Substrate processing apparatus

Abstract

A substrate processing apparatus is provided. The substrate processing apparatus includes: a first chamber; a second chamber disposed on one side of the first chamber in a first direction; a first door disposed on one side of the first chamber in a second direction different from the first direction; and a second door disposed on one side of the second chamber in the second direction, the first door being disposed so as to be displaced in the second direction than the second door.

Description

Technical Field

[0001] The utility model relates to a substrate processing device. Background Art

[0002] With the development of information society, the demand for display devices for displaying images has increased in various forms. The display device may be a flat panel display device such as a liquid crystal display device (Liquid Crystal Display), a field emission display device (Field Emission Display), or a light emitting display device (Light Emitting Display). The light emitting display device may include an organic light emitting display device having an organic light emitting diode element as a light emitting element, or an inorganic light emitting display device having an inorganic light emitting diode element such as an LED (Light Emitting Diode) as a light emitting element.

[0003] The manufacturing process of a display device is composed of a plurality of processes such as a process for manufacturing a substrate, a unit manufacturing process, and a module process. Thus, the manufacturing process of a display device composed of many unit processes is usually carried out in a clean room. Inside the clean room, a plurality of substrates such as unprocessed substrates, substrates being processed during the manufacturing of the display device, and finished substrates after the manufacturing of the display device is completed can be stored and kept in a chamber. Utility Model Content

[0004] The problem to be solved by the utility model is to provide a substrate processing device with improved space efficiency.

[0005] The subject of the present invention is not limited to the above-mentioned subject, and another technical subject not mentioned will be clearly understood by those skilled in the art from the following description.

[0006] According to one embodiment, a substrate processing device for solving the above-mentioned problem includes: a first chamber; a second chamber, which is arranged on one side of the first chamber in a first direction; a first door, which is arranged on one side of the first chamber in a second direction different from the first direction; and a second door, which is arranged on one side of the second chamber in the second direction, wherein the first door is shifted in the second direction relative to the second door.

[0007] The one side of the first chamber where the first door is disposed and the one side of the second chamber where the second door is disposed may be located in the same direction in the second direction.

[0008] It may be that the first door and the second door do not overlap in the first direction.

[0009] The first door and the second door may be configured to move in the first direction.

[0010] It may be that at least a portion of the first door overlaps with the second door in the second direction when in an open state.

[0011] The substrate processing apparatus further includes a first door driving unit and a second door driving unit, which respectively provide driving force to the first door and the second door.

[0012] The first door driving unit may be arranged between the first door and the first chamber in the second direction, and the second door driving unit may be arranged between the second door and the second chamber in the second direction.

[0013] The first door driving unit may include a first rail and a second rail arranged in a third direction different from the first direction and the second direction, and the second door driving unit may include a third rail and a fourth rail arranged in the third direction.

[0014] It may be that the first track does not overlap with the third track in the first direction, and the second track does not overlap with the fourth track in the first direction.

[0015] The first track may be arranged to be shifted relative to the third track in the second direction, and the second track may be arranged to be shifted relative to the fourth track in the second direction.

[0016] It can be that the substrate processing device also includes: a stacking frame for accommodating the first chamber and the second chamber, the stacking frame includes: a first area for configuring the first chamber; a second area for configuring the second chamber; and a third area for configuring on one side of the second area, and the first area to the third area are configured in the first direction.

[0017] It may be that at least a portion of the second door overlaps with the third area in the second direction when in an open state.

[0018] It may be that the substrate processing device further includes: a substrate transfer device, which is arranged on one side of the first chamber and the second chamber in the second direction, and the substrate transfer device includes: a substrate transfer part, which is configured to extend and contract in the second direction; and an arm driving part, which is configured to move the substrate transfer part in the first direction.

[0019] The substrate transfer unit may be configured to extend in the second direction to transfer the target substrate into the first chamber or the second chamber, or to contract in the second direction to transfer the target substrate out of the first chamber or the second chamber.

[0020] The first direction may be a height direction of the first chamber and the second chamber.

[0021] It may be that the first direction is a horizontal direction of the first chamber and the second chamber.

[0022] According to another embodiment for solving the above-mentioned problem, a substrate processing device includes: a first chamber; a second chamber arranged on the first chamber; a first door arranged on one side of the first chamber; and a second door arranged on one side of the second chamber, wherein the first door and the second door do not overlap in the arrangement direction of the first chamber and the second chamber.

[0023] The side of the first chamber where the first door is disposed and the side of the second chamber where the second door is disposed may be located on the same side in the same direction.

[0024] It may be that the first door and the second door do not overlap.

[0025] The first door and the second door may be configured to move in the arrangement direction of the first chamber and the second chamber.

[0026] According to a substrate processing device according to an embodiment of the utility model, space efficiency can be improved.

[0027] The effects according to the embodiments are not limited to the above-exemplified contents, and more various effects are included in this specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 FIG. 1 is a side view schematically showing a substrate processing apparatus according to an embodiment.

[0029] Figure 2 and Figure 3 is a side view illustrating an operating state of a substrate processing apparatus according to an embodiment.

[0030] Figure 4 is a perspective view showing a substrate processing apparatus according to an embodiment.

[0031] Figure 5 is a side view showing a portion of a substrate processing apparatus according to an embodiment.

[0032] Figure 6 FIG. 1 is a side view schematically showing a substrate processing apparatus according to another embodiment.

[0033] Figure 7 is a plan view showing a substrate processing apparatus according to still another embodiment.

[0034] Figure 8is a plan view illustrating an operating state of a substrate processing apparatus according to still another embodiment.

[0035] Fig. 9 is a plan view showing a display device according to an embodiment.

[0036] Fig.10 It is along Fig. 9 A cross-sectional view taken along line X1-X1'.

[0037] Fig.11 Is magnification Fig.10 A magnified image of area A.

[0038] (Explanation of Reference Numerals)

[0039] 10: Substrate processing equipment

[0040] 100: Stacked Frames

[0041] L0: Basal layer

[0042] L1, L2, L3, L4: first to fourth layers

[0043] 200: Chamber

[0044] 210, 220, 230, 240: First to fourth chambers

[0045] 300: Door drive

[0046] 310: Door

[0047] 311, 312, 313, 314: Doors 1 to 4

[0048] 320: Door drive unit

[0049] 321, 322, 323, 324: first to fourth door drive units

[0050] 321a, 321b, 322a, 322b: first to fourth tracks

[0051] 400: Substrate transfer device

[0052] 410: Supporting part

[0053] 420: Arm drive unit

[0054] 430: Substrate transfer section

[0055] 431, 432: first and second substrate transfer units

[0056] 431a, 432a: first and second substrate driving units

[0057] C0: Gilead

[0058] C1, C2, C3: First to third columns DETAILED DESCRIPTION

[0059] If you refer to the attached Figure 1 The advantages and features of the utility model and the methods for achieving them will become clear from the detailed embodiments described below. However, the utility model is not limited to the embodiments disclosed below, and will be implemented in a variety of different forms. The embodiments are only provided to make the disclosure of the utility model complete and to fully inform the scope of the utility model to those who have common knowledge in the technical field to which the utility model belongs. The utility model is only defined by the scope of the claims.

[0060] When an element or layer is referred to as "on" another element or layer, it includes all cases where it is directly above the other element or has other layers or other elements in between. Similarly, when it is referred to as "below", "left" and "right", it includes all cases where it is directly adjacent to other elements or has other layers or other materials in between. The same reference numerals refer to the same components throughout the specification.

[0061] Hereinafter, specific embodiments will be described with reference to the accompanying drawings.

[0062] Figure 1 FIG. 1 is a side view schematically showing a substrate processing apparatus according to an embodiment. Figure 2 and Figure 3 is a side view illustrating an operating state of a substrate processing apparatus according to an embodiment.

[0063] Reference Figures 1 to 3 According to an embodiment, the substrate processing device 10 can be used to store and receive the substrate S, or to manufacture the display device DD (see Fig. 9 ) is a processing device for processing the substrate S to perform various manufacturing processes on the substrate S. The substrate processing device 10 can be used for storing and storing the chamber of the substrate S, or stacking and / or loading the display device DD (see Fig. 9 The substrate S may be used to manufacture a display device DD (see Fig. 9 ) of an unprocessed substrate, or in a display device DD (refer to Fig. 9 ) in the process of manufacturing a substrate, or a display device DD (refer to Fig. 9 ) is used to manufacture a finished substrate (e.g., a display device body).

[0064] A substrate processing apparatus 10 according to an embodiment may include a stack frame 100 , a chamber 200 , a door driving apparatus 300 , and a substrate transferring apparatus 400 .

[0065] The stacking frame 100 may provide a space (e.g., area) in which a plurality of chambers 200 may be arranged. The stacking frame 100 may include a plurality of spaces (e.g., areas) divided in such a manner that a plurality of chambers 200 may be arranged spaced apart from each other. For example, the stacking frame 100 may include a plurality of layers arranged in the third direction DR3.

[0066] In the drawings shown, the first direction DR1 and the second direction DR2 are respectively horizontal directions and intersect each other. For example, the first direction DR1 and the second direction DR2 may be orthogonal to each other. Alternatively, the third direction DR3 intersects the first direction DR1 and the second direction DR2, for example, may be an orthogonal vertical direction. Unless otherwise defined, in this specification, the direction indicated by the arrows of the first to third directions DR1, DR2, and DR3 may be referred to as one side, and the opposite direction thereof may be referred to as the other side.

[0067] In the drawings, the stack frame 100 is shown to include 4 layers, but the present invention is not limited thereto. The number of layers included in the stack frame 100 may be varied in various ways depending on the size and structure of the space in which the substrate processing apparatus 10 is arranged. Hereinafter, for the sake of convenience, the case where the stack frame 100 includes 4 layers is described as an example, but the present invention is not limited thereto.

[0068] In some embodiments, the stack frame 100 may include a base layer L0 , a first layer L1 , a second layer L2 , and a third layer L3 arranged in the third direction DR3 .

[0069] When a door arranged on an adjacent layer is opened, the base layer L0 may be a layer for providing a movement and temporary storage space for the door. For example, when the first door 311 arranged on the adjacent layer, i.e., the first layer L1, is opened, the base layer L0 may provide a space in which the first door 311 can move and a space in which the first door 311 can be temporarily stored in the open state. The chamber 200 may not be arranged on the base layer L0.

[0070] The base layer L0 may be disposed at the lowermost layer or the uppermost layer of the stacking frame 100. In one embodiment, as shown in the drawings, the base layer L0 may be disposed at the lowermost layer of the stacking frame 100.

[0071] The first layer L1 may be disposed on the base layer L0. The second layer L2 may be disposed on the first layer L1. The third layer L3 may be disposed on the second layer L2. The first to third layers L1, L2, and L3 may respectively provide spaces in which a plurality of chambers 200 may be disposed. For example, the first layer L1 may provide a space in which the first chamber 210 may be disposed, the second layer L2 may provide a space in which the second chamber 220 may be disposed, and the third layer L3 may provide a space in which the third chamber 230 may be disposed.

[0072] In some embodiments, the stacking frame 100 may be omitted, in which case each of the plurality of chambers 200 may be directly stacked and / or loaded with each other. For example, the first chamber 210 may be directly disposed on the second chamber 220, and the second chamber 220 may be directly disposed on the third chamber 230.

[0073] The chamber 200 may be a chamber for storing and receiving the substrate S or a chamber for executing the display device DD (see Fig. 9 ). The chamber 200 may include a plurality of chambers. For example, the chamber 200 may include a first chamber 210, a second chamber 220, and a third chamber 230.

[0074] In one embodiment, the first to third chambers 210 , 220 , and 230 may be disposed in the third direction DR3 . The second chamber 220 may be disposed on the first chamber 210 , and the third chamber 230 may be disposed on the second chamber 220 .

[0075] In some embodiments, the first to third chambers 210, 220, 230 may be respectively arranged at the first to third layers L1, L2, L3 of the stacking frame 100. For example, the first chamber 210 may be arranged at the first layer L1, the second chamber 220 may be arranged at the second layer L2, and the third chamber 230 may be arranged at the third layer L3.

[0076] The door driving device 300 may be an opening and closing device that closes a door to block the inside and outside of the chamber 200 or opens a door to connect the inside and outside of the chamber 200. The door driving device 300 may include a door 310 and a door driving unit 320.

[0077] The door 310 may block or connect the inside and the outside of the chamber 200. The door 310 may prevent contamination of the substrate S disposed inside the chamber 200. The door 310 may be disposed at one side of the chamber 200. For example, the door 310 may be disposed at one side of the chamber 200 in the first direction DR1. In one embodiment, the door 310 may be in a plate shape extending in the second direction DR2 and the third direction DR3.

[0078] In some embodiments, the door 310 may include a first door 311 , a second door 312 , and a third door 313 .

[0079] The first to third doors 311, 312, 313 can respectively adjust the opening and closing of the first to third chambers 210, 220, 230. For example, the first door 311 can adjust the opening and closing of the first chamber 210, the second door 312 can adjust the opening and closing of the second chamber 220, and the third door 313 can adjust the opening and closing of the third chamber 230.

[0080] When the door 310 is closed, the first to third doors 311, 312, 313 may be respectively arranged on the first to third floors L1, L2, L3. For example, when the door 310 is closed, the first door 311 may be arranged on the first floor L1, the second door 312 may be arranged on the second floor L2, and the third door 313 may be arranged on the third floor L3.

[0081] When the door 310 is closed, the door 310 disposed on each layer may be disposed on one side of the chamber 200 disposed on the same layer. For example, when the first door 311 is closed, the first door 311 may be disposed on one side of the first chamber 210 in the first direction DR1, when the second door 312 is closed, the second door 312 may be disposed on one side of the second chamber 220 in the first direction DR1, and when the third door 313 is closed, the third door 313 may be disposed on one side of the third chamber 230 in the first direction DR1.

[0082] When the door 310 is closed, the door 310 disposed at each layer may overlap the chamber 200 disposed at the same layer in the first direction DR1. For example, when the first door 311 is closed, the first door 311 may overlap the first chamber 210 in the first direction DR1, when the second door 312 is closed, the second door 312 may overlap the second chamber 220 in the first direction DR1, and when the third door 313 is closed, the third door 313 may overlap the third chamber 230 in the first direction DR1.

[0083] When the door 310 is opened, at least a portion of the door 310 disposed at each layer may be disposed at one side of the chamber 200 disposed at the adjacent layer in the first direction DR1. Figure 2 As shown, when the door 310 is opened, at least a portion of the door 310 arranged at each layer may be arranged at one side of the chamber 200 arranged at the lower layer in the first direction DR1. When the second door 312 is opened, at least a portion of the second door 312 may be arranged at one side of the first chamber 210 arranged at the first layer L1 in the first direction DR1. Although not shown in the drawings, when the third door 313 is opened, at least a portion of the third door 313 may be arranged at one side of the second chamber 220 arranged at the second layer L2 in the first direction DR1.

[0084] When the door 310 is opened, at least a portion of the door 310 disposed on each layer may be disposed on an adjacent layer. For example, when the door 310 is opened, at least a portion of the door 310 disposed on each layer may be disposed on a lower layer. When the first door 311 is opened, at least a portion of the first door 311 may be disposed on the base layer L0, when the second door 312 is opened, at least a portion of the second door 312 may be disposed on the first layer L1, and when the third door 313 is opened, at least a portion of the third door 313 may be disposed on the second layer L2.

[0085] When the door 310 is opened, at least a portion of the door 310 disposed on each layer may overlap with the door 310 on the adjacent layer in the first direction DR1. For example, when the door 310 is opened, at least a portion of the door 310 disposed on each layer may overlap with the door 310 on the lower layer in the first direction DR1. When the second door 312 is opened, at least a portion of the second door 312 may overlap with the first door 311 in the first direction DR1, and when the third door 313 is opened, at least a portion of the third door 313 may overlap with the second door 312 in the first direction DR1.

[0086] The door driving unit 320 may provide driving force to the door 310. The door driving unit 320 may include all driving devices capable of providing driving force to the door 310. For example, the door driving unit 320 may include various driving devices such as pulleys, rails, elevators, cranes, and lifting frames.

[0087] The door driving unit 320 may include a first door driving unit 321, a second door driving unit 322, and a third door driving unit 323. The first door driving unit 321 may provide driving force to the first door 311, the second door driving unit 322 may provide driving force to the second door 312, and the third door driving unit 323 may provide driving force to the third door 313.

[0088] The door driver 320 may move the door 310. For example, the first door driver 321 may move the first door 311 in the third direction DR3, the second door driver 322 may move the second door 312 in the third direction DR3, and the third door driver 323 may move the third door 313 in the third direction DR3.

[0089] In some embodiments, the gate driving part 320 may extend in the third direction DR3. For example, the first gate driving part 321 may extend in the third direction DR3, the second gate driving part 322 may extend in the third direction DR3, and the third gate driving part 323 may extend in the third direction DR3.

[0090] In some embodiments, the door driving unit 320 may be disposed between the door 310 and the chamber 200. For example, the first door driving unit 321 may be disposed between the first door 311 and the first chamber 210, the second door driving unit 322 may be disposed between the second door 312 and the second chamber 220, and the third door driving unit 323 may be disposed between the third door 313 and the third chamber 230. In one embodiment, the first to third door driving units 321, 322, 323 may be disposed in sequence in the opposite direction of the first direction DR1.

[0091] The substrate transfer device 400 may move the substrate S into the chamber 200. The substrate transfer device 400 may be disposed at one side of the stack frame 100, the chamber 200, and the door driving device 300. For example, the substrate transfer device 400 may be disposed at one side of the stack frame 100, the chamber 200, and the door driving device 300 in the first direction DR1.

[0092] In some embodiments, the substrate transfer device 400 may include a support portion 410 , an arm driving portion 420 , and a substrate transfer portion 430 .

[0093] The support part 410 may support the arm driving part 420 and the substrate transferring part 430. In some embodiments, the support part 410 may extend in the third direction DR3.

[0094] An arm driving portion 420 may be located on the support portion 410. In some embodiments, the arm driving portion 420 may extend in the same direction as the support portion 410. For example, the arm driving portion 420 may extend in the third direction DR3.

[0095] The arm driving unit 420 may provide driving force to the substrate transfer unit 430. The arm driving unit 420 may include all driving devices capable of providing driving force to the substrate transfer unit 430. For example, the arm driving unit 420 may include various driving devices such as pulleys, rails, elevators, cranes, and lifting frames.

[0096] like Figure 2 as well as Figure 3 As shown, the substrate transfer unit 430 can move the substrate S. The substrate transfer unit 430 can move the substrate S into and out of the chamber 200. The substrate transfer unit 430 can be disposed between the support unit 410 and the chamber 200. For example, the substrate transfer unit 430 can be disposed between the support unit 410 and the chamber 200 in the first direction DR1.

[0097] In some embodiments, the substrate transfer unit 430 may include a first substrate transfer unit 431 and a second substrate transfer unit 432. The first substrate transfer unit 431 may be disposed below the second substrate transfer unit 432, and the second substrate transfer unit 432 may be disposed above the first substrate transfer unit 431.

[0098] The substrate transfer unit 430 may be connected to the arm driving unit 420. The substrate transfer unit 430 may be moved in the third direction DR3 by the arm driving unit 420. For example, the first substrate transfer unit 431 may be moved in the third direction DR3 by the arm driving unit 420, and the second substrate transfer unit 432 may be moved in the third direction DR3 by the arm driving unit 420.

[0099] The first substrate transfer unit 431 and the second substrate transfer unit 432 can be driven separately by the arm drive unit 420. Therefore, the first substrate transfer unit 431 and the second substrate transfer unit 432 can move in not only the same direction but also different directions from each other. In this case, the arm drive unit 420 can also include a first arm drive unit and a second arm drive unit that can drive the first substrate transfer unit 431 and the second substrate transfer unit 432 respectively.

[0100] In another embodiment, the first substrate transfer unit 431 and the second substrate transfer unit 432 may be physically combined to form a whole. For example, the first substrate transfer unit 431 and the second substrate transfer unit 432 may be arms for supporting one side and the other side of the substrate S in one substrate transfer unit 430. In this case, the first substrate transfer unit 431 and the second substrate transfer unit 432 may be driven simultaneously by the arm driving unit 420 and move together in the same direction.

[0101] In some embodiments, the substrate transfer unit 430 may include substrate driving units 431a and 432a. For example, the first substrate transfer unit 431 may include a first substrate driving unit 431a, and the second substrate transfer unit 432 may include a second substrate driving unit 432a.

[0102] In one embodiment, if Figure 3 As shown, the substrate driving parts 431 a and 432 a may extend in the first direction DR1 . For example, the first substrate driving part 431 a and the second substrate driving part 432 a may extend in the first direction DR1 at the same time to carry the substrate S into the chamber 200 .

[0103] In one embodiment, the substrate driving parts 431a and 432a may shrink in length in the direction opposite to the first direction DR1. For example, the first substrate driving part 431a and the second substrate driving part 432a may shrink in the direction opposite to the first direction DR1 at the same time to move the substrate S out of the chamber 200.

[0104] In the substrate processing apparatus 10 according to the present embodiment, the first to third doors 311, 312, and 313 may be arranged to be shifted in one direction relative to each other. For example, the first door 311 may be arranged to be shifted in the first direction DR1 by a third distance D3 relative to the second door 312, and the second door 312 may be arranged to be shifted in the first direction DR1 by a fourth distance D4 relative to the third door 313. The first to third doors 311, 312, and 313 may not overlap each other in the third direction DR3.

[0105] For example, the first cavity 210 may be displaced from the second cavity 220 in the first direction DR1 by a first distance D1, and the second cavity 220 may be displaced from the third cavity 230 in the first direction DR1 by a second distance D2.

[0106] At least a portion of the first to third chambers 210, 220, and 230 may not overlap each other in the third direction DR3. For example, the first chamber 210 may not overlap with the second chamber 220 in the third direction DR3 by a first distance D1 shifted from the second chamber 220, and the second chamber 220 may not overlap with the third chamber 230 in the third direction DR3 by a second distance D2 shifted from the third chamber 230. The first chamber 210 may not overlap with the third chamber 230 in the third direction DR3 by a total distance of the first distance D1 and the second distance D2.

[0107] The first to third gate driving parts 321, 322, 323 may be arranged displaced from each other in one direction. For example, the first gate driving part 321 may be arranged displaced from the second gate driving part 322 in the first direction DR1, and the second gate driving part 322 may be arranged displaced from the third gate driving part 323 in the first direction DR1. The first to third gate driving parts 321, 322, 323 may not overlap with each other in the third direction DR3.

[0108] In the substrate processing apparatus 10 according to the present embodiment, the first to third doors 311, 312, 313 may not overlap each other in the third direction DR3, so as to have different moving paths. Thus, when any one of the first to third doors 311, 312, 313 is opened, collision with the remaining doors 310 or interference with the remaining doors 310 may be prevented.

[0109] In the substrate processing apparatus 10 according to the present embodiment, the moving paths of the first to third doors 311 , 312 , and 313 do not overlap with each other, so the space efficiency of the substrate processing apparatus 10 can be improved.

[0110] For example, according to the substrate processing apparatus 10 of the previous embodiment, the first to third doors 311, 312, 313 may overlap each other in the third direction DR3. Therefore, in order to prevent the first to third doors 311, 312, 313 from interfering with or colliding with each other when opening / closing, a base layer L0 is also required to be disposed between the first to third layers L1, L2, L3.

[0111] On the contrary, in the substrate processing device 10 of the present embodiment, the first to third doors 311, 312, 313 do not overlap each other in the third direction DR3, so the base layer L0 can be arranged only on the uppermost layer or the lowermost layer. That is, the base layer L0 may not be arranged between the first to third layers L1, L2, L3. As a result, the overall height of the substrate processing device 10 can be reduced. It can be less restricted by the indoor space for configuring the substrate processing device 10, and the number of layers of the substrate processing device 10 is increased. Therefore, the space efficiency of the substrate processing device 10 can be improved.

[0112] Figure 4 is a perspective view showing a substrate processing apparatus according to an embodiment. Figure 5 is a side view showing a portion of a substrate processing apparatus according to an embodiment.

[0113] Reference Figure 4 as well as Figure 5 , showing a state where the first door 311 is closed and a state where the second door 312 is opened.

[0114] In some embodiments, the first door driving unit 321 may include a first rail 321a and a second rail 321b, and the second door driving unit 322 may include a third rail 322a and a fourth rail 322b. The first to fourth rails 321a, 321b, 322a, 322b may extend in the third direction DR3, respectively.

[0115] The first rail 321a and the second rail 321b may be spaced apart from each other in the second direction DR2. The third rail 322a and the fourth rail 322b may be spaced apart from each other in the second direction DR2.

[0116] The first track 321a and the second track 321b may be respectively displaced from the third track 322a and the fourth track 322b in the first direction DR1 by a third distance D3. For example, the first track 321a and the third track 322a may be spaced apart from each other in the first direction DR1, and the second track 321b and the fourth track 322b may be spaced apart from each other in the first direction DR1.

[0117] The first door 311 may be coupled to the first track 321a and the second track 321b. The first door 311 may reciprocate along the first track 321a and the second track 321b in the third direction DR3. The second door 312 may be coupled to the third track 322a and the fourth track 322b. The second door 312 may reciprocate along the third track 322a and the fourth track 322b in the third direction DR3.

[0118] The chamber 200 may include a substrate S that can be accessed (see Figure 2 )'s move-in and move-out exit OP.

[0119] As shown in the drawings, when the second door 312 is opened, the loading / unloading port OP of the second chamber 220 may be exposed to the outside. When the first door 311 is closed, the loading / unloading port OP of the first chamber 210 may be blocked from the outside by the first door 311.

[0120] For example, the second door 312 may move along the third track 322a and the fourth track 322b in the opposite direction of the third direction DR3. Thus, the second door 312 may be in an open state. When the second door 312 is open, at least a portion of the second door 312 may overlap with the first door 311 in the first direction DR1.

[0121] In the substrate processing apparatus 10 of the present embodiment, the moving paths of the first door 311 and the second door 312 do not overlap with each other, so the space efficiency of the substrate processing apparatus 10 can be improved.

[0122] Hereinafter, another embodiment of the substrate processing apparatus according to one embodiment will be described. In the following embodiments, the same structures as those in the previously described embodiments are referred to with the same reference numerals, and repeated descriptions are omitted or simplified, and the description will be mainly based on the differences.

[0123] Figure 6 FIG. 1 is a side view schematically showing a substrate processing apparatus according to another embodiment.

[0124] Reference Figure 6 , at the point where the base layer L0 is arranged at the uppermost layer, the substrate processing apparatus 10 according to the present embodiment is different from the reference Figure 1 The substrate processing apparatus 10 according to one embodiment described above is different.

[0125] More specifically, the substrate processing apparatus 10 according to the present embodiment may include a stack frame 100 , a chamber 200 , a door driving apparatus 300 , and a substrate transferring apparatus 400 .

[0126] In one embodiment, the stacking frame 100 may include a first layer L1 , a second layer L2 , a third layer L3 , a fourth layer L4 , and a base layer L0 .

[0127] In the drawings, the stacking frame 100 is shown to include 5 layers, but is not limited thereto. Figure 1 As described above, the number of layers included in the stack frame 100 may be variously changed according to the size and structure of the space where the substrate processing apparatus 10 is arranged.

[0128] The first layer L1 may be arranged at the bottom layer. The second layer L2 may be arranged on the first layer L1. The third layer L3 may be arranged on the second layer L2. The fourth layer L4 may be arranged on the third layer L3. The first to fourth layers L1, L2, L3, and L4 may respectively provide spaces in which a plurality of chambers 200 may be arranged. For example, the first layer L1 may provide a space in which a first chamber 210 may be arranged, the second layer L2 may provide a space in which a second chamber 220 may be arranged, the third layer L3 may provide a space in which a third chamber 230 may be arranged, and the fourth layer L4 may provide a space in which a fourth chamber 240 may be arranged.

[0129] When a door arranged on an adjacent layer is opened, the base layer L0 may be a layer for providing a movement and temporary storage space for the door. For example, when the fourth door 314 arranged on the adjacent layer, i.e., the fourth layer L4, is opened, the base layer L0 may provide a space in which the fourth door 314 can move and a space in which the fourth door 314 can be temporarily stored in the open state. The chamber 200 may not be arranged on the base layer L0.

[0130] The base layer L0 may be disposed at the lowermost layer or the uppermost layer of the stacking frame 100. In one embodiment, as shown in the drawings, the base layer L0 may be disposed at the uppermost layer of the stacking frame 100. For example, the base layer L0 may be disposed on the fourth layer L4.

[0131] In one embodiment, the chamber 200 may include a first chamber 210, a second chamber 220, a third chamber 230, and a fourth chamber 240. The first to fourth chambers 210, 220, 230, 240 may be arranged in the third direction DR3. The second chamber 220 may be arranged on the first chamber 210, the third chamber 230 may be arranged on the second chamber 220, and the fourth chamber 240 may be arranged on the third chamber 230.

[0132] In some embodiments, the first to fourth chambers 210, 220, 230, 240 may be respectively arranged at the first to fourth layers L1, L2, L3, L4 of the stacking frame 100. For example, the first chamber 210 may be arranged at the first layer L1, the second chamber 220 may be arranged at the second layer L2, the third chamber 230 may be arranged at the third layer L3, and the fourth chamber 240 may be arranged at the fourth layer L4.

[0133] In one embodiment, the door 310 may include a first door 311 , a second door 312 , a third door 313 , and a fourth door 314 .

[0134] The first to fourth doors 311, 312, 313, 314 can respectively adjust the opening and closing of the first to fourth chambers 210, 220, 230, 240. For example, the first door 311 can adjust the opening and closing of the first chamber 210, the second door 312 can adjust the opening and closing of the second chamber 220, the third door 313 can adjust the opening and closing of the third chamber 230, and the fourth door 314 can adjust the opening and closing of the fourth chamber 240.

[0135] When the door 310 is closed, the first to fourth doors 311, 312, 313, 314 may be respectively arranged on the first to fourth floors L1, L2, L3, L4. For example, when the door 310 is closed, the first door 311 may be arranged on the first floor L1, the second door 312 may be arranged on the second floor L2, the third door 313 may be arranged on the third floor L3, and the fourth door 314 may be arranged on the fourth floor L4.

[0136] When the door 310 is closed, the door 310 disposed in each layer may be disposed on one side of the chamber 200 disposed in the same layer. For example, when the first door 311 is closed, the first door 311 may be disposed on one side of the first chamber 210 in the first direction DR1, when the second door 312 is closed, the second door 312 may be disposed on one side of the second chamber 220 in the first direction DR1, when the third door 313 is closed, the third door 313 may be disposed on one side of the third chamber 230 in the first direction DR1, and when the fourth door 314 is closed, the fourth door 314 may be disposed on one side of the fourth chamber 240 in the first direction DR1.

[0137] When the door 310 is closed, the door 310 disposed on each layer may overlap the chamber 200 disposed on the same layer in the first direction DR1. For example, when the first door 311 is closed, the first door 311 may overlap the first chamber 210 in the first direction DR1, when the second door 312 is closed, the second door 312 may overlap the second chamber 220 in the first direction DR1, when the third door 313 is closed, the third door 313 may overlap the third chamber 230 in the first direction DR1, and when the fourth door 314 is closed, the fourth door 314 may overlap the fourth chamber 240 in the first direction DR1.

[0138] In a state where the door 310 is opened, at least a portion of the door 310 disposed at each layer may be disposed at a side of the chamber 200 disposed at the adjacent layer. For example, in a state where the door 310 is opened, at least a portion of the door 310 disposed at each layer may be disposed at a side of the chamber 200 disposed at the upper layer. Although not shown in the drawings, in a state where the first door 311 is opened, at least a portion of the first door 311 may be disposed at a side of the second chamber 220 disposed at the second layer L2 in the first direction DR1. In a state where the second door 312 is opened, at least a portion of the second door 312 may be disposed at a side of the third chamber 230 disposed at the third layer L3 in the first direction DR1. In a state where the third door 313 is opened, at least a portion of the third door 313 may be disposed at a side of the fourth chamber 240 disposed at the fourth layer L4 in the first direction DR1.

[0139] When the door 310 is opened, at least a portion of the door 310 disposed on each layer can be disposed on an adjacent layer. For example, when the door 310 is opened, at least a portion of the door 310 disposed on each layer can be disposed on an upper layer. When the first door 311 is opened, at least a portion of the first door 311 can be disposed on the second layer L2, when the second door 312 is opened, at least a portion of the second door 312 can be disposed on the third layer L3, when the third door 313 is opened, at least a portion of the third door 313 can be disposed on the fourth layer L4, and when the fourth door 314 is opened, at least a portion of the fourth door 314 can be disposed on the fourth layer L4.

[0140] When the door 310 is opened, at least a portion of the door 310 disposed on each layer may overlap with the door 310 on the adjacent layer in the first direction DR1. For example, when the door 310 is opened, at least a portion of the door 310 disposed on each layer may overlap with the door 310 on the upper layer in the first direction DR1. When the first door 311 is opened, at least a portion of the first door 311 may overlap with the second door 312 in the first direction DR1, when the second door 312 is opened, at least a portion of the second door 312 may overlap with the third door 313 in the first direction DR1, and when the third door 313 is opened, at least a portion of the third door 313 may overlap with the fourth door 314 in the first direction DR1.

[0141] In one embodiment, the door driving unit 320 may include a first door driving unit 321, a second door driving unit 322, a third door driving unit 323, and a fourth door driving unit 324. The first door driving unit 321 may provide a driving force to the first door 311, the second door driving unit 322 may provide a driving force to the second door 312, the third door driving unit 323 may provide a driving force to the third door 313, and the fourth door driving unit 324 may provide a driving force to the fourth door 314.

[0142] The door driving unit 320 can move the door 310. For example, the first door driving unit 321 can move the first door 311 in the third direction DR3, the second door driving unit 322 can move the second door 312 in the third direction DR3, the third door driving unit 323 can move the third door 313 in the third direction DR3, and the fourth door driving unit 324 can move the fourth door 314 in the third direction DR3.

[0143] In some embodiments, the gate driving unit 320 may extend in the third direction DR3. For example, the first gate driving unit 321 may extend in the third direction DR3, the second gate driving unit 322 may extend in the third direction DR3, the third gate driving unit 323 may extend in the third direction DR3, and the fourth gate driving unit 324 may extend in the third direction DR3.

[0144] In some embodiments, the door driving unit 320 may be disposed between the door 310 and the chamber 200. For example, the first door driving unit 321 may be disposed between the first door 311 and the first chamber 210, the second door driving unit 322 may be disposed between the second door 312 and the second chamber 220, the third door driving unit 323 may be disposed between the third door 313 and the third chamber 230, and the fourth door driving unit 324 may be disposed between the fourth door 314 and the fourth chamber 240. In one embodiment, the first to fourth door driving units 321, 322, 323, 324 may be disposed in sequence in the first direction DR1.

[0145] In the substrate processing apparatus 10 according to the present embodiment, the first to fourth doors 311, 312, 313, and 314 may be configured to be shifted in one direction relative to each other. For example, the first door 311 may be configured to be shifted by a fourth distance D4 relative to the second door 312 in the opposite direction of the first direction DR1, the second door 312 may be configured to be shifted by a fifth distance D5 relative to the third door 313 in the opposite direction of the first direction DR1, and the third door 313 may be configured to be shifted by a sixth distance D6 relative to the fourth door 314 in the opposite direction of the first direction DR1. The first to third doors 311, 312, and 313 may not overlap each other in the third direction DR3.

[0146] The first to third chambers 210, 220, and 230 may be displaced relative to each other in one direction. For example, the first chamber 210 may be displaced relative to the second chamber 220 by a first distance D1 in the opposite direction of the first direction DR1, the second chamber 220 may be displaced relative to the third chamber 230 by a second distance D2 in the opposite direction of the first direction DR1, and the third chamber 230 may be displaced relative to the fourth chamber 240 by a third distance D3 in the opposite direction of the first direction DR1.

[0147] At least a portion of the first to third chambers 210, 220, 230 may not overlap with each other in the third direction DR3. For example, the first chamber 210 may not overlap with the second chamber 220 in the third direction DR3 by a first distance D1 shifted from the second chamber 220, the second chamber 220 may not overlap with the third chamber 230 in the third direction DR3 by a second distance D2 shifted from the third chamber 230, and the third chamber 230 may not overlap with the fourth chamber 240 in the third direction DR3 by a third distance D3 shifted from the fourth chamber 240.

[0148] The first chamber 210 may not overlap with the third chamber 230 in the third direction DR3 by a distance equal to the total of the first distance D1 and the second distance D2, and the first chamber 210 may not overlap with the fourth chamber 240 in the third direction DR3 by a distance equal to the total of the first distance D1, the second distance D2, and the third distance D3. The second chamber 220 may not overlap with the fourth chamber 240 in the third direction DR3 by a distance equal to the total of the second distance D2 and the third distance D3.

[0149] The first to third gate driving parts 321, 322, 323 may be arranged displaced from each other in one direction. For example, the first gate driving part 321 may be arranged displaced from the second gate driving part 322 in the first direction DR1, and the second gate driving part 322 may be arranged displaced from the third gate driving part 323 in the first direction DR1. The first to third gate driving parts 321, 322, 323 may not overlap with each other in the third direction DR3.

[0150] In the substrate processing apparatus 10 according to the present embodiment, the first to third doors 311, 312, 313 may not overlap each other in the third direction DR3, so as to have different moving paths. Thus, when any one of the first to third doors 311, 312, 313 is opened, collision with the remaining doors 310 or interference with the remaining doors 310 may be prevented.

[0151] In the substrate processing apparatus 10 according to the present embodiment, the moving paths of the first to third doors 311 , 312 , and 313 do not overlap with each other, so the space efficiency of the substrate processing apparatus 10 can be improved.

[0152] In the substrate processing device 10 of the present embodiment, the first to third doors 311, 312, 313 do not overlap each other in the third direction DR3, so the base layer L0 can be arranged only on the uppermost layer or the lowermost layer. That is, the base layer L0 may not be arranged between the first to third layers L1, L2, L3. As a result, the overall height of the substrate processing device 10 can be reduced. It can be less restricted by the indoor space for configuring the substrate processing device 10, and the number of layers of the substrate processing device 10 is increased. Therefore, the space efficiency of the substrate processing device 10 can be improved.

[0153] Figure 7 is a plan view showing a substrate processing apparatus according to still another embodiment. Figure 8 is a plan view illustrating an operating state of a substrate processing apparatus according to still another embodiment.

[0154] Reference Figure 7 as well as Figure 8 At the point where the chamber 200 is loaded in the second direction DR2, the substrate processing apparatus 10 according to the present embodiment is different from the reference Figure 1 The substrate processing apparatus 10 according to one embodiment described above is different.

[0155] More specifically, in the substrate processing apparatus 10 according to an embodiment, the stack frame 100 may include a plurality of columns arranged in the second direction DR2 .

[0156] In some embodiments, the stack frame 100 may include a base column C0 , a first column C1 , a second column C2 , and a third column C3 arranged in the second direction DR2 .

[0157] The base column C0 may be arranged at the leftmost or rightmost side of the stacking frame 100 in the second direction DR2. In one embodiment, as shown in the drawings, the base column C0 may be arranged at the rightmost side of the stacking frame 100 in the second direction DR2. In another embodiment, the base column C0 may be arranged at the leftmost side of the stacking frame 100 in the second direction DR2.

[0158] The first column C1 may be arranged at one side of the base column C0 in the second direction DR2. The second column C2 may be arranged at one side of the first column C1 in the second direction DR2. The third column C3 may be arranged at one side of the second column C2 in the second direction DR2.

[0159] In some embodiments, the stacking frame 100 may be omitted, in which case the plurality of chambers 200 may be directly stacked and / or loaded one on top of the other. For example, the first chamber 210 may be directly disposed on one side of the second chamber 220 in the second direction DR2, and the second chamber 220 may be directly disposed on one side of the third chamber 230 in the second direction DR2.

[0160] In one embodiment, the first to third chambers 210, 220, and 230 may be arranged in the second direction DR2. The second chamber 220 may be arranged at one side of the first chamber 210 in the second direction DR2, and the third chamber 230 may be arranged at one side of the second chamber 220 in the second direction DR2.

[0161] In some embodiments, the first to third chambers 210, 220, 230 may be respectively arranged in the first to third columns C1, C2, C3 of the stacking frame 100. For example, the first chamber 210 may be arranged in the first column C1, the second chamber 220 may be arranged in the second column C2, and the third chamber 230 may be arranged in the third column C3.

[0162] In one embodiment, the door 310 may be disposed at one side of the chamber 200 in the first direction DR1 .

[0163] When the door 310 is closed, the first to third doors 311, 312, 313 may be arranged in the first to third columns C1, C2, C3, respectively. For example, when the door 310 is closed, the first door 311 may be arranged in the first column C1, the second door 312 may be arranged in the second column C2, and the third door 313 may be arranged in the third column C3.

[0164] When the doors 310 are closed, the doors 310 arranged in each layer may be arranged at one side of the chambers 200 arranged in the same column in the first direction DR1. For example, when the first door 311 is closed, the first door 311 may be arranged at one side of the first chamber 210 in the first direction DR1, when the second door 312 is closed, the second door 312 may be arranged at one side of the second chamber 220 in the first direction DR1, and when the third door 313 is closed, the third door 313 may be arranged at one side of the third chamber 230 in the first direction DR1.

[0165] When the doors 310 are closed, the doors 310 arranged in each layer may overlap the chambers 200 arranged in the same column in the first direction DR1. For example, when the first door 311 is closed, the first door 311 may overlap the first chamber 210 in the first direction DR1, when the second door 312 is closed, the second door 312 may overlap the second chamber 220 in the first direction DR1, and when the third door 313 is closed, the third door 313 may overlap the third chamber 230 in the first direction DR1.

[0166] When the door 310 is opened, at least a portion of the door 310 arranged in each row may be arranged on one side of the chamber 200 arranged in the adjacent row in the first direction DR1. Figure 8 As shown, when the door 310 is opened, at least a portion of the door 310 arranged in each column may be arranged on one side of the chamber 200 arranged in the right column in the first direction DR1. When the second door 312 is opened, at least a portion of the second door 312 may be arranged on one side of the first chamber 210 arranged in the first column C1 in the first direction DR1. Although not shown in the drawings, when the third door 313 is opened, at least a portion of the third door 313 may be arranged on one side of the second chamber 220 arranged in the second column C2 in the first direction DR1.

[0167] In another embodiment, when the door 310 is opened, at least a portion of the door 310 arranged in each row may be arranged on one side of the chamber 200 arranged in the right row in the first direction DR1.

[0168] When the doors 310 are opened, at least a portion of the doors 310 arranged in each column may be arranged in an adjacent column. In one embodiment, when the doors 310 are opened, at least a portion of the doors 310 arranged in each column may be arranged in a right column. When the first door 311 is opened, at least a portion of the first door 311 may be arranged in a base column C0, when the second door 312 is opened, at least a portion of the second door 312 may be arranged in a first column C1, and when the third door 313 is opened, at least a portion of the third door 313 may be arranged in a second column C2.

[0169] In another embodiment, when the doors 310 are opened, at least a portion of the doors 310 arranged in each column may also be arranged in the left column.

[0170] When the doors 310 are opened, at least a portion of the doors 310 arranged in each column may overlap with the doors 310 in the adjacent column in the first direction DR1. For example, when the doors 310 are opened, at least a portion of the doors 310 arranged in each column may overlap with the doors 310 in the right column in the first direction DR1. When the second door 312 is opened, at least a portion of the second door 312 may overlap with the first door 311 in the first direction DR1, and when the third door 313 is opened, at least a portion of the third door 313 may overlap with the second door 312 in the first direction DR1.

[0171] In another embodiment, when the doors 310 are opened, at least a portion of the doors 310 arranged in each row may overlap with the doors 310 in the left row in the first direction DR1.

[0172] The door driver 320 may move the door 310. For example, the first door driver 321 may move the first door 311 in the second direction DR2, the second door driver 322 may move the second door 312 in the second direction DR2, and the third door driver 323 may move the third door 313 in the second direction DR2.

[0173] In some embodiments, the gate driving part 320 may extend in the second direction DR2. For example, the first gate driving part 321 may extend in the second direction DR2, the second gate driving part 322 may extend in the second direction DR2, and the third gate driving part 323 may extend in the second direction DR2.

[0174] In some embodiments, the door driving unit 320 may be disposed between the door 310 and the chamber 200. For example, the first door driving unit 321 may be disposed between the first door 311 and the first chamber 210, the second door driving unit 322 may be disposed between the second door 312 and the second chamber 220, and the third door driving unit 323 may be disposed between the third door 313 and the third chamber 230. In one embodiment, the first to third door driving units 321, 322, 323 may be disposed in sequence in the opposite direction of the first direction DR1.

[0175] In the substrate processing apparatus 10 according to the present embodiment, the first to third doors 311, 312, and 313 may be arranged to be shifted in one direction relative to each other. For example, the first door 311 may be arranged to be shifted in the first direction DR1 by a third distance D3 relative to the second door 312, and the second door 312 may be arranged to be shifted in the first direction DR1 by a fourth distance D4 relative to the third door 313. The first to third doors 311, 312, and 313 may not overlap each other in the second direction DR2.

[0176] For example, the first cavity 210 may be displaced from the second cavity 220 in the first direction DR1 by a first distance D1, and the second cavity 220 may be displaced from the third cavity 230 in the first direction DR1 by a second distance D2.

[0177] At least a portion of the first to third chambers 210, 220, and 230 may not overlap with each other in the second direction DR2. For example, the first chamber 210 may not overlap with the second chamber 220 in the second direction DR2 by a first distance D1 shifted from the second chamber 220, and the second chamber 220 may not overlap with the third chamber 230 in the second direction DR2 by a second distance D2 shifted from the third chamber 230. The first chamber 210 may not overlap with the third chamber 230 in the second direction DR2 by a total distance of the first distance D1 and the second distance D2.

[0178] The first to third gate driving parts 321, 322, 323 may be arranged displaced from each other in one direction. For example, the first gate driving part 321 may be arranged displaced from the second gate driving part 322 in the first direction DR1, and the second gate driving part 322 may be arranged displaced from the third gate driving part 323 in the first direction DR1. The first to third gate driving parts 321, 322, 323 may not overlap with each other in the second direction DR2.

[0179] In the substrate processing apparatus 10 according to the present embodiment, the first to third doors 311, 312, 313 may not overlap each other in the second direction DR2, so as to have different moving paths. Thus, when any one of the first to third doors 311, 312, 313 is opened, collision with the remaining doors 310 or interference with the remaining doors 310 may be prevented.

[0180] In the substrate processing apparatus 10 according to the present embodiment, the moving paths of the first to third doors 311 , 312 , and 313 do not overlap with each other, so the space efficiency of the substrate processing apparatus 10 can be improved.

[0181] In the substrate processing device 10 of the present embodiment, the first to third doors 311, 312, 313 may not overlap with each other in the second direction DR2, so the base column C0 is only arranged in the leftmost column or the rightmost column. That is, the base column C0 may not be arranged between the first to third columns C1, C2, C3. As a result, the overall horizontal length of the substrate processing device 10 can be reduced. It can be less restricted by the indoor space used to configure the substrate processing device 10, and the number of columns of the substrate processing device 10 is increased. Therefore, the space efficiency of the substrate processing device 10 can be improved.

[0182] Fig. 9is a plan view showing a display device according to an embodiment.

[0183] Reference Fig. 9 The display device DD may refer to all electronic devices that provide display images. The display device DD may display dynamic images or still images. For example, televisions, notebooks, monitors, billboards, Internet of Things, mobile phones, smart phones, tablet PCs (Personal Computers), electronic watches, smart watches, watch phones, head-mounted displays, mobile communication terminals, electronic manuals, electronic books, PMPs (Portable Multimedia Players), navigators, game consoles, digital cameras, and video cameras that provide display images may be included in the display device DD.

[0184] In one embodiment, the display device DD may be formed in a rectangular shape on a plane. The display device DD may include two long sides extending in a first direction DR1 and two short sides extending in a second direction DR2 intersecting the first direction DR1. The corners where the long sides and the short sides of the display device DD intersect may be right angles, but are not limited thereto, and may also be formed as a curved surface. In another embodiment, the long sides may extend in the second direction DR2, and the short sides may extend in the first direction DR1. The planar shape of the display device DD is not limited to the example, and may also be circular or other different shapes.

[0185] The display device DD may include a display panel for providing a display screen. Examples of display panels include inorganic light emitting diode display panels, organic light emitting display panels, quantum dot light emitting display panels, plasma display panels, and electric field emission display panels. Below, as an example of a display panel, an organic light emitting diode display panel is used, but it is not limited thereto. If the same technical concept can be applied, it can also be applied to other display panels.

[0186] The display device DD may include a display area DA and a non-display area NDA arranged around the display area DA. The display area DA is an area where a picture is displayed, and the non-display area NDA is an area where a picture is not displayed. The display area DA may also be referred to as an active area, and the non-display area NDA may also be referred to as a non-active area. The display area DA may generally occupy the center of the display device DD, and the non-display area NDA may be arranged around the display area DA.

[0187] The display area DA may include a plurality of pixels PX. The plurality of pixels PX may be arranged in rows and columns. The shape of each pixel PX may be a rectangle or a square on a plane, but is not limited thereto, and may also be a rhombus shape with each side inclined relative to a direction.

[0188] As described above, a non-display area NDA may be configured around the display area DA. The non-display area NDA may surround the display area DA in whole or in part. The display area DA may be in a rectangular shape, and the non-display area NDA may be configured to be adjacent to the four sides of the display area DA. The non-display area NDA may constitute a frame of the display device DD. A wiring or circuit driving unit included in the display device DD may be configured in each non-display area NDA, or an external device may be mounted.

[0189] Fig.10 It is along Fig. 9 A cross-sectional view taken along line X1-X1'.

[0190] Reference Fig.10 The display device DD may include a display substrate 1 , a color conversion substrate 2 opposite to the display substrate 1 , a sealing portion 4 combining the display substrate 1 and the color conversion substrate 2 , and a filling material 3 filled between the display substrate 1 and the color conversion substrate 2 .

[0191] The display substrate 1 may include elements and circuits for displaying images, such as pixel circuits such as switching elements, pixel defining films defining light-emitting areas and non-light-emitting areas, and self-light emitting elements. In one embodiment, the self-light emitting element may include at least one of an organic light-emitting element, a quantum dot light-emitting element, an inorganic-based micro-light-emitting diode (e.g., Micro LED), and an inorganic-based nano-light-emitting diode (e.g., nano LED).

[0192] The color conversion substrate 2 may be located on and opposite to the display substrate 1. In one embodiment, the color conversion substrate 2 may include a color changing pattern that changes the color of incident light. In one embodiment, the color changing pattern may include at least one of a color filter and a wavelength conversion pattern.

[0193] The sealant 4 may be located between the display substrate 1 and the color conversion substrate 2 in the non-display area NDA. The sealant 4 may be arranged along the edges of the display substrate 1 and the color conversion substrate 2 in the non-display area NDA to surround the display area DA on a plane. The display substrate 1 and the color conversion substrate 2 may be bonded to each other via the sealant 4.

[0194] The filling material 3 may be located in the space between the display substrate 1 and the color conversion substrate 2 surrounded by the sealing portion 4. The filling material 3 may fill the space between the display substrate 1 and the color conversion substrate 2. The filling material 3 may be formed of a light-transmissive material. In some embodiments, the filling material 3 may also be omitted.

[0195] Fig.11 Is magnification Fig.10 A magnified image of area A.

[0196] Reference Fig.11 The display device DD may include a display substrate 1 , a color conversion substrate 2 opposite thereto, and a filling material 3 filled between the display substrate 1 and the color conversion substrate 2 .

[0197] The display substrate 1 may include a first base substrate SUB1 , a circuit layer CCL, a pixel defining layer PDL, a light emitting element EMD, and a thin film encapsulation layer TFEL.

[0198] The first base substrate SUB1 may include a transparent material. For example, the first base substrate SUB1 may include a transparent insulating material such as glass or quartz. The first base substrate SUB1 may be a rigid substrate. However, the first base substrate SUB1 is not limited thereto, and may include a plastic such as polyimide, or may have a flexible property that can be bent, curved, folded, or rolled.

[0199] The circuit layer CCL may be disposed on the first base substrate SUB1. The circuit layer CCL may include transistors driving the light emitting element EMD and various circuit wirings. The circuit layer CCL may be disposed between the first base substrate SUB1 and the light emitting element EMD.

[0200] The pixel defining film PDL may be disposed on the pixel electrode PXE along the boundary of the pixel PX. The pixel defining film PDL may include an opening portion exposing at least a portion of the pixel electrode PXE. The light emitting area and the non-light emitting area may be distinguished by the pixel defining film PDL and its opening portion.

[0201] The pixel definition layer PDL may include an organic insulating material such as acrylic resin, epoxy resin, phenolic resin, polyamide resin, polyimide resin, unsaturated polyester resin, polyphenyleneether resin, polyphenylene sulfide resin, or benzocyclobutene (BCB). The pixel definition layer PDL may also include an inorganic material.

[0202] The light emitting element EMD can be arranged on the circuit layer CCL. Fig.11 Although one pixel PX is exemplified to illustrate one light emitting element EMD, the display substrate 1 may include a plurality of light emitting elements EMD arranged in accordance with each pixel PX.

[0203] The light emitting element EMD may include a pixel electrode PXE, a light emitting layer EML and a common electrode CME.

[0204] The pixel electrode PXE may be disposed on the circuit layer CCL of the display substrate 1. The pixel electrode PXE may be a first electrode of the light emitting element EMD, such as an anode electrode. The pixel electrode PXE may include indium-tin-oxide (ITO), indium-zinc-oxide (IZO), zinc oxide (ZnO), indium oxide (IndiumOxide: In 2 O 3 ) and a reflective material layer such as silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), lead (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca) or a mixture thereof. The material layer with a high work function can be configured on the upper layer than the reflective material layer and configured to be close to the light-emitting layer EML. The pixel electrode PXE can have a multilayer structure of ITO / Mg, ITO / MgF, ITO / Ag, ITO / Ag / ITO, but is not limited thereto.

[0205] The light-emitting layer EML may be disposed on the pixel electrode PXE exposing the pixel definition film PDL. In one embodiment where the display device DD is an organic light-emitting display device, the light-emitting layer EML may include an organic layer containing an organic substance. The organic layer includes an organic light-emitting layer, and depending on the circumstances, the auxiliary layer as an auxiliary light-emitting layer may also include at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. In another embodiment, when the display device DD is a micro-LED display device, a nano-LED display device, etc., the light-emitting layer EML may include an inorganic substance such as an inorganic semiconductor.

[0206] In one embodiment, the wavelength of light emitted by each light emitting layer EML may be the same for each pixel PX. For example, the light emitting layer EML of each pixel PX emits blue light or ultraviolet light, and the color conversion substrate 2 described later may include a wavelength conversion layer WCL, so as to display colors according to each pixel PX. In another embodiment, the wavelength of light emitted by each light emitting layer EML may be different from each other for each pixel PX.

[0207] The common electrode CME may be disposed on the light-emitting layer EML. The common electrode CME may be connected regardless of each pixel PX. The common electrode CME may be a full-surface electrode that is fully configured regardless of the pixel PX. The common electrode CME may be a second electrode of the light-emitting element EMD, such as a cathode electrode. The common electrode CME may include a material layer with a small work function such as Li, Ca, LiF / Ca, LiF / Al, Al, Mg, Ag, Pt, Pd, Ni, Au, Nd, Ir, Cr, BaF, Ba, or a compound or mixture thereof (for example, a mixture of Ag and Mg, etc.). The common electrode CME may also include a transparent metal oxide layer disposed on the material layer with a small work function.

[0208] The thin film encapsulation layer TFEL may be disposed on the common electrode CME. The thin film encapsulation layer TFEL may include a first inorganic film TFE1, an organic film TFE2, and a second inorganic film TFE3.

[0209] The first inorganic film TFE1 may be disposed on the light emitting element EMD. The first inorganic film TFE1 may include silicon nitride (SiN x ), silicon oxide (SiO x ) or silicon oxynitride (SiO x N y )wait.

[0210] The organic film TFE2 may be disposed on the first inorganic film TFE1. The organic film TFE2 may include organic insulating materials such as polyacrylates resin, epoxy resin, phenolic resin, polyamides resin, polyimides resin, unsaturated polyesters resin, poly phenylenethers resin, polyphenylene sulfides resin, or benzocyclobutene (BCB).

[0211] The second inorganic film TFE3 may be disposed on the organic film TFE2. The second inorganic film TFE3 may include the same material as the aforementioned first inorganic film TFE1. For example, the second inorganic film TFE3 may include silicon nitride (SiN x ), silicon oxide (SiO x ) or silicon oxynitride (SiO x N y )wait.

[0212] The color conversion substrate 2 may be disposed above the thin film encapsulation layer TFEL and opposite to the display substrate 1. Specifically, the color conversion substrate 2 may be disposed opposite to the display substrate 1 with the filling material 3 interposed therebetween.

[0213] The color conversion substrate 2 may include a second base substrate SUB2 , a light blocking member BML, a color filter layer CFL, a first capping layer CAP1 , a partition wall PTL, a wavelength conversion layer WCL, and a second capping layer CAP2 .

[0214] The second base substrate SUB2 may include a transparent material. For example, the second base substrate SUB2 may include a transparent insulating material such as glass or quartz. The second base substrate SUB2 may be a rigid substrate. However, the second base substrate SUB2 is not limited thereto, and may include a plastic such as polyimide, or may have a flexible property that can be bent, curved, folded, or rolled.

[0215] The second base substrate SUB2 may also use the same substrate as the first base substrate SUB1, but the material, thickness, transmittance, etc. may be different. For example, the second base substrate SUB2 may have a higher transmittance than the first base substrate SUB1. The second base substrate SUB2 may be thicker or thinner than the first base substrate SUB1.

[0216] The light shielding member BML may be arranged along the boundary of the pixel PX on one surface of the second base substrate SUB2 facing the first base substrate SUB1. The light shielding member BML may overlap with the pixel defining film PDL of the display substrate 1. The light shielding member BML includes an opening portion that exposes one surface of the second base substrate SUB2, which may be formed in a lattice shape in a plan view, although not shown.

[0217] The light blocking member BML may include an organic substance to form the light blocking member BML. The light blocking member BML may reduce color distortion caused by external light reflection by absorbing external light. Alternatively, the light blocking member BML may play a role in preventing light emitted from the light emitting layer EML from intruding into adjacent pixels PX.

[0218] The color filter layer CFL may be disposed on one surface of the second base substrate SUB2 disposed with the light blocking member BML. The color filter layer CFL may be disposed on one surface of the second base substrate SUB2 exposed by the opening portion of the light blocking member BML.

[0219] The color filter layer CFL may include a colorant such as a dye or pigment that absorbs wavelengths other than the corresponding color wavelength. The color filter layer CFL may include colorants of different colors for each pixel PX. For example, the color filter layer CFL may include a red colorant, a green colorant, and a blue colorant.

[0220] The first capping layer CAP1 may be disposed on the color filter layer CFL. The first capping layer CAP1 may prevent impurities such as moisture or air from penetrating. Alternatively, the first capping layer CAP1 may prevent the color material of the color filter layer CFL from diffusing into other structures.

[0221] The next-wall PTL may be disposed on the first capping layer CAP1. The next-wall PTL may be configured to overlap with the light shielding member BML. The next-wall PTL may include an opening exposing a region where the color filter layer CFL is disposed. The next-wall PTL may include a photosensitive organic material to form, but is not limited thereto. The next-wall PTL may also include a light shielding material.

[0222] The wavelength conversion layer WCL may be disposed in the space of the opening portion exposing the partition wall PTL. The wavelength conversion layer WCL may convert the wavelength of light incident from the light emitting layer EML. The wavelength conversion layer WCL may include a base resin BRS, a scatterer SCP disposed in the base resin BRS, and a wavelength conversion material WCP.

[0223] The matrix resin BRS may include a light-transmitting organic substance, for example, the matrix resin BRS may include epoxy resin, acrylic resin, cardo resin or imide resin.

[0224] The wavelength conversion material WCP may be a material that converts color. The wavelength conversion material WCP may be a quantum dot, a quantum rod, a phosphor, etc. The quantum dot may include a group IV nanocrystal, a group II-VI compound nanocrystal, a group III-V compound nanocrystal, a group IV-VI nanocrystal, or a combination thereof.

[0225] In another embodiment, the wavelength conversion layer WCL may not include the wavelength conversion material WCP. When the wavelength conversion layer WCL does not include the wavelength conversion material WCP, it may function as a light-transmitting layer.

[0226] The scatterer SCP may be metal oxide particles or organic particles. Examples of the metal oxide include titanium oxide (TiO 2 ), zirconium oxide (ZrO 2 ), aluminum oxide (Al 2 O 3 ), indium oxide (In 2 O 3 ), zinc oxide (ZnO) or tin oxide (SnO 2 ) etc., examples of the organic particle material include acrylic resins or urethane resins.

[0227] The second capping layer CAP2 may be disposed on the wavelength conversion layer WCL and the next door PTL. The second capping layer CAP2 may be disposed on the entire surface of the color conversion substrate 2. The second capping layer CAP2 may prevent the penetration of impurities such as moisture or air. The second capping layer CAP2 may be formed of an inorganic substance. The second capping layer CAP2 may be formed by a substance selected from the substances listed as the substances of the first capping layer CAP1. The second capping layer CAP2 and the first capping layer CAP1 may be formed of the same substance, but are not limited thereto.

[0228] The filling material 3 may be disposed between the display substrate 1 and the color conversion substrate 2. The filling material 3 may fill the space between the display substrate 1 and the color conversion substrate, and may play a role in combining them. The filling material 3 may be disposed between the thin film encapsulation layer TFEL of the display substrate 1 and the second capping layer CAP2 of the color conversion substrate 2. The filling material 3 may be formed of Si-based organic substances, epoxy-based organic substances, etc., but is not limited thereto.

[0229] Unprocessed substrates for manufacturing the display device DD, substrates being processed during the manufacturing of the display device DD, and finished substrates (for example, the display device DD body) after the manufacturing of the display device DD is completed can be stored and kept in the Figures 1 to 8 The substrate processing apparatus 10 of the aforementioned embodiment (see Figure 1 ) of the chamber 200 (refer to Figure 1)internal.

[0230] Although the embodiments of the present invention are described above with reference to the attached drawings, a person with common knowledge in the technical field to which the present invention belongs will understand that the present invention can be implemented in other specific forms without changing its technical concept or essential features. Therefore, the embodiments described above should be understood as exemplary in all aspects only, not restrictive.

Claims

1. A substrate processing device, characterized in that: include: First chamber; A second chamber, arranged at one side of the first chamber in a first direction; a first door disposed on one side of the first chamber in a second direction different from the first direction; as well as a second door, arranged at one side of the second chamber in the second direction, The first door is arranged to be displaced relative to the second door in the second direction.

2. The substrate processing device according to claim 1, characterized in that: The one side of the first chamber where the first door is disposed and the one side of the second chamber where the second door is disposed are located in the same direction in the second direction.

3. The substrate processing device according to claim 1, characterized in that: The first door and the second door do not overlap in the first direction.

4. The substrate processing device according to claim 1, characterized in that: At least a portion of the first door overlaps with the second door in the second direction in an open state.

5. The substrate processing apparatus according to claim 1, wherein: The substrate processing apparatus further includes a first door driving unit and a second door driving unit, which respectively provide driving force to the first door and the second door.

6. The substrate processing apparatus according to claim 1, wherein: The substrate processing device further includes: a stacking frame for accommodating the first chamber and the second chamber, The stacking frame comprises: The first region is configured with the first chamber; A second region, configured with the second chamber; and The third area is arranged on one side of the second area, The first region to the third region are arranged in the first direction.

7. The substrate processing apparatus according to claim 1, wherein: The substrate processing device further includes: a substrate transfer device, which is arranged on one side of the first chamber and the second chamber in the second direction, The substrate transfer device comprises: a substrate transfer unit configured to expand and contract in the second direction; and The arm driving unit is configured to move the substrate transfer unit in the first direction.

8. A substrate processing device, characterized in that: include: First chamber; A second chamber, disposed on the first chamber; a first door, disposed on one side of the first chamber; as well as a second door, disposed on one side of the second chamber, In the arrangement direction of the first chamber and the second chamber, the first door and the second door do not overlap.

9. The substrate processing device according to claim 8, characterized in that: The one side of the first chamber where the first door is disposed and the one side of the second chamber where the second door is disposed are located on the same side in the same direction.

10. The substrate processing apparatus according to claim 8, wherein: The first door does not overlap with the second door.

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