Quartz ring dismounting device of MPCVD equipment
By designing a MPCVD device semi -disassembly device including the hug structure and bearing parts, the problem of difficulty disassembling and easy damage to the existing technologies can solve the problem of difficulty disassembling and easily damaging the copper plate, and achieve a fast and safe disassembly process.
Patent Information
- Application Number
- CN202420330050.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-22
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-02-22
AI Technical Summary
When disassembling quartz rings and copper disks, it is difficult for human hands to separate and the use of tools can easily lead to shattering of the quartz rings.
Design a quartz ring disassembly device including the structure of the clip structure and the bearing parts, hold the quartz ring through the clip structure, the rotation screw on the bearing component to resist the copper plate, and the screwed screw drive the bearing component Upper movement, drive the clip structure to move simultaneously to achieve the separation of the quartz ring and the copper plate.
The rapid separation of the quartz ring and the copper plate, avoiding the damage of the quartz ring, simple operation, flexibility, and high disassembly efficiency.
Smart Images
Figure CN222411820U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical vapor deposition growth, in particular to a quartz ring disassembly device of MPCVD equipment. Background Art
[0002] In recent years, the technology of preparing diamond by microwave plasma chemical vapor deposition (MPCVD) has gradually matured. Microwave plasma chemical vapor deposition (MPCVD) is the preferred method for preparing high-quality single-crystalline diamond. MPCVD equipment is microwave plasma chemical vapor deposition equipment, and the demand for MPCVD equipment is also increasing.
[0003] like Figure 1 As shown, when the copper disk 22 of the MPCVD equipment is installed, it is connected to the cavity through the quartz ring 20. Fluorine rubber flat pads 21 are padded at both ends of the quartz ring 20 to ensure air tightness. When the copper disk 22 or quartz ring 20 installed in the MPCVD equipment is replaced, due to the effect of long-term vacuum pressure, the quartz ring 20 will be tightly attached to the copper disk 22 through the adsorption effect of the fluorine rubber flat pad 21, and the center of the copper disk 22 also has a copper disk antenna rod 23 for transmitting microwaves. The surface of the quartz ring 20 is very smooth, and it is extremely difficult to separate the two by hand. Using a pry cone tool to pry open the quartz ring 20 can easily cause the quartz ring 20 to break. Therefore, a quartz ring disassembly device that is convenient for the MPCVD equipment is needed to quickly separate the quartz ring 20 from the copper disk 22 without damaging the quartz ring 20. Utility Model Content
[0004] The utility model aims to provide a quartz ring disassembly device for MPCVD equipment, which is used to solve the problem that it is extremely difficult to separate the quartz ring and the copper plate by hand when disassembling the two, and it is easy to cause the quartz ring to break when prying them open with tools.
[0005] The utility model discloses a quartz ring disassembly device for an MPCVD device, which adopts the following technical scheme: a quartz ring disassembly device for an MPCVD device, comprising a clamping structure for clamping a quartz ring, a load-bearing component being fixedly arranged on the clamping structure, a pushing screw being screwed on the load-bearing component and used to face a copper disk and directly or indirectly press against the copper disk, and the pushing screw being screwed to press against the copper disk drives the clamping structure to move so as to separate the quartz ring from the copper disk.
[0006] Furthermore, the clamping structure includes separately arranged hoops, which are connected by a connecting structure.
[0007] Furthermore, the load-bearing component includes separately arranged load-bearing plates, each of which is provided with the above-mentioned push screw, and each load-bearing plate is assembled to form an avoidance space for avoiding the copper disk antenna pole.
[0008] Furthermore, when the load-bearing plate is fixedly connected to the clamping structure, the installation position of the push screw on the load-bearing plate satisfies that the push screw is located inside the quartz ring when in use.
[0009] Furthermore, the push screws on each bearing plate are symmetrically arranged about the center of the quartz ring.
[0010] Furthermore, the clamping structure is provided with a connecting hole, the bearing plate is connected to the clamping structure by means of locking bolts, and a limiting structure is provided between the clamping structure and the bearing plate so that there is a circumferential interval between the bearing plate and the quartz ring.
[0011] Furthermore, the limiting structure is a limiting sleeve sleeved on the locking bolt.
[0012] Furthermore, a quartz ring protection pad is provided on the inner side of the clamping structure for contact with the quartz ring.
[0013] Furthermore, the quartz ring disassembly device of the MPCVD equipment includes a copper disk protection pad placed above the copper disk and inside the quartz ring.
[0014] Furthermore, the copper disk protection pad includes a supporting protection pad located at the top and a shock-absorbing protection pad located at the bottom.
[0015] The quartz ring disassembly device of the MPCVD equipment of the utility model is a newly designed quartz ring disassembly device of the MPCVD equipment. The beneficial effects of the quartz ring disassembly device of the MPCVD equipment of the utility model are as follows: by clamping the clamping structure on the outer periphery of the quartz ring, the quartz ring and the clamping structure are relatively fixed, and then a load-bearing component is fixedly arranged on the clamping structure, and a push screw is screwed on the load-bearing component to press against the copper disk, and the push screw is screwed to drive the load-bearing component to move upward, driving the clamping structure to move synchronously, and at the same time, the quartz ring clamped by the clamping structure moves to separate the quartz ring from the copper disk. The quartz ring disassembly device of the MPCVD equipment of the utility model has a simple structure, will not cause damage to the quartz ring during operation, is easy to use on site, is flexible to operate, and is quick and efficient to disassemble. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the structure of the existing quartz ring and copper disk;
[0017] Figure 2 It is a schematic diagram of the split structure of an embodiment of a quartz ring disassembly device of an MPCVD device of the utility model;
[0018] Figure 3 This is an assembly diagram of an embodiment of the quartz ring disassembly device of the MPCVD equipment of the utility model.
[0019] In the figure: 1. first hoop; 2. second hoop; 3. load-bearing plate; 4. limiting sleeve; 5. supporting protection pad; 6. shock-absorbing protection pad; 7. quartz ring protection pad; 8. connecting bolt; 9. locking bolt; 10. locking nut; 11. push screw; 20. quartz ring; 21. fluororubber flat pad; 22. copper disk; 23. copper disk antenna rod. DETAILED DESCRIPTION
[0020] The features and performance of the present invention are further described in detail below in conjunction with the embodiments.
[0021] First, the technical solution of the utility model is generally described as follows:
[0022] like Figure 1 As shown, when the copper disk 22 of the MPCVD equipment is installed, it is connected to the cavity through the quartz ring 20. Both ends of the quartz ring 20 are padded with fluororubber flat pads 21 to ensure airtightness. When the copper disk 22 or quartz ring 20 installed in the MPCVD equipment is replaced, due to the effect of long-term vacuum pressure, the quartz ring 20 will be tightly attached to the copper disk 22 through the adsorption effect of the fluororubber flat pad 21, and the center of the copper disk 22 also has a copper disk antenna rod 23 for transmitting microwaves. The surface of the quartz ring 20 is very smooth, and it is extremely difficult to separate the two by hand. Using a pry cone tool to pry open the quartz ring 20 can easily cause the quartz ring 20 to break. Therefore, in view of the problem that the quartz ring 20 is difficult to disassemble, it is necessary to design a tool to quickly separate the quartz ring 20 from the copper disk 22 without damaging the quartz ring 20.
[0023] The utility model designs a quartz ring disassembly device for MPCVD equipment, including a clamping structure, which is clamped on the outer periphery of the quartz ring so that the quartz ring and the clamping structure are relatively fixed, a load-bearing component is fixedly arranged on the clamping structure, a push screw is screwed on the load-bearing component, the push screw passes through the load-bearing component and presses against a copper disk, the load-bearing component is driven upward by screwing the push screw, and the clamping structure is driven to move synchronously, and the clamping structure clamps the quartz ring to move so as to separate the quartz ring from the copper disk. The quartz ring disassembly device for MPCVD equipment of the utility model has a simple structure, will not cause damage to the quartz ring during operation, is easy to use on site, is flexible to operate, and is quick and efficient to disassemble.
[0024] Specific embodiment of the quartz ring disassembly device of the MPCVD equipment of the utility model:
[0025] The schematic diagram of the structure of the quartz ring disassembly device of the MPCVD equipment of the utility model is as follows Figure 1-3As shown, a quartz ring disassembly device for MPCVD equipment includes a clamping structure, which is used to clamp the outer periphery of a quartz ring 20. A load-bearing component is fixedly arranged on the clamping structure, and the load-bearing component is used to screw a push screw 11. The push screw 11 passes through the load-bearing component and is used to face a copper plate 22. The push screw 11 directly or indirectly presses against the copper plate 22. The push screw 11 is screwed to press against the copper plate 22, so that the clamping structure drives the quartz ring 20 to move so that the quartz ring 20 is separated from the copper plate 22.
[0026] In order to facilitate the installation and disassembly of the clamping structure, preferably, the clamping structure includes a separately arranged hoop ring, and the hoop rings are connected by a connecting structure. The separately arranged clamping structure is convenient for disassembly and assembly, and convenient for adjusting the clamping effect. Specifically, the hoop ring includes a first hoop ring 1 and a second hoop ring 2, and the connecting structure is a connecting bolt 8. The first hoop ring 1 and the second hoop ring 2 are connected by the connecting bolt 8, which is convenient to use. Of course, in other embodiments, the clamping effect can also be achieved by hingedly connecting one end of the two hoops and detachably connecting the other end by the connecting bolt 8.
[0027] Since the copper plate 22 is connected to a copper plate antenna rod 23 for transmitting microwaves, in order to facilitate the installation and removal of the load-bearing component, preferably, the load-bearing component includes a split load-bearing plate 3, each load-bearing plate 3 is provided with a push screw 11, and each load-bearing plate 3 is assembled to form an escape space for avoiding the copper plate antenna rod 23, so that when assembling the load-bearing plate 3, the split load-bearing plate 3 is assembled from the side, which is simple and convenient to operate. Of course, in other embodiments, the load-bearing plate 3 can also be set as an integrated structure, and the middle part of the load-bearing plate 3 has an escape hole. When in use, the load-bearing plate 3 is sleeved from the copper plate antenna rod 23 to the top of the quartz ring 20 for assembly.
[0028] Since the area of the copper disk 22 located at the outer ring of the quartz ring 20 is smaller than the area of the copper disk 22 located at the inner ring of the quartz ring 20, preferably, when the bearing plate 3 is fixedly connected to the clamping structure, the installation position of the push screw 11 on the bearing plate 3 satisfies that it is located on the inner side of the quartz ring 20 when in use. Such a structure is easy to manufacture, the position accuracy requirement of the push screw 11 is relatively low, and the bearing plate 3 is biased inwardly to make the structure more compact. Of course, in other embodiments, the bearing plate 3 can also have a plate body extending above the outer ring position of the copper disk 22 of the quartz ring 20. After passing through the bearing plate 3, the push screw 11 is located at the outer ring position of the quartz ring 20 and is pressed against the outer edge of the copper disk 22. By screwing the push screw 11 against the copper disk 22, a good disassembly effect can also be achieved.
[0029] When the bearing plate 3 is an integrated structure, a push screw 11 biased toward the middle of the copper plate 22 is provided to separate the quartz ring 20 from the copper plate 22. However, in order to achieve a higher disassembly effect of the two and to make it easier to separate the two, preferably, on the basis of the bearing plate 3 being split, the push screws 11 on each bearing plate 3 are symmetrically arranged about the center of the quartz ring 20. In this embodiment, the bearing plate 3 is two symmetrically arranged bearing split plates, so that the force applied to the copper plate 22 by the push screw 11 is uniform when it is screwed, and the force distribution of the quartz ring 20 is more uniform, ensuring that the quartz ring 20 has a better separation effect during the screwing of the push screw 11, and will not be deflected, making the operation more labor-saving and convenient. Of course, in other embodiments, three bearing split plates can be arranged evenly in the circumferential direction, and each bearing split plate is provided with a push screw 11.
[0030] The bearing plate 3 is a structure integrally arranged with the clamping structure. It is convenient to assemble it together with the clamping structure during assembly, or the bearing plate 3 is directly fixed and locked by the locking bolt 9 to facilitate the assembly of the push screw 11. However, in order to avoid the bearing plate 3 from colliding with the quartz ring 20 when being assembled on the upper side of the quartz ring 20, which may cause damage to the quartz ring 20, preferably, a connecting hole is provided on the clamping structure, and the bearing plate 3 is connected to the clamping structure by the locking bolt 9. A limiting structure is provided between the clamping structure and the bearing plate 3 so that there is a circumferential interval between the bearing plate 3 and the quartz ring 20. In this embodiment, the bearing plate 3 and the hoop are connected by a locking nut 10 and a locking bolt 9. In order to avoid the bearing plate 3 from colliding with the quartz ring 20, a limiting sleeve 4 is sleeved on the locking bolt 9, so that when the locking nut 10 is used to lock, a certain distance is generated between the two due to the existence of the limiting sleeve 4, thereby preventing the bearing plate 3 from directly contacting the quartz ring 20, thereby providing better protection for the quartz ring 20. Of course, in other embodiments, a protruding structure is provided on the load-bearing plate 3 or the clamping structure at a position facing the other, so that when the locking bolt 9 is fixedly connected to the two, there is a circumferential spacing between the two due to the presence of the protruding structure.
[0031] The clamping structure is directly fitted with the quartz ring 20, which makes it easy to clamp the quartz ring 20 and drive the quartz ring 20 away from the copper plate 22. However, in order to prevent the quartz ring 20 from being damaged during the clamping process, preferably, a quartz ring protection pad 7 is provided on the inner side of the clamping structure at the fitting surface with the quartz ring 20. The quartz ring protection pad 7 is a rubber pad, which is padded on the inner side of the hoop. This can not only ensure that the friction between the clamping structure and the quartz ring 20 is increased to ensure a better clamping effect, but also the rubber pad between the two protects the quartz ring 20 from being easily damaged.
[0032] Since the push screw 11 needs to press against the copper disk 22, it is easy to cause damage to the copper disk 22 during the screwing process. Therefore, in order to better protect the copper disk 22, preferably, the quartz ring disassembly device of the MPCVD equipment includes a copper disk 22 protection pad, and the copper disk 22 protection pad is used to be placed above the copper disk 22 and is located on the inner side of the quartz ring 20. The push screw 11 presses against the copper disk 22 protection pad, so that it does not directly press against the copper disk 22, which can provide good protection for the copper disk 22.
[0033] The push screw 11 has a certain pressing force when it is screwed. In order to further improve the protection effect of the copper plate 22, preferably, the copper plate 22 protection pad includes a support protection pad 5 located at the top and a shock-absorbing protection pad 6 located at the bottom. The support protection pad 5 and the shock-absorbing protection pad 6 are both provided with a circular hole at the center position to avoid the copper plate antenna rod 23. Specifically, the upper support protection pad 5 has a support groove, which is used to provide a good support for the push screw 11. The lower shock-absorbing protection pad 6 is used to reduce the vibration of the support protection pad 5 and the collision between the support protection pad 5 and the copper plate 22, thereby strengthening the protection of the copper plate 22. Of course, in other embodiments, the copper plate 22 protection pad can be a thicker single-layer protection pad.
[0034] In order to ensure better protection for the copper plate 22 and facilitate the setting of the position of the push screw 11, preferably, the sizes of the support protection pad 5 and the shock-absorbing protection pad 6 are used to adapt to the inner ring of the quartz ring 20, so that the push screw 11 is set at any position of the bearing plate 3 on the inner ring of the quartz ring 20 to achieve the protection effect on the copper plate 22.
[0035] When the quartz ring disassembly device of the MPCVD equipment is used, the shock-absorbing protective pad 6 is firstly put on the copper disk antenna rod 23 through the central circular hole and on the surface of the copper disk 22 of the inner circle of the quartz ring 20, and then the supporting protective pad 5 is put on the copper disk antenna rod 23 through the central circular hole and placed on the shock-absorbing protective pad 6 of the inner circle of the quartz ring 20. The two are used to protect the surface of the copper disk 22 to prevent the surface of the copper disk 22 from being scratched when the quartz ring 20 is disassembled. The first hoop 1 is connected to the second hoop 2 by a connecting bolt 8, and the connecting bolt 8 is clamped on the quartz ring 2 by screwing the connecting bolt 8. 0, a quartz ring protection pad 7 is sandwiched between the hoop and the quartz ring 20 for protecting the quartz ring 20 and increasing the friction between the hoop and the quartz ring 20, and connecting holes are respectively opened on the first hoop 1 and the second hoop 2 for the locking bolt 9 to pass through, and the locking bolt 9 passes through the hoop from the lower side through the connecting hole, and the locking bolt 9 is respectively sleeved with a limiting sleeve 4, and the through holes on both sides of the bearing plate 3 are respectively sleeved on the locking bolt 9, and the locking nut 10 is installed on the locking bolt 9 on the upper side of the bearing plate 3, and the locking nut 10 is tightened to fix the bearing plate 3 and the hoop. A threaded hole is opened in the middle position of the bearing plate 3, and the push screw 11 passes through the upper side of the bearing plate 3 and contacts the bottom surface of the groove on the upper surface of the copper plate 22 protection pad. The groove is used to position the copper plate 22 protection pad to prevent the movement of the copper plate 22 protection pad. When the quartz ring 20 needs to be removed, the bearing plate 3 is screwed with a push screw 11 pressed against the copper plate 22. The push screw 11 is screwed, and the push screw 11 presses against the copper plate 22 to drive the bearing plate 3 to drive the hoop ring to move upward, and drive the quartz ring 20 clamped by the hoop ring to move upward, so that the quartz ring 20 and the copper plate 22 are separated.
[0036] Through the above description of the specific embodiment of the quartz ring disassembly device of the MPCVD equipment of the utility model, it can be seen that the quartz ring disassembly device of the MPCVD equipment of the utility model clamps the clamping structure on the outer periphery of the quartz ring so that the quartz ring and the clamping structure are relatively fixed, and then a load-bearing component is fixedly provided on the clamping structure, and a push screw screw mounted on the load-bearing component presses against the copper disk, and the push screw is screwed to drive the load-bearing component to move upward, driving the clamping structure to move synchronously, and the clamping structure clamps the quartz ring to move to separate the quartz ring from the copper disk. The quartz ring disassembly device of the MPCVD equipment of the utility model has a simple structure, will not cause damage to the quartz ring during operation, is easy to use on site, is flexible to operate, and is quick and efficient to disassemble.
[0037] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. The patent protection scope of the present invention shall be based on the claims. All equivalent structural changes made using the description and drawings of the present invention shall be included in the protection scope of the present invention.
Claims
1. A quartz ring disassembly device for MPCVD equipment, characterized in that: The invention comprises a clamping structure for clamping a quartz ring, a load-bearing component is fixedly arranged on the clamping structure, a pushing screw is screwed on the load-bearing component and is used to face the copper plate and directly or indirectly press the copper plate, and the pushing screw is screwed to press the copper plate to drive the clamping structure to move so as to separate the quartz ring from the copper plate.
2. The quartz ring disassembly device of the MPCVD equipment according to claim 1, characterized in that: The clamping structure comprises separately arranged hoops, which are connected by a connecting structure.
3. The quartz ring disassembly device of the MPCVD equipment according to claim 1, characterized in that: The load-bearing components include separately arranged load-bearing plates, each of which is provided with the aforementioned push screw rod, and each load-bearing plate is assembled to form an avoidance space for avoiding the copper plate antenna pole.
4. The quartz ring disassembly device of the MPCVD equipment according to claim 3, characterized in that: When the bearing plate is fixedly connected to the clamping structure, the installation position of the push screw on the bearing plate satisfies that the push screw is located inside the quartz ring when in use.
5. The quartz ring disassembly device of the MPCVD equipment according to claim 4, characterized in that: The push screws on each bearing plate are symmetrically arranged about the center of the quartz ring.
6. The quartz ring disassembly device of the MPCVD equipment according to claim 5, characterized in that: The clamping structure is provided with a connecting hole, the load-bearing plate is connected to the clamping structure through locking bolts, and a limiting structure is provided between the clamping structure and the load-bearing plate so that there is a circumferential interval between the load-bearing plate and the quartz ring.
7. The quartz ring disassembly device of the MPCVD equipment according to claim 6, characterized in that: The limiting structure is a limiting sleeve sleeved on the locking bolt.
8. The quartz ring disassembly device of the MPCVD equipment according to any one of claims 1 to 7, characterized in that: A quartz ring protection pad is arranged on the inner side of the clamping structure for contacting with the quartz ring.
9. The quartz ring disassembly device of the MPCVD equipment according to any one of claims 1 to 7, characterized in that: The quartz ring disassembly device of the MPCVD equipment includes a copper disk protection pad placed above the copper disk and located inside the quartz ring.
10. The quartz ring disassembly device of the MPCVD equipment according to claim 9, characterized in that: The copper plate protection pad comprises a supporting protection pad located at the top and a shock absorbing protection pad located at the bottom.