Heating device and heater

Abstract

The utility model relates to the technical field of heating equipment, in particular to a heating device and a heater, which comprise a shell, an electric heating tube, a heat insulation layer and a support structure, the electric heating tube comprises a heating tube part positioned in the shell, the heat insulation layer is positioned between the shell and the heating tube part, at least part of the support structure is inserted into the heat insulation layer, or the support structure is inserted into the heat insulation layer. The supporting structure is attached to the heat insulation layer. The heat insulation layer of the device is provided with a supporting structure, the shape stability of the heat insulation layer during use can be guaranteed, the problem that the service life of the heating device is affected due to the fact that the heat insulation layer deforms and makes contact with the heating pipe part is solved, the safety of the heating device is further improved, and the heat preservation effect is more stable due to the fact that the shape of the heat insulation layer is stable.

Description

Technical Field

[0001] The utility model relates to the technical field of heating equipment, in particular to a heating device and a heater. Background Art

[0002] Fluid heating equipment can be used in the semiconductor, photovoltaic solar energy, display panels, testing equipment, micro-chemical and other industries, such as wet cleaning equipment in semiconductor processes. Fluid heating equipment can be applied to multiple links, such as etching and degumming, ultrapure water cleaning, etc. These all require heating of acid and alkali liquids, chemical liquids, pure water or ultrapure water. By increasing the temperature of the cleaning liquid, the cleaning effect is improved and the cleaning speed is accelerated.

[0003] In order to ensure the safety and energy saving of heating equipment, a heat insulation layer is generally provided on the outer peripheral side of the heating tube. In the prior art, a heat insulation layer is generally simply installed. For a flexible heat insulation layer, the heat insulation layer may be deformed during use, which affects the life of the heating equipment and the heat insulation effect. Utility Model Content

[0004] The utility model aims to provide a heating device in order to solve the problem that a flexible heat-insulating layer may be deformed during use, thus affecting the life of the heating equipment and the heat-insulating effect.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A heating device includes a shell, an electric heating tube, an insulation layer, and a support structure. The electric heating tube includes a heating tube portion located in the shell, the insulation layer is located between the shell and the heating tube portion, at least part of the support structure is inserted into the insulation layer, or the support structure is bonded to the insulation layer.

[0007] The support structure comprises a support tube, and the support tube is supported on the inner ring wall of the heat insulation layer.

[0008] The heating device comprises an adhesive tape, and the adhesive tape is wrapped around the outer annular wall of the heat insulation layer.

[0009] The support structure comprises a high temperature resistant cloth, and the high temperature resistant cloth at least wraps the inner surface and the outer surface of the heat insulation layer.

[0010] The supporting structure includes sutures, and the sutures are inserted and sutured between the high temperature resistant cloth and the heat insulation layer. The sutures include horizontal lines and / or vertical lines.

[0011] The spacing between adjacent transverse lines is 10 mm to 80 mm; and / or the spacing between adjacent longitudinal lines is 10 mm to 80 mm;

[0012] And / or the maximum thickness of the thermal insulation layer is 3mm-10mm, the thickness of the thermal insulation layer at the transverse stitching is 2mm-9mm, and the thickness of the thermal insulation layer at the longitudinal stitching is 2mm-9mm.

[0013] The heating device comprises an adhesive tape, and the adhesive tape is wrapped around the outer ring wall of the high temperature resistant cloth; and\or, the high temperature resistant cloth is made of high silica cloth or glass fiber cloth.

[0014] The thermal insulation layer is cylindrical as a whole, and has a first docking wall and a second docking wall, and the first docking wall and the second docking wall are in contact with each other; and\or, the thermal insulation layer is made of inorganic fiber cotton or aerogel.

[0015] The first docking wall has a protruding wall or a recessed wall, and the second docking wall matches the first docking wall.

[0016] A heater is connected to a pan-semiconductor device, comprising the above-mentioned heating device, wherein the electric heating tube comprises a joint, and the joint is integrally formed with the heating tube portion.

[0017] The utility model proposes a heating device, which has the beneficial effect that the heat insulation layer of the device is provided with a supporting structure, which can ensure the stability of the shape of the heat insulation layer during use, avoid the problem that the heat insulation layer is deformed and contacts with the heating pipe part to affect the service life of the heating device, further improve the safety of the heating device, and because the shape of the heat insulation layer is relatively stable, the thermal insulation effect is more stable.

[0018] A heater has the beneficial effect that a heater using the heating device has higher safety and longer service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of a half-section structure of the utility model;

[0020] Figure 2 Schematic diagram of the thermal insulation layer of the utility model Figure 1 ;

[0021] Figure 3 Schematic diagram of the thermal insulation layer of the utility model Figure 2 ;

[0022] Figure 4 The radial cross-sectional structure of the heat insulation layer of the utility model is shown in FIG. Figure 1 ;

[0023] Figure 5 The radial cross-sectional structure of the heat insulation layer of the utility model is shown in FIG. Figure 2 ;

[0024] Figure 6 The radial cross-sectional structure of the heat insulation layer of the utility model is shown in FIG. Figure 3 ;

[0025] Figure 7 Schematic diagram of the thermal insulation layer of the utility model Figure 3 ;

[0026] Figure 8 For the utility model Figure 7 Schematic diagram of the cross-sectional structure from the left;

[0027] Fig. 9 Schematic diagram of the thermal insulation layer of the utility model Figure 4 .

[0028] In the figure: shell 1, electric heating tube 2, insulation layer 3, support structure 4, recessed wall 5, protruding wall 6, support tube 41, high temperature resistant cloth 42, suture line 43, tape 44, horizontal line 431, vertical line 432, heating tube part 21. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0030] Reference Figure 1-9 A heating device includes a shell 1, an electric heating tube 2, an insulation layer 3, and a support structure 4. The electric heating tube 2 includes a heating tube portion 21 located in the shell 1, the insulation layer 3 is located between the shell 1 and the heating tube portion 21, and at least a portion of the support structure 4 is inserted into the insulation layer 3, or the support structure 4 is in contact with the insulation layer 3.

[0031] The device is provided with a heat-insulating layer 3 between the heating tube portion 21 and the outer shell 1. The heat-insulating layer 3 can better insulate the heat radiated by the heating tube portion 21. On the one hand, it can achieve a better thermal insulation effect. On the other hand, it can reduce the heat of the outer shell and avoid the risk of scalding the outer shell. If the heat-insulating layer comes into contact with part of the heating tube portion, local heat accumulation will occur, and even the heat-insulating layer will adhere to the surface of the heating tube portion. The heat-insulating layer 3 of the device is provided with a supporting structure, which can ensure the stability of the shape of the heat-insulating layer 3 during use, and avoid the problem that the heat-insulating layer 3 is deformed and contacts with the heating tube portion 21 to affect the service life of the heating device, thereby further improving the safety of the heating device. In addition, since the shape of the heat-insulating layer 3 is relatively stable, the thermal insulation effect is more stable.

[0032] The device is suitable for heating pan-semiconductor equipment, which includes integrated circuits, flat panel displays, LEDs, solar cells, discrete devices, and semiconductor equipment material industries, including semiconductors.

[0033] As an implementation of the support structure 4, the support structure 4 includes a support tube 41, and the support tube 41 is supported on the inner ring wall of the thermal insulation layer 3. The inner wall of the thermal insulation layer 3 is supported by the support tube 41 to prevent the thermal insulation layer 3 from deforming toward the heating tube part, wherein the support tube 41 can be a tube made of mica or quartz.

[0034] The heating device includes a tape 44, which is wrapped around the outer ring wall of the insulation layer 3. The insulation layer 3 is wrapped around the support tube by the tape 44. For example, the insulation layer 3 is spread out into a sheet structure, and then the insulation layer 3 is rolled around the outer surface of a support tube and then wrapped by the tape 44.

[0035] As another embodiment of the support structure 4, the support structure 4 includes a high temperature resistant cloth 42, and the high temperature resistant cloth 42 at least wraps the inner surface and the outer surface of the heat insulation layer 3. The heat insulation layer 3 is wrapped by the high temperature resistant cloth 42, and then rolled into a cylindrical structure as a whole. The shape of the flexible heat insulation layer 3 is fixed by the high temperature resistant cloth 42, so that the entire heat insulation structure forms a semi-rigid property to prevent the heat insulation layer 3 from being deformed.

[0036] When the heat insulation layer 3 wrapped with the high temperature resistant cloth 42 is rolled into a cylindrical shape, the inner and outer layers of the high temperature resistant cloth 42 wrapped outside the heat insulation layer may be separated from the heat insulation layer after rolling, resulting in wrinkles or loosening of the inner or outer high temperature cloth during assembly, affecting the use effect. As an embodiment, the support structure 4 includes a suture 43, which is inserted and sutured between the high temperature resistant cloth 42 and the heat insulation layer 3, and the suture 43 includes a horizontal line 431 and / or a vertical line 432. Semi-flexible heat insulation is formed by the high temperature resistant cloth and the suture, and the suture connects the high temperature resistant cloth and the heat insulation layer together.

[0037] The heat insulation structure of the device is not only low in cost but also simple to manufacture.

[0038] As an embodiment, the spacing between adjacent transverse lines 431 is 10 mm-80 mm; and / or the spacing between adjacent longitudinal lines 432 is 10 mm-80 mm. As an embodiment, the spacing between adjacent transverse lines 431 is 40 mm; and / or the spacing between adjacent longitudinal lines 432 is 40 mm. If the size spacing is too small, the manufacturing cost will increase and the heat insulation layer will become thinner. If the size is too large, it will be difficult to effectively fit the high temperature resistant cloth to the heat insulation layer.

[0039] And / or the maximum thickness of the heat insulation layer 3 is 3mm-10mm, the thickness of the heat insulation layer 3 at the stitching of the horizontal line 431 is 2mm-9mm, and the thickness of the heat insulation layer 3 at the stitching of the vertical line 432 is 2mm-9mm.

[0040] If the compression degree of the horizontal lines 431 and / or the vertical lines 432 is too high, the thickness of the heat insulation layer 3 between the horizontal lines 431 and / or the vertical lines 432 will become smaller, which will reduce the heat insulation capacity of the local area. Therefore, it is necessary to set a reasonable compression height.

[0041] In order to achieve a better supporting effect, the heating device includes a tape 44, which is wrapped around the outer ring wall of the high temperature resistant cloth 42; and / or, the high temperature resistant cloth 42 is made of high silica cloth or glass fiber cloth. The tape 44 supports the thermal insulation structure to prevent the thermal insulation layer 3 from loosening and losing its fixed shape.

[0042] refer to Figure 3 , Fig. 9 , the heat insulation layer 3 is cylindrical as a whole, and the heat insulation layer 3 has a first butt joint wall 7 and a second butt joint wall 8, and the first butt joint wall 7 and the second butt joint wall 8 are in contact; and\or, the heat insulation layer 3 is made of inorganic fiber cotton or aerogel. Compared with a linear butt joint, since hot air diffuses along the butt joint, the device sets the butt joint to be non-linear, which can increase diffusion resistance and effectively reduce heat diffusion.

[0043] The thermal insulation layer 3 has a sheet-like structure when unfolded and a cylindrical structure when in use. The thermal insulation layer 3 of the device is made of a flexible deformable material and has a flat sheet-like structure before being placed inside the outer shell. During assembly, the thermal insulation layer 3 is rolled into a cylindrical structure so that the shape of the thermal insulation layer 3 matches the shape of the heating tube and surrounds the outer circumference of the heating tube.

[0044] The first docking wall 7 has a protruding wall 6 or a recessed wall 5 , and the second docking wall 8 matches the first docking wall 7 .

[0045] A heater is connected to a pan-semiconductor device, comprising a heating device, wherein the electric heating tube 2 comprises a joint, and the joint is integrally formed with the heating tube portion 21. The heater has high safety in use, long service life, and is not easy to contaminate the internal fluid.

[0046] The above is only a preferred specific implementation method of the utility model, but the protection scope of the utility model is not limited thereto. Any technical solution, concept, and design obtained by equivalent replacement or change based on the technical solution and utility model concept of the utility model by any technician familiar with the technical field within the technical scope disclosed by the utility model should be included in the protection scope of the utility model.

Claims

1. A heating device, characterized in that: The invention comprises an outer shell (1), an electric heating tube (2), a heat insulating layer (3), and a support structure (4); the electric heating tube (2) comprises a heating tube portion (21) located in the outer shell (1); the heat insulating layer (3) is located between the outer shell (1) and the heating tube portion (21); at least a portion of the support structure (4) is inserted into the heat insulating layer (3), or the support structure (4) is in contact with the heat insulating layer (3).

2. A heating device according to claim 1, characterized in that: The support structure (4) comprises a support tube (41), and the support tube (41) is supported on the inner ring wall of the thermal insulation layer (3).

3. A heating device according to claim 2, characterized in that: The heating device comprises an adhesive tape (44), wherein the adhesive tape (44) is wrapped around the outer annular wall of the thermal insulation layer (3).

4. A heating device according to claim 1, characterized in that: The support structure (4) comprises a high temperature resistant cloth (42), and the high temperature resistant cloth (42) at least wraps the inner surface and the outer surface of the heat insulation layer (3).

5. A heating device according to claim 4, characterized in that: The supporting structure (4) comprises a stitching line (43), wherein the stitching line (43) is inserted and stitched between the high temperature resistant cloth (42) and the heat insulation layer (3), and the stitching line (43) comprises a horizontal line (431) and / or a vertical line (432).

6. A heating device according to claim 5, characterized in that: The spacing between adjacent transverse lines (431) is 10 mm to 80 mm; and / or the spacing between adjacent longitudinal lines (432) is 10 mm to 80 mm; And / or the maximum thickness of the thermal insulation layer (3) is 3 mm to 10 mm, the thickness of the thermal insulation layer (3) at the sewing point of the horizontal line (431) is 2 mm to 9 mm, and the thickness of the thermal insulation layer (3) at the sewing point of the vertical line (432) is 2 mm to 9 mm.

7. A heating device according to claim 6, characterized in that: The heating device comprises an adhesive tape (44), wherein the adhesive tape (44) is wrapped around the outer ring wall of the high temperature resistant cloth (42); and / or, the high temperature resistant cloth (42) is made of high silica cloth or glass fiber cloth.

8. A heating device according to claim 1 or 2 or 3 or 4 or 5 or 7, characterized in that: The thermal insulation layer (3) is cylindrical in shape as a whole, and has a first docking wall (7) and a second docking wall (8), and the first docking wall (7) and the second docking wall (8) are in contact with each other; and / or, the thermal insulation layer (3) is made of inorganic fiber cotton or aerogel.

9. A heating device according to claim 8, characterized in that: The first docking wall (7) has a protruding wall (6) or a recessed wall (5), and the second docking wall (8) matches the first docking wall (7).

10. A heater connected to a pan-semiconductor device, characterized in that: It comprises the heating device according to any one of claims 1 to 9, wherein the electric heating pipe (2) comprises a joint, and the joint is integrally formed with the heating pipe portion (21).

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