Liquid feeding device of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnace equipment, in particular to a liquid feeding device of a single crystal furnace. Comprising a fixing sleeve, a crucible is slidably connected into the fixing sleeve, a supporting seat is slidably connected into the fixing sleeve and located at the bottom of the crucible, a fixing rod is connected to the bottom of the supporting seat through bolts, the fixing rod is slidably connected with a base, conveying pipes are evenly distributed and fixed into the top end of the fixing sleeve, and the tops of the conveying pipes are slidably connected with a closing cover; an elastic blocking piece is fixed to the bottom of the conveying pipe and located in the crucible. According to the liquid feeding device for the single crystal furnace, provided by the utility model, through the matching of the fixing sleeve, the conveying pipe, the elastic baffle plate and the feeding mechanism, when the single crystal furnace is used, raw materials are conveyed into a crucible through the conveying pipe by the feeding mechanism; meanwhile, the elastic baffle fixed at the bottom of the conveying pipe prevents impact generated when the raw materials enter the crucible, and movement of liquid in the crucible is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace equipment, in particular to a single crystal furnace liquid feeding device. Background Art

[0002] Single crystal silicon is the most important and widely used basic material in the semiconductor industry. The single crystal furnace is an important device for growing large-size, high-quality single crystal silicon. During the growth process of single crystal silicon, the silicon raw material in the single crystal furnace is continuously reduced due to the continuous pulling of the crystal. When a new furnace of single crystal silicon is grown, the silicon raw material needs to be supplemented through a feeding device. Nowadays, most single crystal furnaces are prone to impact the quartz crucible inside the single crystal furnace when loading. For this reason, we designed a single crystal furnace liquid feeding device to provide another technical solution to the above technical problems. Utility Model Content

[0003] In view of the deficiencies in the prior art, the utility model provides a single crystal furnace liquid feeding device for solving the technical problem that most single crystal furnaces are prone to impact the interior of the single crystal furnace during feeding.

[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0005] A single crystal furnace liquid feeding device comprises a fixed sleeve, a crucible is slidably connected to the interior of the fixed sleeve, a support seat is slidably connected to the interior of the fixed sleeve and located at the bottom of the crucible, a fixing rod is bolted to the bottom of the support seat, and the fixing rod is slidably connected to the base, delivery pipes are evenly fixed inside the top end of the fixed sleeve, the top of the delivery pipe is slidably connected to a closing cover, and an elastic baffle is fixed to the bottom of the delivery pipe and located inside the crucible.

[0006] As a preferred implementation of the single crystal furnace liquid feeding device provided by the utility model, the top of the fixing sleeve is bolted to a closing cover, and the bottom of the fixing sleeve is bolted to a base.

[0007] As a preferred implementation of the single crystal furnace liquid feeding device provided by the utility model, a height support platform is fixed inside the base.

[0008] As a preferred implementation of the single crystal furnace liquid feeding device provided by the utility model, the elastic baffle is in a birdcage shape.

[0009] As a preferred embodiment of the single crystal furnace liquid feeding device provided by the utility model, the elastic baffle is composed of a bottom baffle and a plurality of arc-shaped baffles, and a bottom baffle is fixed at the bottom between the plurality of arc-shaped baffles.

[0010] As a preferred embodiment of the liquid feeding device for a single crystal furnace provided by the utility model, a liquid level sensor is fixed inside the crucible, and the liquid level sensor is located at a position of four fifths of the height inside the crucible.

[0011] As a preferred embodiment of the single crystal furnace liquid feeding device provided by the utility model, a feeding mechanism for conveying raw materials is installed at one end of the fixed sleeve, and the feeding mechanism includes a raw material storage cylinder, an infusion tube, a one-way valve, an air pipe and a booster pump. A infusion tube is arranged inside one end of the top of the raw material storage cylinder, and the bottom of the infusion tube is in contact with the raw material storage cylinder, a one-way valve is fixed at one end of the infusion tube, one end of the one-way valve is connected to the conveying tube, an air pipe is arranged inside the other end of the top of the raw material storage cylinder, and the end of the air pipe away from the infusion tube is connected to the booster pump.

[0012] As a preferred embodiment of the single crystal furnace liquid feeding device provided by the utility model, the bottom position of the gas pipe near one end of the liquid pipe is higher than the bottom position of the liquid pipe near one end of the gas pipe.

[0013] As a preferred embodiment of the liquid feeding device for a single crystal furnace provided by the utility model, it also includes a lifting mechanism for adjusting the height of the infusion tube, the lifting mechanism includes a fixed shell, a lifting platform, a pressure plate and a lifting block, the top of the fixed shell is slidably connected to the lifting block, the top of the lifting block is fixed with a lifting platform, and the top of the lifting platform is bolted to the pressure plate;

[0014] A height adjustment component for driving the lifting block to lift is installed inside the fixed shell, and the height adjustment component includes a rotating rod, a connecting rod, a slider, a lifting drive rotating motor, a lifting worm and a lifting worm wheel. The bottom end of the fixed shell is internally rotatably connected to the rotating rod, and a connecting rod is fixed to the outside of the rotating rod. One end of the connecting rod is rotatably connected to the slider, and the slider is slidably connected to the lifting block. A lifting drive rotating motor is fixed inside the fixed shell, and the output end of the lifting drive rotating motor is connected to the lifting worm, and the top of the lifting worm is meshingly connected to the lifting worm wheel, and the inside of the lifting worm wheel is fixed to the rotating rod.

[0015] It can be seen without a doubt that the above-mentioned technical solution of the present application can definitely solve the technical problem to be solved by the present application.

[0016] At the same time, through the above technical solutions, the utility model has at least the following beneficial effects:

[0017] The utility model provides a single crystal furnace liquid feeding device. Through the cooperation of a fixed sleeve, a conveying pipe, an elastic baffle and a feeding mechanism, the single crystal furnace can be used to convey raw materials into the crucible through the conveying pipe by the feeding mechanism. At the same time, the elastic baffle fixed at the bottom of the conveying pipe is used to place the raw materials into the crucible to generate impact, thereby reducing the movement of liquid inside the crucible.

[0018] By cooperating with the fixed shell, lifting platform, pressing plate and height adjustment assembly, the height of the lifting platform can be adjusted through the height adjustment mechanism to adjust the height of the infusion tube fixed on the top of the lifting platform, thereby adjusting the height of one end of the infusion tube inside the raw material storage cylinder. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 This is a schematic diagram of the overall structure of the first embodiment of the utility model;

[0021] Figure 2 It is an exploded view of the first embodiment of the utility model;

[0022] Figure 3 This is a schematic diagram of the structure of the support seat of the utility model;

[0023] Figure 4 This is a schematic diagram of the structure of the elastic baffle of the utility model;

[0024] Figure 5 This is a schematic diagram of the structure of the raw material storage cylinder of the utility model;

[0025] Figure 6 This is a schematic diagram of the overall structure of the second embodiment of the utility model;

[0026] Figure 7 This is a schematic diagram of the internal structure of the fixed shell of the utility model;

[0027] Figure 8 It is a structural schematic diagram of the rotating rod of the utility model;

[0028] Fig. 9 It is a working schematic diagram of the booster pump of the utility model.

[0029] In the figure: 1. fixed sleeve; 2. closing cover; 3. crucible; 4. support seat; 5. base; 6. height support platform; 7. fixed rod; 8. delivery pipe; 9. elastic baffle; 10. raw material storage cylinder; 11. infusion tube; 12. one-way valve; 13. gas pipe; 14. booster pump; 15. fixed shell; 16. lifting platform; 17. pressure plate; 18. lifting block; 19. rotating rod; 20. connecting rod; 21. slider; 22. lifting drive rotating motor; 23. lifting worm; 24. lifting worm wheel. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0031] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the accompanying drawings.

[0032] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions in the embodiments may be combined with each other.

[0033] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0034] Embodiment 1

[0035] Reference Figure 1-Figure 5 , a single crystal furnace liquid feeding device, comprising a fixed sleeve 1, the top of the fixed sleeve 1 is bolted to a closing cover 2, the bottom of the fixed sleeve 1 is bolted to a base 5, so that the bottom of the object inside the fixed sleeve 1 is supported by the base 5, the bottom end of the outer side of the base 5 is evenly provided with connecting channels, a height support platform 6 is fixed inside the base 5, and the top position inside the fixed sleeve 1 is supported by the top of the height support platform 6, the inside of the fixed sleeve 1 is slidably connected to a crucible 3, the inside of the fixed sleeve 1 and the bottom of the crucible 3 is slidably connected to a support seat 4, so that the bottom of the crucible 3 is supported by the support seat 4, the bottom of the support seat 4 is bolted to a fixing rod 7, and the fixing rod 7 is slidably connected to the base 5, so that the height of the support seat 4 can be adjusted and supported by the lifting of the fixing rod 7;

[0036] The top of the fixed sleeve 1 is evenly fixed with a delivery pipe 8, and the top of the delivery pipe 8 is slidably connected with the closing cover 2, so that the top of the delivery pipe 8 extends out of the closing cover 2, and the bottom of the delivery pipe 8 and the inside of the crucible 3 are fixed with an elastic baffle 9, so that the liquid entering the crucible 3 through the delivery pipe 8 can be prevented from directly impacting the crucible 3, and the elastic baffle 9 is in the shape of a birdcage, and a liquid level sensor is fixed inside the crucible 3, and the liquid level sensor is located at a position of four fifths of the height inside the crucible 3, and the model of the liquid level sensor is SIN-ZP, and the liquid height inside the crucible 3 can be detected by the liquid level sensor;

[0037] In this embodiment, the elastic baffle 9 is composed of a bottom baffle and a plurality of arc-shaped baffles, and a bottom baffle is fixed at the bottom between the plurality of arc-shaped baffles, and the diameter of the bottom baffle is slightly smaller than the inner wall diameter of the delivery pipe 8, so that the liquid entering through the delivery pipe 8 can offset the impact force through the obstruction of the bottom baffle, and the liquid hitting the bottom baffle can flow out from the gaps between the plurality of arc-shaped baffles, thereby reducing the impact on the crucible 3. In other embodiments, the diameter of the bottom baffle can also be equal to or greater than the inner wall diameter of the delivery pipe 8.

[0038] In this embodiment, an alarm device is fixed on the fixed sleeve 1, specifically an alarm light or an alarm speaker. When the liquid level sensor detects that the liquid inside the crucible 3 reaches four-fifths of the height, the alarm device gives a signal to the operator to control the liquid conveyed into the conveying pipe 8 to stop.

[0039] A feeding mechanism for conveying raw materials is installed at one end of the fixed sleeve 1, and the feeding mechanism includes a raw material storage cylinder 10, a liquid infusion tube 11, a one-way valve 12, an air delivery tube 13 and a booster pump 14. The liquid infusion tube 11 is arranged inside one end of the top of the raw material storage cylinder 10, and the bottom of the liquid infusion tube 11 is in contact with the raw material storage cylinder 10. A one-way valve 12 is fixed at one end of the liquid infusion tube 11, and one end of the one-way valve 12 is connected to the delivery tube 8, so that the liquid inside the raw material storage cylinder 10 enters the top of the delivery tube 8 through the liquid infusion tube 11, and then passes through the elastic baffle. 9 enters the interior of the crucible 3, and the one-way valve 12 is used to prevent the liquid from flowing back. An air pipe 13 is arranged inside the other end of the top of the raw material storage cylinder 10. The bottom position of the air pipe 13 near the end of the liquid infusion tube 11 is higher than the bottom position of the liquid infusion tube 11 near the end of the air pipe 13. The end of the air pipe 13 away from the liquid infusion tube 11 is connected to a booster pump 14. The model of the booster pump 14 is MPT125X100-20L-20T, so that the interior of the raw material storage cylinder 10 is pressurized through the air pipe 13 by the operation of the booster pump 14.

[0040] In this embodiment, the working diagram of the booster pump 14 can be referred to Fig. 9 , and let Fig. 9 The middle top output is connected to the gas delivery pipe 13.

[0041] In this embodiment, the raw material storage cylinder 10 is in a shape with an open top. In other embodiments, the raw material storage cylinder 10 is an integrally sealed cylinder with only a through hole reserved at the top for the liquid infusion tube 11 and the gas infusion tube 13 to enter.

[0042] The use process of a single crystal furnace liquid feeding device provided by the utility model is as follows: when working, the booster pump 14 is allowed to pressurize the interior of the raw material storage cylinder 10 through the gas pipe 13. At this time, the height of the gas pipe 13 at one end inside the raw material storage cylinder 10 is higher than the height of the liquid infusion pipe 11 at one end inside the raw material storage cylinder 10. Then, when a large amount of air is compressed at the top of the raw material storage cylinder 10, the pressure at the top of the raw material storage cylinder 10 is increased, and at the same time, the raw material liquid inside the raw material storage cylinder 10 enters the interior of the liquid infusion pipe 11, and the liquid enters the interior of the delivery pipe 8 through the liquid infusion pipe 11, and the birdcage shape of the elastic baffle 9 allows the raw material liquid to enter the delivery pipe 8 through the delivery pipe 8. The incoming liquid first contacts the elastic baffle 9, so that the liquid entering through the delivery pipe 8 can offset the impact force through the obstruction of the bottom baffle, and the liquid hitting the bottom baffle can flow out from the gaps between the multiple arc-shaped baffles, thereby reducing the impact on the crucible 3. After the liquid contacts the elastic baffle 9, the liquid will bypass the arc-shaped baffles in the elastic baffle 9, thereby slowing down the flow rate of the liquid and reducing the movement of the liquid inside the crucible 3. When the liquid is continuously added to the height of four-fifths of the inside of the crucible 3, the liquid level sensor detects the liquid, allowing the operator to control the booster pump 14 to stop working, and at the same time, the one-way valve 12 is used to prevent the liquid inside the crucible 3 from being sucked back into the inside of the raw material storage cylinder 10.

[0043] Embodiment 2

[0044] Reference Figure 6-Figure 8 A single crystal furnace liquid feeding device also includes a lifting mechanism for adjusting the height of a liquid infusion tube 11, the lifting mechanism includes a fixed shell 15, a lifting platform 16, a pressing plate 17 and a lifting block 18, the top of the fixed shell 15 is internally slidably connected with the lifting block 18, the top of the lifting block 18 is fixed with the lifting platform 16, and the lifting platform 16 is driven to lift by the lifting of the lifting block 18, and the top of the lifting platform 16 is bolted with the pressing plate 17, so that one end of the liquid infusion tube 11 can be fixed between the lifting platform 16 and the pressing plate 17;

[0045] A height adjustment component for driving the lifting block 18 to move up and down is installed inside the fixed shell 15, and the height adjustment component includes a rotating rod 19, a connecting rod 20, a slider 21, a lifting drive rotating motor 22, a lifting worm 23 and a lifting worm wheel 24. The bottom end of the fixed shell 15 is internally rotatably connected to the rotating rod 19, and a connecting rod 20 is fixed to the outside of the rotating rod 19. One end of the connecting rod 20 is rotatably connected to the slider 21, and the slider 21 is slidably connected to the lifting block 18, so that the rotation of the connecting rod 20 drives the lifting block 18 to move up and down through the rotationally connected slider 21. A lifting drive rotating motor 22 is fixed inside the fixed shell 15, and the output end of the lifting drive rotating motor 22 is connected to the lifting worm 23, and the top of the lifting worm 23 is meshedly connected to the lifting worm wheel 24, and the inside of the lifting worm wheel 24 is fixed to the rotating rod 19, so that the rotation of the lifting worm wheel 24 can drive the rotating rod 19 to rotate.

[0046] The use process of a single crystal furnace liquid feeding device provided by the utility model is as follows: when it is necessary to adjust the height of the infusion tube 11, first place one end of the infusion tube 11 on the top of the lifting platform 16, and fix the infusion tube 11 by bolting the pressure plate 17 to the lifting platform 16, and then drive the rotating motor 22 to obtain power to drive the lifting worm 23 to rotate, so that the rotation of the lifting worm 23 drives the meshing lifting worm wheel 24 to rotate, and the lifting worm wheel 24 drives the connecting rod 20 to rotate through the rotating rod 19, and through the sliding connection between the slider 21 and the lifting block 18 and the sliding connection between the lifting block 18 and the fixed shell 15, the rotation of the connecting rod 20 drives the lifting block 18 to lift, and the lifting of the lifting block 18 drives the infusion tube 11 to lift, thereby adjusting the height of one end of the infusion tube 11 inside the raw material storage cylinder 10.

[0047] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A liquid feeding device for a single crystal furnace, characterized in that: The invention comprises a fixing sleeve (1), wherein a crucible (3) is slidably connected to the interior of the fixing sleeve (1), a support seat (4) is slidably connected to the interior of the fixing sleeve (1) and located at the bottom of the crucible (3), a fixing rod (7) is bolted to the bottom of the support seat (4), and the fixing rod (7) is slidably connected to a base (5), a conveying pipe (8) is evenly fixed inside the top of the fixing sleeve (1), the top of the conveying pipe (8) is slidably connected to a closing cover (2), and an elastic baffle (9) is fixed to the bottom of the conveying pipe (8) and located inside the crucible (3).

2. A single crystal furnace liquid feeding device according to claim 1, characterized in that: The top of the fixing sleeve (1) is bolted to a closing cover (2), and the bottom of the fixing sleeve (1) is bolted to a base (5).

3. A single crystal furnace liquid feeding device according to claim 2, characterized in that: A height support platform (6) is fixed inside the base (5).

4. The single crystal furnace liquid feeding device according to claim 1, characterized in that: The elastic blocking piece (9) is in the shape of a birdcage.

5. The single crystal furnace liquid feeding device according to claim 1, characterized in that: The elastic baffle (9) is composed of a bottom baffle and a plurality of arc-shaped baffles, and the bottom between the plurality of arc-shaped baffles is fixed with the bottom baffle.

6. The single crystal furnace liquid feeding device according to claim 1, characterized in that: A liquid level sensor is fixed inside the crucible (3), and the liquid level sensor is located at a position at four fifths of the height inside the crucible (3).

7. The single crystal furnace liquid feeding device according to claim 1, characterized in that: A feeding mechanism for conveying raw materials is installed at one end of the fixed sleeve (1), and the feeding mechanism comprises a raw material storage cylinder (10), a liquid infusion tube (11), a one-way valve (12), an air delivery tube (13) and a booster pump (14). The liquid infusion tube (11) is arranged inside one end of the top of the raw material storage cylinder (10), and the bottom of the liquid infusion tube (11) is in contact with the raw material storage cylinder (10). A one-way valve (12) is fixed to one end of the liquid infusion tube (11), and one end of the one-way valve (12) is connected to the conveying tube (8). The air delivery tube (13) is arranged inside the other end of the top of the raw material storage cylinder (10), and the end of the air delivery tube (13) away from the liquid infusion tube (11) is connected to the booster pump (14).

8. The single crystal furnace liquid feeding device according to claim 7, characterized in that: The bottom position of the gas delivery pipe (13) close to one end of the liquid delivery pipe (11) is higher than the bottom position of the liquid delivery pipe (11) close to one end of the gas delivery pipe (13).

9. The single crystal furnace liquid feeding device according to claim 7, characterized in that: It also includes a lifting mechanism for adjusting the height of the infusion tube (11), the lifting mechanism including a fixed shell (15), a lifting platform (16), a pressing plate (17) and a lifting block (18), the top of the fixed shell (15) is internally slidably connected to the lifting block (18), the top of the lifting block (18) is fixed with the lifting platform (16), and the top of the lifting platform (16) is bolted to the pressing plate (17); A height adjustment component for driving the lifting block (18) to move up and down is installed inside the fixed shell (15), and the height adjustment component comprises a rotating rod (19), a connecting rod (20), a slider (21), a lifting driving rotating motor (22), a lifting worm (23) and a lifting worm wheel (24). The bottom of the fixed shell (15) is internally rotatably connected with the rotating rod (19), the outer side of the rotating rod (19) is fixed with a connecting rod (20), one end of the connecting rod (20) is rotatably connected with the slider (21), and the slider (21) is slidably connected with the lifting block (18). A lifting driving rotating motor (22) is fixed inside the fixed shell (15), the output end of the lifting driving rotating motor (22) is connected with the lifting worm (23), the top of the lifting worm (23) is meshingly connected with the lifting worm wheel (24), and the inside of the lifting worm wheel (24) is fixed to the rotating rod (19).

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