Terminal for realizing temperature control

Abstract

The utility model provides a terminal for realizing temperature control. The terminal comprises a data acquisition module, a controller module, a display module and a temperature control module. According to the utility model, the in-furnace temperature detection module mounted in the annealing furnace is used for detecting the in-furnace temperature, the out-furnace temperature detection module mounted outside the annealing furnace is used for detecting the out-furnace temperature, and the voltage and current data of heating equipment are detected, are processed by the controller module, and are used for sending a temperature control instruction to the temperature control module; the in-furnace temperature detection module and the out-furnace temperature detection module guarantee self-adaptability to environmental condition changes, low-power heating equipment and high-power heating equipment included in the temperature control module guarantee self-adaptability to working load changes, and data information collected by the controller module and control instructions sent by the controller module are displayed through the display module. And a user can clearly know the operation state of the system.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor heating equipment, in particular to a terminal for realizing temperature control. Background Art

[0002] Annealing furnace is an important semiconductor processing equipment, which is used to heat semiconductor materials to high temperature in a short time and control the holding time to achieve the regulation of specific chemical, structural or electrical properties on the material surface. In semiconductor processing, temperature control is crucial and has a direct impact on material properties and device performance.

[0003] Publication number CN208378955U provides an annealing furnace temperature control system. Through the construction of input module, single-chip microcomputer and input module, the temperature parameters in the furnace are tested by a temperature detector and transmitted to the single-chip microcomputer. The single-chip microcomputer compares the set value parameters input by the key circuit, automatically starts and stops the heating wire, and achieves the function of automatic temperature control.

[0004] However, the system has a simple structure and cannot meet the adaptability to changes in environmental conditions and workload, resulting in unstable temperature control effects under different working conditions. At the same time, the operating status of the heating equipment cannot be fed back, and the operating status of the annealing furnace cannot be understood in detail.

[0005] Based on the above problems, there is an urgent need in the art for an annealing furnace control system that can achieve adaptability to environmental conditions and workload changes and understand the operating status of the annealing furnace in detail. Utility Model Content

[0006] The purpose of the utility model is to provide a terminal for realizing temperature control so as to solve the problems raised in the above background technology.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A terminal for implementing temperature control, comprising:

[0009] A data acquisition module, the data acquisition module is electrically connected to the controller module, and is used to collect the temperature inside the annealing furnace, the temperature outside the annealing furnace, the voltage and current data of the heating device, and send them to the controller module. The data acquisition module includes a furnace temperature detection module, a furnace temperature detection module, a voltage detection module and a current detection module. The furnace temperature detection module is evenly installed inside the annealing furnace hearth, and is used to detect the temperature inside the furnace. The furnace temperature detection module is installed on the outer wall of the annealing furnace body, and is used to detect the ambient temperature of the annealing furnace. The voltage detection module is installed on the heating device cable, and is used to detect the real-time voltage data of the heating device. The current detection module is installed on the heating device cable, and is used to detect the real-time current data of the heating device.

[0010] A controller module, the controller module is used to process the temperature inside the annealing furnace, the temperature outside the annealing furnace, the voltage and current data of the heating device collected by the data collection module, and send temperature control instructions to control the output of the power of the heating device and the cooling device;

[0011] A display module, which is electrically connected to the controller module and is used to display the temperature inside the annealing furnace, the temperature outside the annealing furnace, the voltage and current data of the heating device collected by the data collection module, and to display and control the controller module to send temperature control instruction data;

[0012] A temperature control module, the temperature control module is electrically connected to the controller module, and is used to control the heating temperature in the annealing furnace. The temperature control module includes a high-power heating device, a low-power heating device, a frequency converter and a cooling fan. The high-power heating device includes a first PWM voltage regulator group and a first electric heating lamp tube group. One end of the first PWM voltage regulator group is electrically connected to the controller module, and the other end is electrically connected to the first electric heating lamp tube group, and is used to adjust the heating power of the first electric heating lamp tube group. The low-power heating device includes a second PWM voltage regulator group and a second electric heating lamp tube group. One end of the second PWM voltage regulator group is electrically connected to the controller module, and the other end is electrically connected to the second electric heating lamp tube group, and is used to adjust the heating power of the second electric heating lamp tube group. The frequency converter is electrically connected to the cooling fan, and is used to control the power of the cooling fan. The cooling fan is used to control the temperature in the annealing furnace.

[0013] In one embodiment, there are six furnace temperature detection modules evenly installed in the annealing furnace, including furnace thermocouples and furnace temperature transmitters. The furnace thermocouples are used to collect furnace temperature data, and the furnace temperature transmitters are used to display and send temperature data to the controller module.

[0014] In one embodiment, the external furnace temperature detection module includes an external furnace thermocouple and an external furnace temperature transmitter, the external furnace thermocouple is used to collect external furnace temperature data, and the external furnace temperature transmitter is used to display and send the temperature data to the controller module.

[0015] In one embodiment, the first electric heating lamp tube group and the second electric heating lamp tube group each have four groups, and are cross-installed side by side in the annealing furnace.

[0016] In one embodiment, the heating devices are high-power heating devices and low-power heating devices.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] The utility model provides a terminal for realizing temperature control, including a data acquisition module, a controller module, a display module and a temperature control module. The utility model detects the temperature inside the furnace through the furnace temperature detection module installed in the annealing furnace, detects the temperature outside the furnace through the furnace temperature detection module installed outside the annealing furnace, and detects the voltage and current data of the heating device, processes through the controller module, and sends the temperature control command to the temperature control module. The furnace temperature detection module and the furnace temperature detection module ensure the adaptability to the change of environmental conditions. The low-power heating device and the high-power heating device included in the temperature control module ensure the adaptability to the change of workload. The data information collected by the controller module and the control command sent are displayed through the display module, so that the user can clearly understand the system operation status. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the system structure of the utility model.

[0020] In the figure: 100 data acquisition module, 110 furnace temperature detection module, 111 furnace thermocouple, 112 furnace temperature transmitter, 120 furnace outside temperature detection module, 121 furnace outside thermocouple, 122 furnace outside temperature transmitter, 130 voltage detection module, 140 current detection module, 200 controller module, 300 display module, 400 temperature control module, 410 high-power heating equipment, 411 first PWM voltage regulator group, 412 first electric heating lamp group, 420 low-power heating equipment, 421 second PWM voltage regulator group, 422 second electric heating lamp group, 430 inverter, 440 cooling fan. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] Example:

[0023] See also Figure 1 , the utility model provides a technical solution:

[0024] A terminal for implementing temperature control comprises a data acquisition module 100, a controller module 200, a display module 300 and a temperature control module 400, wherein;

[0025] The data acquisition module 100 is electrically connected to the controller module 200, and is used to collect the temperature inside the annealing furnace, the temperature outside the annealing furnace, the voltage and current data of the heating equipment, and send them to the controller module 200. The data acquisition module 100 includes a furnace temperature detection module 110, a furnace temperature detection module 120, a voltage detection module 130 and a current detection module 140. The furnace temperature detection module 110 is evenly installed inside the annealing furnace furnace chamber to detect the temperature inside the furnace. The furnace temperature detection module 120 is installed on the outer wall of the annealing furnace body to detect the ambient temperature of the annealing furnace. The voltage detection module 130 uses a voltage detection module of model YVT7-AB, which is installed on the heating equipment cable to detect the real-time voltage data of the heating equipment. The current detection module 140 uses a current detection module of model JX1-1-QD, which is installed on the heating equipment cable to detect the real-time current data of the heating equipment. The voltage and current data of the heating equipment are collected to ensure a comprehensive understanding of the operating status of the annealing furnace.

[0026] Furthermore, the heating devices are a high-power heating device 410 and a low-power heating device 420 .

[0027] Furthermore, there are six furnace temperature detection modules 110, which are evenly installed in the annealing furnace. The furnace temperature detection module 110 includes a furnace thermocouple 111 and a furnace temperature transmitter 112. The furnace thermocouple 111 adopts a platinum resistance thermometer with model WZPB-231. One end of the furnace thermocouple 111 is inserted into the furnace, and the other end extends out of the furnace to collect furnace temperature data. The furnace temperature transmitter 112 adopts a temperature transmitter with a display screen with model VAS1001 R. The furnace temperature transmitter 112 is installed at one end of the furnace thermocouple 111 extending out of the furnace, and is used to display the real-time temperature of the furnace thermocouple 111 and send the temperature data to the controller module 200.

[0028] Furthermore, the external furnace temperature detection module 120 includes an external furnace thermocouple 121 and an external furnace temperature transmitter 122. The external furnace thermocouple 121 adopts a platinum resistance thermometer with model WZPB-231, which is used to collect external furnace temperature data. The external furnace temperature transmitter 122 adopts a temperature transmitter with a display screen with model VAS1001 R, which is used to display and send temperature data to the controller module 200.

[0029] The furnace thermocouples 111 evenly installed in the annealing furnace collect the temperatures at various locations in the annealing furnace to ensure the uniformity of temperature collection. The furnace external temperature detection module 120 obtains the temperature difference between the inside and outside of the furnace by collecting the temperature outside the furnace, which is used to improve the adaptability to changes in environmental conditions.

[0030] The controller module 200 uses a controller of model STM32F103C8T6, which is used to process the temperature inside the annealing furnace, the temperature outside the annealing furnace, the voltage and current data of the heating equipment collected by the data acquisition module 100, and send temperature control instructions to control the output of the power of the heating equipment and the cooling equipment. According to the collected temperatures at various locations in the annealing furnace, the power of the heating equipment at the corresponding position can be controlled, and then the temperature at the corresponding position can be controlled, so that the heating of the workpiece is more uniform, the adaptability of the workload change is improved, and the voltage and current data of the heating equipment are processed to ensure the normal operation of the heating equipment.

[0031] The display module 300 uses a resistive touch screen of model SDWb070C53T and is electrically connected to the controller module 200 to display the temperature inside the annealing furnace, the temperature outside the annealing furnace, the voltage and current data of the heating device collected by the data acquisition module 100, and to display and control the controller module 200 to send temperature control instruction data.

[0032] The temperature control module 400 is electrically connected to the controller module 200 and is used to control the heating temperature in the annealing furnace. The temperature control module 400 includes a high-power heating device 410, a low-power heating device 420, a frequency converter 430 and a cooling fan 440. The high-power heating device 410 includes a first PWM voltage regulator group 411 and a first electric heating lamp group 412. The first PWM voltage regulator group 411 adopts a model LSW-TH3Z40CPWM voltage regulator, one end of which is electrically connected to the controller module 200, and the other end is electrically connected to the first electric heating lamp group 412, and is used to adjust the heating power of the first electric heating lamp group 412. The first electric heating lamp group 412 adopts a halogen lamp with a model J78-60W. The low-power heating device 420 includes The second PWM voltage regulator group 421 and the second electric heating lamp tube group 422, the second PWM voltage regulator group 421 adopts a PWM voltage regulator of model LSW-TH3Z20C, one end of which is electrically connected to the controller module 200, and the other end is electrically connected to the second electric heating lamp tube group 422, for adjusting the heating power of the second electric heating lamp tube group 422, the second electric heating lamp tube group 422 adopts a halogen lamp of model J78-30W, further, the first electric heating lamp tube group 412 and the second electric heating lamp tube group 422 each have four groups, each first electric heating lamp tube is equipped with a first PWM voltage regulator, each second electric heating lamp tube is equipped with a second PWM voltage regulator, and the first electric heating lamp tube group 412 and the second electric heating lamp tube group 422 are installed side by side and cross-wise in the annealing furnace.

[0033] The inverter 430 is a G120 inverter, which is electrically connected to the cooling fan 440 and is used to control the power of the cooling fan 440. The cooling fan 440 is a 130FLJ1-B85W centrifugal fan, which is used to control the temperature in the annealing furnace.

[0034] The use principle of the utility model: when in use, the temperature inside the furnace is detected by the furnace temperature detection module installed in the annealing furnace, the temperature outside the furnace is detected by the furnace temperature detection module installed outside the annealing furnace, and the voltage and current data of the heating equipment are detected, and processed by the controller module, and the temperature control command is sent to the temperature control module. The furnace temperature detection module and the furnace temperature detection module ensure the adaptability to changes in environmental conditions. The low-power heating equipment and high-power heating equipment included in the temperature control module ensure the adaptability to changes in workload. The data information collected by the controller module and the control commands sent are displayed through the display module, so that the user can clearly understand the system operation status.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A terminal for realizing temperature control, characterized in that: include: A data acquisition module (100), the data acquisition module (100) being electrically connected to the controller module (200), and being used to collect data on the temperature inside the annealing furnace, the temperature outside the annealing furnace, and the voltage and current of the heating device, and sending the data to the controller module (200), the data acquisition module (100) comprising a furnace temperature detection module (110), a furnace temperature detection module (120), a voltage detection module (130), and a current detection module (140), the furnace temperature detection module (110) being evenly installed inside the furnace chamber of the annealing furnace, and being used to detect the temperature inside the furnace, the furnace temperature detection module (120) being installed on the outer wall of the furnace body of the annealing furnace, and being used to detect the ambient temperature of the annealing furnace, the voltage detection module (130) being installed on the cable of the heating device, and being used to detect the real-time voltage data of the heating device, and the current detection module (140) being installed on the cable of the heating device, and being used to detect the real-time current data of the heating device; A controller module (200), the controller module (200) being used to process the temperature inside the annealing furnace, the temperature outside the annealing furnace, the voltage and current data of the heating device collected by the data collection module (100), and to send temperature control instructions to control and adjust the output of the power of the heating device and the cooling device; A display module (300), the display module (300) being electrically connected to the controller module (200), and being used to display the temperature inside the annealing furnace, the temperature outside the annealing furnace, and the voltage and current data of the heating device collected by the data collection module (100), and to display and control the controller module (200) to send temperature control instruction data; A temperature control module (400) is electrically connected to the controller module (200) and is used to control the heating temperature in the annealing furnace. The temperature control module (400) comprises a high-power heating device (410), a low-power heating device (420), a frequency converter (430) and a cooling fan (440). The high-power heating device (410) comprises a first PWM voltage regulator group (411) and a first electric heating lamp group (412). One end of the first PWM voltage regulator group (411) is electrically connected to the controller module (200), and the other end is electrically connected to the first electric heating lamp group (412). The low-power heating device (420) comprises a second PWM voltage regulator group (421) and a second electric heating lamp tube group (422); one end of the second PWM voltage regulator group (421) is electrically connected to the controller module (200), and the other end is electrically connected to the second electric heating lamp tube group (422) for adjusting the heating power of the second electric heating lamp tube group (422); the frequency converter (430) is electrically connected to a cooling fan (440) for controlling the power of the cooling fan (440); and the cooling fan (440) is used to control the temperature in the annealing furnace.

2. A terminal for implementing temperature control according to claim 1, characterized in that: There are six furnace temperature detection modules (110) evenly installed in the annealing furnace, including furnace thermocouples (111) and furnace temperature transmitters (112). The furnace thermocouples (111) are used to collect furnace temperature data, and the furnace temperature transmitters (112) are used to display and send temperature data to a controller module (200).

3. A terminal for implementing temperature control according to claim 1, characterized in that: The external furnace temperature detection module (120) comprises an external furnace thermocouple (121) and an external furnace temperature transmitter (122), wherein the external furnace thermocouple (121) is used to collect external furnace temperature data, and the external furnace temperature transmitter (122) is used to display and send the temperature data to the controller module (200).

4. A terminal for implementing temperature control according to claim 1, characterized in that: There are four groups of the first electric heating lamp tube group (412) and the second electric heating lamp tube group (422), which are installed side by side and crosswise in the annealing furnace.

5. A terminal for implementing temperature control according to claim 1, characterized in that: The heating devices are a high-power heating device (410) and a low-power heating device (420).

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