Cleaning device

Abstract

The utility model provides a cleaning device, which is used for cleaning a filter element, and comprises a cleaning cavity, a first filter element and a second filter element, a partition plate is arranged in the cleaning cavity, and the partition plate divides the cleaning cavity into a first chamber and a second chamber which are not communicated with each other; the air blowing device is positioned in the first chamber; the oscillator is positioned in the first chamber; the air blowing device is located in the second cavity, penetrates through the partition plate to be connected with the oscillator and is communicated with an air outlet of the air blowing device so that pressure air generated by the air blowing device can be blown out through an air blowing opening of the air blowing device. According to the cleaning device, the air blowing device is used for guiding out pressure air and blowing the pressure air to the filter element, meanwhile, mechanical vibration generated by the oscillator is conducted to the filter element through the air blowing device, effective and thorough cleaning of the filter element is achieved in the mode that air blowing cleaning and vibration cleaning are combined, and the filter element can be repeatedly used.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a cleaning device. Background Art

[0002] The filter device in the semiconductor wastewater treatment system uses a filter element to perform preliminary filtration of the water. The filter element will become clogged after being used for a period of time, and a new filter element needs to be replaced. Due to the large replacement volume, the cost is high. If the clogged filter element is cleaned and reused, costs can be saved.

[0003] Since the water required for semiconductor manufacturing is ultrapure water, the cleaning requirements for the filter element are also relatively high. General cleaning equipment cannot thoroughly clean the clogged filter element, and therefore cannot meet the requirements for reuse. Utility Model Content

[0004] The purpose of the present application is to provide a cleaning device for thoroughly cleaning a filter element.

[0005] An embodiment of the present application provides a cleaning device for cleaning a filter element, comprising: a cleaning chamber, wherein a partition is provided in the cleaning chamber, wherein the partition divides the cleaning chamber into a first chamber and a second chamber that are not connected to each other; an air blowing device, wherein the air blowing device is located in the first chamber; an oscillator, wherein the oscillator is located in the first chamber; an air blowing device, wherein the air blowing device is located in the second chamber and is connected to the oscillator through the partition, and is communicated with an air outlet of the air blowing device so that the pressurized gas generated by the air blowing device is blown out through the air outlet of the air blowing device, and at least one filter element is connected to the air blowing device and faces the air blowing direction of the air outlet.

[0006] In some embodiments, the air blowing device includes a connecting part, a base and at least one air blowing rod, the connecting part penetrates the partition and is connected to the oscillator; the base is arranged on the surface of the partition and is vertically connected to the connecting part, the base has a cavity, the extension direction of the cavity is parallel to the surface of the partition, and is connected to the air outlet of the air blowing device; the air blowing rod includes a cavity hole arranged along the length direction of the air blowing rod and at least one first through hole penetrating the rod wall of the air blowing rod, at least one air blowing rod is respectively connected to the base and the cavity holes are respectively connected to the cavity, the filter element is connected to the outside of the air blowing rod and faces the air blowing direction of the first through hole.

[0007] In some embodiments, the base has a second through hole communicating with the cavity, and one end of the air blowing rod is inserted into the second through hole and sealedly connected to the base.

[0008] In some embodiments, the cleaning device also includes a first connecting tube, which passes through the partition and is sealed to the partition. The base has a third through hole that is connected to the cavity. One end of the first connecting tube is connected to the air outlet of the air blowing device, and the other end is inserted into the third through hole to connect the air outlet of the air blowing device to the cavity.

[0009] In some embodiments, the second through hole and the third through hole are respectively located on two opposite sides of the base.

[0010] In some embodiments, there are a plurality of the first through holes, and the plurality of the first through holes are arranged at intervals along the axial direction and / or circumferential direction of the air blowing rod.

[0011] In some embodiments, an ultrasonic generator is further included, wherein the ultrasonic generator is disposed in the first chamber and connected to the partition.

[0012] In some embodiments, a sterilization device is further included, wherein the sterilization device is connected to the top of the second chamber.

[0013] In some embodiments, the sterilization device includes at least one ultraviolet lamp connected to the top of the second chamber.

[0014] In some embodiments, a sealing cover is provided on the top of the second chamber, the sealing cover is sealingly connected to the side wall of the second chamber, and the ultraviolet lamp is connected to the bottom wall of the sealing cover.

[0015] In some embodiments, the sealing cover is provided with an exhaust port, and the exhaust port is connected to the atmosphere.

[0016] In some embodiments, a drain port is provided at the bottom of the side wall of the second chamber, and the drain port is connected to a waste liquid treatment system:

[0017] The beneficial effects of the cleaning device provided in the embodiments of the present application include but are not limited to the following:

[0018] 1. An air blowing device is used to guide the pressurized gas generated by the air blowing device and blow it toward the filter element connected to the air blowing device, thereby blowing out the pollutants in the filter element and drying the filter element. The mechanical vibration generated by the oscillator is transmitted to the filter element through the air blowing device, and the pollutants in the filter element are removed by vibration. Therefore, the cleaning device of the present application effectively removes the pollutants in the filter element by combining air blowing cleaning with vibration cleaning, thereby achieving thorough cleaning of the filter element and allowing the filter element to meet the cleanliness requirements for reuse.

[0019] 2. By setting up multiple air blowing rods, multiple filter elements can be cleaned at the same time, which improves the cleaning efficiency.

[0020] 3. By setting up an ultrasonic generator, ultrasonic waves are used to deeply clean the filter element, thereby further improving the cleaning effect of the filter element by using a composite cleaning method of air blowing, vibration and ultrasonic waves.

[0021] 4. By setting up a sterilization device, the filter element can be thoroughly cleaned and sterilized at the same time, ensuring the purity of the fluid used in the semiconductor manufacturing process, thereby improving the production quality of semiconductor products. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0023] in:

[0024] Figure 1 It is a schematic diagram of the structure of a cleaning device according to some embodiments of the present application;

[0025] Figure 2 Schematic diagram of the air blowing channel structure of the cleaning device according to some embodiments of the present application;

[0026] Figure 3 A schematic diagram of the air blowing rod structure of a cleaning device according to some embodiments of the present application;

[0027] Figure 4 It is a structural schematic diagram of the change in the angle of the axis line of the first through hole of the air blowing rod of the cleaning device according to some embodiments of the present application;

[0028] Figure 5 This is a structural schematic diagram of the connection between the first connecting pipe and the connecting part of the cleaning device according to some embodiments of the present application. DETAILED DESCRIPTION

[0029] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0030] An embodiment of the present application provides a cleaning device, comprising: a cleaning chamber, wherein a partition is provided in the cleaning chamber, wherein the partition divides the cleaning chamber into a first chamber and a second chamber that are not connected to each other; an air blowing device, wherein the air blowing device is located in the first chamber; an oscillator, wherein the oscillator is located in the first chamber; an air blowing device, wherein the air blowing device is located in the second chamber and is connected to the oscillator through the partition, and is communicated with an air outlet of the air blowing device so that the pressurized gas generated by the air blowing device is blown out through the air outlet of the air blowing device, and at least one filter element is connected to the air blowing device and faces the air blowing direction of the air outlet.

[0031] The cleaning device provided in the embodiment of the present application utilizes an air blowing device to guide the pressurized gas generated by the air blowing device to the second chamber and blows the air flow toward the filter element connected to the air blowing device, thereby blowing out the contaminants in the filter element and drying the filter element. At the same time, the mechanical vibration generated by the oscillator is transmitted to the filter element through the air blowing device, and the contaminants on the filter element are removed by vibration. Therefore, the cleaning device improves the cleaning quality of the filter element by combining air blowing with mechanical vibration, so that the filter element meets the cleanliness requirements for reuse.

[0032] The automatic cleaning device provided in the present application will be described in detail below in conjunction with the embodiments and drawings.

[0033] Figure 1 It is a schematic diagram of the structure of a cleaning device according to some embodiments of the present application.

[0034] like Figure 1 As shown, the cleaning device 1 includes a cleaning chamber 11, in which a partition 12 is provided. The partition 12 divides the cleaning chamber 11 into a first chamber 11a and a second chamber 11b which are not connected to each other. The first chamber 11a is provided with an air blowing device 13 and an oscillator 14, which are used to provide pressure gas and a mechanical vibration source, respectively. The second chamber 11b can be used to hold the cleaning liquid, and is provided with an air blowing device 15, which passes through the partition 12 and is connected to the oscillator 14, and is also connected to the air outlet of the air blowing device 13. At least one filter element 2 is connected to the air blowing device 15, and the filter element 2 faces the air blowing direction of the air blowing port of the air blowing device 15. Therefore, the air blowing device 15 can transmit the mechanical vibration generated by the oscillator 14 to the filter element 2, and use the pressure gas generated by the air blowing device 13 to blow and clean the filter element 2, and remove the pollutants on the filter element 2 by using a cleaning method of mechanical vibration and air blowing.

[0035] The size of the cleaning chamber 11 can be designed according to the number of filter elements 2 that need to be cleaned at one time. The material of the cleaning chamber 11 is not limited, and hard alloy, stainless steel, etc. can be used, which have good heat resistance and corrosion resistance, and have strong ultrasonic and mechanical vibration conductivity. The cleaning liquid used to clean the filter element 2 can be determined according to the type of pollutants. For example, deionized water can be used to clean inorganic impurities in the filter element 2, and acid-base solutions can be used to remove organic pollutants, grease, oxides, etc. in the filter element 2, and organic solvents can be used to remove organic pollutants, grease, colloids, etc. in the filter element 2.

[0036] In some embodiments, a sealing cover 111 is provided on the top of the second chamber 11b, and the sealing cover 111 is sealed and connected to the side wall of the second chamber 11b. For example, a sealing ring is provided between the sealing cover 111 and the side wall of the second chamber 11b to prevent the cleaning liquid from volatilizing to the outside of the cleaning chamber 11 and causing external air pollution. An exhaust port 111a connected to the atmosphere can be provided on the sealing cover 111 to prevent the gas pressure in the second chamber 11b from being too high during the air blowing process and causing damage to the cleaning equipment. A liquid inlet (not shown in the figure) can be provided on the sealing cover 111 or the side wall of the second chamber 11b to facilitate the injection of cleaning liquid into the second chamber 11b through the liquid inlet. A liquid discharge port 11b-1 can also be provided at the bottom of the side wall of the second chamber 11b to discharge the waste liquid after cleaning through the liquid discharge port 11b-1. The liquid discharge port 11b-1 can be connected to a waste liquid collection tank or a waste liquid treatment system through a discharge pipeline. A stop valve 11b-2 may be provided on the discharge pipeline to control the on-off of the waste liquid discharge channel.

[0037] A sealed connection is required between the periphery of the partition 12 and the inner wall of the cleaning chamber 11 to prevent leakage of the cleaning liquid. For example, a seal can be provided at the connection between the periphery of the partition 12 and the cleaning chamber 11, or the periphery of the partition 12 and the cleaning chamber 11 can be fixedly connected together by gluing or welding. The fixed connection method of gluing or welding can improve the sealing reliability between the partition 12 and the inner wall of the cleaning chamber 11, and reduce the maintenance workload caused by the failure of the seal. At this time, an inspection window can be opened on the side wall of the first chamber 11a to facilitate the inspection and maintenance of the equipment in the first chamber 11a. A through hole for the air blowing device 15 to pass through is provided on the partition 12, and a seal is provided between the inner wall of the through hole and the air blowing device 15 to ensure that the first chamber 11a and the second chamber 11b are not connected.

[0038] The oscillator 14 can generate high-frequency vibrations through a motor or a pneumatic vibration system, and transmit them to the filter element 2 through the air blowing device 15, and use the friction and flushing effect between the cleaning liquid and the surface of the filter element 2 to quickly shake off the dirt, impurities, etc. in the filter element 2, so as to achieve the effect of efficient and rapid cleaning. In some embodiments, the filter element 2 can be soaked in the cleaning liquid for a period of time in advance to decompose the pollutants, so that the binding force between the pollutants and the surface of the filter element 2 becomes weak or directly falls off, and then vibrate and clean, so as to shorten the cleaning time and improve the cleaning quality.

[0039] The air blowing device 13 can be a blower, a ventilator, an air booster, etc. In order to meet different air supply requirements, the air blowing device 13 can be of adjustable power. The air blowing device 13 can also be arranged outside the cleaning chamber 11. Arranging the air blowing device 13 in the second chamber 11b can reduce the volume and occupied space of the entire cleaning device 1, shorten the length of the connecting pipeline, and reduce the sealing structure design of the connecting pipeline and the external components.

[0040] The air blowing device 15 is provided with an air blowing channel inside, the air inlet of the air blowing channel is connected with the air outlet of the air blowing device 13, and the air outlet faces the filter element 2. As an exemplary illustration, Figure 1 and Figure 2 As shown, the air blowing device 15 may include a connection portion 151, a base 152 and at least one air blowing rod 153, the connection portion 151 penetrates the partition 12 and is fixedly connected to the oscillator 14, the base 152 is arranged on the surface of the partition and vertically connected to the connection portion 152, and at least one air blowing rod 153 is vertically connected to the upper surface of the base 152. Therefore, the connection portion 151 can transmit the mechanical vibration generated by the oscillator 4 to the base 152, and then to the air blowing rod 153 connected to the base 152 and the filter element 2 connected to the air blowing rod 153, so as to remove the pollutants in the filter element 2 through vibration.

[0041] Specifically, the connection part 151 can be in the form of a column, such as a cylinder, a square column, etc. The connection part 151 can be made of metal material, such as stainless steel, cemented carbide, and has high mechanical strength and excellent vibration conduction performance. The connection part 151 and the base 152 can be detachably connected or non-detachably connected. The detachable connection can be threaded or riveted, and the non-detachable connection can be welded. The connection part 151 can also be designed as an integral part with the base 152. Welding or integral forming can improve the connection strength between the connection part 151 and the base 152, and avoid loosening or disengagement of the connection part during vibration. At the same time, the integral design can also simplify the installation process. The connection method between the connection part 151 and the oscillator 14 is not limited. For ease of installation, a connection seat (not shown in the figure) can be set at the bottom of the connection part 151, and the connection seat and the oscillator 14 are fixedly connected by a threaded part or a clamping part.

[0042] The specific routing of the air blowing channel in the air blowing device 15 is not limited, and is used as an example. Figure 2 As shown, a cavity 152a can be set in the base 152, and the extension direction of the cavity 152a is parallel to the surface of the partition 12. At least one air blowing rod 153 is connected to the top wall of the base 152, and the extension direction of the cavity 152a is related to the arrangement direction of the air blowing rods 153, and covers the area where the air blowing rods 153 are located to ensure the smooth flow of the air blowing channel. A second through hole 152b is set on the top wall of the base 152 corresponding to the position of each air blowing rod 153, and the second through holes 152b are respectively connected to the cavity 152a. A third through hole 152c that is connected to the cavity 152a is opened on the bottom wall or side wall of the base 152, and the third through hole 152c is connected to the air outlet of the inflation device 13. As shown Figure 3 As shown, the air blowing rod 153 is a hollow structure, and a cavity 153a is provided inside the hollow structure along the length direction of the air blowing rod 153. One end of the air blowing rod 153 is inserted into the second through hole 152b and sealedly connected with the base 152, and the cavity 153a is connected with the cavity 152a in the base 152. The rod wall of the air blowing rod 153 is provided with at least one first through hole 153b that penetrates the rod wall. The filter element 2 is installed on the outer wall of the air blowing rod 153 and faces the air blowing direction of the first through hole 153b. Therefore, the pressure gas generated by the air blowing device 13 enters from the third through hole 152c, enters the air blowing rod 153 through the cavity 152a, and finally blows to the filter element 2 from the first through hole 153b.

[0043] The third through hole 152c is not limited in its location. In some embodiments, the second through hole 152b and the third through hole 152c are located on opposite sides of the base. Figure 2 Taking the structure in as an example, the second through hole 152a and the third through hole 152c are respectively located on the top wall and the bottom wall of the base 152. This arrangement can form a relatively short and straight flow channel in the base 152, so that the pressurized gas generated by the blowing device 13 can pass through the base 152 more smoothly, reduce the loss of gas pressure along the way, and improve the air blowing efficiency.

[0044] The length of the air blowing rod 153 can be designed according to the size of the filter element 2. Multiple filter elements 2 can be connected to one air blowing rod 153 to achieve simultaneous cleaning of multiple filter elements 2. Multiple air blowing rods 153 can also be set according to the cleaning space of the second chamber 11b to further improve the cleaning efficiency. Multiple air blowing rods 153 can be evenly spaced and arranged on the top surface of the base 152 to effectively utilize the cleaning space in the second chamber 11b.

[0045] like Figure 4As shown, the filter element can be an annular structure, and the inner annular surface of the filter element 2 is provided with filter holes. At this time, the filter element 2 can be sleeved on the air blowing rod 153, and the filter element 2 is facing the first through hole 153b of the air blowing rod 153, and the pressure gas blows the filter element 2 from the inside to the outside. The blowing direction of the pressure gas can be changed by changing the angle between the axis of the first through hole 153b and the axis of the cavity 153a. As an exemplary illustration, Figure 4 As shown, the axial directions of the first through holes 153b located above and below the filter element 2 are adjusted so that the air outlet of the first through hole 153b above the filter element 2 faces the upper surface of the filter element 2, and the air outlet of the first through hole 153b below the filter element 2 faces the lower surface of the filter element 2, so as to form an air blowing effect on the filter element 2 from all directions, and achieve a more comprehensive and thorough air washing effect on the filter element 2. In addition, the first through holes 153b can be arranged evenly spaced along the axial direction and circumferential direction of the air blowing rod 153, so that a stable pressure airflow can be formed at various parts of the air blowing rod 153 to ensure the consistency of the cleaning quality.

[0046] The air blowing rod 153 and the base 152 can be sealed in any manner, such as threaded connection, crimping, etc., and a sealant can be provided between the air blowing rod 153 and the base 152, or a rubber material can be applied to the threaded portion to form a bond, so as to ensure the air tightness of the connection. The air blowing rod 153 and the base 152 can also be welded, which can not only improve the sealing of the connection, but also ensure the connection strength, improve the vibration resistance of the air blowing device 15, and avoid the bottom of the air blowing rod 153 from loosening during vibration, which may lead to cleaning failure.

[0047] The cavity 152a of the base 152 can be connected to the air outlet of the air blowing device 13 through a connecting pipe. Figure 2 The cavity 152a can be connected to the gas outlet of the gas blowing device 13 through the first connecting pipe 16. The first connecting pipe 16 passes through the partition 12, and the two ends are sealed and connected to the gas outlet of the gas blowing device 13 and the third through hole 152c respectively, so as to introduce the pressurized gas generated by the gas blowing device 13 into the cavity 152a. The material of the first connecting pipe 16 is not limited, and it can be a metal pipe or a non-metal pipe. A sealing member ( Figure 2 The cleaning fluid in the second chamber 11b is prevented from flowing into the first chamber 11a and damaging the cleaning equipment in the first chamber 11a.

[0048] In some embodiments, the first connecting pipe 16 can be connected to the connecting portion 151, and a ventilation pipe communicating with the second through hole 152c is provided in the connecting portion 151, so that the pressurized gas is guided to the filter element 2 through the ventilation pipe in the connecting portion 151. As an example, Figure 5 As shown, the connecting portion 151 is provided with a first connecting hole 151a and a second connecting hole 151b that are interconnected. One end of the first connecting pipe 16 is connected to the gas outlet of the air blowing device 13, and the other end is connected to the second connecting hole 151b. The second through hole 152c on the base 152 is arranged above the connecting portion 151. The first connecting hole 151a is connected to the second through hole 152c, thereby forming a connected gas path to introduce the pressurized gas of the air blowing device 13 into the cavity 152a of the base 152. The connecting seat 151 and the base 152 can be fixedly connected by welding. With this arrangement, the first connecting pipe 16 does not need to pass through the partition 12, thereby eliminating the sealing structure design at the partition 12, and avoiding the occurrence of leakage failures.

[0049] In some embodiments, an ultrasonic generator 17 is further provided in the first chamber 11b. Figure 1 As shown, the vibrator of the ultrasonic generator 17 is fixedly connected to the bottom of the partition 12. The ultrasonic generator 17 can generate high frequency and high voltage, which are transmitted to the vibrator through the cable, and then the vibrator drives the partition 12 to generate high frequency resonance, so that the ultrasonic wave radiates in the cleaning liquid. Under the action of the ultrasonic wave, the cleaning liquid forms a large number of tiny bubbles. When the bubbles are compressed and ruptured, a high local hydraulic impact force is generated, which can cause the dirt on the surface or hidden places of the filter element 2 to burst and peel off. At the same time, under the action of the ultrasonic wave, the pulsation stirring of the cleaning liquid is intensified, and the dissolution and penetration effect is strengthened, so that the filter element 2 is thoroughly cleaned.

[0050] In some embodiments, a sterilization device 18 is further provided in the second chamber 11b. Figure 1 As shown, it is used to sterilize the filter element. The installation position of the sterilization device 18 is not limited, and it can be installed on the side wall or the top of the second chamber 11b. Compared with installing it on the side wall, installing the sterilization device 18 on the top of the second chamber 11b can expand the sterilization range and improve the sterilization efficiency. As an exemplary illustration, Figure 1 As shown, a sealing cover 111 can be provided on the top of the second chamber 11b, and the sterilizing device 18 is connected to the sealing cover 111 and suspended above the air blowing rod 153. The types of the sterilizing device 18 include, but are not limited to, ultraviolet sterilizers, ozone sterilizers, plasma sterilizers, etc. In some embodiments, the sterilizing device 18 uses an ultraviolet lamp group, which is suspended above the air blowing rod 153, and the irradiation surface covers the arrangement area of ​​the air blowing rod 153. Ultraviolet sterilization is a non-contact sterilization method, which can avoid damage or secondary contamination to the filter element 16, and is simple to operate and efficient and economical.

[0051] In some embodiments, in order to realize intelligent control of the cleaning device, a control terminal (not shown in the figure) is also provided, which can respectively connect the air blowing device 13, the oscillator 14, the ultrasonic generator 18 and the sterilization device 18 to communicate with the control terminal. The operating parameters of each cleaning equipment are centrally controlled through the control terminal, and different cleaning operation processes and cleaning times are set for different types of filter elements, thereby reducing the amount of manual work and making the cleaning process safer and more efficient.

[0052] As an exemplary illustration, the cleaning device of the embodiment of the present application may adopt the following cleaning process:

[0053] S1: Install the filter element 2 to be cleaned onto the air blowing rod 153, and inject a certain amount of cleaning liquid into the second chamber 11b;

[0054] S2: starting the oscillator 14 to make the filter element 2 vibrate continuously for a specified period of time to remove larger particle pollutants on the filter element;

[0055] S3: turning off the oscillator 14 and starting the ultrasonic generator 17 to perform deep cleaning on the filter element 2 using ultrasonic waves to remove tiny particles and fine impurities in the filter element 2;

[0056] S4: Turn off the ultrasonic generator 17 and discharge the waste liquid through the drain port 11b-1;

[0057] S5: Start the air blowing device 13 to blow away the residual pollutants in the filter element 2 and dry the filter element at the same time;

[0058] S6: Turn off the air blowing device 13 and start the sterilizing device 18 to sterilize the filter element 2.

[0059] It is understandable that the above cleaning process is only an example and should not be used as a restriction on the use of the cleaning device to clean the filter element.

[0060] The beneficial effects of the cleaning device provided in the embodiments of the present application include but are not limited to: (1) The air blowing device is used to guide the pressurized gas generated by the air blowing device to form air blowing on the filter element, thereby removing pollutants and drying the filter element. At the same time, the air blowing device transmits the mechanical vibration generated by the oscillator to the filter element, and the filter element is effectively and thoroughly cleaned by combining air blowing and vibration; (2) By setting an ultrasonic generator and an ultraviolet lamp group, ultrasonic water washing, ultraviolet sterilization, air washing, and oscillation are used to achieve deep cleaning of the filter element, thereby improving the cleanliness level of the filter element, so that the filter element meets the cleanliness requirements for reuse and reduces the system operation cost; (3) The cleaning device provided in the embodiments of the present application can accommodate multiple filter elements at the same time, realize the simultaneous cleaning of multiple filter elements, and improve work efficiency; (4) The cleaning device provided in the embodiments of the present application has a simple structure, is easy to install and maintain, is economical and practical, and has good application prospects.

[0061] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.

[0062] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0063] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0064] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0065] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0066] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0067] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0068] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A cleaning device for cleaning a filter element, characterized in that: include: A cleaning chamber, wherein a partition is provided in the cleaning chamber, and the partition divides the cleaning chamber into a first chamber and a second chamber that are not connected to each other; an air blowing device, the air blowing device being located in the first chamber; an oscillator, the oscillator being located in the first chamber; An air blowing device is located in the second chamber, connected to the oscillator through the partition, and communicated with the air outlet of the air blowing device, so that the pressurized gas generated by the air blowing device can be blown out through the air outlet of the air blowing device. At least one filter element is connected to the air blowing device and faces the air blowing direction of the air outlet.

2. The cleaning device according to claim 1, characterized in that: The air blowing device includes a connecting part, a base and at least one air blowing rod, the connecting part penetrates the partition and is connected to the oscillator; the base is arranged on the surface of the partition and is vertically connected to the connecting part, and a cavity is provided in the base, the extension direction of the cavity is parallel to the surface of the partition and is connected to the air outlet of the blowing device; the air blowing rod includes a cavity hole arranged along the length direction of the air blowing rod and at least one first through hole penetrating the rod wall of the air blowing rod, at least one air blowing rod is respectively connected to the base and the cavity holes are respectively connected to the cavity, and the filter element is connected to the outside of the air blowing rod and faces the air blowing direction of the first through hole.

3. The cleaning device according to claim 2, characterized in that: The base is provided with a second through hole communicating with the cavity, and one end of the air blowing rod is inserted into the second through hole and is sealed and connected with the base.

4. The cleaning device according to claim 3, characterized in that: The cleaning device also includes a first connecting tube, which passes through the partition and is sealed to the partition. The base has a third through hole that is connected to the cavity. One end of the first connecting tube is connected to the air outlet of the air blowing device, and the other end is inserted into the third through hole to connect the air outlet of the air blowing device to the cavity.

5. The cleaning device according to claim 4, characterized in that: The second through hole and the third through hole are respectively located on two opposite sides of the base.

6. The cleaning device according to claim 2, characterized in that: There are a plurality of the first through holes, and the plurality of the first through holes are arranged at intervals along the axial direction and / or the circumferential direction of the air blowing rod.

7. The cleaning device according to claim 1, characterized in that: It also includes an ultrasonic generator, which is disposed in the first chamber and connected to the partition.

8. The cleaning device according to claim 1, characterized in that: Also included is a sterilization device, which is connected to the top of the second chamber.

9. The cleaning device according to claim 8, characterized in that: The sterilization device includes at least one ultraviolet lamp, and the ultraviolet lamp is connected to the top of the second chamber.

10. The cleaning device according to claim 9, characterized in that: A sealing cover is provided on the top of the second chamber, the sealing cover is sealed and connected to the side wall of the second chamber, and the ultraviolet lamp is connected to the bottom wall of the sealing cover.

11. The cleaning device according to claim 10, characterized in that: The sealing cover is provided with an exhaust port, and the exhaust port is communicated with the atmosphere.

12. The cleaning device according to claim 1, characterized in that: A liquid discharge port is provided at the bottom of the side wall of the second chamber, and the liquid discharge port is connected to a waste liquid treatment system.

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