal space INC. The heating parts HT are adjacent to an upper portion of the internal space INC. For example, the heating parts HT are arranged symmetrically to each other in the second direction DR2.

[0042] The heating part HT maintains the temperature of the internal space INC. For example, the heating part HT maintains the temperature of the internal space INC at a set temperature by radiant heat.

[0043] Figure 3 Picture shows Figure 2 The first area AA1 in. Figure 4 is along Figure 3 A cross-sectional view taken along line II' in FIG. Figure 5 is along Figure 3 A cross-sectional view taken along line II-II'.

[0044] For example, Figure 3 It is an enlarged floor plan.

[0045] refer to Figure 2 and Figure 3 In an embodiment, the opening portion WOP and a portion of the seating portion JG in which the opening portion WOP is formed may be defined as a seating unit ANU. Hereinafter, one seating unit ANU will be described.

[0046] The arrangement unit ANU has a frame shape when viewed in a plan view. The arrangement unit ANU has an inner surface ISD defining an opening portion WOP. The inner surface ISD surrounds the opening portion WOP when viewed in a plan view.

[0047] The window WD described below (see Figure 8) is arranged in the opening portion WOP. This will refer to Fig. 9A and Fig. 9B Describe in detail.

[0048] The inner surface ISD includes a first inner surface NAP1, a second inner surface NAP2, a seating surface ANP, and a guide surface GDP. When viewed in a plan view, the guide surface GDP may surround the seating surface ANP, the first inner surface NAP1, and the second inner surface NAP2.

[0049] refer to Figures 3 to 5 In an embodiment, the inner surface ISD further includes an induction surface INP. The induction surface INP connects the bottom surface of the seating portion JG and the first inner surface NAP1 to each other. The induction surface INP is inclined relative to the bottom surface of the seating portion JG. The induction surface INP has a height that gradually increases toward the first inner surface NAP1.

[0050] The induction surface INP has a predetermined angle with respect to the bottom surface of the seating portion JG. The induction surface INP has an angle θ1 of about 20 degrees or more and less than about 90 degrees with respect to the bottom surface of the seating portion JG. The induction surface INP has a thickness T1 of about 3 mm to about 5 mm in the third direction DR3. The thickness of the induction surface INP is defined as the length from the bottom surface of the seating portion JG to the boundary between the induction surface INP and the first inner surface NAP1 in the third direction DR3.

[0051] The deposited material can be deposited along the induction surface INP toward the window WD arranged in the opening portion WOP (see Figure 8 ) moves. Therefore, the deposited material and the window WD (see Figure 8 ) can touch each other. This will refer to Fig. 9B and Fig. 9C Describe in detail.

[0052] The first inner surface NAP1 includes a 1-1th inner surface NAP1-1 and a 1-2th inner surface NAP1-2. The 1-1th inner surface NAP1-1 may extend in the first direction DR1. The plurality of 1-1th inner surfaces NAP1-1 face each other in the second direction DR2.

[0053] The 1-2nd inner surface NAP1-2 extends in the second direction DR2. Each of the plurality of 1-2nd inner surfaces NAP1-2 extends in the second direction DR2 from one of the plurality of 1-1st inner surfaces NAP1-1. Each of the plurality of 1-2nd inner surfaces NAP1-2 extends from one of the plurality of 1-1st inner surfaces NAP1-1 toward the other of the plurality of 1-1st inner surfaces NAP1-1. Each of the plurality of 1-1st inner surfaces NAP1-1 and each of the plurality of 1-2nd inner surfaces NAP1-2 are connected to each other. The plurality of 1-2nd inner surfaces NAP1-2 face each other in the first direction DR1. Therefore, each of the plurality of 1-2nd inner surfaces NAP1-2 connects the plurality of 1-1st inner surfaces NAP1-1 to each other. For example, the 1-1st inner surface NAP1-1 and the 1-2nd inner surface NAP1-2 are provided as one body.

[0054] The second inner surface NAP2 is disposed on the first inner surface NAP1. The first inner surface NAP1 further protrudes from the second inner surface NAP2 toward the inside of the opening portion WOP. The first inner surface NAP1 and the second inner surface NAP2 have a stepped shape with a height difference.

[0055] The second inner surface NAP2 includes a 2-1st inner surface NAP2-1 and a 2-2nd inner surface NAP2-2. The 2-1st inner surface NAP2-1 is disposed on the 1-1st inner surface NAP1-1. The 2-1st inner surface NAP2-1 extends in the first direction DR1.

[0056] The 2-2nd inner surface NAP2-2 is disposed on the 1-2nd inner surface NAP1-2. The 2-2nd inner surface NAP2-2 extends in the second direction DR2.

[0057] The installation surface ANP connects the first inner surface NAP1 and the second inner surface NAP2 to each other. The installation surface ANP connects the upper end of the first inner surface NAP1 and the lower end of the second inner surface NAP2 to each other. The window WD (see FIG. 1 ) to be described below Figure 8 ) is arranged on the mounting surface ANP. The mounting surface ANP supports the window WD (see Figure 8 ). This will refer to Fig. 9B Describe in detail.

[0058] The mounting surface ANP includes a first mounting surface ANP1 and a second mounting surface ANP2. Each of the plurality of first mounting surfaces ANP1 connects the 1-1th inner surface NAP1-1 and the 2-1th inner surface NAP2-1 to each other. When viewed in a plan view, the first mounting surface ANP1 extends in the first direction DR1. For example, each of the plurality of first mounting surfaces ANP1 has a width ω1 of about 0.2 mm to about 0.3 mm in the second direction DR2.

[0059] Each of the plurality of second seating surfaces ANP2 connects the 1-2nd inner surface NAP1-2 and the 2-2nd inner surface NAP2-2 to each other. The second seating surface ANP2 extends in the second direction DR2 when viewed in a plan view. For example, each of the plurality of second seating surfaces ANP2 may have a width ω2 of about 0.15 mm to about 0.25 mm in the first direction DR1.

[0060] The guide surface GDP connects the second inner surface NAP2 and the top surface of the seating portion JG to each other. The guide surface GDP is inclined relative to the top surface of the seating portion JG. The guide surface GDP has a height that gradually decreases toward the second inner surface NAP2. Therefore, the window WD (see Figure 8 ) can be moved along the guide surface GDP to be arranged in the opening portion WOP. Figure 8 ) are arranged on the seating surface ANP along the guide surface GDP.

[0061] The guide surface GDP has a predetermined angle with respect to the top surface of the seating portion JG. For example, the guide surface GDP has an angle θ2 of about 20 degrees or more and less than about 90 degrees in the third direction DR3. When viewed in a plan view, the guide surface GDP has a width ω3 of about 3 mm to about 7 mm in the first direction DR1 or the second direction DR2.

[0062] Figure 6 The diagram shows Figure 1 A display device manufactured using a window deposition apparatus.

[0063] refer to Figure 6 In an embodiment, when viewed in a plan view, the display device DD has a rectangular shape having short sides extending in a first direction DR1 and long sides extending in a second direction DR2. However, embodiments of the present disclosure are not necessarily limited thereto, and in other embodiments, the display device DD can have various other shapes, such as a circular shape or other polygonal shapes.

[0064] The display device DD is capable of displaying an image IM through a display surface DD-IS. The display surface DD-IS is divided into different areas according to whether the image IM can be displayed. The display surface DD-IS includes a display area DD-DA in which the image IM can be displayed and a non-display area DD-NDA adjacent to the display area DD-DA. The non-display area DD-NDA surrounds the display area DD-DA. However, the embodiments of the present disclosure are not necessarily limited to this, and in other embodiments, the shape of the display area DD-DA and the shape of the non-display area DD-NDA can be changed. For example, in some embodiments, the non-display area DD-NDA is arranged only in those areas facing each other in the second direction DR2.

[0065] The display surface DD-IS is divided into different areas according to the display direction of the image IM. The flat surface area DD-P is parallel to a plane defined by a first direction DR1 and a second direction DR2 perpendicular to the first direction DR1. The curved surface area DD-C may extend from both sides of the flat surface area DD-P, respectively, and each has a curved outer surface. The image IM can be displayed in the flat plane area DD-P and the curved surface area DD-C. The display device DD includes Figure 7 The display module DM shown in FIG. Figure 7 The display module DM is described in detail.

[0066] Figure 7 is along Figure 6 A cross-sectional view taken along line III-III'.

[0067] refer to Figure 6 and Figure 7 In an embodiment, the display module DM is included in Figure 6 The display module DM includes a display panel DP, an input sensing portion ISP, a reflection prevention layer RPL, a window module WM, a panel protection film PPF, and a first adhesive layer AL1 and a second adhesive layer AL2.

[0068] The display panel DP may be a light-emitting display panel, and is not particularly limited. For example, the display panel DP may be an organic light-emitting display panel or an inorganic light-emitting display panel. The emission layer of the organic light-emitting display panel includes an organic light-emitting material. The emission layer of the inorganic light-emitting display panel may include quantum dots, quantum rods, etc. Hereinafter, the display panel DP is described as an organic light-emitting display panel.

[0069] The input sensing part ISP is arranged on the display panel DP. The input sensing part ISP includes a plurality of sensors that sense external input by using a capacitive method. The input sensing part ISP can be manufactured directly on the display panel DP during the manufacture of the display module DM. However, the embodiments of the present disclosure are not necessarily limited thereto, and in some embodiments, the input sensing part ISP is manufactured as a panel separated from the display panel DP and attached to the display panel DP by an adhesive layer.

[0070] The reflection prevention layer RPL is arranged on the input sensing part ISP. The reflection prevention layer RPL can be manufactured directly on the input sensing part ISP during the manufacture of the display device DD. However, the embodiments of the present disclosure are not necessarily limited thereto, and in some embodiments, the reflection prevention layer RPL can be manufactured as a separate panel and attached to the input sensing part ISP through an adhesive layer.

[0071] The anti-reflection layer RPL is a film that prevents reflection of external light. The anti-reflection layer RPL reduces reflection of external light incident from above the display device DD toward the display panel DP. Due to the anti-reflection layer RPL, the external light may not be visible to the user.

[0072] The window module WM is disposed on the reflection preventing layer RPL. The window module WM protects the display panel DP, the input sensing part ISP, and the reflection preventing layer RPL from external scratches and impacts.

[0073] The panel protection film PPF is disposed under the display panel DP. The panel protection film PPF protects a lower portion of the display panel DP. The panel protection film PPF includes a flexible plastic material such as polyethylene terephthalate (PET).

[0074] The first adhesive layer AL1 is disposed between the display panel DP and the panel protection film PPF, and the display panel DP and the panel protection film PPF are bonded to each other through the first adhesive layer AL1. The second adhesive layer AL2 is disposed between the window module WM and the reflection prevention layer RPL, and the window module WM and the reflection prevention layer RPL are bonded to each other through the second adhesive layer AL2.

[0075] Figure 8 Pictured Figure 7 Window modules.

[0076] For example, Figure 8 The window module WM is illustrated when viewed in the second direction DR2.

[0077] refer to Figure 7 and Figure 8 , in an embodiment, the window module WM includes a window WD, an anti-glare layer AGL, an anti-reflection layer ARL, and an anti-fingerprint layer AFL.

[0078] The window WD includes a first flat portion WP1 and first curved portions WC1 extending from both sides of the first flat portion WP1 opposite to each other in the first direction DR1. The window WD has a top surface including curved surfaces, each of which convexly projects upward when viewed in the second direction DR2.

[0079] The first flat portion WP1 and Figure 6 The first curved portion WC1 corresponds to the flat surface area DD-P shown in FIG. Figure 6 The curved surface area DD-C shown in FIG.

[0080] The window WD includes optically transparent glass. However, the embodiments of the present disclosure are not necessarily limited thereto, and in some embodiments, the window WD includes a synthetic resin film.

[0081] The anti-glare layer AGL is arranged on the window WD. The anti-glare layer AGL is arranged on the top surface of the window WD. Figure 1 The window deposition device WSM shown in FIG. 4 forms an anti-glare layer AGL on a window WD.

[0082] The anti-glare layer AGL includes a second flat portion WP2 and second curved portions WC2 extending from both sides of the second flat portion WP2 opposite to each other in the first direction DR1. The anti-glare layer AGL has a top surface including curved surfaces, each of which convexly projects upward when viewed in the second direction DR2.

[0083] The second flat portion WP2 is arranged on the first flat portion WP1. The second flat portion WP2 overlaps the first flat portion WP1. Figure 6 It corresponds to the flat surface area DD-P shown in FIG.

[0084] Each of the plurality of second curved portions WC2 is arranged on a corresponding first curved portion WC1. The plurality of second curved portions WC2 overlap the plurality of first curved portions WC1, respectively. Each of the plurality of first curved portions WC1 has a top surface having the same curvature as the bottom surface of each of the plurality of second curved portions WC2. Figure 6 The curved surface area DD-C shown in FIG.

[0085] In addition, the anti-glare layer AGL has a surface including protrusions. The protrusions of the anti-glare layer AGL diffusely reflect external incident light toward the display panel DP. Therefore, the reflected external light is prevented from being incident on the eyes of the user, thereby preventing glare.

[0086] The anti-reflection layer ARL is disposed on the anti-glare layer AGL. The anti-reflection layer ARL is disposed on the top surface of the anti-glare layer AGL. Figure 1 The window deposition apparatus WSM shown in FIG. 4 forms an anti-reflection layer ARL on the anti-glare layer AGL.

[0087] The anti-reflection layer ARL includes a third flat portion WP3 and third curved portions WC3 extending from both sides of the third flat portion WP3 opposite to each other in the first direction DR1. The anti-reflection layer ARL has a top surface including curved surfaces, each of which convexly projects upward when viewed in the second direction DR2.

[0088] The third flat portion WP3 is arranged on the second flat portion WP2. The third flat portion WP3 overlaps the first flat portion WP1 and the second flat portion WP2. Figure 6 It corresponds to the flat surface area DD-P shown in FIG.

[0089] Each of the plurality of third curved portions WC3 is arranged on the corresponding second curved portion WC2. Each of the plurality of third curved portions WC3 overlaps each of the plurality of first curved portions WC1 and each of the plurality of second curved portions WC2, respectively. Each of the plurality of second curved portions WC2 has a top surface having the same curvature as the bottom surface of each of the plurality of third curved portions WC3. Figure 6 The curved surface area DD-C shown in FIG.

[0090] The anti-reflection layer ARL includes silicon dioxide (SiO 2 ) and titanium dioxide (TiO 2 ) at least one of. However, the embodiments of the present disclosure are not necessarily limited thereto, and in an embodiment, the anti-reflection layer ARL includes magnesium fluoride (MgF 2 ).

[0091] Light incident from the outside toward the display panel DP is not reflected by the anti-reflection layer ARL. For example, the phase of the light reflected from the window WD and the phase of the light reflected from the anti-reflection layer ARL are different from each other. The light reflected from the window WD and the light reflected from the anti-reflection layer ARL destructively interfere with each other. Therefore, the anti-reflection layer ARL reduces the reflection of the window module WM and prevents the reflected external light from being visible to the user.

[0092] The anti-fingerprint layer AFL is disposed on the anti-reflection layer ARL. The anti-fingerprint layer AFL is disposed on the top surface of the anti-reflection layer ARL. Figure 1 The window deposition machine WSM shown in FIG. 4 forms an anti-fingerprint layer AFL on the anti-reflection layer ARL.

[0093] The anti-fingerprint layer AFL includes a fourth flat portion WP4 and fourth curved portions WC4 extending from both sides of the fourth flat portion WP4 opposite to each other in the first direction DR1. The anti-fingerprint layer AFL has a top surface including curved surfaces, each of which convexly projects upward when viewed in the second direction DR2.

[0094] The fourth flat portion WP4 is arranged on the third flat portion WP3. The fourth flat portion WP4 overlaps the first flat portion WP1, the second flat portion WP2, and the third flat portion WP3. Figure 6 It corresponds to the flat surface area DD-P shown in FIG.

[0095] Each of the plurality of fourth curved portions WC4 is arranged on the corresponding third curved portion WC3. Each of the plurality of fourth curved portions WC4 overlaps the first curved portion WC1, the second curved portion WC2, and the third curved portion WC3. Each of the plurality of third curved portions WC3 has a top surface having the same curvature as the bottom surface of each of the plurality of fourth curved portions WC4. Figure 6 The curved surface area DD-C shown in FIG.

[0096] The anti-fingerprint layer AFL includes a waterproof coating. For example, the anti-fingerprint layer AFL includes a fluorine coating. Therefore, the anti-fingerprint layer AFL is waterproof and oil-proof, and prevents the user's fingerprints from remaining on the surface of the window module WM and prevents contaminants from being attached to the window module WM.

[0097] Figure 8 The anti-glare layer AGL, the anti-reflection layer ARL, and the anti-fingerprint layer AFL are illustrated as being arranged on the window WD, but the embodiments of the present disclosure are not necessarily limited thereto. For example, any one layer may be omitted. For another example, in addition to the anti-glare layer AGL, the anti-reflection layer ARL, and the anti-fingerprint layer AFL, another layer may be additionally deposited on the window WD.

[0098] 9A to 9C Pictured Figure 8 Deposition of window modules.

[0099] For example, Fig. 9A It is a floor plan. Fig. 9B is along Figure 3 A cross-sectional view taken along line II-II' in FIG. Fig. 9C The window deposition apparatus WSM is illustrated when viewed in a first direction DR1 .

[0100] 9A to 9C The window deposition device WSM, the placement unit JG and the window WD shown in the figure are respectively Figures 1 to 5 The window deposition equipment WSM and the placement unit JG shown in the figure and Figure 8 , and the window WD illustrated in FIG. 1 is the same as or similar to the window WD illustrated in FIG. 1. Therefore, its repeated description may be omitted or simplified.

[0101] refer to Fig. 9A and Fig. 9B In the embodiment, the window WD is arranged in the opening portion WOP formed in the seating portion JG. Hereinafter, for convenience of explanation, one seating unit ANU and one window WD will be described.

[0102] The window WD is arranged in the opening portion WOP. The window WD is arranged in the opening portion WOP along the guide surface GDP. The window WD is arranged in the opening portion WOP while being turned upside down. The front surface of the window WD is oriented downward. The window WD is arranged so that the rear surface of the window WD is positioned at a higher level than the front surface of the window WD.

[0103] The opening portion WOP exposes a portion of the window WD from the seating portion JG. For example, the window WD contacts the inner surface ISD of the seating portion JG that defines the opening portion WOP. Each of the plurality of first curved portions WC1 has a portion arranged on the seating surface ANP. Therefore, the window WD is in close contact with the seating portion JG. In the window WD, a portion of each of the plurality of first curved portions WC1 and the first flat portion WP1 are exposed by the seating portion JG.

[0104] refer to Figure 8 , Fig. 9B and Fig. 9C In an embodiment, the window WD is arranged on the seating portion JG, and then the seating portion JG is arranged in the chamber CH. The seating portion JG is connected to the driving portion DC. The driving portion DC rotates the seating portion JG around a rotation axis parallel to the third direction DR3.

[0105] When the seating part JG is arranged in the chamber CH, the heat source HS of the ejection part SP heats the deposition material in the crucible CRB. For example, the heat source HS heats the crucible CRB by one of an electron beam evaporation method that converts kinetic energy of electrons into thermal energy and a sputtering method that converts electrical energy of plasma into kinetic energy.

[0106] The deposition material in the crucible CRB is heated by the heat source HS and evaporated. The deposition material can be used to form an anti-glare layer AGL, an anti-reflection layer ARL, and an anti-fingerprint layer AFL. When the deposition material has evaporated into a gaseous state, the wing SW arranged on the ejection portion SP rotates. The deposition material is uniformly deposited on the placement portion JG through the wing SW.

[0107] The deposition material is deposited on the window WD arranged in the opening portion WOP. The deposition material is deposited on a portion of the window WD exposed by the seating portion JG. The deposition material moves toward the window WD along the induction surface INP. The deposition material is deposited on the front surface of the window WD.

[0108] Different deposition materials can be deposited multiple times on the front surface of the window WD to produce Figure 8 The window module WM in.

[0109] refer to Fig. 9B and Fig. 9C In an embodiment, when the window WD is not seated on the seating portion JG, the vapor deposition material is deposited on each of the front and rear surfaces of the window WD. For example, stains are generated on the rear surface of the window WD. The stains generated on the rear surface cause appearance defects of the window WD. In addition, the stains reduce the adhesion between the window WD and the second adhesive layer AL2 (see Figure 7 ) between them, resulting in the display device DD (see Figure 6 ) defects.

[0110] However, when the window deposition apparatus WSM according to an embodiment of the present disclosure is used to deposit a deposition material on the window WD, the window WD is in close contact with the inner surface ISD of the seating portion JG. Therefore, the gaseous deposition material is deposited on the front surface of the window WD, but not on the rear surface of the window WD. Therefore, no stain is generated, which prevents appearance defects of the window WD. In addition, the window WD is prevented from being in contact with the second adhesive layer AL2 (see Figure 7 ) between the display device DD (see Figure 6 ) defects.

[0111]

[0112] Table 1

[0113]

[0114] Table 2

[0115] For example, Table 1 shows the window module WM according to the comparative example (see Figure 7 ), and Table 2 shows the experimental data of the window module WM manufactured by the window deposition apparatus according to the embodiment of the present disclosure (see Figure 7 )’s experimental data.

[0116] refer to Figure 7As with Table 1 and Table 2, an experiment on the adhesion between the window module WM and the second adhesive layer AL2 is implemented through a contact angle experiment. The contact angle experiment is to measure the contact angle between the rear surface of the window module WM and the droplet when the droplet falls on the rear surface of the window module WM. The contact angle is defined as the angle obtained by measuring the angle between the liquid surface and the rear surface of the window module WM from the inside of the liquid. As the hydrophilicity of the rear surface of the window module WM decreases, the contact angle may increase. For example, as the contact angle increases, the adhesion between the rear surface of the window module WM and the second adhesive layer AL2 decreases.

[0117] refer to Figure 8 and Table 1, in an embodiment, when the deposition material is deposited on the rear surface of the window module WM, the average contact angle is about 63.05 degrees, as shown in Table 1. The results show that the hydrophilicity of the rear surface of the window module WM is reduced. Therefore, the adhesion between the window module WM and the second adhesive layer AL2 is reduced.

[0118] refer to Figure 8 , Fig. 9B and Table 2, in an embodiment, when the window deposition apparatus according to an embodiment of the present disclosure is used to manufacture the window module WM, the window WD is in close contact with the inner surface ISD of the seating portion JG. Therefore, the deposition material is not deposited on the rear surface of the window WD. As shown in Table 2, the average contact angle is about 53.98 degrees. The results show that the hydrophilicity of the rear surface of the window module WM is not reduced. Therefore, the adhesive force between the window module WM and the second adhesive layer AL2 is not reduced, which prevents the display device DD (see Figure 6 ) defects.

[0119] According to an embodiment of the present disclosure, the inner surface of the placement portion defining the opening portion includes: a first inner surface; a second inner surface, which is arranged on the first inner surface; a placement surface, which connects the upper end of the first inner surface and the lower end of the second inner surface to each other; an induction surface, which connects the first inner surface and the bottom surface of the placement portion to each other; and a guide surface, which connects the second inner surface and the top surface of the placement portion to each other. The window is arranged in the opening portion. The window is in close contact with the inner surface of the placement portion. Therefore, the deposition material is deposited on the front surface of the window and not on the rear surface of the window.

[0120] Although the embodiments of the present disclosure have been described, it should be understood that the embodiments of the present disclosure should not be limited thereto, but a person of ordinary skill in the art can make various changes and modifications within the spirit and scope of the present disclosure as claimed below. On the contrary, the embodiments set forth herein are provided so that the present disclosure will be thorough and complete, and will fully convey the scope of the present disclosure to those skilled in the art.

Claims

1. A window deposition device, characterized in that: include: Chamber; a placement portion, the placement portion being arranged in the chamber and having a window arranged thereon, and having an opening portion formed therein to expose a portion of the window; as well as an ejection portion disposed in the chamber and facing a bottom surface of the seating portion, Wherein, the inner surface of the placement portion defining the opening portion includes: a first inner surface, the first inner surface defining the opening portion, an induction surface connecting the first inner surface and the bottom surface of the seating portion to each other, a second inner surface, the second inner surface being arranged on the first inner surface, and a guide surface connecting the second inner surface and the top surface of the seating portion to each other, Wherein, the first inner surface protrudes inwardly than the second inner surface.

2. The window deposition apparatus according to claim 1, characterized in that The inner surface of the seating portion further includes a seating surface connecting an upper end of the first inner surface and a lower end of the second inner surface to each other, Wherein, the window is placed on the placement surface.

3. The window deposition apparatus according to claim 2, characterized in that The mounting surface comprises: a plurality of first seating surfaces extending in a first direction when viewed in plan; and a plurality of second mounting surfaces extending in a second direction intersecting the first direction when viewed in the plan view, Wherein, when viewed in the plan view, each of the plurality of first seating surfaces has a width of 0.2 mm to 0.3 mm in the second direction.

4. The window deposition apparatus according to claim 3, characterized in that Each of the plurality of second seating surfaces has a width of 0.15 mm to 0.25 mm in the first direction when viewed in the plan view.

5. The window deposition apparatus according to claim 3, characterized in that The guide surface has a height that gradually decreases toward the second inner surface.

6. The window deposition apparatus according to claim 5, characterized in that When viewed in the plan view, the guide surface has a width of 3 mm to 7 mm, wherein the guide surface has an angle of 20 degrees or more and less than 90 degrees in a third direction, wherein the third direction intersects a plane defined by the first direction and the second direction.

7. The window deposition apparatus according to claim 1, characterized in that The inducing surface has a height that gradually increases toward the first inner surface.

8. The window deposition apparatus according to claim 7, characterized in that The thickness from the bottom surface of the seating portion to the boundary between the inducing surface and the first inner surface is 3 mm to 5 mm, The inducing surface has an angle of 20 degrees or more and less than 90 degrees with respect to the bottom surface of the seating portion.

9. The window deposition apparatus according to claim 1, characterized in that Further including: a driving portion, the driving portion being arranged on the placement portion in the chamber, The seating portion has a fan shape, and the seating portion is rotatably coupled to the driving portion.

10. The window deposition apparatus according to claim 1, characterized in that Further including: a rotating portion, the rotating portion being arranged between the seating portion and the ejecting portion in the chamber, Wherein, the injection unit comprises: a crucible in which a deposition material is disposed; and A heat source heats the deposition material.

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